JP2013132701A - Flange mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a new flange mechanism can improve workability in the attaching/detaching of a fixing nut in the replacing work of cutting blades.SOLUTION: A flange mechanism sandwiches a cutting blade to be fixed at a tip end of a rotatably supported spindle for cut-machining an object-to-be-machined, and has a fixed flange including: a columnar boss part of which an outer circumference of its tip end has a male screw formed; a blade mounting part formed at an intermediate portion in the axial direction of the boss part; and a flange part formed protruding from the rear end of the boss part in the axial direction into the radial direction resulting in supporting the cutting blade, while having a fixing nut of annular shape whose inner circumferential surface has a female thread formed thereon that fittingly screws together with the male thread of the boss part while sandwiching the flange part of the fixed flange and cutting blade for fixing, whereas the mutually screwing male thread of the fixed flange and female thread of the fixing nut are composed of multiple threads, with the starting ends of the multiple threads being formed at an equal interval in the circumferential direction.

Description

  The present invention relates to an improvement in a flange mechanism of a precision cutting apparatus such as a dicing apparatus.

  In semiconductor device manufacturing processes and various electronic component manufacturing processes, dicing apparatuses that divide a workpiece into individual products or chips are widely used. In the dicing apparatus, an ultra-thin cutting blade fixed to the tip of a spindle that is driven to rotate is rotated at a high speed, and a workpiece such as a semiconductor wafer is cut. In the cutting process, cutting water is applied to the workpiece from nozzles arranged around the cutting blade.

  The cutting blade is consumed every time the cutting is repeated, and the cutting blade that has been consumed by a predetermined consumption amount needs to be replaced each time. In this replacement work, the flange mechanism fixing the worn cutting blade to the machine is loosened and removed from the fixing flange. After the new cutting blade is attached to the fixing flange, the fixing nut is tightened again. Is called. A configuration is known in which the fixing nut is screwed to a boss portion of a fixing flange, and screws that are screwed to each other are formed on the fixing nut and the boss portion (see, for example, Patent Document 1).

JP 2000-190155 A

  In the above-described cutting blade replacement operation, the fixing nut is attached to and detached from the fixing flange. However, when the screw of the fixing nut is engaged with the screw of the fixing flange, there is a problem that the engagement is difficult. That is, it is necessary to start the screwing so that the positions of the start ends of the fixing nut and the fixing flange are matched (matching the catch), but it is difficult to align the start ends.

  The reason for this is that, in the replacement work, the operator faces the axial direction of the spindle on which the fixing flange is provided (the direction in which the spindle protrudes from the operator), so the rotation surface of the fixing nut is in the vertical direction. This is probably because of this.

  If the rotating surface of the fixing nut is horizontal, the weight of the fixing nut can be supported by the fixing flange. Therefore, it is possible to concentrate on searching for the catch of the fixing nut by hand, and the rotating surface of the fixing nut is vertical. It is conceivable that the operation is easier than in the case of the direction.

  On the other hand, if the rotation surface of the fixing nut is vertical, the weight of the fixing nut is supported so that the rotation surface of the fixing nut is vertical with respect to the spindle whose axial direction is horizontal. As a result, there is a problem that the work is difficult.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a novel flange structure capable of improving workability with respect to attachment and detachment of a fixing nut in a cutting blade replacement operation. It is to be.

  In the present invention, a flange mechanism that clamps a cutting blade that is fixed to the tip of a spindle that is rotatably supported and that cuts a workpiece, and has a cylindrical boss portion with a male screw formed on the outer periphery of the tip portion, A fixed flange having a blade mounting portion formed at an axial intermediate portion of the boss portion, a flange portion projecting in a radial direction from an axial rear end of the boss portion, and supporting a cutting blade; An internal thread of a female thread that engages with a male thread is formed on the inner periphery, and includes an annular fixing nut that clamps and fixes a flange portion of a fixing flange and a cutting blade. Is composed of a multi-threaded screw, and a flange mechanism is provided, characterized in that the start ends of the multi-threaded screw are formed at equal intervals in the circumferential direction.

  Preferably, the male screw of the fixing flange and the female screw of the fixing nut are four or less multi-threads.

  According to the present invention, since the fixing nut is screwed onto the fixing flange by the multi-thread screw, the start end portion of each screw is a multiple according to the number of threads, and the probability of catching that the screw fastening starts increases according to the multiple. , Screwing is easily started. Thereby, the screwing of the fixing nut to the fixing flange can be started immediately, and the workability of fastening of the fixing nut can be improved.

  In addition, for example, if it is a double thread screw, the fastening nut can be completed or removed at about half the number of rotations, and the effect of being able to be quickly attached and detached is also achieved.

  Furthermore, by using multi-threaded screws, a plurality of threads are formed at equal intervals. Thus, for example, in the case of a double thread, when a place where a fastening force is generated in a virtual plane orthogonal to the axial direction of the fixing nut is examined, the place is dispersed at a position that is 180 degrees out of phase about the axis. Will be. Thereby, the degree to which the fastening force applied to the fixing nut and the cutting blade is biased to a specific location can be reduced.

It is an external appearance perspective view of the cutting device suitable for implementing this invention. It is a perspective view shown about the structure of a cutting unit. It is a disassembled perspective view which shows a mode that a cutting blade is attached to a spindle. It is a perspective view shown about the composition of a fixed nut and a fixed flange. It is a front view of the boss | hub part which shows that the start end part of an external thread is formed in the circumferential direction at equal intervals.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an external perspective view of a cutting device 2 suitable for carrying out the present invention. FIG. 2 is a perspective view showing the configuration of the cutting unit.

  As shown in FIG. 1, the cutting device 2 includes a processing region 4 disposed on the left side of the cutting device 2 and a carry-in / out region 6 disposed on the right side of the cutting device 2. Above the processing region 4, a display monitor 8 having a touch panel function is provided.

  The processing area 4 and the carry-in / out area 6 are blocked by a plate-like partition wall 11. A gate 19 for communicating the processing region 4 and the carry-in / out region 6 is formed below the partition wall 11, and a chuck table (not shown) is moved through the gate 19 to move the chuck table on the chuck table. A workpiece such as a semiconductor wafer held on the substrate is moved between the processing region 4 and the carry-in / out region 6.

  In addition to the partition wall portion 11 disposed on the right side of the processing region 4, the processing region 4 has a plate-shaped partition wall portion 12 disposed on the rear side of the cutting unit 24 toward the cutting device 2, and further an upper surface partition wall portion 13 a. By being surrounded by the protective cover 13 having the left partition wall portion 13b and the front partition wall portion 13c, a compartment is formed as a closed space. Preferably, the protective cover 13 is configured by a transparent body that allows the inside to be visually recognized.

  FIG. 2 shows a perspective view of a state where the wafer W supported by the frame F is cut along the street by the cutting unit 24. Reference numeral 25 denotes a spindle housing of the cutting unit 24. A spindle 26 that is rotationally driven by a servo motor (not shown) is rotatably accommodated in the spindle housing 25. The cutting blade 28 is an electroformed blade, and has a cutting edge 28a formed by dispersing diamond abrasive grains in a nickel base material on the outer peripheral portion thereof.

  Reference numeral 30 denotes a blade cover that covers the cutting blade 28, and a cutting water nozzle (not shown) that extends along the side surface of the cutting blade 28 and cutting water that sprays the cutting water onto the contact area between the cutting blade 28 a of the cutting blade 28 and the wafer W. A water injection nozzle 35 is attached.

  The cutting water from the cutting water supply unit 34 is pressurized to about 0.3 Mpa. Cutting water is supplied through a pipe 32 to a cutting water nozzle (not shown) provided on the blade cover. Similarly, cutting water is supplied to the cutting water injection nozzle 35 provided on the blade cover via a pipe 37. The cutting water injection nozzle 35 is injected at a flow rate of 1.6 to 2.0 liters per minute.

  Reference numeral 39 denotes a detachable cover, which is detachably attached to the blade cover 30 with screws 43. The detachable cover 39 has a cutting water nozzle 44 extending along the side surface of the cutting blade 28. Cutting water is supplied to the cutting water nozzle 44 via a pipe 46.

  Referring to FIG. 3, an exploded perspective view showing how the hub type cutting blade 28 is mounted on the spindle 26 is shown. In the cutting blade 28, a cutting blade 28a and a flange portion 28b are integrally formed.

  By inserting the flange portion 28 b into the blade mounting portion 36 of the boss portion 38, and screwing and tightening to the fixing nut 50 male screw 42, the cutting blade 28 is sandwiched from both sides by the fixing nut 50 and the fixing flange 40 to the spindle 26. It is attached. The fixing nut 50 and the fixing flange 40 are configured as a flange mechanism for fixing the cutting blade 28 to the spindle 26.

  As described above, in the cutting apparatus 2 of the present embodiment, the chuck table that holds the wafer W that is a workpiece, and the annular cutting blade 28 that cuts the wafer W held on the chuck table are provided by the spindle mechanism 26 by the flange mechanism. It is set as the structure provided with the cutting unit 24 as a cutting means fixed to.

  Next, a characteristic flange mechanism in the present invention will be described. As shown in FIG. 3, the flange mechanism includes a fixed flange 40 and a fixed nut 50.

  The fixed flange 40 includes a cylindrical boss portion 38 having a male screw 42 formed on the outer periphery of the front end portion, a blade mounting portion 36 formed at an intermediate portion in the axial direction of the boss portion 38, and an axial rear end of the boss portion 38. And a flange portion 41 that protrudes in the radial direction and supports the cutting blade 28.

  The fixing nut 50 has an internal thread 55 formed on the inner periphery thereof that engages with the male thread 42 of the boss portion 38 of the fixing flange 40. The fixing nut 50 has an annular shape for sandwiching and fixing the cutting blade 56 together with the flange portion 41 of the fixing flange 40. It is configured as a nut member.

  As shown in FIGS. 4 and 5, the male screw 42 of the fixing flange 40 and the female screw 55 of the fixing nut 50 that are screwed to each other are composed of multiple threads, and the start ends 42a and 42b and the start end 52a of the multiple threads. , 52b are formed at equal intervals in the circumferential direction.

  In the present embodiment, the male thread 42 of the fixing flange 40 has a first spiral 42A and a second spiral 42B, and is configured as a two-thread with two spirals in one pitch.

  The start ends 42a and 42b of the first spiral 42A and the second spiral 42B of the male screw 42 are formed on the end side of the boss portion 38 (the end opposite to the flange portion 41). As shown, when facing from the end side of the boss portion 38, the boss portion 38 is arranged at equal intervals in the circumferential direction, that is, at a position 180 degrees apart from each other.

  As shown in FIG. 4, the female screw 55 of the fixing nut 50 corresponding to the male screw 42 of the fixing flange 40 has a first spiral 52A and a second spiral 52B. It is composed of a double thread with a spiral.

  The start ends 52a and 52b of the first spiral 52A and the second spiral 52B of the female screw 55 are positioned at equal intervals in the circumferential direction of the fixed nut 50 when facing from the end in the axial direction of the fixed nut 50. That is, they are arranged 180 ° apart from each other.

  According to the above configuration, since the fixing nut 50 is screwed into the fixing flange 40 by the male screw 42 and the female screw 55 provided with the double thread, the start end portions 42a, 42b, 52a, 52b of each screw are in the number of threads. It becomes a multiple corresponding to this, and the probability of catching that the screw fastening is started increases according to the multiple, so that the screwing is easily started. Thereby, the screwing of the fixing nut 50 to the fixing flange 40 can be started immediately, and the workability of fastening of the fixing nut 50 can be improved.

  In addition, as in the present embodiment, if a double thread is used, the lead (the length that moves when the screw makes one revolution) can be double the pitch of the screw. As a result, the fastening nut 50 can be completely fastened or removed at about half the number of rotations, and there is also an effect that it can be quickly attached and detached in a short time.

  Furthermore, by using multi-threaded screws, a plurality of threads are formed at equal intervals. Thus, for example, in the case of a double thread, as shown in FIG. 5, when a place where a fastening force is generated in a virtual plane orthogonal to the axial direction of the fixing nut 50 is examined, the place is centered on the axis center C. It will be dispersed at positions P1 and P2 that are 180 degrees out of phase. Thereby, the degree to which the fastening force applied to the fixing nut and the cutting blade 28 is biased to one specific place can be reduced.

  In the present embodiment described above, the male thread 42 of the fixing flange 40 and the female thread 55 of the fixing nut 50 are each constituted by two threads, but the number of threads is not particularly limited. For example, it is also possible to set it as Article 3, Article 4, etc.

38 Boss part 40 Fixing flange 41 Flange part 42 Screw 42 Male screw 42A Spiral 42a Starting end part 42B Spiral 42b Starting end part 50 Fixing nut 52A Spiral 52a Starting end part 52B Spiral 52b Starting end part 55 Female thread 56 Cutting blade 58 Removable flange

Claims (2)

A flange mechanism that clamps a cutting blade that is fixed to the tip of a spindle that is rotatably supported and that cuts a workpiece,
A cylindrical boss part with a male thread formed on the outer periphery of the tip part, a blade mounting part formed at the axially intermediate part of the boss part, and a boss part that projects radially from the axial rear end. A fixed flange having a flange portion for supporting the cutting blade;
A female screw threadedly engaged with the male screw of the boss portion is formed on the inner periphery, and includes an annular fixing nut that clamps and fixes the flange portion of the fixing flange and the cutting blade;
The male screw of the fixing flange and the female screw of the fixing nut that are screwed to each other are composed of multiple threads,
The start ends of the multi-thread screws are formed at equal intervals in the circumferential direction.
A flange mechanism characterized by that. The male screw of the fixing flange and the female screw of the fixing nut are multi-threads having four or less threads,
The flange mechanism according to claim 1, wherein:

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