JP2013136108A - Slide table device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slide table device in which variation of the deformation amount of a table due to bending is small even when negative pressure acting on a negative pressure pocket varies.SOLUTION: The slide table device 1 is constituted such that the table 3 including a guiding part 3f on which the negative pressure pocket 3c1 and a supporting static pressure pocket 3c2 are arranged, is mounted on a base including a guide surface 2b. In the slide table device 1, the static pressure pockets 3c2 are disposed to surround the negative pressure pocket 3c1 and a gap tbetween a negative land 3c3 and the guide surface 2b is made smaller than a gap tbetween the guide surface 3f and the guide surface 2b.

Description

  The present invention relates to a slide table device in which a negative pressure is generated in a guide portion to improve stability.

  In a slide table device that restricts the vertical movement of the table by the pressing force against the guide portion by its own weight, the larger the pressing force, the more stable the slide table. Therefore, a pressing force due to atmospheric pressure may be applied. For example, as shown in FIG. 6, the table 100 provided with static pressure pockets 100c, 100e, 100d, 100f for holding at both ends of the guide surfaces 100A, 100B and the negative pressure pockets 100a, 100b between them is lubricated. There is a slide table device that is mounted through the suction pocket and sucks the lubricating oil in the negative pressure pockets 100a and 100b. (Non-Patent Document 1)

PM controller jet pump with examples of application.Technical information. [Online] .HYPROSTATIK Schonfeld GmbH. [Searched on December 19, 2011], Internet /pdfs/hydrostaticguides.pdf

In the prior art described in Non-Patent Document 1, since it is held by the static pressure pockets provided at both ends of the guide surface and the middle is sucked by the negative pressure pocket, it is located at the center of the support span with the static pressure pocket as the support point. The load by a negative pressure pocket will act. Since the support span is long, the bending force acting on the table also increases. When the negative pressure acting on the negative pressure pocket changes, the bending force also changes and the amount of deformation of the table due to bending also changes.
Further, the negative pressure may be reduced by sucking air from the outer periphery of the negative pressure pocket.

  The present invention has been made in view of the above circumstances, and it is easy to reduce the amount of deformation caused by bending the table with respect to the fluctuation of the negative pressure acting on the negative pressure pocket, and further to prevent the suction of air into the negative pressure pocket. A slide table device that can increase negative pressure is provided.

In order to solve the above-mentioned problem, the invention according to claim 1 is characterized in that a table having a guide portion provided with a negative pressure pocket and a static pressure pocket for support on a base having a guide surface is provided as the guide. In the slide table device mounted so that the surface and the guide portion are engaged,
The static pressure pocket is provided so as to surround the negative pressure pocket,
The gap between the negative pressure land, which is a protrusion that separates the negative pressure pocket and the static pressure pocket, and the guide surface is smaller than the gap between the static pressure land, which is a protrusion that surrounds the outside of the static pressure pocket, and the guide surface. is there.

According to the invention of claim 1, since the supporting force acting on the static pressure pocket and the suction force acting on the negative pressure pocket do not exert a bending force on the outside of the pocket, even if the negative pressure for suction fluctuates, Thus, a slide table device can be provided in which the amount of deformation of the table due to bending is small.
Further, since the gap between the negative pressure land and the guide surface around the negative pressure pocket is smaller than the gap between the static pressure land and the guide surface, the negative pressure pocket is highly sealed and a large negative pressure can be generated.

It is the schematic which shows the whole structure of the slide table apparatus of this embodiment. It is a perspective view of the guide surface part of the table of this embodiment. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. FIG. 5 is a detailed view of a part C in FIG. 4. It is a perspective view of the guide surface part of the conventional table.

Hereinafter, an embodiment of the present invention will be described based on a case of a slide table device provided with a V-flat type static pressure guide surface.
As shown in FIG. 1, the slide table device 1 includes a base 2 having a V-shaped guide surface 2 a and a flat guide surface 2 b, and a table 3 that can reciprocate on the base 2 and is driven by a linear motor 4. Yes.
As shown in FIG. 2, the table 3 is provided with a V-shaped guide portion 3A and a flat guide portion 3B on the lower surface, and the V-type guide surface 2a of the base 4 and the V-type guide portion 3A are engaged with each other. The surface 2b and the flat guide 3B are engaged. The V-shaped guide portion 3A includes a pair of composite pockets 3a and 3b on a guide surface (static pressure land) 3e, and the flat guide portion 3B includes composite pockets 3c and 3d on a guide surface (static pressure land) 3f. .
The composite pocket 3a includes a negative pressure pocket 3a1 which is a recess provided in the V-shaped guide 3A, a static pressure pocket 3a2 which is a groove provided surrounding the negative pressure pocket 3a1, and a space between the negative pressure pocket 3a1 and the static pressure pocket 3a2. It is composed of a negative pressure land 3a3 that is a protruding portion that is divided and protrudes larger than the guide surface 3e. Similarly, the composite pocket 3b is composed of a negative pressure pocket 3b1, a static pressure pocket 3b2, and a negative pressure land 3b3 which is a protruding portion protruding larger than the guide surface 3e.
The composite pocket 3c includes a negative pressure pocket 3c1, which is a depression provided in the flat guide portion 3B, a static pressure pocket 3c2, which is a groove provided surrounding the negative pressure pocket 3c1, and a space between the negative pressure pocket 3c1 and the static pressure pocket 3c2. It is composed of a negative pressure land 3c3 that is a protruding portion that is divided and protrudes larger than the guide surface 3f. Similarly, the composite pocket 3d is a negative pressure land 3d3 that is a protrusion that projects between the negative pressure pocket 3d1 and the static pressure pocket 3d2 and between the negative pressure pocket 3d1 and the static pressure pocket 3d2 and protrudes larger than the guide surface 3f. Composed.

  As shown in FIG. 3, the table 3 includes a suction channel 3 g that communicates with the negative pressure pockets 3 a 1 and 3 c 1, and the suction channel 3 g communicates with the suction conduit 5. The suction line 5 is connected to the suction port 6 a of the ejector 6. A supply pipe 8 is connected to the ejection port 6 b of the ejector 6, and a pump 7 is connected to the supply pipe 8. A discharge line 9 is connected to the discharge port 6 c of the ejector 6 and communicates with a recovery tank 11. Similarly, the negative pressure pockets 3b1 and 3d1 are also connected to the suction port 6a of the ejector 6 via a suction line (not shown).

  As shown in FIG. 4, the table 3 includes a supply flow path 3 h that communicates with the static pressure pockets 3 a 2 and 3 c 2 via a restriction 3 i, and the supply flow path 3 h communicates with a pump 7 via a supply pipe 10. ing. Similarly, the static pressure pockets 3b2, 3d2 are also communicated with the pump 7 via a supply line (not shown).

The operation of the slide table device 1 will be described.
When the pump 7 is started, the lubricating oil whose pressure has been increased by the pump 7 is supplied to the ejection port 6b of the ejector 6 through the supply pipe 8, and the high-speed lubricating oil flows from the ejection port 6b into the discharge port 6c and is sucked into the suction port 6a. Negative pressure is generated in With this negative pressure, the negative pressure pockets 3a1, 3c1 become negative pressure by sucking the lubricating oil in the negative pressure pockets 3a1, 3b1 via the suction pipe 5 and the suction flow path 3g. Similarly, the negative pressure pockets 3b1 and 3d1 have negative pressure. As a result, a suction force is generated in the negative pressure pockets 3a1, 3b1, 3c1, 3d1, and the table 3 is pulled toward the base 2.
At the same time, the lubricating oil boosted by the pump 7 is supplied to the static pressure pockets 3a2, 3c2 via the supply pipe 10, the supply flow path 3h, and the restriction 3i. Similarly, the pressurized lubricating oil is supplied to 3b2 and 3d2. As a result, a support force for floating the table 3 in the static pressure pockets 3a2, 3b2, 3c2, 3d2 is generated.

FIG. 5 shows details of the composite pocket 3c in a state where the table 3 is lifted by the lifting force of the static pressure pockets 3a2, 3b2, 3c2, 3d2. Since negative pressure lands 3c3 protrudes from the guide surface 3f, a clearance _{t 1} of the guide surface 2b of the negative pressure lands 3c3 and the base 2 the gap _{t 2} is less than the guide surface 2b and the guide surface 3f. Therefore, the lubricating oil flowing out of the hydrostatic pockets 3c2 is mainly flows out from the gap t ₂ of the pocket periphery, the amount that flows into the inside of the negative pressure pockets 3c1 is small. Further, since the inflow of air into the negative pressure pocket 3c1 is blocked by the static pressure pocket 3c2, only a small amount of lubricating oil is sucked from the negative pressure pocket 3c1, and the negative pressure pocket 3c1 becomes a large negative pressure. Similarly, in the other negative pressure pockets, only a small amount of lubricating oil is sucked to generate a large negative pressure in the negative pressure pocket.
As a result, the table 3 can be pulled toward the base 2 with a large suction force without increasing the suction amount of the ejector 6.

The bending force acting on the table 3 will be described.
The weight of the table 3 is distributed as a weight load to each static pressure pocket according to the distance from the center of gravity position to each static pressure pocket, and a predetermined bending moment is generated according to the distance between the center of gravity position and the static pressure pocket, and the table bends. Since the weight of the table 3 is constant, the bending deformation resulting therefrom is also constant.
On the other hand, since the suction force of the negative pressure pocket and the support force of the static pressure pocket are balanced in each composite pocket, bending deformation extending outside the composite pocket is small.

As described above, according to the present invention, the table 3 can be pulled to the base 2 with a large suction force without increasing the suction amount of the ejector 6, and the vertical movement of the table 3 is regulated and stabilized. Feeding movement becomes possible.
Further, the bending deformation generated by the suction force of the negative pressure pocket and the support force of the static pressure pocket can be reduced. Therefore, even if the suction force of the negative pressure pocket varies due to fluctuations in the flow velocity of the ejector 6, etc. Variation in deformation amount can be reduced.

2: Base 2a: V-shaped guide surface 2b: Flat guide surface 3: Table 3a, 3b, 3c, 3d: Composite pocket 3e, 3f: Guide surface 3a1, 3b1, 3c1, 3d1: Negative pressure pocket 3a2, 3b2, 3c2 3d2: Static pressure pocket 3g: Suction channel 3h: Supply channel 5: Suction channel 6: Ejector 7: Pump 9: Discharge channel 10: Supply channel 11: Tank

Claims (1)

In a slide table device that mounts a table provided with a guide portion provided with a negative pressure pocket and a static pressure pocket for support on a base provided with a guide surface so that the guide surface and the guide portion are engaged with each other,
The static pressure pocket is provided so as to surround the negative pressure pocket,
A slide table in which a gap between the negative pressure land, which is a protrusion that separates the negative pressure pocket and the static pressure pocket, and the guide surface is smaller than a gap between the static pressure land, which is a protrusion that surrounds the outside of the static pressure pocket, and the guide surface. apparatus.

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