JP2016083763A - Guide mechanism of machine tool and machine tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a guide mechanism of a machine tool which has a high load, a low friction, a high guide precision and a high attenuation performance, and a machine tool.SOLUTION: A guide mechanism 30 of a machine tool has move members 31 which are moved relatively to each other, first and second rails 141, 142 as a guide member. Between the move member 31 and the first and second rails 141, 142, an oil hydrostatic guide mechanism 40 and a slide guide mechanism 50 are formed. The oil hydrostatic guide mechanism 40 has a hydrostatic chamber 41, a seal portion 42 which seals a circumference of the hydrostatic chamber 41, and a supply path 43 for supplying a lubrication oil to the hydrostatic chamber 41.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a machine tool guide mechanism and a machine tool including the same.

2. Description of the Related Art Conventionally, various moving mechanisms are used in machine tools in order to move a workpiece to be processed and a processing tool to arbitrary relative positions.
For example, a support structure for a table on which a workpiece is placed or a support structure for a head on which a tool is mounted has a linear movement mechanism along each of the X, Y, and Z axes to enable three-dimensional movement. Is adopted. Also, a rotational movement mechanism is employed to change the orientation of the table or head.

These moving mechanisms have two members that move relative to each other (for example, a guide member and a moving member that moves along the two members), a driving mechanism that moves these two members, and the accuracy of the moving direction or axis (guide accuracy). ) Is provided.
Such a guide mechanism is required to have a high degree of guidance accuracy, that is, a geometric accuracy that linear motion is as straight as possible and rotational motion is as true as possible. Further, the guide mechanism is required to have high load capacity, low friction, and high damping performance (vibration absorbing performance).

In recent years, an oil hydrostatic guide mechanism has been used as a guide mechanism for machine tools (Patent Document 1).
In the hydrostatic pressure guide mechanism, a static pressure chamber is formed in one of a pair of sliding surfaces, lubricating oil is supplied to the static pressure chamber, and the load is transmitted to the other sliding surface by the static pressure. Do. That is, only the lubricating oil is present between the pair of sliding surfaces, and the pair of sliding surfaces are in a non-contact state, so that the sliding resistance can be greatly reduced.

On the other hand, a traditional slide guide mechanism (dynamic pressure guide mechanism) continues to be frequently used as a guide mechanism for machine tools (Patent Document 2).
The sliding guide mechanism slides each of the sliding guide mechanisms while supplying lubricating oil between a pair of smoothly formed sliding surfaces. The pair of sliding surfaces are maintained in solid contact with each other although they are lubricated with lubricating oil.

JP 2004-58192 A JP 2008-2338397 A

Since the oil hydrostatic guide mechanism described above always includes an oil film from a stationary state to a moving state, it can support a high load load and stably reduce the friction.
However, the hydrostatic pressure guide mechanism has a limit in damping performance due to the structure of floating with an oil film. Further, a supply device that supplies lubricating oil for forming an oil film and a recovery device that recovers the lubricating oil are required. In particular, the conventional hydrostatic pressure guide mechanism cannot discharge to the outside air like an aerostatic bearing using air because of the use of lubricating oil. For this reason, the lubricating oil supplied to the static pressure chamber is discharged from the outer peripheral edge to the outside of the guide mechanism. In particular, in the hydrostatic pressure guide mechanism, the amount of lubricating oil to be discharged is enormous compared to the sliding guide, and thus a recovery device that recovers the lubricating oil and returns it to the supply device is required. Therefore, the device configuration and piping associated with the guide mechanism must be complicated.

  On the other hand, since the sliding guide mechanism is a sliding guide between a pair of sliding surfaces, the guiding accuracy and the damping performance can be enhanced and the structure is simple. However, the sliding guide mechanism has a small load capacity and a large friction coefficient. Particularly, since the friction coefficient increases at the time of starting or at low speed, the operation may not be smooth, which may affect the positioning accuracy.

In order to make the operation of the machine tool smooth, it is conceivable to replace the guide mechanism with a hydrostatic guide mechanism with excellent low friction property instead of the conventional slide guide mechanism.
However, even if the conventional sliding guide mechanism is simply replaced with the hydrostatic guide mechanism, the expected performance may not be obtained due to the above-described difference in features.

It is also conceivable to use a conventional slide guide mechanism and an oil hydrostatic guide mechanism in combination.
However, in the conventional hydrostatic pressure guide mechanism, the lubricating oil supplied to the static pressure chamber is discharged from the outer peripheral edge to the outside of the sliding structure due to its structure.
Therefore, when the slide guide mechanism and the hydrostatic pressure guide mechanism are used in combination, the lubricant discharged to the outside may overflow without being collected, and the overflowed lubricant reaches the slide guide mechanism, which is preferable. There is no possibility of affecting.

  An object of the present invention is to provide a machine tool guide mechanism and a machine tool with high load, low friction, high guidance accuracy, and high damping performance.

Prior to the present invention, the inventors of the present invention have developed a sealed oil hydrostatic guide mechanism in which lubricating oil does not overflow to the outside.
In this sealed hydrostatic pressure guide mechanism, the outer periphery is sealed to seal the hydrostatic pressure structure, and all the lubricating oil that has been discharged to the outside from the surroundings is collected and circulated. Therefore, this sealed oil hydrostatic guide mechanism can prevent the lubricating oil from overflowing to the outside even though it is an oil hydrostatic guide mechanism.

By adopting this sealed hydrostatic pressure guide mechanism, the present invention can be combined with a slide guide mechanism, which combines the features of each with high load, low friction, high accuracy, and high damping. Realized a machine tool guide mechanism.
Specifically, the machine tool guide mechanism of the present invention has the following configuration.

  The guide mechanism of the machine tool of the present invention is a guide mechanism of a machine tool having two members that move relative to each other, and an oil hydrostatic guide mechanism and a slide guide mechanism are formed between the two members, and the oil The static pressure guide mechanism includes a sealed static pressure chamber whose outer periphery is sealed, and a supply path for supplying lubricating oil to the static pressure chamber.

  In the machine tool guide mechanism according to the present invention, the hydrostatic pressure guide mechanism may have a recovery path for recovering the lubricating oil from the static pressure chamber.

  In the present invention, in the hydrostatic pressure guide structure, the load support between the two members that move relative to each other is performed by the hydrostatic pressure of the lubricating oil in the hydrostatic chamber. As the hydrostatic pressure guide structure, either an enclosed hydrostatic pressure structure or a flow-through or circulating hydrostatic pressure structure can be used.

  In the enclosed hydrostatic pressure structure, only the supply path is connected to the static pressure chamber, and the recovery path is not connected. Lubricating oil is supplied from a supply path and filled into the static pressure chamber at a predetermined pressure. When the lubricating oil in the static pressure chamber decreases, the lubricating oil is replenished from the supply path.

In the flow-type hydrostatic pressure structure, a supply path and a recovery path are connected to the static pressure chamber. Lubricating oil is supplied from the supply path, generates static pressure while circulating in the static pressure chamber, and is recovered from the static pressure chamber to the recovery path.
In the circulation type hydrostatic pressure structure, the circulation type hydrostatic pressure structure can be obtained by reusing the lubricating oil recovered from the recovery path to the supply path.

In the present invention, the hydrostatic pressure guide mechanism is a hermetic hydrostatic pressure structure in which the outer periphery of the hydrostatic chamber is sealed. Therefore, in the hydrostatic pressure guide mechanism of the present invention, it is possible to prevent or minimize the overflow of the lubricating oil from the outer peripheral edge to the outside.
Therefore, even if the hydrostatic pressure guide mechanism and the slide guide mechanism are provided together, the lubricating oil overflowing from the hydrostatic pressure guide mechanism has an undesirable effect on the slide guide mechanism (mixing of different types of lubricating oils, etc.). The possibility can be eliminated.

  Thereby, in the moving mechanism of this invention, it becomes possible to provide an oil hydrostatic guide mechanism and a slip guide mechanism side by side. In addition, the hydrostatic pressure guide mechanism can ensure high load capacity and low friction, and the slide guide mechanism can ensure guidance accuracy and damping performance. As a result, it is possible to provide a machine tool guide mechanism with high load capacity, low friction, high guide accuracy, and high damping performance.

In the present invention, as the supply path and the recovery path, passages formed in the two members themselves that move relative to each other and pipes connected to them can be used. A pump for driving the lubricating oil, a tank for storing the lubricating oil, etc. can be connected to each of the supply path and the recovery path, and an instrument for detecting the state of the lubricating oil pressure or flow rate is provided along the way. May be installed.
Note that the recovery path is not limited to piping sealed from the outside, and a recovery path that has been used in a conventional hydrostatic pressure guide mechanism, such as a bag, can also be used.

In the present invention, the two members that move relative to each other include a guide member that extends along the moving direction, such as a set of a rail and a slider that constitutes a guide mechanism of a machine tool, and a moving member that can move relative to the guide member. Combinations are applicable.
The movement of the guide member and the moving member is relative. For example, the moving member may be fixedly installed on the machine tool, and the guide member may move relative to the moving member.

In the present invention, it is preferable that the supply path supplies lubricating oil to an outer peripheral side of the static pressure chamber, and the recovery path recovers the lubricating oil from a central portion of the static pressure chamber.
In the present invention, the lubricating oil from the supply path is supplied to the outer peripheral side of the static pressure chamber, and the supplied lubricating oil circulates in the center of the static pressure chamber and is connected to the center of the static pressure chamber. Recovered from the recovery route.
By performing such center recovery of the lubricating oil, the flow rate of the lubricating oil as the oil hydrostatic guide mechanism can be reduced.

  That is, in the conventional hydrostatic pressure guide mechanism, in order to generate a desired static pressure in the inner static pressure chamber (so-called recess portion), a pressure holding portion (so-called land portion) is provided along the outer periphery of the static pressure chamber. It is formed. And the lubricating oil of a static pressure chamber is discharged | emitted from an outer periphery through the pressure holding part along an outer periphery. At this time, since the circumference of the pressure holding portion along the outer circumference becomes longer in proportion to the radius thereof, a predetermined flow velocity (the desired pressure in the inner static pressure chamber) is passed through the pressure holding portion in the radial direction. If the flow rate that can be maintained) is to be secured, the overall flow rate must be a considerably large flow rate.

In order to supply such a large flow rate, a large capacity is required in the supply device, and an increase in the size of the device configuration, such as an increase in the pipe diameter, cannot be avoided.
On the other hand, in the present invention, in order to perform the center recovery, the pressure holding part may be formed around the recovery opening, and the circumference thereof may be much shorter. Therefore, the flow rate of the lubricating oil can be greatly reduced, and the lubricating oil supply device, the supply path, and the recovery path can be reduced in size and simplified.

  In the guide mechanism of the machine tool of the present invention, the two members that move relative to each other include a guide member and a movable member that can move relative to the guide member, and the guide member has a smooth guide surface. The hydrostatic pressure guide mechanism and the slide guide mechanism are preferably formed between the guide surface and share the guide surface.

In the present invention as described above, the main structure (hydrostatic chamber, oil supply groove, etc.) of the hydrostatic pressure guide mechanism and the slide guide mechanism is collected on the moving member that is one of the two members that move relative to each other. Only the guide surface is formed on the guide member which is the other of the members.
That is, since the hydrostatic pressure guide mechanism and the slide guide mechanism share the guide surface of the guide member, it can be simplified compared to a structure in which each mechanism is provided with a guide surface, and the moving mechanism as a whole can be downsized. be able to.

  In addition, the main structures (such as the static pressure chamber and the oil supply groove) of the hydrostatic pressure guide mechanism and the slide guide mechanism can be integrated into the moving member, and the structure can be simplified in this respect as well. Furthermore, the hydrostatic pressure guide mechanism and the slide guide mechanism can be installed side by side on the surface of the moving member facing the guide surface, and the load sharing by each mechanism can be ensured.

The length of the two members that move relative to each other, such as the guide member and the moving member, may be set as appropriate, and either one may be longer than the other, or the same length.
In the present invention, the main structure of the hydrostatic pressure guide mechanism (such as the static pressure chamber forming the hydrostatic pressure structure) and the main structure of the slide guide mechanism (such as the oil supply groove) are basically located on the moving member side. Install it. However, any one of these may be installed on the guide member side.
Further, the two members that move relative to each other may be a bearing member and a rotating shaft that is pivotally supported by the bearing member and rotates.

As a case where the two members that move relative to each other are a bearing member and a rotating shaft that is supported by the bearing member and rotates, there is a thrust bearing, for example. In the thrust bearing, a sliding surface that receives an axial thrust load is formed between the rotating shaft and the bearing member. Therefore, the rotating shaft side of the sliding surface is used as a guide member, the sliding surface is formed as a smooth guide surface, and the main structure of the hydrostatic pressure guide mechanism and the sliding guide mechanism is formed on the sliding surface on the bearing member side. can do.
With the same configuration, a static pressure guide mechanism and a slide guide mechanism can be incorporated on the rotating shaft side. In this case, it is possible to employ a configuration in which the lubricant for the hydrostatic pressure guide mechanism and the lubricant for the slide guide mechanism are supplied from the bearing side to the rotation side via the rotary joint.

In the case of a structure in which the rotating shaft is fixed and the surrounding bearing member rotates, the main structure of the hydrostatic pressure guide mechanism and the sliding guide mechanism is formed on the sliding surface of the fixed rotating shaft, and the bearing member side The sliding surface can be a smooth guide surface.
The present invention can also be applied to radial bearings. In this case, the hydrostatic pressure guide mechanism and the slide guide mechanism are formed in a curved surface between the outer peripheral surface of the rotating shaft and the inner peripheral surface of the bearing.

  In the guide mechanism of the machine tool of the present invention, the moving member includes the static pressure chamber facing the guide surface and a seal portion surrounding the static pressure chamber, and the static pressure chamber, the guide surface, Thus, it is desirable that the hydrostatic pressure guide mechanism is formed.

In the present invention as described above, the lubricating oil is supplied from the supply path into the static pressure chamber, and an oil film is formed between the inner surface of the static pressure chamber and the guide surface, and the guide member is levitated and supported as the hydrostatic pressure guide mechanism. be able to.
At this time, the lubricating oil in the static pressure chamber is supplied from the supply path to the static pressure chamber, supports the load from the guide member in the static pressure chamber, and moves inward from the outer peripheral side of the static pressure chamber to the center portion. The entire amount is recovered from the recovery route.
On the outer periphery of the static pressure chamber, the sealing portion surrounding the static pressure chamber prevents the lubricating oil from leaking outside of the seal portion, thereby forming a sealed oil hydrostatic pressure guide mechanism. it can.

  In the present invention, as described above, the flow rate of the lubricating oil can be reduced by performing the central recovery of the lubricating oil by the recovery path connected to the central portion of the static pressure chamber, and the supply of the lubricating oil The apparatus, supply path, and recovery path can be reduced in size and simplified.

In the present invention, as the static pressure chamber, a recess having a predetermined depth (about several tens of microns) formed in a concave shape on the surface of the moving member can be used.
In the static pressure chamber, concentric circular isobaric grooves are formed in the static pressure chamber to divide the static pressure chamber into an inner side and an outer side, the inner side serves as a pressure holding portion (land), and the outer side serves as a static pressure chamber body (recess). ). Even if the inner pressure holding portion and the outer static pressure chamber main body have the same depth, the inner pressure holding portion can cause a pressure holding effect in the static pressure chamber main body by forming a deeper isobaric groove than these. it can. Thereby, in the main body of a static pressure chamber, the load burden by the static pressure of lubricating oil can be performed, and the function as an oil hydrostatic pressure guide structure can be obtained.

By forming a shallow pressure holding portion (land portion taller than the outer static pressure chamber main body) that surrounds the recovery path on the inner periphery of the static pressure chamber, a function as a hydrostatic pressure guide structure is obtained. You may do it.
The planar shape of the static pressure chamber may be, for example, a circle, an ellipse, or an oval, and may be a rectangle such as a square or a rectangle, or another polygonal shape. Even in the case of a rectangle or a polygon, it is desirable that each apex has an arc shape or the like, and an angular portion is rounded.

As the seal portion, a combination of a seal groove deeper than the depth of the static pressure chamber formed along the periphery of the static pressure chamber and an annular seal member installed in the seal groove can be used.
As the sealing member, a member that ensures sealing performance by being in close contact with the bottom surface of the static pressure chamber and the guide surface of the opposing guide member is preferable, such as a molded product made of an elastomer material having a height higher than the depth of the static pressure chamber. Is available. For example, an oil-resistant O-ring or the like can be used, but it is also effective to add a lip seal or the like as appropriate so as to cope with a high pressure in the static pressure chamber and prevent leakage of the lubricating oil.
The planar shape of the seal portion may be a shape that follows the contour of the static pressure chamber, and may be a circle, a rectangle, or another shape according to the static pressure chamber.

In the present invention, the recovery path only needs to communicate with the central portion of the static pressure chamber, and may not be the geometric center as long as it is in the vicinity of the central portion of the static pressure chamber.
The supply path only needs to communicate with the outer peripheral side of the recovery path of the static pressure chamber, and may communicate with the vicinity of the outer periphery of the static pressure chamber or the inside of the seal groove of the seal portion. At this time, the supply path only needs to be communicated with an arbitrary position of the seal groove, but the supply path may be communicated with a plurality of locations of the seal portion so as not to be uneven in the circumferential direction.

  In the guide mechanism of the machine tool of the present invention, the moving member includes a sliding surface facing the guide surface, and an oil supply groove formed on the sliding surface, and the sliding surface, the guide surface, It is desirable that the slide guide mechanism is formed by the above.

  In the present invention as described above, a sliding guide mechanism is formed between the guide surface and the sliding surface, and lubricating oil can be supplied between the guiding surface and the sliding surface through an oil supply groove. As a result, sufficient sliding performance can be secured.

At this time, it is desirable that the lubricating oil supplied between the guide surface and the sliding surface of the sliding guide mechanism is the same lubricating oil as that supplied to the hydrostatic guide mechanism.
In this way, if the lubricating oil of the sliding guide mechanism and the lubricating oil of the hydrostatic guide mechanism are the same, the same lubrication will occur even if the lubricating oil leaks from the hydrostatic guide mechanism and mixes with each other. Since it is oil, no problem occurs.

In the guide mechanism of the machine tool of the present invention, the lubricant for the hydrostatic guide mechanism and the lubricant for the slide guide mechanism may be different. Even in this case, since the hydrostatic pressure guide mechanism is basically sealed on the outer periphery, the problem of mixing different types of lubricating oils can be avoided.
For example, since the outer periphery is sealed, the leakage of the lubricating oil from the hydrostatic pressure guide mechanism is slight, and the problem of the mixing of the lubricating oil in the sliding guide mechanism is sufficiently acceptable. On the other hand, since the outer periphery of the hydrostatic pressure guide mechanism is sealed, mixing of the lubricating oil leaking from the sliding guide mechanism with the lubricating oil of the hydrostatic pressure guide mechanism is suppressed.
Furthermore, even when the oil for hydrostatic pressure leaks from the hydrostatic pressure guide mechanism and mixes with the lubricating oil of the slide guide mechanism, the lubricating oil discharged from the slide guide mechanism is generally discarded. No problem.

Thus, by using the same lubricating oil in the sliding guide mechanism and the hydrostatic pressure guide mechanism, a part of the supply path can be shared. However, the supply of lubricating oil to the sliding guide mechanism is intermittently relatively small, whereas the lubricating oil supply to the hydrostatic guide mechanism is continuous and has a relatively large flow rate. The portion that can be converted is limited to the tank storing the lubricating oil and the surrounding area.
A large amount of lubricating oil supplied to the hydrostatic pressure guide mechanism is recovered from the recovery path, and returned to the supply tank, for example, to prevent leakage from the static pressure chamber to the outside, but is supplied to the slip guide mechanism. Since the amount of lubricating oil is small, it may be collected in a separate tank and discarded without being collected in the supply tank.

  In the machine tool guide mechanism of the present invention, the slide guide mechanism is installed inside the machine tool, and the hydrostatic guide mechanism is fixed to the outside of the machine tool. Guide mechanism.

In the present invention, when the two parts of the machine tool move relative to each other, the slide guide mechanism inside the machine tool and the external hydrostatic pressure guide mechanism are effective, and the performance of each guide mechanism is combined. Guidance performance can be obtained.
Furthermore, the slide guide mechanism inside the machine tool and the external hydrostatic pressure guide mechanism can be arranged so as to share the same guide member, and the structure of the guide mechanism can be simplified by such sharing. The machine tool as a whole can be downsized.

Furthermore, the configuration of the present invention can be easily realized by externally attaching an oil hydrostatic guide mechanism to an existing machine tool having a slide guide mechanism inside.
And by adding an oil hydrostatic guide mechanism to an existing machine tool having a slide guide mechanism, an oil hydrostatic slide combined type guide mechanism can be easily realized, and as a result, with a high load capacity, It is possible to provide a machine tool guide mechanism that has low friction, high guide accuracy, and high damping performance.

A machine tool according to the present invention includes the above-described guide mechanism for the machine tool according to the present invention.
In the present invention as described above, the effects as described in the above-described hydrostatic pressure guide mechanism of the present invention can be obtained, and the effectiveness of the machine tool as a whole can be enhanced.

  In the machine tool of the present invention, a load-side guide mechanism having a moving side member movable in the horizontal direction relative to the fixed side member and extending in the horizontal direction between the fixed side member and the moving side member. And a tilt prevention guide mechanism that opposes the tilt centered on the load support guide mechanism.

  In the present invention, the fixed member is a member that supports the movable member in a movable manner, and is, for example, a cross bar of a machine tool. The fixed side member is not necessarily limited to a fixed member, but includes a member that is movable relative to another member. Further, the moving side member is supported movably with respect to the fixed side member, for example, a spindle head of a machine tool.

  In some existing machine tools, the spindle head is cantilevered by a load supporting guide mechanism. In such a configuration in which the spindle head is cantilevered, the support structure is deformed by the weight of the spindle head, and the spindle head is tilted or tilted. In order to prevent or compensate for such deformation, a conventional machine tool is provided with a tilt preventing guide mechanism.

  In the present invention, as such a tilt preventing guide mechanism, the above-described configuration using the hydrostatic pressure guide mechanism and the sliding guide mechanism of the present invention together, or a part of the tilt preventing guide mechanism is an oil hydrostatic guide mechanism. In addition, by adopting a configuration in which other parts are configured as a slide guide mechanism, a configuration in which each function is combined can prevent inclination while performing load support, and at this time, with a high load capacity , Low friction, high guidance accuracy, and high damping performance.

  According to the machine tool guide mechanism and the machine tool of the present invention, the slide guide mechanism and the hydrostatic guide mechanism can be provided side by side. In addition, the hydrostatic pressure guide mechanism can ensure high load capacity and low friction, and the slide guide mechanism can ensure guidance accuracy and damping performance. As a result, it is possible to provide a machine tool guide mechanism and a machine tool with high load capacity, low friction, high guidance accuracy, and high damping performance.

The perspective view which shows the whole apparatus of 1st Embodiment of this invention. The perspective view which shows arrangement | positioning of the moving member in the said 1st Embodiment. The disassembled perspective view which shows the moving mechanism of the said 1st Embodiment. The perspective view which shows the principal part of the oil hydrostatic guide mechanism and slip guide mechanism which are arrange | positioned at the moving member of the said 1st Embodiment. Sectional drawing which shows the hydrostatic pressure guide mechanism of the said 1st Embodiment. Sectional drawing which shows the slide guide mechanism of the said 1st Embodiment. The perspective view which shows the principal part of the hydrostatic pressure guide mechanism and slide guide mechanism which are arrange | positioned at the moving member of 2nd Embodiment of this invention. Sectional drawing which shows the oil hydrostatic guide mechanism of the said 2nd Embodiment. The disassembled perspective view which shows the moving mechanism of 3rd Embodiment of this invention. The perspective view which shows the principal part of the oil hydrostatic guide mechanism and slide guide mechanism which are arrange | positioned at the moving member of the said 3rd Embodiment. The perspective view which shows the whole apparatus of 4th Embodiment of this invention. Sectional drawing which shows arrangement | positioning of the moving mechanism of the said 4th Embodiment. The disassembled perspective view which shows the modification of the moving mechanism of the said 4th Embodiment. Sectional drawing which shows other embodiment of this invention.

[First Embodiment]
1 to 6 show a first embodiment according to the present invention.
In FIG. 1, a machine tool 10 has a base 11 extending in the X-axis direction, and a table 12 is supported on the base 11. A pair of columns 13 is installed on both sides of the base 11, and a cross bar 14 extending in the Y-axis direction is installed at the upper end of each column. A head 15 is supported on the cross bar 14, and a ram 16 extending in the Z-axis direction (vertical direction) is attached to the head 15.

A work 19 to be processed is fixed on the upper surface of the table 12. A main shaft 17 is exposed at the lower end of the ram 16, and a processing tool 18 is attached to the main shaft 17.
In the machine tool 10, the table 18 is moved in the X-axis direction, the head 15 is moved in the Y-axis direction, and the ram 16 is moved in the Z-axis direction. The workpiece 19 can be moved relative to each other, whereby an arbitrary shape can be processed on the workpiece 19.

In order to perform such a three-dimensional machining operation, the machine tool 10 includes an X-axis movement mechanism 21 that moves the table 12 along the base 11 and a Y-axis movement that moves the head 15 along the crossbar 14. A mechanism 22 and a Z-axis moving mechanism 23 that moves the ram 16 with respect to the head 15 are installed.
These X-axis moving mechanism 21, Y-axis moving mechanism 22, and Z-axis moving mechanism 23 each support a moving part (table 12 or the like with respect to base 11) so as to be movable, and guide them in a predetermined moving direction. A drive mechanism including a guide mechanism and a motor for driving the moving part based on an external command is provided.

  Among these moving mechanisms 21 to 23, the Y-axis moving mechanism 22 between the head 15 and the crossbar 14 includes a plurality of guide mechanisms 30 (first to sixth guide mechanisms 30A to 30F) extending in the Y-axis direction. , See FIG. 2).

  As shown in FIG. 2, the cross bar 14 has a first rail 141 at the upper part on the side where the head 15 is mounted, and a second rail 142 at the lower part. The head 15 has a first groove 151 facing downward at the upper part, and a second groove 152 at the lower crossbar 14 side.

The second groove 152 formed in the head 15 is engaged with the second rail 142 of the cross bar 14 to support the load in the Z-axis direction and to restrict the position in the X-axis direction.
The first groove portion 151 formed in the head 15 is engaged with the first rail 141 of the cross bar 14, and the head 15 has its own weight centered on the second rail 142 that supports the load while restricting the position in the X-axis direction. The tilt is controlled by.

Inside the first groove portion 151, first and second moving members 31A and 31B that sandwich the first rail 141 in the X-axis direction are installed. The first and second moving members 31A and 31B constitute the first and second guide mechanisms 30A and 30B according to the present invention between the first rail 141 and the first rail 141, respectively.
Inside the second groove 152, the third and fourth moving members 31C and 31D sandwiching the second rail 142 in the X-axis direction, and the fifth and sixth sandwiching the second rail 142 in the Z-axis direction. The moving members 31E and 31F are installed. The third to sixth moving members 31C to 31F constitute the third to sixth guide mechanisms 30C to 30F according to the present invention between the first rail 141 and the first rail 141, respectively.

[Guiding mechanism 30]
In FIG. 3, a guide mechanism 30 (first to sixth guide mechanisms 30A to 30F, see FIG. 2) is a moving member 31 (moving members 31A to 31F, see FIG. 2) that moves relative to each other and a guide member. The first and second rails 141 and 142 are provided.

The moving member 31 (first to sixth moving members 31A to 31F) is a member extending in the relative movement direction of the guide mechanism 30, and is fixed to the head 15 along the first and second groove portions 151 and 152. It is formed using a plate material or a part of the head 15.
At both ends of the moving member 31, one step higher portion is formed on the side facing the first and second rails 141, 142, and the surfaces thereof are a smooth surface 49 and a sliding surface 51 that are smooth. Moreover, the moving member 31 has a pair of side surfaces in a direction orthogonal to its own thickness direction.

The first and second rails 141 and 142 are members extending in the relative movement direction of the guide mechanism 30, and are formed by using another member fixed along the crossbar 14 or a part of the crossbar 14. .
The surfaces of the first and second rails 141 and 142 facing the moving member 31 are guide surfaces 39 that are smooth over the entire length.

The moving member 31 and the first and second rails 141 and 142 are such that the smooth surfaces 49 and the sliding surfaces 51 at both ends of the moving member 31 are in close contact with the guide surfaces 39 of the first and second rails 141 and 142. The guide mechanism 30 is configured by being arranged in a state.
At this time, the hydrostatic pressure guide mechanism 40 is formed between the smooth surface 49 and the guide surface 39, and the slip guide mechanism 50 is formed between the sliding surface 51 and the guide surface 39.

A sheet made of a low friction material such as tetrafluoroethylene is stuck on the sliding surface 51 and the smooth surface 49 continuously over the entire surface.
The smooth surface 49 outside the hydrostatic pressure guide mechanism 40 may be cut lower than the sliding surface 51 and may be a flank that does not contact the guide surface 39.

  The hydrostatic pressure guide mechanism 40, which will be described in detail later, supports the first and second rails 141 and 142 to float on the moving member 31 with pressurized lubricating oil supplied from the outside. It is. In order to supply and collect the lubricating oil for this purpose, a lubricating oil supply device 60 is connected to the hydrostatic pressure guide mechanism 40.

As shown in FIGS. 3 and 4, the lubricating oil supply device 60 includes a tank 61 that stores lubricating oil, and a supply pipe 63 and a recovery pipe 64 that connect the tank 61 and the oil hydrostatic guide mechanism 40.
In the middle of the supply pipe 63, a filter 65 for filtering the lubricating oil passing therethrough and a pump 62 for pressurizing the lubricating oil are installed.

  As a result, the lubricating oil supply device 60 takes out the lubricating oil stored in the tank 61 from the supply pipe 63, filters it with the filter 65, pumps it with the pump 62, and supplies it to the hydrostatic pressure guide mechanism 40. Can do. Further, the lubricating oil from the hydrostatic guide mechanism 40 can be recovered by the recovery pipe 64 and returned to the tank 61.

The lubricating oil supply device 60 also supplies the lubricating oil used in the slide guide mechanism 50.
3 and 4, the lubricating oil supply device 60 includes a tank 69 that stores the lubricating oil, and a supply pipe 66 that connects the tank 69 and the sliding guide mechanism 50.
In the middle of the supply pipe 66, a filter 68 for filtering the lubricating oil passing therethrough and a pump 67 for intermittently feeding the lubricating oil by an appropriate amount are installed.

  Note that, as a discharge path for the lubricating oil supplied to the sliding guide mechanism 50, a recovery rod 55 that receives the lubricating oil discharged from the sliding guide mechanism 50 and a recovery rod 55 are collected below the side surface of the moving member 31. And a waste oil tank 56 for storing the lubricating oil. Piping may be used as appropriate for the discharge path.

That is, in the present embodiment, the same type of lubricating oil is supplied to both the hydrostatic pressure guide mechanism 40 and the sliding guide mechanism 50 by the lubricating oil supply device 60.
However, the amount of lubricating oil used in the sliding guide mechanism 50 is sufficiently smaller than that of the hydrostatic guide mechanism 40, and the supply is intermittent. In order to cope with such a difference in supply conditions, the lubricating oil supply path to the sliding guide mechanism 50 and the lubricating oil supply path to the hydrostatic pressure guide mechanism 40 are completely separate systems.
Hereinafter, the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 of this embodiment will be described.

[Hydrostatic pressure guide mechanism 40]
As shown in FIGS. 4 and 5, in the present embodiment, the smooth surface 49 of the hydrostatic pressure guide mechanism 40 and the sliding surface 51 of the slide guide mechanism 50 are continuous planes.
That is, a structure such as a static pressure chamber 41 is formed in an extended portion of the sliding surface 51 where the slide guide mechanism 50 is formed, and the first and second rails 141 and 142 as guide members are opposed to each other to guide the surface. By covering with 39, the hydrostatic pressure guide mechanism 40 is formed.

4, the hydrostatic pressure guide mechanism 40 includes a circular static pressure chamber 41 formed in a concave shape on the smooth surface 49, and a seal portion 42 that continuously surrounds the periphery of the chamber.
The static pressure chamber 41 is represented as a recess in FIGS. 3 and 5, but is closed by being covered by the guide surfaces 39 of the first and second rails 141 and 142 when assembled as the guide mechanism 30. It becomes space.

A communication hole 431 of the supply path 43 is communicated with a part of the seal portion 42.
The supply path 43 is connected to the supply pipe 63 of the above-described lubricating oil supply device 60, and pressurized lubricating oil is supplied into the static pressure chamber 41 through the supply pipe 63.

A communication hole 441 of the recovery path 44 is communicated with the center of the static pressure chamber 41.
The recovery path 44 is connected to the recovery pipe 64 of the lubricating oil supply device 60 described above, and the lubricating oil from the static pressure chamber 41 is recovered through the recovery pipe 64.

As shown in FIG. 5, the bottom surface of the static pressure chamber 41 communicates with the communication hole 441 of the recovery path 44 described above at the center, and an annular groove 411 is formed concentrically with the opening.
The bottom surface of the static pressure chamber 41 is partitioned into an inner portion 412 and an outer portion 413 with the annular groove 411 as a boundary. A radial communication groove 414 extending from the annular groove 411 to the seal portion 42 is formed in a part of the outer portion 413.

  The seal portion 42 has an annular seal groove 421 along the outer periphery of the static pressure chamber 41, and a seal member 422 made of an elastomer molded product such as oil resistant rubber is disposed in the seal groove 421. A communication hole 431 of the supply path 43 communicates with a part of the seal groove 421 on the inner side (static pressure chamber 41 side) than the seal member 422.

In such an oil hydrostatic guide mechanism 40, pressurized lubricating oil is supplied from the supply path 43, flows into the static pressure chamber 41 from the seal groove 421, and passes through the inside of the static pressure chamber 41 from the outer portion 413. It moves to the portion 412 and is recovered from the communication hole 441 to the recovery path 44.
At this time, the lubricating oil in the static pressure chamber 41 floats and supports the guide surface 39 by the static pressure, whereby the function as the oil static pressure guide mechanism 40 is obtained.
On the other hand, the entire amount of the lubricating oil in the static pressure chamber 41 is recovered from the recovery path 44. Furthermore, since the periphery of the static pressure chamber 41 is sealed by the seal portion 42, the lubricating oil is prevented from leaking outside.

In the present embodiment, the thickness of the static pressure chamber 41 (the distance between the inner portion 412 and the guide surface 39), that is, the depth of the recess with respect to the smooth surface 49 is very shallow compared with the seal groove 421 and the annular groove 411 (several tens of times). Is formed).
Furthermore, the inner part 412 and the outer part 413 are set to the same height. That is, the depth of the static pressure chamber 41 in the inner portion 412 (relative to the smooth surface 49) is the same as the depth in the outer portion 413.

Therefore, in the assembled state as the guide mechanism 30, the thickness in the outer portion 413 of the static pressure chamber 41 (the distance between the outer portion 413 and the guide surface 39) and the thickness in the inner portion 412 of the static pressure chamber 41 (inner portion 412). And the distance between the guide surface 39 and the guide surface 39 are the same.
However, an annular groove 411 is formed between the inner portion 412 and the outer portion 413, and the annular groove 411 is communicated with the seal groove 421 through a communication groove 414. For this reason, in the outer part 413, it is hold | maintained at the same pressure as the pressure of the lubricating oil from the supply path 43 supplied through the communicating hole 431.

With this setting, when lubricating oil flows from the outer portion 413 to the inner portion 412 of the static pressure chamber 41, the inner portion 412 acts as a land portion or a pressure holding portion.
In other words, the pressure on the outside of the inner portion 412 (the region facing the annular groove 411) is the same as that on the outer portion 413. However, the pressure gradually decreases as it flows inward and reaches the communication hole 441 of the recovery path 44. Atmospheric pressure.

As described above, the inner portion 412 acts as a land portion or a pressure holding portion, whereby a static pressure for supporting a load can be secured in the outer portion 413 which is a recess portion or a static pressure chamber main body.
Furthermore, the static pressure support by the lubricating oil in the static pressure chamber 41 is performed at the outer portion 413 which is mainly on the outer peripheral side and has a large area, and the pressure receiving area can be expanded, Efficient static pressure support by the high-pressure lubricating oil that has just flowed in can be performed.

[Slip guide mechanism 50]
In FIG. 4, the sliding guide mechanism 50 has a smooth sliding surface 51. An oil supply groove 52 that is continuous vertically and horizontally is formed on the sliding surface 51.
As shown also in FIG. 6, an oil supply path 53 is communicated with the oil supply groove 52, and the supply pipe 66 of the lubricating oil supply device 60 described above is connected to the oil supply path 53.

In the sliding guide mechanism 50, the sliding surface 51 and the guide surface 39 are brought into contact with each other to support the first and second rails 141 and 142 that are guide members, and between the sliding surface 51 and the guide surface 39. Allow relative movement by sliding.
Here, in the sliding guide mechanism 50, the lubricating oil supplied to the oil supply path 53 is diffused to each part of the slide surface 51 by the oil supply groove 52, so that the gap between the slide surface 51 and the guide surface 39 is increased. Sliding resistance and wear can be reduced.

In the sliding guide mechanism 50 of the present embodiment, the lubricating oil supplied between the guide surface 39 and the sliding surface 51 is the same lubricating oil as the lubricating oil supplied to the hydrostatic pressure guide mechanism 40. For this reason, even if the lubricating oil leaks out from the hydrostatic pressure guide mechanism 40 and mixes with each other, there is no problem because the lubricating oil is the same.
Further, since the same lubricating oil is used in the sliding guide mechanism 50 and the hydrostatic guide mechanism 40, the same tank can be shared instead of the separate tanks 61 and 69.

[Effects of First Embodiment]
According to the first embodiment described above, the following effects can be obtained in addition to the effects individually described in the description of the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50.
In the present embodiment, the hydrostatic pressure guide mechanism 40 is a hermetic hydrostatic pressure guide mechanism, and the outer periphery is sealed by the seal portion 42, and the lubricating oil is supplied from the supply path 43 and recovered from the recovery path 44. Circulated to the tank 61.

Therefore, in the hydrostatic pressure guide mechanism 40, it is possible to prevent or minimize the overflow of the lubricating oil from the outer peripheral edge to the outside.
Furthermore, even if the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 are provided together, the possibility that the lubricating oil overflowing from the hydrostatic pressure guide mechanism 40 may adversely affect the slide guide mechanism 50 can be eliminated.

  The hydrostatic pressure guide mechanism 40 can ensure high load load and low friction, and the slide guide mechanism 50 can ensure guidance accuracy and damping performance. As a result, it is possible to provide a machine tool guide mechanism 30 that has a high load, low friction, high guide accuracy, and high damping performance.

In the present embodiment, the main structure (hydrostatic chamber 41, oil supply groove 52, etc.) of the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 is collected on the moving member 31 that is one of the two members that move relative to each other. Only the guide surface 39 is formed on the first and second rails 141 and 142 which are the other of the two members.
That is, since the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 share the guide surfaces 39 of the first and second rails 141 and 142 that are guide members, compared to a structure in which a guide surface is prepared for each mechanism. The guide mechanism 30 as a whole can be downsized.

  In addition, the main structures (such as the static pressure chamber 41 and the oil supply groove 52) of the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 can be integrated into the moving member 31, and the structure can be simplified in this respect as well. Furthermore, since the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 are installed side by side on the surface of the moving member 31 facing the guide surface 39, the load sharing by each mechanism can be ensured.

[Second Embodiment]
7 and 8 show a second embodiment according to the present invention.
In the present embodiment, a guide mechanism 30 based on the present invention is installed on a machine tool 10 similar to the first embodiment described above.
In the present embodiment, the basic configuration of the machine tool 10, the guide mechanism 30, the hydrostatic pressure guide mechanism 40, and the slide guide mechanism 50 is common, and redundant description will be omitted, and different configurations will be described below.

  In the first embodiment described above, the static pressure chamber 41 of the hydrostatic pressure guide mechanism 40 has the annular groove 411, the inner part 412, the outer part 413, and the communication groove 414. And while the inner part 412 and the outer part 413 have the same depth, the annular groove 411 and the communication groove 414 communicate with the seal groove 421, so that the inner part 412 functions as a pressure holding part (land part), The outer portion 413 functions as a static pressure chamber main body (recess portion).

In the present embodiment, the annular groove 411 and the communication groove 414 are omitted, and the depth of the outer portion 413 is formed deeper than the inner portion 412, so that the inner portion 412 is actually used as a land (pressure holding portion), and The outer portion 413 is a recess (static pressure chamber main body).
In the present embodiment, the depth of the inner portion 412 is about several tens of microns similar to the first embodiment described above, and the depth of the outer portion 413 is deeper than the inner portion 412.

In the first embodiment described above, the lubricating oil supply device 60 is provided with a path for supplying the lubricating oil to the hydrostatic pressure guide mechanism 40 and a path for collecting the discharged lubricating oil, and separately, a sliding guide is provided. A path for supplying lubricating oil to the mechanism 50 was provided.
On the other hand, in the present embodiment, the tank 61 is shared, and the supply pipe 63 to the hydrostatic pressure guide mechanism 40 and the supply pipe 66 to the slide guide mechanism 50 are connected to the same tank 61.

  According to the present embodiment, since the basic configurations of the machine tool 10, the guide mechanism 30, the hydrostatic pressure guide mechanism 40, and the slide guide mechanism 50 are the same as those of the first embodiment described above, the effects of these are the same. Is obtained.

  Further, in the present embodiment, the annular groove 411 and the communication groove 414 are omitted, but the static pressure load support is performed in the same manner as in the first embodiment described above by setting the depth of the inner portion 412 and the outer portion 413. The function as the hydrostatic pressure guide mechanism 40 can be obtained.

  Further, in the lubricating oil supply device 60, the same tank 61 is used for supplying the lubricating oil to the hydrostatic pressure guide mechanism 40 and supplying the lubricating oil to the sliding guide mechanism 50, whereby the device configuration can be simplified. Even in such a case, since the lubricating oil used in the hydrostatic guide mechanism 40 and the sliding guide mechanism 50 is the same, there is no functional problem.

[Third Embodiment]
9 and 10 show a third embodiment according to the present invention.
In the first embodiment and the second embodiment described above, the sliding surface 51 and the smooth surface 49 are provided continuously on the surfaces of both ends of the moving member 31, and the hydrostatic pressure guide mechanism 40 and the sliding guide mechanism 50 are adjacent to each other. It was installed.
On the other hand, in this embodiment, the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 are formed as separate members.

As shown in FIGS. 9 and 10, in the present embodiment, the sliding guide mechanism 50 is formed on the moving member 31, but the hydrostatic pressure guide mechanism 40 is not formed.
On the other hand, block-shaped auxiliary moving members 48 are installed at both ends of the moving member 31, and the hydrostatic pressure guide mechanism 40 is formed on the auxiliary moving member 48.

The auxiliary moving member 48 is installed on the outer surface of the spindle head 15 (see FIG. 2) on which the moving member 31 is installed, and is firmly supported by the frame of the spindle head 15.
The smooth surface 49 of the auxiliary moving member 48 is disposed on the same plane as the sliding surface 51 of the moving member 31.
A static pressure chamber 41 and a seal portion 42 are formed on the smooth surface 49 of the auxiliary moving member 48, and a supply path 43 and a recovery path 44 are formed inside the auxiliary moving member 48.
The hydrostatic pressure guide mechanism 40 similar to that of the first embodiment or the second embodiment is formed by the static pressure chamber 41, the seal portion 42, the supply path 43, and the recovery path 44.

  According to this embodiment, the hydrostatic pressure guide mechanism 40 is disposed adjacent to the sliding guide mechanism 50 and the auxiliary moving member 48 formed on the moving member 31, and these hydrostatic pressure guide mechanisms 40 and Since the sliding guide mechanism 50 is guided with respect to the guide surfaces 39 of the first and second rails 141 and 142, which are guide members, the same effects as those of the first and second embodiments described above are obtained. be able to.

  Furthermore, in the present embodiment, the hydrostatic pressure guide mechanism 40 is formed on the auxiliary moving member 48 that is separate from the moving member 31. For this reason, the auxiliary moving member 48 having the hydrostatic pressure guide mechanism 40 is additionally installed on the existing machine tool in which only the sliding guide mechanism 50 is formed on the moving member 31 (so-called retrofit). Can be easily implemented. And existing machine tools can be utilized.

[Fourth Embodiment]
11 and 12 show a fourth embodiment based on the present invention.
In FIG. 11, the machine tool 10S of the present embodiment has a first groove portion 151S at the upper part of the spindle head 15 as in the case of the machine tool 10 (see FIG. 1) of the first embodiment, and the first groove portion 151S. Is engaged with the first rail 141S of the cross bar 14. Further, a second groove portion 152 is provided at the lower portion of the spindle head 15, and the second groove portion 152 is engaged with the second rail 142 of the cross bar 14.

In FIG. 12, a load supporting guide mechanism 30T (guide mechanisms 30CT, 30DT, 30ET, 30FT) is installed between the second groove 152 and the second rail 142.
The load supporting guide mechanism 30T (guide mechanisms 30CT, 30DT, 30ET, 30FT) is arranged in the same manner as the guide mechanism 30 (guide mechanisms 30C, 30D, 30E, 30F) of the first embodiment described above.

However, in the guide mechanism 30 of the first embodiment, the guide mechanisms 30C, 30D, 30E, and 30F are respectively provided with the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 on the respective moving members 31C, 31D, 31E, and 31F. I was prepared.
On the other hand, in the guide mechanism 30T of the present embodiment, the guide mechanisms 30CT, 30DT, 30ET, and 30FT include only the slide guide mechanism 50 on each of the moving members 31CT, 31DT, 31ET, and 31FT.

That is, in the present embodiment, the hydrostatic pressure guide mechanism 40 is not used for the load supporting guide mechanism 30T.
The moving members 31CT, 31DT, 31ET, and 31FT having only such a sliding guide mechanism 50 may have the same configuration as the moving member 31 (see FIG. 9) in the third embodiment described above.

  On the other hand, a guide mechanism 30S for preventing the inclination of the spindle head 15 is installed between the first groove portion 151S and the first rail 141S.

A guide surface 39S is formed obliquely on the first rail 141S, and a moving member 31S is installed inside the first groove 151S so as to face the guide surface 39S. A guide mechanism 30S is formed by the guide surface 39S and the moving member 31S.
In the present embodiment, the guide mechanism 30S includes only the hydrostatic pressure guide mechanism 40 on the moving member 31S.

A guide mechanism 30AS attached to the guide mechanism 30S is formed between the spindle head 15 and the first rail 141S. The guide mechanism 30AS has the same arrangement as the guide mechanism 30A of the first embodiment described above, and includes a moving member 31AS that slides on the vertical guide surface 39A.
However, while the guide mechanism 30A of the first embodiment includes the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 on the moving member 31A, in the guide mechanism 30AS of the present embodiment, the moving member 31AS does not slide. Only the guide mechanism 50 is provided.

  According to this embodiment, the weight of the spindle head 15 can be supported by the cross bar 14 at the lower part of the spindle head 15 by the guide mechanism 30T. Further, since the guide mechanism 30S is disposed at an upper portion of the spindle head 15, the guide mechanism 30S can bear an inclination moment due to the weight of the spindle head 15 and can prevent the spindle head 15 from being inclined. .

  At this time, the guide mechanism 30S for preventing tilting can have a high load load because the space between the guide surface 39S and the moving member 31S serves as the hydrostatic pressure guide mechanism 40. On the other hand, since the sliding guide mechanism 50 is used for the load supporting guide mechanism 30T and the guide mechanism 30AS, the conventional mechanism can be diverted.

The moving member 31S having only the hydrostatic pressure guide mechanism 40 used for the tilt prevention guide mechanism 30S can be configured as follows.
In FIG. 13, the moving member 31 </ b> S has a smooth surface 49 at the level of one step on both sides, and two sets of hydrostatic pressure guide mechanisms 40 are formed on each surface.
Each structure of the hydrostatic pressure guide mechanism 40 is the same as that of the first embodiment, and redundant description is omitted.
In such a guide mechanism 30S, the moving member 31S has a total of four sets of hydrostatic pressure guide mechanisms 40, and can bear a heavy load with the first rail 141S as a guide member.

[Other Embodiments]
In addition, this invention is not limited to the structure of each embodiment mentioned above, The deformation | transformation etc. in the range which can achieve the objective of this invention are included in this invention.
For example, the number, arrangement, dimensions, and the like of the hydrostatic pressure guide mechanism 40 installed in each part can be set as appropriate in implementation. For example, a plurality of hydrostatic pressure guide mechanisms 40 may be arranged in parallel in one guide mechanism 30.

  In the fourth embodiment, the tilt preventing guide mechanism 30S (moving member 31S) has only the hydrostatic pressure guide mechanism 40, and the load supporting guide mechanism 30T and the guide mechanism 30AS have only the slip guide mechanism 50. However, each may use the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 in combination.

In each of the above embodiments, the lubricating oil supply device 60 is provided with a path for supplying the lubricating oil to the hydrostatic pressure guide mechanism 40 and a path for collecting the discharged lubricating oil, and also supplies the lubricating oil to the sliding guide mechanism 50. There was a route.
However, if it is not necessary to supply lubricating oil as the sliding guide mechanism 50, such an oil supply function to the sliding guide mechanism 50 may be omitted. For example, when the amount of lubricating oil that leaks from the hydrostatic pressure guide mechanism 40 corresponds to the amount of lubricating oil required by the slide guide mechanism 50, the lubricating oil flows out from a part of the seal portion 42 of the hydrostatic pressure guide mechanism 40. This may be supplied to the sliding guide mechanism 50.

  The sliding guide mechanism 50 is not limited to using the same lubricating oil as the hydrostatic guide mechanism 40 for lubrication and wear prevention, but uses other oils or oils or uses a solid lubricating material for the sliding surface 51. It may be. Even in such a case, since the leakage of the lubricating oil from the hydrostatic guide mechanism 40 can be prevented by the seal portion 42, there is no inconvenience in the slip guide mechanism 50 due to the leaked lubricating oil.

  In each of the embodiments described above, the guide surface 39 is provided on the first and second rails 141 and 142 that are guide members, and the guide surface 39 is shared by the hydrostatic pressure guide mechanism 40 and the slide guide mechanism 50 of the moving member 31. did. However, sharing of the guide surface 39 is not essential to the present invention, and two rows of guide surfaces 39 may be provided on the guide member, and each may be used for the hydrostatic guide mechanism 40 and the slide guide mechanism 50.

  Alternatively, it is not essential to arrange the hydrostatic pressure guide mechanism 40 and the sliding guide mechanism 50 on the moving member 31. For example, the moving member 31 is provided with the hydrostatic pressure guide mechanism 40 and a guide surface (for sliding guide) and guided. A sliding guide mechanism 50 and a guide surface (for hydrostatic pressure guide) may be provided on the members (the first and second rails 141 and 142 in each embodiment described above).

  In the above-described hydrostatic pressure guide mechanism 40 of each embodiment, the lubricating oil is supplied from the supply path 43 to the static pressure chamber 41, the lubricating oil discharged from the static pressure chamber 41 is recovered from the recovery path 44, and the tank 61 The circulation type hydrostatic pressure structure is used. However, not only the circulation type but also a simple flow type hydrostatic pressure structure may be adopted. For example, the lubricating oil recovered from the recovery path 44 is not returned to the tank 61, but the lubricating oil is supplied from the supply path 43 to the static pressure chamber 41 to generate static pressure in the static pressure chamber 41, and then recovered in the recovery path 44. You can just do it.

  Further, the hydrostatic pressure guide mechanism 40 may be an enclosed hydrostatic pressure structure that uses the static pressure of the lubricating oil stored in the hydrostatic chamber 41. Even in this case, in order to maintain the amount and pressure of the lubricating oil in the static pressure chamber 41 at predetermined values, the supply path 43 needs to be installed, but the recovery path 44 can be omitted.

  In each of the above-described embodiments, the present invention is applied to the Y-axis moving mechanism 22 that moves the cross bar 14 and the head 15 relative to each other in the machine tool 10 having the gate-type support structure with the pair of columns 13 and the cross bar 14. An example was explained. However, the present invention is not limited to such a part, and other relative movement parts of the machine tool 10, such as a guide mechanism or a base of the Z-axis movement mechanism 23 that relatively moves the head 15 and the ram 16. You may apply to the guide mechanism of the X-axis moving mechanism 21 which moves 11 and the table 12 relatively.

In FIG. 1 described above, as the X-axis moving mechanism 21, a pair of guide mechanisms that mainly receive the load of the table 12 is provided on the upper surface of the base 11, and the vertical inner wall surface of the concave portion between these guide mechanisms is provided. In some cases, a guide mechanism for restricting the moving direction of the table 12 relative to the base 11 may be provided.
As shown in FIG. 14, the load supporting guide mechanism 30 </ b> W includes a guide member 31 </ b> W on the lower surface of the table 12, and the guide member 31 </ b> W uses the upper surface of the base 11 as a guide surface 39 </ b> W. Further, the guide mechanism 30G for restricting the moving direction has a pair of guide members 31G on both sides of the convex portion formed on the lower surface of the table 12, and these guide members 31G are concave grooves formed on the base 11. A pair of inner side surfaces is a guide surface 39G.

Of these, the load receiving guide mechanism 30W receives only the weight of the table 12 and the weight of the workpiece 19 to be processed (see FIG. 1), and thus the slide guide mechanism 50 can be used.
On the other hand, the guide mechanism 30G for restricting the moving direction may receive a cutting force in the horizontal direction that is much larger than the weight of the table 12 or the workpiece 19 described above, and the slip guide mechanism 50 exceeds the allowable surface pressure. For this reason, it is possible to cope with high loads by using the hydrostatic pressure guide mechanism 40 as the guide mechanism 30G for restricting the moving direction.
In this way, the hydrostatic pressure guide mechanism 40 and the sliding guide mechanism 50 may be selectively used according to the requirements of each part guide mechanism, such as the load receiving guide mechanism 30W or the guide mechanism 30G for restricting the moving direction.

The present invention is not limited to the linear movement as described above, and may be applied to a rotating portion guide mechanism such as a rotary support mechanism of a rotary table.
The machine tool to which the present invention is applied is not limited to the machine tool 10 described above, and the present invention can be applied to various machine tools having two members that move relative to each other.

  INDUSTRIAL APPLICABILITY The present invention can be used for various machine tool guide mechanisms and machine tools that move a workpiece to be machined and a machining tool to arbitrary relative positions.

  DESCRIPTION OF SYMBOLS 10 ... Machine tool, 11 ... Base, 12 ... Table, 13 ... Column, 14 ... Crossbar, 141, 142 ... 1st and 2nd rail which is a guide member, 15 ... Head, 151, 152 ... Groove part, 16 ... Ram, 17 ... Main shaft, 18 ... Tool, 19 ... Workpiece, 21 ... X-axis moving mechanism, 22 ... Y-axis moving mechanism, 23 ... Z-axis moving mechanism, 30, 30A-30F, 30S, 30AS, 30CT-30FT, 30G, 30W ... Guide mechanism, 31, 31A-31F, 31S, 31AS, 31CT-31FT, 31G, 31W ... Moving member, 39, 39A-39F, 39S, 39CT-39FT, 39G, 39W ... Guide surface, 40 ... Oil Static pressure guide mechanism, 41 ... static pressure chamber, 411 ... annular groove, 412 ... inner part, 413 ... outer part, 414 ... communication groove, 42 ... seal part, 421 ... seal groove, 42 ... Sealing member, 43 ... Supply path, 431 ... Communication hole, 44 ... Collection path, 441 ... Communication hole, 48 ... Auxiliary moving member, 49 ... Smooth surface, 50 ... Sliding guide mechanism, 51 ... Sliding surface, 52 ... Oil supply Groove 53 ... Oil supply path 55 ... Recovery tank 56 ... Waste oil tank 60 ... Lubricating oil supply device 61, 69 ... Tank, 62 ... Pump, 63, 66 ... Supply piping, 64 ... Recovery piping, 65, 68 ... Filter, 67 ... pump.

In the machine tool guide mechanism according to the present invention, the slide guide mechanism is installed inside the machine tool, and the hydrostatic guide mechanism is fixed to both ends of the slide guide mechanism. Machine guide mechanism.

In the present invention, when the two parts of the machine tool move relative to each other, the slide guide mechanism inside the machine tool and the hydrostatic pressure guide mechanisms at both ends thereof are effective, and the performance of each guide mechanism is combined. Guidance performance can be obtained.
Furthermore, the sliding guide mechanism inside the machine tool and the hydrostatic pressure guide mechanisms at both ends thereof can be arranged so as to share the same guide member, and this sharing can simplify the structure of the guide mechanism. And the machine tool as a whole can be downsized.

Furthermore, the configuration of the present invention can be easily realized by externally attaching an oil hydrostatic guide mechanism to both ends of an existing machine tool having a slide guide mechanism inside.
And by adding an oil hydrostatic guide mechanism to an existing machine tool having a slide guide mechanism, an oil hydrostatic slide combined type guide mechanism can be easily realized, and as a result, with a high load capacity, It is possible to provide a machine tool guide mechanism that has low friction, high guide accuracy, and high damping performance.

Claims (9)

A machine tool guide mechanism having two members that move relative to each other,
An oil hydrostatic guide mechanism and a slide guide mechanism are formed between the two members,
The oil hydrostatic guide mechanism has a static pressure chamber whose outer periphery is sealed, and a supply path for supplying lubricating oil to the static pressure chamber. In the machine tool guide mechanism according to claim 1,
The oil hydrostatic guide mechanism has a recovery path for recovering lubricating oil from the static pressure chamber. In the machine tool guide mechanism according to claim 2,
The supply path supplies lubricating oil to the outer peripheral side of the static pressure chamber,
A guide mechanism for a machine tool, wherein the recovery path recovers lubricating oil from a central portion of the static pressure chamber. In the machine tool guide mechanism according to any one of claims 1 to 3,
As the two members that move relative to each other, a guide member and a movable member that is relatively movable along the guide member,
The guide member has a smooth guide surface,
The guide mechanism for a machine tool, wherein the hydrostatic pressure guide mechanism and the slide guide mechanism are formed between the guide surface and share the guide surface. In the machine tool guide mechanism according to claim 4,
The moving member has the static pressure chamber facing the guide surface, and a seal portion surrounding the static pressure chamber,
A guide mechanism for a machine tool, wherein the hydrostatic pressure guide mechanism is formed by the static pressure chamber and the guide surface. In the guide mechanism of the machine tool according to claim 4 or 5,
The moving member has a sliding surface facing the guide surface, and an oil supply groove formed on the sliding surface,
A guide mechanism for a machine tool, wherein the sliding guide mechanism is formed by the sliding surface and the guide surface. In the machine tool guide mechanism according to any one of claims 1 to 6,
The guide mechanism for a machine tool, wherein the slide guide mechanism is installed inside the machine tool, and the hydrostatic pressure guide mechanism is fixed to the outside of the machine tool.   A machine tool comprising the machine tool guide mechanism according to any one of claims 1 to 7. The machine tool according to claim 8,
A movable side member movable in a horizontal direction with respect to the fixed side member, and a load supporting guide mechanism extending in a horizontal direction between the fixed side member and the moving side member; and the load supporting guide A machine tool comprising an inclination prevention guide mechanism that opposes an inclination centering on the mechanism.

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