JP2013119430A - Thin plate container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and securely attach a support tool to a container body and contain a thin plate at the same support height as in a conventional container.SOLUTION: Fixing holes 11 and 12 are formed at a bottom wall 7a of the container body 3 and a body section 30 that supports a base board for the thin plate and connections 40 and 50 where through-holes 46 and 56 are formed in the support tools 5 are provided. Lower side protrusion sections 42 and 52 that protrude on a lower side and upper side protrusion sections 43 and 53 that protrude on an upper side are formed in the connections 40 and 50. Insertion recesses 44 and 54 into which the lower side protrusion sections 42 and 52 of the support tools 5 disposed on the upper side are formed on the upper side protrusion sections 43 and 53. A support tool stack S where a plurality of the support tools 5 are stacked is inserted into the container body 3, a shaft 60 is inserted into the through-holes 46, 56 from the fixing holes 11, 12, and an upper end and a lower end of the shaft 60 are tightened by nuts 61 and 62.

Description

  The present invention relates to a thin plate container for storing, transporting and transporting a thin plate substrate obtained by thinly processing a wafer on which an electronic circuit is formed.

  This type of thin plate container includes a container main body having an opening and a lid that closes the opening of the container main body so that the opening can be sealed, and supports the substrate on the opposing inner walls of the container main body. The shelves are formed at regular intervals in the vertical direction.

  Currently, a thin plate-like substrate in which an electronic circuit is formed on the surface of a silicon wafer having a diameter of 300 mm and a thickness of 775 μm and the back surface thereof is polished to reduce the thickness is sometimes used. For example, the thin plate-like substrate may be thinly processed to 10 μm to 400 μm, which is half or less of a normal substrate.

  Such a thin plate-like substrate has a large deflection due to its own weight, so that the thin plate-like substrate is not only easily detached from the support shelf, but also may be damaged by contact between adjacent thin plate-like substrates.

  In order to solve such a problem, as shown in Patent Document 1 and Patent Document 2, it is possible to support the thin plate substrate by placing a jig for suppressing the bending of the thin plate substrate on the support shelf of the thin plate container. It was proposed. In Patent Document 3, the carrier is not a container for storing a thin plate-like substrate, but is a carrier that attaches and integrates a pair of side wall assemblies in which a plurality of slots are assembled to a pair of end members provided in the frame structure portion. Has been proposed.

JP 2000-091400 A JP-T-2004-529493 Japanese Patent No. 4398240

  However, in the container described in Patent Document 1, there is a problem that the jig is misaligned because only the jig for preventing the bending of the thin plate substrate is placed on the support shelf.

  In this regard, in the container described in Patent Document 2, the tab formed on the jig is fitted so as to be sandwiched between the support shelves, and the thin plate-like substrate is supported by the protrusion formed on the upper surface of the jig. Thereby, the problem of the displacement of the insert can be solved.

  However, in the container described in Patent Document 2, since it is necessary to fit the tabs of the jig so as to be sandwiched between the support shelves, the attachment of the jig to the container becomes complicated. And since a thin board | substrate is supported by the protrusion formed in the upper surface of a jig, the height position which supports a thin board | substrate changes with respect to the position of the support shelf of a container. Moreover, since the tabs of the jig protrude from the upper and lower surfaces of the support shelf, the thin film substrate is rubbed and contaminated by the ribs of the jig, and the upper surface is damaged by friction with the thin film substrate, so it is temporarily attached to the container. Once used, it cannot be removed from the container and reused.

  The carrier described in Patent Document 3 has a problem that it is necessary to create a dedicated frame body separately. In addition, since the pair of side wall assemblies are simply inserted and attached to the frame structure so that each slot forms the left and right side walls in the frame structure, the integrated slot falls out of the frame structure. There is also a problem that dimensional accuracy becomes unstable due to incomplete insertion.

  Therefore, the present invention has been made in view of the above problems, and it is possible to easily and surely attach a support jig that suppresses bending of the thin plate by its own weight to the container body that houses the thin plate. It is an object of the present invention to provide a thin plate storage container that can be stored at the same support height as the storage container.

  A thin plate storage container according to the present invention is a thin plate storage container having a container main body having an opening and having a fixing hole formed in a bottom wall, and a support jig provided with a main body for supporting the thin plate. Is provided with a connecting portion in which a through-hole is formed which is disposed on the outer peripheral edge of the main body portion and penetrates vertically, and is connected to a support jig which is inserted into the fixing hole and the through-hole and arranged vertically. A rod-shaped member that connects the container body to the container body, and a fixing member that is attached to the rod-shaped member and sandwiches the container body and the support jig.

  According to the thin plate container according to the present invention, by forming the connecting portion on the support jig, it is possible to form a laminated body in which a plurality of support jigs are stacked one above the other, and of the connecting portion formed on the support jig. By adjusting the thickness, it is possible to adjust the interval between the support jigs arranged above and below. For this reason, a thin plate can be accommodated with the same support height as a conventional storage container. In addition, the support jig can be positioned with respect to the container body by inserting the rod-like member through the through hole formed in the connecting part of the support jig and the fixing hole formed in the bottom wall of the container body. By attaching the fixing member to the rod-shaped member, the support jig can be fixed to the container body. As described above, the support jig can be easily and reliably attached to the container body by inserting the rod-like member through the through hole of the support jig and the fixing hole of the container body and attaching the fixing member to the rod-like member.

  In the present invention, the connecting portion has a protruding portion that protrudes to either the upper side or the lower side, and an insertion concave portion into which the protruding portion of the support jig disposed on the other of the upper side or the lower side is inserted, Can be formed. By forming the protrusion and the insertion recess in this manner, positioning between the support jigs arranged above and below can be easily performed.

  In the present invention, the projecting portion is formed in a convex shape whose diameter decreases in the projecting direction, and the insertion concave portion is formed in a concave shape whose diameter decreases in the depth direction. be able to. By forming the protrusion and the insertion recess in this manner, the protrusion of the support jig disposed on either the upper side or the lower side is inserted into the insertion recess of the support jig disposed on either the upper side or the lower side. Therefore, a plurality of support jigs can be easily stacked.

  Further, according to the present invention, the insertion recess may be provided with a vertical restriction rib for restricting the insertion amount of the protrusion. Thus, by providing the upper and lower restriction ribs in the insertion recess, the interval between the support jigs arranged vertically can be adjusted by the height of the upper and lower restriction ribs. For this reason, for example, the support jig can be easily arranged at the same height as the thin plate support shelf in the conventional storage container.

  Further, according to the present invention, the pair of inner side walls of the container main body are formed with front and rear restriction ribs that protrude toward the opposed inner side walls, and the main body part is formed with front and rear restriction recesses that are fitted to the front and rear restriction ribs. Can be. Thus, by forming the front-rear restricting rib on the container body and forming the front-rear restricting recess on the main body, the support jig can be easily positioned in the front-rear direction with respect to the container main body.

  The present invention further includes an intermediate auxiliary member that is fitted to the connecting portion of the support jig disposed above and below, and the intermediate auxiliary member is formed with a through-hole through which the rod-shaped member is inserted. The upper surface can be fitted with the lower surface of the connecting portion of the support jig disposed on the upper side, and the lower surface of the intermediate auxiliary member can be fitted with the upper surface of the connecting portion of the support jig disposed on the lower side. . Thus, by providing the intermediate auxiliary member, it is possible to stack support jigs that are vertically adjacent via the intermediate auxiliary member, so by changing the height of the intermediate auxiliary member, the vertically adjacent support The interval between the jigs 105 can be easily adjusted.

  In the present invention, a protruding portion that protrudes to one of the connecting portion and the intermediate auxiliary member is formed, and an insertion concave portion into which the protruding portion is inserted is formed to either one of the connecting portion and the intermediate auxiliary member. It can be. By forming the protrusion and the insertion recess in this manner, positioning between the support jigs arranged above and below can be easily performed.

  Further, the present invention provides a lower auxiliary member fitted from below to a connecting portion of a support jig arranged at the lowermost level, and an upper auxiliary member fitted from above to a connecting portion of the support jig arranged at the uppermost level. And can be further provided. By providing the lower auxiliary member and the upper auxiliary member in this way, the lower auxiliary member is arranged between the support jig arranged at the lowermost stage and the bottom wall of the container body, and the support jig arranged at the uppermost stage. Since the upper auxiliary member is disposed between the upper auxiliary member and the top wall of the container body, the support jig laminate is attached to the bottom wall and the top wall of the container main body by adjusting the height of the lower auxiliary member and the upper auxiliary member. It can be made to contact both. Thereby, fixation of the support jig laminated body with respect to a container main body can be performed easily.

In the present invention, the main body portion may be formed in a U-shaped plate shape.
The By forming the main body part of the support jig in a U shape in this way, the conveyance of the thin plate is performed while the inner diameter of the main body unit is reduced and the distance from the center of the thin plate to the thin plate support position by the main body unit is shortened. A thin plate can be smoothly put in and out of the container main body without the apparatus interfering with the main body.

  According to the present invention, it is possible to easily and surely attach a support jig that suppresses bending of the thin plate by its own weight to the container body that stores the thin plate, and stores the thin plate at the same support height as that of the conventional storage container. Can do.

It is a perspective view of the thin plate container which concerns on 1st Embodiment. It is sectional drawing of the container main body in the II-II line | wire of FIG. It is a cross-sectional perspective view of the container main body in the II-II line | wire of FIG. It is a top view of a support jig. It is a perspective view of a support jig. It is the elements on larger scale of the support jig shown in FIG. It is sectional drawing in the VII-VII line shown in FIG. It is the elements on larger scale of the support jig shown in FIG. It is sectional drawing in the IX-IX line shown in FIG. It is a front view of a support jig laminated body. It is a front view of the container main body in which the support jig laminated body was inserted. It is sectional drawing in the XII-XII line | wire shown in FIG. It is a cross-sectional side view of the container main body to which the support jig laminated body was fixed with the shaft. It is a top sectional view of a container main part with which a support jig laminated body was fixed with a shaft. It is a lower cross-sectional view of the container body in which the support jig laminate is fixed to the shaft. It is sectional drawing of the thin plate container which concerns on 2nd Embodiment. It is sectional drawing of the thin plate container in the XVII-XVII line of FIG. It is the elements on larger scale which show the lower part of a support jig laminated body. It is the elements on larger scale which show the upper part of a support jig laminated body. It is sectional drawing which showed the lamination | stacking state of the support jig which concerns on other embodiment. It is sectional drawing which showed the lamination | stacking state of the support jig which concerns on other embodiment.

  Hereinafter, a preferred embodiment of a thin plate container according to the present invention will be described in detail with reference to the drawings. In the present embodiment, the thin plate stored in the thin plate container will be described as a thin plate substrate having an electronic circuit formed on the surface. In the following description, the horizontal direction (width direction) of the thin plate container is referred to as the X direction, the front and rear direction of the thin plate container is referred to as the Y direction, and the vertical direction of the thin plate container is referred to as the Z direction. -The left / right / inside / outside directions are simply referred to as up / down / front / back / left / right / inside / outside directions. In all drawings, the same or corresponding parts are denoted by the same reference numerals.

[First Embodiment]
FIG. 1 is a perspective view of a thin plate container according to the first embodiment. As shown in FIG. 1, a thin plate container 1 according to the first embodiment stores a thin plate substrate having a diameter of 300 mm and a thickness of 10 μm to 400 μm inside, and includes a container body 3, a lid 4, The support jig 5 is provided.

  2 is a cross-sectional view of the container body taken along line II-II in FIG. FIG. 3 is a cross-sectional perspective view of the container body taken along line II-II in FIG. As shown in FIGS. 1 to 3, the container body 3 is a front open type container having an opening 6 on the front side which is the front. A bottom plate 8 is mounted on the lower surface portion of the container body 3 and is placed on a processing device on which the thin plate container 1 is mounted. A robotic flange 9 for conveyance is provided on the upper surface portion of the container body 3. It is attached.

  The bottom wall 7a of the container body 3 has a pair of front fixing holes 11 formed at both ends on the opening 6 side, and both ends on the back side (the rear side of the container body 3) opposite to the opening 6. A pair of rear-side fixing holes 12 are formed in the front. The front side fixing hole 11 and the rear side fixing hole 12 are holes that vertically penetrate the bottom wall 7a of the container body 3. The front side fixing hole 11 is disposed at a position close to the pair of opposite left and right inner walls 7b of the container body 3 so as not to interfere with the thin plate-like substrate housed in the container body 3 in plan view. The rear fixing hole 12 is a position close to the rear side wall 7c connected to the pair of inner side walls 7b and disposed on the opposite side of the opening 6, and is a thin plate-like substrate accommodated in the container body 3 in a plan view. It is arranged at a position where it does not interfere with.

  The pair of left and right inner side walls 7b facing the container body 3 are provided with front and rear regulating ribs 13 projecting toward the facing inner wall 7b. The front-rear regulating rib 13 is used to position the support jig 5 attached to the container body 3 in the Y direction. The front / rear regulating rib 13 is formed so as to protrude horizontally from one inner side wall 7b to the other inner side wall 7b, and the opening side front / rear regulating rib 14 disposed on the opening 6 side, 6, a back side front and rear regulating rib 15 disposed on the back side opposite to 6. The opening-side front / rear regulating rib 14 and the back-side front / rear regulating rib 15 are formed in a substantially rectangular plate shape and are spaced apart from each other. And when the support jig laminated body S by which the several support jig 5 was laminated | stacked is mounted in the inside of the container main body 3, each support jig 5 which comprises the support jig laminated body S is arrange | positioned at the front-rear regulating rib 13. It is formed at a height position.

  As shown in FIG. 1, the lid 4 is fitted into the opening 6 of the container body 3 to seal the container body 3. Therefore, the lid 4 includes a seal member 21 that seals between the opening 6 of the container body 3 and a locking mechanism 22 that holds the lid 4 in a state in which the lid 4 is fitted into the opening 6. . The locking mechanism 22 can be operated from the outside of the container body 3.

  FIG. 4 is a plan view of the support jig. FIG. 5 is a perspective view of the support jig. FIG. 6 is a partially enlarged view of the support jig shown in FIG. 7 is a cross-sectional view taken along line VII-VII shown in FIG. FIG. 8 is a partially enlarged view of the support jig shown in FIG. 9 is a cross-sectional view taken along line IX-IX shown in FIG.

  As shown in FIGS. 1 and 4 to 9, the support jig 5 is a member that is attached to the container body 3 to support the thin plate-like substrate and suppresses the thin plate-like substrate from being bent by its own weight. The support jig 5 includes a main body part 30 that supports the thin plate substrate, a pair of front side connection parts 40 that are connected to another support jig 5 that is formed on the outer peripheral edge of the main body part 30 and arranged vertically. And a rear connecting portion 50.

  The main body portion 30 is formed in a U-shape with a plate-like member, and extends in a substantially linear shape from both ends of the arc-shaped support surface portion 31 formed in a semicircular arc shape and the arc-shaped support surface portion 31 so as to be substantially parallel to each other. And a pair of linear support surface portions 32 to be arranged.

  By the way, the support jig 5 inserted into the container main body 3 is attached to the container main body 3 such that the arc-shaped support surface portion 31 is disposed on the back side of the container main body 3. For this reason, when the support jig 5 is attached to the container body 3, the surface facing the upper side of the container body 3 becomes the upper surface, the surface facing the lower side of the container body 3 becomes the lower surface, and the opening 6 side of the container body 3 is It is the front side, the back side of the container body 3 is the rear side, the inner wall 7b side and the rear wall 7c side of the container body 3 are the outside, and the center side of the container body 3 is the inside.

  The upper surfaces of the arc-shaped support surface portion 31 and the linear support surface portion 32 are surfaces on which the thin plate substrate is placed, and are flat surfaces in order to reduce the frictional resistance with the thin plate substrate.

  The outer diameter of the arc-shaped support surface portion 31 is larger than the outer diameter of the thin plate substrate to be placed. The inner diameter of the arc-shaped support surface portion 31 is smaller than the outer diameter of the thin plate substrate to be placed.

  By the way, the amount of bending of the thin plate-like substrate is maximized on the center line parallel to the take-out direction of the thin plate, particularly on the opening 6 side of the container body 3. For this reason, the amount of bending of the thin plate substrate can be reduced by bringing the support position of the thin plate substrate closer to the center of the thin plate substrate. On the other hand, the amount of bending of the thin plate-like substrate is deformed according to its thickness, and the amount of bending increases as the thickness decreases. For this reason, in order to keep the amount of bending of the thin plate substrate within a predetermined range, the support position of the thin plate substrate needs to be as close to the center as possible as the thickness of the thin plate substrate is reduced. Therefore, the inner diameter of the arc-shaped support surface portion 31 is preferably set as appropriate according to the vertical distance of the support jig 5, the allowable deflection amount of the thin plate substrate, and the thickness of the thin plate substrate. For example, when the thickness of the thin plate substrate is 10 μm and the inner diameter of the arc-shaped support surface 31 is 210 mm (the dimension from the center is 105 mm), the allowable deflection amount of the thin plate substrate is 10 mm. The vertical distance of 5 can be 20 mm.

  The inner peripheral surface of the arc-shaped support surface portion 31 and the inner surface of the linear support surface portion 32 are smoothly connected, and the inner diameter of the arc-shaped support surface portion 31 and the distance between the pair of linear support surface portions 32 have the same dimensions. It has become.

  Then, on the outside of the arcuate support surface portion 31 and the linear support surface portion 32, a front side front / rear restricting concave portion 33 and a rear side front / rear restricting concave portion 34 that are spaced apart from the rear side of the front side front / rear restricting concave portion 33 are formed. Has been. Here, the rear side is the upper side in FIG. 4, and the front side is the lower side in FIG. 4.

  The front side front / rear restricting recess 33 is a part to which the opening side front / rear restricting rib 14 is fitted. For this reason, the front side front and rear restricting recess 33 is formed in a rectangular concave shape corresponding to the shape of the opening side front and rear restricting rib 14. It should be noted that the front side front / rear restricting recess 33 has a width (a dimension in the vertical direction in FIG. 4) so that the opening side front / rear restricting rib 14 can be easily fitted. Is substantially equal to the dimension in the Y direction.

  The rear side front / rear restricting recess 34 is a part to which the rear side front / rear restricting rib 15 is fitted. For this reason, the rear side front / rear restricting recess 34 is formed in a rectangular recess corresponding to the shape of the back side front / rear restricting rib 15. The rear front / rear restricting recess 34 has a width (a dimension in the vertical direction in FIG. 4) that allows the rear front / rear restricting recess 15 to be easily fitted into the rear front / rear restricting rib 15. The dimension of the rib 15 is substantially equal to the dimension in the Y direction.

  As shown in FIGS. 4-7, each front side connection part 40 is each formed in the front side edge of each linear support surface part 32, respectively, and it is below the connection plate part 41 and the connection plate part 41 from the connection plate part 41, respectively. A projecting lower projecting portion 42 and an upper projecting portion 43 projecting upward from the connecting plate portion 41 are provided.

  The connecting plate portion 41 is formed in a plate shape having the same thickness as the main body portion 30, and is a portion that holds the lower protruding portion 42 and the upper protruding portion 43. The connecting plate portion 41 has a lower protrusion 42 and an upper protrusion in plan view when the front front / rear restricting recess 33 and the rear front / rear restricting recess 34 are fitted to the opening front / rear restricting rib 14 and the rear front / rear restricting rib 15. The center of the portion 43 extends from the front edge of the linear support surface portion 32 toward the front side and the outside so as to overlap the front fixing hole 11 of the container body 3.

  The lower protruding portion 42 protrudes below the lower surface of the main body portion 30. The outer peripheral surface 42a of the lower protrusion 42 has a convex frustoconical shape whose diameter becomes smaller (tapered) downward, which is the protruding direction of the lower protrusion 42, and the lower protrusion 42 Is a flat surface parallel to the upper and lower surfaces of the main body 30.

  The upper protrusion 43 protrudes above the upper surface of the main body 30. The upper protrusion 43 is formed with an insertion recess 44 into which the lower protrusion 42 of the support jig 5 disposed on the upper side is inserted. The insertion concave portion 44 is formed in a concave shape extending from the upper end surface of the upper protruding portion 43 toward the lower side where the lower protruding portion 42 is disposed. An inner peripheral surface 44a of the insertion concave portion 44 is a concave truncated cone whose diameter is reduced (tapered) at the same rate as the outer peripheral surface 42a of the lower protrusion 42 toward the lower side in the depth direction of the insertion concave portion 44. It is formed into a shape. For this reason, the outer peripheral surface 42a of the lower protrusion 42 and the insertion recess 44 of the upper protrusion 43 have the same inclination angle.

  The insertion recess 44 is provided with a vertical regulating rib 45 that bulges from the inner peripheral surface 44 a of the insertion recess 44 toward the radial center of the insertion recess 44. The vertical regulation rib 45 is a part that regulates the insertion amount (insertion height) of the lower protrusion 42. The upper end surface of the vertical restriction rib 45 is a flat surface parallel to the upper surface and the lower surface of the main body 30, similarly to the lower end surface of the lower protrusion 42. The upper end surface of the vertical regulation rib 45 is formed at a position where the inner diameter of the insertion recess 44 is the same as the outer diameter of the lower end surface of the lower protrusion 42. In addition, since the thickness of the up-and-down regulating rib 45 is increased, the thickness can be appropriately removed. In the drawing, the vertical regulating rib 45 is thinned in a cross shape, but the shape of the thinning is not limited and can be set as appropriate.

  The lower protrusion 42 and the upper protrusion 43 are formed with through holes 46 that vertically penetrate the centers of the lower protrusion 42 and the upper protrusion 43. The through hole 46 is formed in a straight line that passes through the radial center axis of the lower protrusion 42 and the insertion recess 44. For this reason, when the lower protrusion 42 of the support jig 5 disposed on the upper side is inserted into the insertion recess 44 of the support jig 5 disposed on the lower side, the outer peripheral surface 42 a of the lower protrusion 42 is In a state of being fitted into the inner peripheral surface 44a, the lower end surface of the lower protrusion 42 is placed on the upper end surface of the vertical regulation rib 45, and is disposed below the through hole 46 of the support jig 5 disposed on the upper side. The through holes 46 of the support jig 5 are arranged in a straight line.

  As shown in FIGS. 4, 5, 8, and 9, each rear connection portion 50 is formed at the rear edge of the arcuate support surface portion 31, and includes a connection plate portion 51 and a connection plate, respectively. A lower protruding portion 52 protruding downward from the portion 51 and an upper protruding portion 53 protruding upward from the connecting plate portion 51 are provided.

  The connecting plate portion 51 is formed in a plate shape having the same thickness as the main body portion 30 and is a portion that holds the lower protruding portion 52 and the upper protruding portion 53. The connecting plate portion 51 has a lower protrusion 52 and an upper protrusion in plan view when the front front / rear restricting recess 33 and the rear front / rear restricting recess 34 are fitted to the opening front / rear restricting rib 14 and the back front / rear restricting rib 15. The center of the portion 53 extends rearward and outward from a position where the rear end edge of the arcuate support surface portion 31 is spaced apart from the rear fixing hole 12 of the container body 3.

  The lower protrusion 52 protrudes below the lower surface of the main body 30. The outer peripheral surface 52a of the lower protrusion 52 has a convex frustoconical shape whose diameter decreases (taperes) downward, which is the protruding direction of the lower protrusion 52, and the lower protrusion 52 Is a flat surface parallel to the upper and lower surfaces of the main body 30.

  The upper protruding portion 53 protrudes above the upper surface of the main body portion 30. The upper protrusion 53 is formed with an insertion recess 54 into which the lower protrusion 52 of the support jig 5 disposed on the upper side is inserted. The insertion recess 54 is formed in a concave shape extending from the upper end surface of the upper protrusion 53 toward the lower side where the lower protrusion 52 is disposed. An inner peripheral surface 54a of the insertion concave portion 54 is a concave truncated cone whose diameter decreases (taperes) at the same rate as the outer peripheral surface 52a of the lower protrusion 52 toward the lower side in the depth direction of the insertion concave portion 54. It is formed into a shape. For this reason, the outer peripheral surface 52a of the lower protrusion part 52 and the insertion recessed part 54 of the upper protrusion part 53 have the same inclination angle.

  The insertion recess 54 is provided with a vertical regulating rib 55 that bulges from the inner peripheral surface 54 a of the insertion recess 54 toward the radial center of the insertion recess 54. The vertical regulation rib 55 is a part that regulates the insertion amount (insertion height) of the lower protrusion 52. The upper end surface of the vertical restriction rib 55 is a flat surface parallel to the upper surface and the lower surface of the main body 30, similarly to the lower end surface of the lower protrusion 52. The upper end surface of the vertical regulating rib 55 is formed at a position where the inner diameter of the insertion recess 54 is the same as the outer diameter of the lower end surface of the lower protrusion 52. In addition, since the thickness of the vertical regulation rib 55 is increased, the thickness can be appropriately removed. In the drawing, the vertical regulating rib 55 is thinned in a cross shape, but the shape of the thinning is not limited and can be set as appropriate.

  The lower protrusion 52 and the upper protrusion 53 are formed with through-holes 56 that vertically penetrate the centers of the lower protrusion 52 and the upper protrusion 53. The through hole 56 is formed in a straight line that passes through the radial center axis of the lower protrusion 52 and the insertion recess 54. For this reason, when the lower protrusion 52 of the support jig 5 disposed on the upper side is inserted into the insertion recess 54 of the support jig 5 disposed on the lower side, the outer peripheral surface 52a of the lower protrusion 52 is In a state of being fitted into the inner peripheral surface 54a, the lower end surface of the lower protruding portion 52 is placed on the upper end surface of the vertical regulation rib 55, and is disposed below the through hole 56 of the support jig 5 disposed on the upper side. The support jig 5 and the through hole 56 are arranged in a straight line.

  The support jig 5 configured in this way is, for example, a thermoplastic resin such as polyacetal, polycarbonate, polybutylene terephthalate, polybutylene naphthalate, polyetheretherketone, polyetherimide, cycloolefin polymer, polyester-based, It can be formed from a thermoplastic elastomer such as polystyrene or polyolefin. In addition, additives such as carbon black and carbon nanotubes can be appropriately added to these resins in order to impart conductivity. In order to improve rigidity, glass fiber may be added, and in order to improve slidability, mica, fluorine resin, or the like may be added.

  Next, a method for attaching the support jig 5 to the container body 3 will be described.

  FIG. 10 is a front view of the support jig laminate. FIG. 11 is a front view of the container main body in which the support jig laminate is inserted. 12 is a cross-sectional view taken along line XII-XII shown in FIG. FIG. 13 is a cross-sectional side view of a container body in which a support jig laminate is fixed by a shaft. FIG. 14 is an upper cross-sectional view of a container body in which a support jig laminate is fixed by a shaft. FIG. 15 is a lower cross-sectional view of the container body in which the support jig laminate is fixed to the shaft.

  First, as shown in FIG. 10, a support jig laminate S in which a plurality of support jigs 5 are laminated is assembled. In the stacking of the support jig 5, the pair of lower protrusions 42 of the support jig 5 arranged on the upper side is inserted into the pair of insertion recesses 44 of the support jig 5 arranged on the lower side, and arranged on the upper side. This is done by inserting the pair of lower protrusions 52 of the support jig 5 into the pair of insertion recesses 54 of the support jig 5 arranged on the lower side. Then, the lower end surface of the lower protrusion 42 is placed on the upper end surface of the vertical regulating rib 45 with the outer peripheral surface 42a of the lower protrusion 42 fitted in the inner peripheral surface 44a of the insertion recess 44, and The through hole 46 of the support jig 5 to be arranged and the through hole 46 of the support jig 5 arranged on the lower side are arranged in a straight line. In addition, with the outer peripheral surface 52a of the lower protruding portion 52 fitted into the inner peripheral surface 54a of the insertion recess 54, the lower end surface of the lower protruding portion 52 is placed on the upper end surface of the vertical regulating rib 55 and The through hole 56 of the support jig 5 to be arranged and the through hole 56 of the support jig 5 arranged on the lower side are arranged in a straight line.

  Next, as shown in FIG. 11, the support jig laminate S is inserted into the container body 3 from the opening 6. At this time, the container main body 30 is slightly lifted so that the main body 30 of each support jig 5 constituting the support jig laminated body S does not hit the opening-side front / rear regulating rib 14 and the back-side front / rear regulating rib 15. 3 is inserted inside. Then, as shown in FIG. 12, when the support jig laminate S is inserted into the container body 3, the support jig laminate S is lowered, and the opening side front and rear restriction ribs 14 and the back side front and rear restriction ribs 15 are moved. The front side front and rear restricting recess 33 and the rear side front and rear restricting recess 34 are fitted. Then, in plan view, the through holes 46 of the support jigs 5 are overlapped with the front fixing holes 11 of the container body 3 so that the front fixing holes 11 and the through holes 46 of all the support jigs 5 are arranged in a straight line. The through holes 56 of the support jigs 5 are overlapped with the rear fixing holes 12 of the container body, and the rear fixing holes 12 and the through holes 56 of all the support jigs 5 are arranged in a straight line. Thereby, the positioning in the Y direction of the support jig laminated body S with respect to the container main body 3 is performed. Then, by placing the support jig laminate S on the bottom wall 7a of the container body 3, the support jig laminate S is positioned in the Z direction with respect to the container body 3.

  Next, as shown in FIG. 12, the shaft 60 is inserted through the front side fixing hole 11 and the rear side fixing hole 12 and the through hole 46 and the through hole 56 of each support jig 5 constituting the support jig laminated body S. The shaft 60 is inserted by inserting the shaft 60 from the outside of the container body 3 into the front fixing hole 11 and the rear fixing hole 12. Thereby, positioning in the X direction and the Y direction of the support jig laminated body S with respect to the container main body 3 is performed.

  The shaft 60 is a rod-like member having male screws engraved at the upper end and the lower end. The length of the shaft 60 protrudes upward from the through hole 46 and the through hole 46 formed in the uppermost support jig 5 when the support jig laminated body S is laminated on the bottom wall 7 a of the container body 3. The dimensions are such that they protrude downward from the front side fixing hole 11 and the rear side fixing hole 12 formed in the container body 3. The shaft 60 configured as described above can be formed from, for example, a highly rigid thermoplastic resin such as polyether ether ketone, polycarbonate, polybutylene terephthalate, or liquid crystal polymer, or a metal such as aluminum or SUS. When the shaft 60 is made of metal, the surface is preferably covered with a resin layer.

  Then, when the shaft 60 is inserted through the through holes 46 and the through holes 56 of all the support jigs 5 constituting the support jig laminate S, as shown in FIG. 14, the through holes formed in the uppermost support jig 5 are formed. The nut 61 is tightened to the upper end portion of the shaft 60 protruding upward from the hole 46 and the through hole 46, and as shown in FIG. 15, downward from the front fixing hole 11 and the rear fixing hole 12 formed in the container body 3. A nut 62 is tightened to the lower end of the protruding shaft 60. At this time, from the viewpoint of improving the sealing performance of the container body 3, it is preferable to dispose a sealing member such as an O-ring around the front side fixing hole 11 and the rear side fixing hole 12. The arrangement position of the O-ring includes, for example, between the bottom wall 7a of the container body 3 and the nut 62, between the front fixing hole 11 and the rear fixing hole 12, and the shaft 60.

  Then, since the support jig laminated body S and the bottom wall 7a of the container main body 3 are clamped by the nut 61 and the nut 62 attached to the upper end part and lower end part of the shaft 60, the support jig laminated body S becomes the container main body. 3 is fixed. Thereby, attachment of the support jig laminated body S with respect to the container main body 3 is complete | finished.

  When a thin plate substrate is stored in the thin plate container 1, first, the thin plate substrate is placed on each support jig 5. Next, the lid 4 is fitted into the opening 6 of the container body 3, and the gap between the opening 6 and the lid 4 is sealed by the seal member 21. Next, the lid 4 is locked to the container body 3 by the locking mechanism 22. Thereby, the thin plate-like substrate is sealed in the thin plate container 1.

  As described above, according to the thin plate container 1 according to the present embodiment, the support jig 5 is formed with the front connection part 40 and the rear connection part 50 so that the support jig 5 is vertically stacked. The laminated body S can be formed, and the through hole 46 and the through hole 56 formed in each support jig 5 constituting the support jig laminated body S and the front side fixing hole 11 and the rear side fixing hole formed in the container body 3. 12, the support jig laminate S can be positioned with respect to the container body 3 by inserting the shaft 60 into the container body 12. The support jig laminated body S can be fixed. For this reason, the support jig 5 can be easily and reliably attached to the container body 3.

  Further, by forming the lower protrusion 42, the lower protrusion 52, the insertion recess 44, and the insertion recess 54 in the front connection portion 40 and the rear connection portion 50, positioning between the support jigs 5 arranged above and below can be performed. It can be done easily. Moreover, by forming the lower protrusion 42 and the lower protrusion 52, the insertion recess 44 and the insertion recess 54 in a truncated cone shape, the lower protrusion 42 and the lower protrusion of the support jig 5 disposed on the upper side. Since 52 is inserted so that it may be guided by the insertion recessed part 44 and the insertion recessed part 54 of the support jig 5 arrange | positioned below, the several support jig 5 can be laminated | stacked easily.

  Further, by providing the insertion recess 44 and the insertion recess 54 with the vertical regulation rib 45 and the vertical regulation rib 55, the interval between the support jigs 5 arranged above and below is adjusted by the height of the vertical regulation rib 45 and the vertical regulation rib 55. be able to. For this reason, it is also possible to easily arrange the support jig 5 at the same height as the thin plate support shelf in the conventional storage container.

  Further, the support body 5 is supported by forming the opening side front / rear restricting rib 14 and the back side front / rear restricting rib 15 on the container body 3 and forming the front side front / rear restricting recess part 33 and the rear side front / rear restricting recessed part 34 on the support jig 5. The jig 5 can be easily positioned in the front-rear direction.

  In addition, by forming the main body 30 of the support jig 5 in a U shape, the inner diameter of the main body 30 is reduced, and the distance from the center of the thin plate to the position where the main body 30 supports the thin plate is reduced. The thin plate can be smoothly put in and out of the container main body 3 without the conveying device that conveys the main body 30 interfering with it.

[Second Embodiment]
Next, a thin plate container according to the second embodiment will be described. The thin plate storage container 1 according to the first embodiment directly stacks support jigs arranged vertically, but the thin plate storage container according to the second embodiment is arranged vertically via an auxiliary member. The support jig to be used is indirectly laminated. Further, the thin plate container 1 according to the first embodiment fixes the support jig laminated body only to the bottom wall of the container main body, but the thin plate container according to the second embodiment does not support the support jig laminate. The body is fixed to the bottom wall and the top wall of the container body. Since the thin plate container according to the second embodiment is basically the same as the thin plate container 1 according to the first embodiment, in the following description, the thin plate container 1 according to the first embodiment. Only the configuration that is different from the first embodiment will be described, and the description of the same configuration as the thin plate container 1 according to the first embodiment will be omitted.

  FIG. 16 is a cross-sectional view of a thin plate container according to the second embodiment. FIG. 17 is a cross-sectional view of the thin plate container in the line XVII-XVII in FIG. FIG. 18 is a partially enlarged view showing a lower part of the support jig laminate. FIG. 19 is a partially enlarged view showing the upper part of the support jig laminate.

  As shown in FIGS. 16 to 19, the thin plate storage container 101 according to the second embodiment includes a container body 103 corresponding to the container body 3 of the first embodiment and the support jig 5 of the first embodiment. A corresponding support jig 105, and an intermediate auxiliary member 106 interposed between the support jigs 105 arranged above and below, and a support jig 105 and a bottom wall 7 a of the container body 103. A lower auxiliary member 107 to be inserted, and an upper auxiliary member 108 inserted between the support jig 105 and the top wall 7d of the container main body 103 are provided.

  The container main body 103 is not formed with front / rear restricting ribs corresponding to the opening-side front / rear restricting ribs 14 and the back-side front / rear restricting ribs 15 formed in the container main body 3 of the first embodiment. The container body 103 has a pair of front side fixing holes 111 and a pair of rear side fixing holes 112 formed in the top wall 7d. The pair of front-side fixing holes 111 and the pair of rear-side fixing holes 112 formed in the top wall 7d are positioned so as to face the pair of front-side fixing holes 11 and the rear-side fixing holes 12 formed in the bottom wall 7a in the vertical direction. Is formed.

  The support jig 105 does not have the front / rear restricting recesses corresponding to the front / rear restricting recesses 33 and the rear front / rear restricting recesses 34 formed in the support jig of the first embodiment. The support jig 105 includes a pair of front connection parts 140 and a pair of rear connection parts corresponding to the pair of front connection parts 40 and the pair of rear connection parts 50 formed in the support jig 105 of the first embodiment. 150 is formed.

  The front connection part 140 and the rear connection part 150 are respectively protruded upward from the upper surface of the main body 30 and the lower protrusion 142 and the lower protrusion 152 that protrude downward from the lower surface of the main body 30. An upper protrusion 143 and an upper protrusion 153 are formed. Moreover, the front side connection part 140 and the rear side connection part 150 are each formed with a through-hole penetrating vertically through the centers of the front side connection part 140 and the rear side connection part 150.

  The lower protrusion 142 and the lower protrusion 152 are formed with an insertion recess 144 and an insertion recess 154 into which the intermediate auxiliary member 106 is inserted from below, and the upper protrusion 143 and the upper protrusion 153 are intermediate from above. An insertion recess 145 and an insertion recess 155 into which the auxiliary member 106 is inserted are formed. The insertion recess 144, the insertion recess 145, the lower protrusion 152, and the upper protrusion 153 are all formed in the same shape as the insertion recess 44 and the insertion recess 54 of the first embodiment, and face the depth direction. Thus, it is formed in a concave truncated cone shape with a small diameter (tapered). Similarly to the first embodiment, the insertion recess 144, the insertion recess 145, the lower protrusion 152, and the upper protrusion 153 include a vertical restriction rib 146 and a vertical restriction rib that restrict the insertion amount of the intermediate auxiliary member 106. 147, vertical regulation ribs 156, and vertical regulation ribs 157 are formed.

  The intermediate auxiliary member 106 includes a lower insertion portion 161 that protrudes downward and is inserted into the insertion recess 145 and the insertion recess 155, and an upper insertion portion 162 that protrudes upward and is inserted into the insertion recess 144 and the insertion recess 154. , Is formed. Each of the lower insertion portion 161 and the upper insertion portion 162 is formed in the same shape as the lower protrusion 42 and the lower protrusion 52 of the first embodiment, and the diameter becomes narrower in the protrusion direction. It is formed in a convex truncated cone shape (tapering).

  The lower auxiliary member 107 includes an upper insertion portion 171 that protrudes upward and is inserted into the insertion recess 144 and the insertion recess 154, and a lower contact that is disposed on the lower side and contacts the bottom wall 7 a of the container body 103. And a contact portion 172. The upper insertion portion 171 is formed in the same shape as the lower protruding portion 42 and the lower protruding portion 52 of the first embodiment, and has a convex cone whose diameter becomes smaller (tapered) in the protruding direction. It is formed in a trapezoidal shape. The lower contact portion 172 is formed in an inverted T-shaped cross section so that the contact area with the bottom wall 7a of the container body 103 is increased.

  The upper auxiliary member 108 has a lower insertion portion 145 that projects downward and is inserted into the insertion recess 145 and the insertion recess 155, and an upper contact that is disposed on the upper side and contacts the top wall 7 d of the container body 103. Part 182 is formed. The lower insertion portion 181 is formed in the same shape as the lower protrusion 42 and the lower protrusion 52 of the first embodiment, and has a convex shape that becomes thinner (tapered) in the protruding direction. It is formed in a truncated cone shape. The upper contact portion 182 is formed in a T-shaped cross section so that the contact area with the top wall 7d of the container body 103 is increased.

  Next, a method for attaching the support jig 105 to the container body 103 will be described.

  First, as shown in FIGS. 18 and 19, a support jig laminate S in which a plurality of support jigs 105 are laminated is assembled. In the stacking of the support jig 105, first, the lower insertion portion 161 of the intermediate auxiliary member 106 is inserted into the insertion concave portion 145 and the insertion concave portion 155 of the support jig 105 arranged on the lower side, and the upper insertion of the intermediate auxiliary member 106 is inserted. The portion 162 is inserted into the insertion concave portion 144 and the insertion concave portion 154 of the support jig 105 disposed on the upper side, and the support jigs 105 adjacent to each other in the vertical direction are stacked via the intermediate auxiliary member 106. When all the support jigs 105 are stacked through the intermediate auxiliary member 106, the upper insertion part 171 of the lower auxiliary member 107 is inserted into the insertion concave part 144 and the insertion concave part 154 of the support jig 105 arranged at the lowest level. At the same time, the lower insertion portion 181 of the upper auxiliary member 108 is inserted into the insertion recess 145 and the insertion recess 155 of the support jig 105 arranged at the uppermost stage. As a result, the stacking of the support jig laminate S was completed, and the through holes formed in all the support jigs 105, the through holes formed in all the intermediate auxiliary members 106, and the lower auxiliary members 107 were formed. The through hole and the through hole formed in the upper auxiliary member 108 are arranged on a straight line. At this time, as the intermediate auxiliary member 106, a member having a height at which the interval between the support jigs 105 adjacent in the vertical direction is set is used. Further, the lower auxiliary member 107 and the upper auxiliary member 108 mount the support jig stack S on the bottom wall 7a of the container body 103, and support jig 105, intermediate auxiliary member 106, lower auxiliary member 107, and upper auxiliary member. The through holes formed in the member 108 are connected to the front fixing hole 11 and the rear fixing hole 12 formed in the bottom wall 7a of the container main body 103, and the front fixing hole 111 and the rear fixing hole 12 formed in the top wall 7d of the container main body 103. When overlapped with the side fixing hole 112, the lower contact portion 172 of the lower auxiliary member 107 contacts the bottom wall 7a of the container body 103, and the upper contact portion 182 of the upper auxiliary member 108 functions as the container body. The thing of the height contact | abutted to the top wall 7d of 103 is used.

  Next, as shown in FIG. 17, the support jig laminate S is inserted into the container body 103 through the opening 6, and the support jig 105, the intermediate auxiliary member 106, the lower auxiliary member 107, and the upper auxiliary member 108 are inserted. The formed through holes are divided into front fixing holes 11 and rear fixing holes 12 formed in the bottom wall 7a of the container main body 103, and front fixing holes 111 and rear fixing holes formed in the top wall 7d of the container main body 103. 112. Accordingly, the lower contact portion 172 of the lower auxiliary member 107 contacts the bottom wall 7a of the container main body 103, and the upper contact portion 182 of the upper auxiliary member 108 contacts the top wall 7d of the container main body 103.

  Next, the shaft 60 is inserted into the container main body 103 from the front side fixing hole 11 and the rear side fixing hole 12 or from the front side fixing hole 111 and the rear side fixing hole 112. The shaft 60 has a length that penetrates the container main body 103 and protrudes downward from the front fixing hole 11 and the rear fixing hole 12 and protrudes upward from the front fixing hole 111 and the rear fixing hole 112. Then, when the shaft 60 is passed through the container body 103, the support jig laminate S is positioned in the X direction and the Y direction with respect to the container body 103.

  Next, as shown in FIG. 16, the nut 61 is tightened to the lower end portion of the shaft 60 protruding from the front side fixing hole 11 and the rear side fixing hole 12, and the shaft 60 protruding from the front side fixing hole 111 and the rear side fixing hole 112. Tighten the nut 62 to the lower end of the nut. Then, since the bottom wall 7a of the container main body 103 and the top wall 7d of the container main body 103 are sandwiched by the nut 61 and the nut 62 attached to the upper end portion and the lower end portion of the shaft 60, the support jig laminate S is formed. Fixed to the container body 103. Thereby, attachment of the support jig laminated body S with respect to the container main body 103 is complete | finished.

  As described above, if the support jigs 105 that are vertically adjacent to each other are stacked via the intermediate auxiliary member 106, the height of the intermediate auxiliary member 106 is changed to easily adjust the interval between the support jigs 105 adjacent to each other in the vertical direction. can do.

  Further, the insertion recess 144 and the insertion recess 154 and the insertion recess 145 and the insertion recess 155 are formed in the lower protrusion 142 and the lower protrusion 152, and the intermediate auxiliary member 106 is inserted into the insertion recess 144 and the insertion recess 154. By forming the lower insertion portion 162 and the insertion recess 145 and the upper insertion portion 161 to be inserted into the insertion recess 155, positioning between the support jigs 105 arranged above and below can be easily performed. In addition, by forming these into a concave frustoconical shape and a convex frustoconical shape, the insertion concave portion 144 and the insertion concave portion 154 are inserted so that the lower insertion portion 162 is guided and the insertion concave portion 145. And since it inserts so that the upper insertion part 161 may be guided to the insertion recessed part 155, the some support jig | tool 105 can be laminated | stacked easily.

  Further, if the lower auxiliary member 107 is arranged below the support jig 105 arranged at the lowermost stage and the upper auxiliary member 108 is arranged above the support jig 105 arranged at the uppermost stage, the lower auxiliary member By changing the heights of 107 and the upper auxiliary member 108, the support jig stack S can be brought into contact with both the bottom wall 7 a and the top wall 7 d of the container body 103. Thereby, fixation of the support jig laminated body S with respect to the container main body 103 can be performed easily.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.

  For example, in the first embodiment, the protrusion of the support jig has been described as protruding downward. For example, as in the support jig 70 illustrated in FIG. 20, the connection portion 71 in which the through hole 76 is formed. It is good also as what protruded the protrusion part to the upper side. In this case, the connecting portion 71 includes an upper protruding portion 72 protruding upward and a lower protruding portion 73 protruding downward, and the lower protruding portion 73 includes a support jig 70 disposed on the lower side. An insertion recess 74 into which the upper projection 72 is inserted is formed. Inside the insertion recess 74, a vertical regulation rib 75 that regulates the amount of insertion of the upper projection 72 is provided. Even if comprised in this way, there can exist an effect similar to 1st Embodiment.

  Further, in the first embodiment, it has been described that the protrusion is formed in a truncated cone shape and the insertion recess is formed in a truncated cone shape, but this shape is not particularly limited. Various shapes can be used. For example, the protruding portion may be formed in a polygonal convex shape, and the insertion concave portion may be formed in a polygonal concave shape. Further, the protrusion and the insertion recess need not necessarily be inclined.

  In the first and second embodiments, the insertion recess is formed in the upper protrusion. However, the insertion recess may be formed without providing the upper protrusion.

  In the first embodiment and the second embodiment, the connecting portion formed on the support jig has been described as two places on the front side of the support jig, two places on the rear side, a total of four places, The number and arrangement of the container body 3 are not particularly limited as long as the container body 3 can be positioned and fixed. For example, two locations on the front side of the support jig and one location on the rear side may be provided, for a total of three locations.

  Moreover, in 1st Embodiment and 2nd Embodiment, although the fixing member demonstrated as what was a nut fastened by the upper end part and lower end part of a shaft, it is in the rod-shaped member inserted in a fixing hole and a through-hole. Any device may be used as long as it can be attached to sandwich the container body and the support jig. For example, when a bolt-shaped member having a head formed at one end is adopted as the rod-shaped member, a nut that is fastened only to the other end of the rod-shaped member may be used.

  In the first embodiment, the shaft is described as being inserted only through the bottom wall of the container body. However, as in the second embodiment, a fixing hole is formed in the top wall of the container body, and this through hole is formed. Alternatively, the shaft may be inserted. In this case, a nut is fastened to the middle portion of the shaft protruding upward from the through hole formed in the uppermost support jig, and the nut is attached to the lower end portion of the shaft protruding downward from the fixing hole formed in the bottom wall of the container body. And tighten the nut on the upper end of the shaft protruding upward from the fixing hole formed in the top wall of the container body. Thereby, the fixed strength of the support jig assembly can be significantly improved.

  Moreover, in 1st Embodiment, although it did not mention in particular about the number of front-and-rear control ribs, only 1 step | paragraph may be sufficient and the number of lamination | stacking of a support jig laminated body may be sufficient. Further, the front / rear regulating rib itself may not be provided. When only one level of the front / rear regulating rib is provided, it is preferable to provide it at the height position of the support jig arranged at the center stage or the uppermost stage of the support jig laminate.

  In the first embodiment, the front-side front / rear restricting concave portion 33 and the rear-side front / rear restricting concave portion 34 are described as being formed in the arc-shaped support surface portion 31 and the linear support surface portion 32, but only the linear support surface portion 32. Alternatively, it may be formed only on the arcuate support surface portion 31.

  In the first embodiment, the arcuate support surface 31 of the support jig 5 has been described as being semicircular, but the outer shape of the arcuate support surface 31 is not necessarily arcuate. It can be changed as appropriate as long as it does not interfere with the inner wall of the main body 3.

  Moreover, in 2nd Embodiment, although the insertion recessed part was demonstrated in the lower side protrusion part 142 and the lower side protrusion part 152 of the front side connection part 140 and the rear side connection part 150, it showed, for example in FIG. As described above, the projecting portions 192 and 193 formed in a tapered shape are provided on the upper and lower surfaces of the connecting portion 191 formed in the support jig 190, and the tapered shape is formed on the upper and lower surfaces of the intermediate auxiliary member 194. An insertion recess 195 and an insertion recess 196 into which the protrusion 192 and the protrusion 193 are inserted may be formed. Even if comprised in this way, there can exist an effect similar to 2nd Embodiment.

  In the second embodiment, the lower auxiliary member 107 and the upper auxiliary member 108 have been described as bringing the support jig stack S into contact with the bottom wall 7a and the top wall 7d of the container body 103. A cylindrical boss having the same shape as the lower auxiliary member 107 is formed on the bottom wall 7a of the container main body 103, and a cylindrical shape similar to the upper auxiliary member 108 is formed on the top wall 7d of the container main body 103. The boss may be formed.

  Further, the support jig 5 of the second embodiment and the support jig 190 shown in FIG. 21 may be alternately disposed, and the support jigs may be stacked by fitting these connecting portions together.

  Further, the arc-shaped support surface portion 31 and the linear support surface portion 32 may be appropriately hollowed from the viewpoint of weight reduction. In this case, it is preferable that the thinning is formed in a portion excluding the inner edge of the arc-shaped support surface portion 31 and the linear support surface portion 32 so that the thin plate substrate can be supported at a position close to the center.

DESCRIPTION OF SYMBOLS 1 ... Thin plate storage container, 3 ... Container main body, 4 ... Cover body, 5 ... Support jig, 6 ... Opening part, 7a ... Bottom wall, 7b ... Inner side wall, 7c ... Rear side wall, 7d ... Top wall, 8 ... Bottom plate , 9 ... Robotic flange, 11 ... Front side fixing hole (fixing hole), 12 ... Rear side fixing hole (fixing hole), 13 ... Front and rear restriction ribs, 14 ... Opening side front and rear restriction ribs (front and rear restriction ribs), 15 ... Back Side front / rear restricting rib (front / rear restricting rib), 21 ... sealing member, 22 ... locking mechanism, 30 ... main body, 31 ... arc-shaped support surface, 32 ... linear support surface, 33 ... front front / rear restricting recess (front / rear restricting recess) , 34 ... rear front and rear restricting recesses (front and rear restricting recesses), 40 ... front connecting part (connecting part), 41 ... connecting plate part, 42 ... lower projecting part (projecting part), 42a ... outer peripheral surface, 43 ... upper projecting part 44, insertion recess, 44a ... inner peripheral surface, 45 ... vertical regulating rib, 46 ... penetrating Hole: 50 ... rear side connection part (connection part), 51 ... connection plate part, 52 ... lower side protrusion part (protrusion part), 52a ... outer peripheral surface, 53 ... upper side protrusion part, 54 ... insertion concave part, 54a ... inner periphery Surface 55, vertical regulation rib 56, through hole 60 shaft (bar-shaped member) 61 nut (fixing member) 62 nut (fixing member) 70 support jig 71 71 connecting portion 72 upper side Projection, 73 ... Lower projection, 74 ... Insertion recess, 75 ... Up / down regulation rib, 76 ... Through hole, 101 ... Thin plate container, 103 ... Container body, 105 ... Support jig, 106 ... Intermediate auxiliary member, 107 ... Lower auxiliary member, 108 ... upper auxiliary member, 111 ... front side fixing hole (fixing hole), 112 ... rear side fixing hole (fixing hole), 140 ... front side connecting part, 142 ... lower side protruding part (protruding part), 143 ... Upper protrusion (protrusion), 144 ... insertion recess, 1 5 ... Insertion recess, 146 ... Vertical regulation rib, 147 ... Vertical regulation rib, 150 ... Rear connection part, 152 ... Lower projection, 153 ... Upper projection, 154 ... Insertion recess, 155 ... Insertion recess, 156 ... Vertical Restriction ribs, 157... Vertical restriction ribs, 161 .. Lower insertion part, 162... Upper insertion part (protrusion part), 171... Upper insertion part (protrusion part), 172. , 182 ... Upper contact part, 190 ... Support jig, 191 ... Connection part, 192 ... Projection part, 193 ... Projection part, 194 ... Intermediate auxiliary member, 195 ... Insertion recess, 196 ... Insertion recess, S ... Support jig laminate .

Claims (9)

A container body having an opening and a fixing hole formed in the bottom wall;
A support jig comprising a main body for supporting a thin plate;
A thin plate container,
The support jig includes a connecting portion that is disposed on the outer peripheral edge of the main body and has a through-hole that is vertically penetrated.
A rod-shaped member that connects the support jig and the container main body while connecting the support jig that is inserted through the fixing hole and the through-hole and arranged vertically.
A fixing member attached to the rod-shaped member and sandwiching the container body and the support jig;
A thin plate container. The connecting portion is formed with a protruding portion that protrudes to one of the upper side and the lower side, and an insertion concave portion into which the protruding portion of the support jig disposed on the other of the upper side and the lower side is inserted. ing,
The thin plate container according to claim 1. The protrusion is formed in a convex shape whose diameter decreases toward the protrusion direction,
The insertion concave portion is formed in a concave shape whose diameter decreases in the depth direction.
The thin plate container according to claim 2. The insertion recess is provided with a vertical regulation rib that regulates the insertion amount of the protrusion.
The thin plate container according to claim 2 or 3. A pair of inner side walls of the container main body is formed with front and rear restricting ribs protruding toward the opposed inner side walls,
The main body portion is formed with a front / rear restricting recess to be fitted to the front / rear restricting rib.
The thin plate container according to any one of claims 1 to 4. Further comprising an intermediate auxiliary member fitted to the connecting portion of the support jig disposed above and below,
The intermediate auxiliary member has a through-hole through which the rod-shaped member is inserted, and the upper surface of the intermediate auxiliary member is fitted to the lower surface of the connecting portion of the support jig disposed on the upper side, The lower surface of the auxiliary member is fitted to the upper surface of the connecting portion of the support jig disposed on the lower side.
The thin plate container according to claim 1. A protruding portion that protrudes to any one of the connecting portion and the intermediate auxiliary member is formed,
An insertion recess into which the protrusion is inserted is formed on the other of the connecting portion and the intermediate auxiliary member,
The thin plate container according to claim 6. A lower auxiliary member fitted from the lower side to the connecting portion of the support jig arranged at the lowermost level, and an upper auxiliary member fitted from the upper side to the connecting portion of the support jig arranged at the uppermost level Prepare
The thin plate container according to claim 6 or 7. The main body is formed in a U-shaped plate shape,
The thin plate container according to any one of claims 1 to 8.

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