JP2011103391A - Substrate housing container and support member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a support member, capable of being mounted in a container body, improving dimensional accuracy of a substrate support parts, and suppressing deflection of the substrates supported by the substrate support parts, and to provide a substrate housing container with the support member. <P>SOLUTION: The substrate housing container includes: a container body having an opening and housing a plurality of substrates; a lid for closing the opening of the container body; a pair of support members 5 installed on the inner surface of the container body and supporting the substrates; and support columns 51A, 51B for fixing the support members to the container body. Each support member 5 has a plurality of support pieces 61, each capable of laying a substrate thereon. Each of the support columns 51A, 51B has a plurality of shelves 52 that hold the support pieces 61 at predetermined intervals, while each support piece 61 fits between the shelves 52. Thereby, since the support pieces 61 and the support columns 51A, 51B are formed as separate members from each other, molding of the support pieces 61 becomes easy, and dimensional accuracy thereof can be improved. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a substrate storage container that stores precision substrates such as semiconductor wafers, glass wafers, mask glasses, etc., and is used for transportation, transportation, storage, etc., and more particularly to the structure of a substrate support portion provided in a container body. is there.

  2. Description of the Related Art Conventionally, there is a substrate storage container 1 including a container main body having an opening on the front surface and a lid that closes the opening of the container main body 2 so as to be sealable. For example, Patent Document 1 describes a support structure for a substrate storage container that stores a substrate having a diameter of 300 mm. In the substrate support structure described in Patent Document 1, a shelf-like support portion protruding from the inner wall of the container body is formed from the front opening side to the back.

  In recent years, semiconductor components have been miniaturized and wiring pitches have been reduced, and semiconductor components that are smaller and thinner than conventional ones have been produced. Therefore, back grinding is performed to make the semiconductor wafer thinner (100 μm or less). In some cases, such a thin substrate is stored in the substrate storage container.

  In addition, in semiconductor parts, competition for cost and market share is intensifying. In response, the movement to increase the diameter of precision substrates and reduce costs continues. In the case of semiconductor wafers, the mainstream is the one with a diameter of 300 mm. However, studies have started to further increase production efficiency by setting this to 450 mm.

  For this reason, a substrate storage container for storing a substrate such as a semiconductor wafer also needs to be a container having a large size in accordance with a large-diameter substrate to be stored. Further, since a substrate having a large diameter or being back-ground and thinned is easily bent, a substrate storage container having a substrate support structure capable of safely supporting the easily bent substrate is required.

JP 2003-324327 A

  When a substrate thinly formed by back grinding or a substrate having a large diameter is stored as it is, the substrate is flexed so that loading and unloading by a substrate take-out machine for taking out the substrate becomes difficult. Therefore, it is required to support the substrate with high positional accuracy. Moreover, when holding said board | substrate, there exists a possibility that it may become easy to be damaged by the vibration and impact at the time of transportation.

  In order to support the substrate by reducing the deflection of the substrate, it is important which part of the substrate is supported. Usually, since the peripheral part of the substrate on the opening side is far from the support part, the deflection becomes large. Therefore, in order to reduce the deflection at the peripheral edge portion of the substrate on the opening side, it is necessary to support the substrate portion on the opening side as much as possible. However, in this case, the support portion protrudes greatly from the inner surface of the side wall of the container body. Therefore, the support part itself, especially the shelf part extended in a horizontal direction becomes easy to change at the time of shaping | molding, and the problem that a dimensional accuracy falls arises. In the case of a substrate having a large diameter of 450 mm, the weight of the substrate also increases, and it is conceivable that the shelf (supporting portion) that protrudes greatly from the side wall is bent due to the weight of the substrate.

  The present invention can be mounted on a container body, can improve the dimensional accuracy of the substrate support portion, can suppress the deflection of the substrate supported by the substrate support portion, and the substrate storage provided with the support member The purpose is to provide a container.

  A substrate storage container according to the present invention includes a container main body having an opening for storing a substrate, a lid for closing the opening of the container main body, a support member provided on the inner surface of the container main body for supporting the substrate, and the support member for the container. A substrate storage container having a fixing portion for fixing to a main body, wherein the support member has a plurality of support pieces on which a substrate can be placed, and the fixing portion holds a plurality of holding plates for holding the support pieces at a predetermined interval. And the support piece is fitted between the sandwiching plates.

  In such a substrate storage container, a plurality of support pieces on which a substrate can be placed are provided, and the plurality of support pieces are fitted into the fixing portion. Thereby, since the several support piece is formed as a member different from a fixing | fixed part, shaping | molding of a support piece becomes easy and a dimensional accuracy can be improved. As a result, bending of the substrate supported by the support piece can be suppressed. That is, it is possible to realize a substrate support structure that can support a substrate with an increased size and a reduced thickness, while suppressing the bending of the substrate. Further, since the support piece is a separate member from the fixed part, the support piece and the fixed part can be formed of different materials.

  Further, in the present invention, since the support pieces are sandwiched between the support plates at a predetermined interval and supported without contacting the support pieces, a large dimensional error occurs due to accumulation of dimensional errors and deformations of the support pieces. Is prevented. Thereby, a board | substrate can be supported with a dimensional accuracy compared with a prior art. For example, when the base end side of the support piece is connected in the vertical direction, when it is molded as a single piece, contraction deformation occurs so that the front end side of the support piece is inclined downward, and the pitch accuracy of the support piece is ensured. Is difficult. In the present invention, since a plurality of support pieces are formed as separate members and the support pieces are fixed by a pair of sandwiching plates, shrinkage deformation is prevented by improving the rigidity of the sandwiching plates, and the pitch accuracy of the support pieces is improved. Ensuring can be facilitated.

  Here, the support piece has a plurality of insertion pieces that are formed with positioning inclined surfaces and are fitted into the locking portions of the fixing portion, and the fixing portion has a fixed groove into which the insertion piece is inserted. It is preferable that they are formed at intervals. As a result, the support piece can be fitted into the locking portion with high position accuracy, and the position accuracy of the substrate supported by the support piece can be improved. As a result, errors during substrate loading and unloading can be prevented, and substrate damage can be prevented.

  In addition, it is preferable that the fixing portion includes a support member that is a separate member from the container body, and a plurality of support members are provided apart from each other in the front-rear direction. Thereby, a support | pillar member and a support piece can be formed as a separate member. Moreover, since the plurality of support members are provided apart from each other in the front-rear direction, the support piece can be fixed by being sandwiched from both sides by the pair of support members.

  Moreover, it is preferable that the support | pillar member is formed from the highly rigid material whose rigidity is higher than a support piece. Moreover, it is preferable that the support | pillar member is formed with the metal material selected from aluminum, an aluminum alloy, and a magnesium alloy as a highly rigid material. As a result, the rigidity of the support member can be improved, the substrate can be prevented from being bent, and the substrate can be reliably supported.

  Moreover, it is preferable that the coating process is applied to the surface of the support | pillar member formed from the metal material. Thus, it becomes possible to prevent generation | occurrence | production of a particle by performing a coating process on the surface.

  The support member for a substrate storage container according to the present invention is a support member that is attached to the inner surface of a container body that stores a substrate and supports the substrate, and includes a plurality of support pieces on which the substrate is placed and a plurality of support members. A pair of support members that fix the pieces in the vertical direction at regular intervals, and the support pieces are provided with a plurality of insertion pieces that are inserted into the support members, and the support members are provided with predetermined insertion pieces. It is preferable that the latching | locking part supported by a space | interval is provided.

  In such a support member for a substrate storage container, a plurality of support pieces on which a substrate can be placed are provided, and the plurality of support pieces are fitted into the column members. In the support member, since the plurality of support pieces and the support member are formed as separate members, the support piece can be easily molded and the dimensional accuracy can be improved. As a result, bending of the substrate supported by the support piece can be suppressed. That is, it is possible to realize a substrate support structure that can support a substrate with an increased size and a reduced thickness, while suppressing the bending of the substrate. Further, since the support piece is a separate member from the support member, the support piece and the support member can be formed of different materials. For example, it is preferable to form the column member with a highly rigid material having higher rigidity than the support piece.

  According to the present invention, the dimensional accuracy of the support piece is improved, and the substrate can be supported with high positional accuracy in response to the increase in the substrate size. As a result, substrate loading and unloading errors and substrate damage can be prevented.

It is a disassembled perspective view of the board | substrate storage container which concerns on 1st Embodiment of this invention. It is a disassembled perspective view of the board | substrate support member which concerns on 1st Embodiment of this invention. It is a perspective view which shows the support | pillar member which concerns on 1st Embodiment of this invention. It is a perspective view which shows the support piece which concerns on 1st Embodiment of this invention. It is a perspective view which shows the opening side of the supporting member which concerns on 1st Embodiment of this invention from upper direction. It is a perspective view which shows the rear side of the supporting member which concerns on 1st Embodiment of this invention from upper direction. It is a figure which shows the rear side of a supporting member from diagonally forward, and is a figure which shows the state by which the board | substrate W was supported by the rear groove | channel. It is sectional drawing which shows the contact | adherence state of a shelf part and an insertion piece. It is a figure which shows the baffle plate formed in the lower surface of the rear side of a support piece. It is a perspective view which shows the container main body of the substrate storage container which concerns on 2nd Embodiment of this invention. It is an exploded view which shows the container main body and support piece which concern on 2nd Embodiment of this invention. It is an enlarged view which shows the support piece arrange | positioned at the front opening side. It is an enlarged view which shows the support piece arrange | positioned at the rear side.

  Hereinafter, a preferred embodiment of a substrate storage container 1 according to the present invention will be described with reference to the drawings. The substrate storage container 1 of the present invention stores precision substrates such as semiconductor wafers, glass wafers, and mask glasses, and is used for transportation, transportation, storage, and the like. In the substrate storage container 1, the surface on which the opening 2 a (see FIG. 1) for taking in and out the substrate is formed will be described as the front. In each figure, three orthogonal (X, Y, Z) directions are shown. The X-axis direction is a direction in which the substrate is taken in and out in the front-rear direction, the Y-axis direction is the width direction, and the Z-axis direction is the up-down direction.

  The semiconductor wafer W stored in the substrate storage container 1 is a thin and large silicon wafer having a diameter of 450 mm and a thickness of 925 μm, for example. A notch for alignment and identification (not shown) is cut out in a semicircular plane on the peripheral edge of the silicon wafer. In the container body 2, 25 semiconductor wafers are stored in a horizontal state and arranged at regular intervals.

  FIG. 1 is an exploded perspective view of a substrate storage container according to an embodiment of the present invention. The substrate storage container 1 has an opening 2a on the front surface, a container body 2 that stores a plurality of substrates W, a lid 3 that closes the opening 2a of the container body 2, and a top surface of the container body 2. Provided on the provided robotic flange 4 for transportation, and on the inner surfaces of both side walls 2b, 2b of the container body 2, and on the bottom surface 2c of the container body 2 and a support member 5 that can horizontally support a plurality of substrates W. And a bottom plate 6 for positioning and fixing.

  The lid 3 has a built-in locking mechanism 33 having a locking claw that is locked to the container body 2. The lid body 3 includes a lid body 32 that houses the locking mechanism 33 and a cover plate 31 that is attached to the lid body 32 and covers the locking mechanism 33. The lid 3 forms a seal with the opening 2a of the container body 2 and seals the opening 2a.

  The locking mechanism 33 includes a rotating body 34 and a pair of latch bars 35. In the locking mechanism 33, the tip of the latch bar 35 protrudes from the opening (only shown on the upper side) 32 a of the side wall of the lid body 32 by rotating the rotating body 34. A locking claw (locking member) formed as a separate member can be further provided at the tip of the latch bar 35. The locking claw protruding from the lid 3 is fitted into a recess (only the lower side is shown) 10 a formed on the rim 10 of the container body 2. The cover plate 31 has a through hole (key hole) 31a for operating the locking mechanism 33 from the outside.

  In addition, a gasket for forming a seal between the lid 3 and the opening 2 a of the container body 2 is attached. Thus, the container body 2 can be hermetically sealed. On the back side of the lid body 32 (the side facing the container body 2), a retainer 29 for holding the substrates individually is provided. The retainer 29 can hold the substrates individually in a state where the lid 3 is attached to the container body 2.

  As shown in FIGS. 2 to 4, the support member 5 includes a support member 51 and a support piece 61 as separate members. The support member 5 is formed by integrating a plurality of support pieces 61 on a support member 51. The support member 5 supports one substrate by two support pieces 61 arranged on both sides in the width direction Y, and supports a plurality of support pieces 61 arranged in the vertical direction Z on both sides in the front-rear direction. It is supported by a pair of arranged support members 51A and 51B. In addition, what is arrange | positioned at the front side is the support | pillar member 51A, and what is arrange | positioned at the back side is the support | pillar member 51B, and when it is not necessary to distinguish front and back, it is set as the support | pillar member 51. The support member 5 of this embodiment has four support members 51.

  As shown in FIG. 3, the column member 51 has a prism shape, and a plurality of groove portions 53 are formed at equal intervals on the back side of the column member 51A, and a plurality of groove portions 53 are formed on the front side of the column member 51B. Are formed at equal intervals. The facing groove portions 53 of the support members 51A and 51B are formed at the same height in the vertical direction Z. On both sides of the groove portion 53 in the vertical direction Z, shelf portions 52 that protrude in the front-rear direction are formed. The shelf 52 functions as a clamping plate that clamps the support piece 61. That is, the groove part 53 is formed between the clamping plates 52 and 52 arranged in parallel in the up-down direction Z at a predetermined interval. Further, the corners of the shelf 52 that are continuous in the front-rear direction X are cut to form an inclined surface 52a. The inclined surface 52 a is a surface that is inclined with respect to the upper and lower surfaces and the side surfaces of the shelf 52, and is formed continuously in the front-rear direction X.

  As shown in FIG. 4, the support piece 61 has a plate shape and has a mounting portion 62 that is curved along the periphery of the semiconductor wafer. The placement part 62 is a part on which the periphery of the semiconductor wafer is placed.

  Further, the support piece 61 is provided with plate-like insertion pieces 64 that are fitted into the groove portions 53 of the column members 51 at both ends in the X-axis direction. The insertion piece 64 protrudes outward, for example, on the side opposite to the placement portion 62 in the Y-axis direction. The width of the insertion piece 64 in the Y-axis direction is set to a size corresponding to the width of the column member 51 in the Y-axis direction. In addition, at both ends of the insertion piece 64 in the Y-axis direction, inclined surfaces 64 a that can come into contact with the inclined surface 52 a provided on the column member 51 are provided. And the support | pillar member 51 is engage | inserted from the outer side of a X-axis direction, and the several support piece 61 is supported at equal intervals. That is, since the pair of support members 51 can be fixed from both sides in the front-rear direction X, the support piece 61 is prevented from falling off.

  FIG. 5 is a perspective view showing the opening side of the support member from above. As shown in FIG. 5, a step 65 for preventing the substrate W from popping out can be provided on the opening side of the upper surface of the support piece 61. The step 65 is curved along the substrate W.

  FIG. 6 is a perspective view showing the rear side of the support member from above. As shown in FIG. 6, a rear groove 66 that restricts the insertion position of the substrate W is provided on the rear side of the upper surface of the support piece 61. The rear groove 66 is a V-shaped groove, and the V-shaped opening side is curved along the substrate W. When the lid 3 is mounted on the container body 2, the substrate W placed on the support piece 61 is urged rearward by the retainer 29 attached to the back surface of the lid 3. FIG. 7 is a view showing the rear side of the support member from an oblique front, and is a view showing a state in which the substrate W is supported by the rear groove. As shown in FIG. 7, the substrate W urged rearward comes into contact with the lower slope of the rear groove 66 and floats up and is supported from the front and rear directions by the retainer 29 and the rear groove 66.

  FIG. 8 is a cross-sectional view showing a close contact state between the shelf and the insertion piece. In FIG. 8, the contact | adherence state of the shelf part 52 of the support | pillar member 51A arrange | positioned at the front opening side and the insertion piece 64 of the support piece 16 is shown. Further, the insertion piece 64 is held by the column member 51 in a state where the inclined surfaces 52 a and 64 a arranged on both sides in the width direction X are in contact with each other. That is, it is positioned and reliably held by the inclined surfaces 52a and 64a. Here, the insertion piece 64 of the support piece 61 is closely fixed by the shelf portion 52 of the column member 51 from both sides in the vertical direction. The insertion piece 64 is fitted in the column member 51, and the upper surface of the insertion piece 64 abuts on the lower surface of the facing shelf 52, and the lower surface of the insertion piece 64 is in contact with the upper surface of the facing shelf 52. It is in contact. That is, the insertion piece 64 of the support piece 61 is fixed by the support member 51, and the plurality of support pieces 61 are not directly stacked, so that generation of particles due to rubbing between the support pieces 61 is reduced. be able to.

  FIG. 9 is a diagram illustrating a baffle plate formed on the lower surface on the rear side of the support piece. As shown in FIG. 9, a baffle plate 67 having an inclined surface is formed on the lower surface on the rear side of the support piece 61. The inclined surface of the baffle plate 67 is disposed at a position corresponding to the peripheral edge of the substrate. The surface of the baffle plate 67 on the substrate side is an inclined surface, and is inclined so that the lower side is disposed rearward compared to the upper side. When the substrate comes into contact with such a baffle plate 67, the substrate is prevented from entering the gap between the rear groove 66 and the support piece 61 thereon.

  The material of the support member 5 will be described. At least one of the column member 51 and the support piece 61 is preferably made of a material having high rigidity and a large deflection load. The support member 51 is preferably made of a highly rigid material having higher rigidity than the support piece 61.

  The support member 51 can be formed using a synthetic resin. As the synthetic resin, polyether ether ketone, liquid crystal polymer, or the like can be applied. In particular, by adding an appropriate amount (20 wt% to 40 wt%) of carbon fiber, glass fiber or the like to these synthetic resins, it is possible to improve the material strength and the flexural modulus. Examples of the carbon fiber include pitch, PAN, and carbon nanotube. Such a synthetic resin may be employed as a highly rigid material.

  Moreover, the support | pillar member 51 can be formed from various metal materials. In particular, aluminum, aluminum alloys (Al-Si-Mg-based, Al-Si-Cu-based, Al-Si-Cu-Mg-based), magnesium alloys (Mg-Al-Zn-based, Mg-Ag-based) can be reduced in weight. ), A titanium alloy or the like can be used for the support member 51. In particular, aluminum, an aluminum alloy, and a magnesium alloy that are advantageous in terms of cost are preferable. The rigidity in the case of an aluminum alloy can be confirmed by comparing the Young's modulus. An aluminum alloy having a Young's modulus of about 69 GPa has a Young's modulus of about 20 times or more that of a normal thermoplastic resin, and can solve the problem of strength. Such a metal material can be used as a highly rigid material.

  When the support member 51 is formed as a cast product such as aluminum, it is preferable to perform burr processing such as sandblasting in order to ensure the smoothness of the surface portion. Thereby, the surface of the support | pillar member 51 can be smooth | blunted by setting it as surface roughness Ra10micrometer or less. Further, after the surface smoothing treatment, the strut member 51 is formed by combining the baking coating treatment of carbon, the surface coating treatment using a resin with little outgas emission, the surface coating treatment with a resin having gas barrier properties, and these various treatments. It is preferable to form a coating layer on the surface. An epoxy resin, a fluororesin, a polyetheretherketone, or the like can be used as a resin that emits less outgas. As the resin having gas barrier properties, an ethylene vinyl alcohol copolymer, polybutyl alcohol, polyacrylonitrile, polyvinylidene chloride, or the like can be used. Thus, by performing the surface smoothing process, generation of wear powder can be suppressed.

  In such a substrate storage container 1, a plurality of support pieces 61 on which the substrate W can be placed are provided, and the plurality of support pieces 61 are fitted into support members 51 that are fixed portions. A support member 5 in which a plurality of support pieces 61 are fitted into and integrated with the column member 51 is fixed to the inner surfaces of the left and right side walls 2 b of the container body 2. As a method of fixing the support member 5 to the side wall 2b, the support member 5 may be fixed using a screw member, or may be fixed using an engagement member.

  According to the substrate storage container 1 including the support member 5 of the present embodiment, since the plurality of support pieces 61 are formed as separate members from the fixed portion, the support piece 61 can be easily formed and the dimensional accuracy is improved. be able to. As a result, the bending of the substrate supported by the support piece 61 can be suppressed. That is, it is possible to realize a substrate support structure that can support a substrate with an increased size and a reduced thickness, while suppressing the bending of the substrate. Further, since the support piece 61 is a separate member from the fixed portion, the support piece 61 and the fixed portion can be formed of different materials.

  Here, the support piece 61 includes an insertion piece 64 in which a positioning inclined surface 64 a is formed and is fitted into the groove portion 53 of the column member 51, and the column member 51 has a groove portion 53 into which the insertion piece 64 is fitted. It is formed at regular intervals. Therefore, the support piece 61 can be fitted into the groove portion 53 with high positional accuracy, and the positional accuracy of the substrate supported by the support piece 61 can be improved. As a result, errors during substrate loading and unloading can be prevented, and substrate damage can be prevented.

  In the support member 5 of the present embodiment, the support pieces 61 are sandwiched at predetermined intervals by the shelf portions 52 that project in the horizontal direction, and support the support pieces 61 without contacting each other. It is prevented that a large dimensional error occurs due to accumulation of dimensional error and deformation. Thereby, a board | substrate can be supported with a dimensional accuracy compared with a prior art. In the present invention, since the plurality of support pieces 61 and the support member 51 are formed as separate members, and the support piece 61 is fixed by the shelf portion 52 that functions as a sandwiching plate, the support member 61 contracts by improving the rigidity of the support member 51. The deformation can be prevented and the pitch accuracy of the support piece 61 can be easily ensured.

  Next, a substrate storage container according to a second embodiment will be described with reference to FIGS. In the description of the second embodiment, the same description as in the first embodiment is omitted. The substrate storage container 71 according to the second embodiment is different from the substrate storage container 1 according to the first embodiment in that the configuration of the support member is different. Specifically, in the substrate storage container 1 of the first embodiment, the support piece 61 that supports the substrate is fixed to the container body 2 via the column member 51 that is a fixing portion, whereas the second embodiment In the substrate storage container 71, the support piece 81 is fixed to the container body 72. That is, the fixing portion 91 that fixes the support piece 81 is integrally formed on the inner wall surface of the container main body 72.

  The container body 72 of the second embodiment has an opening 72a formed on the front side, a top plate 72b constituting the top surface, side walls 72c and 72c constituting the side surface, a bottom plate 72d constituting the bottom surface, and a first surface constituting the back surface. A back wall 72e and second back walls 72f and 72f are provided. In the drawings showing the container main body 72, illustrations of accessory parts such as a robotic flange and a manual transfer handle are omitted.

  The first back wall 72 e is disposed at the center in the width direction Y of the container body 72. On both sides of the first back wall 72e, second back walls 72f having a predetermined angle with the first back wall 72e in a plan view are arranged. The second back wall 72f is formed from the rear end of the side wall 72c to the side end of the first back wall 72e. As shown in FIG. 11, the second back wall 72f is arranged at an angle of 45 degrees with respect to the X axis and the Y axis, for example.

  A plurality of shelves 92 </ b> A projecting inward of the container main body 72 are formed on the side wall 72 c as the fixing portions 91. The plurality of shelves 92A have surfaces parallel to the X axis and the Y axis, and are arranged at equal intervals in the Z axis (vertical) direction. A groove is formed between the shelves 92 </ b> A that are separated in the vertical direction Z, and the insertion piece 84 </ b> A of the support piece 81 is inserted into the groove. Further, the side wall 72c is provided with a step 72g, and the rear side of the side wall 72c is disposed inward in the width direction Y from the front opening side of the side wall 72c. The step 72g becomes the rear end of the shelf 92A. Further, the fixed portion 91 having the shelf portion 92A is formed with a convex portion that protrudes to the front side. This convex portion functions as a locking portion for preventing the support piece 81 from falling off.

  A plurality of shelves 92B projecting inward of the container main body 72 are formed on the second back wall 72f as the fixing portions 91. The plurality of shelves 92B have surfaces parallel to the X axis and the Y axis, and are arranged at equal intervals in the Z axis (vertical) direction. A groove is formed between the shelves 92B spaced apart in the vertical direction Z, and the insertion piece 84B of the support piece 81 is inserted into this groove. The second back wall 72f is formed with a recessed portion 72k that is recessed rearward, and the rear end portion 82d of the mounting portion 82 is fitted into the recessed portion 72k.

  Next, the support piece 81 will be described. The support piece 81 includes a plate-like mounting portion 82A and a mounting portion 82B, which are portions on which the periphery of the semiconductor wafer is mounted, and has a connecting portion 83 that connects these mounting portions 82A and 82B. The mounting portions 82A and 82B are formed in a trapezoidal shape in plan view, for example, and the lower base side of the trapezoid is a portion fixed to the container main body 72.

  As shown in FIGS. 11 and 12, the mounting portion 82 </ b> A is a mounting portion that is disposed on the front side of the container main body 72. An insertion piece 84A to be fitted into the shelf 92A is formed on the lower bottom side of the mounting portion 82A. In addition, an engaging portion that engages with the engaging portion of the shelf portion 92A is formed at the rear end of the placement portion 82A.

  As shown in FIGS. 11 and 13, the placement portion 82 </ b> B is a placement portion that is disposed on the rear side of the container body 72. An insertion piece 84B that is fitted into the shelf 92B is formed on the lower bottom side of the mounting portion 82B. An engaging portion 82d that engages with the engaging portion of the shelf 92B is formed at the rear end of the placement portion 82B.

  The support piece 81 is inserted into the container main body 71 from the front opening side, and is fixed to a fixing portion 91 provided on the inner wall of the container main body 72. The insertion piece 84A of the mounting portion 82A is fitted into a groove between the shelf portions 92A and 92A, and the upper and lower surfaces of the insertion piece 84A are in close contact with the upper and lower surfaces of the shelf portion 92A. Even in such a support piece (support member) 81 of the second embodiment, it can be mounted on the container main body in the same manner as the support member of the first embodiment, and the positional accuracy and dimensional accuracy of the support piece can be improved. I can plan. Thereby, the bending of the board | substrate supported by the support piece 81 can be suppressed. In the substrate storage container of this embodiment, the dimensional accuracy of the support piece 81 is improved, and the substrate can be supported with high positional accuracy in response to an increase in the substrate size. As a result, substrate loading and unloading errors and substrate damage can be prevented.

  As mentioned above, although this invention was concretely demonstrated based on the embodiment, this invention is not limited to the said embodiment. For example, the support piece 61 may be formed by being divided in the front-rear direction. For example, it may be a support piece that is divided into two on the front opening side and the rear side, or may be a support piece that is divided into three parts on the front opening side, the rear side, and an intermediate portion disposed therebetween.

  A plurality of protrusions for supporting the semiconductor wafer can be formed on the support piece. By forming the support piece 61 as a separate member, the protrusion can be provided at an arbitrary position.

  In the above-described embodiment, the strut members 51 are separately provided in the front-rear direction. However, the pair of strut members 51 arranged in the front-rear direction may be connected by a frame or the like to form one component. And the structure which fixes the support | pillar member connected and made into one component to the inner wall face of a container main body may be sufficient.

  Further, as a method of fixing the support member 5 to the container body, a fixing method using a screw member or a fixing method using a locking member may be used. Further, without being limited thereto, a through hole is formed in the container main body or the support member, a protrusion penetrating into the container is formed in the supporting member or the container main body, and the tip of the protrusion is thermally welded or ultrasonically welded, It is good also as a structure fixed by staking.

  Moreover, although it illustrated that the handle 16 for manual conveyance was formed in the side wall of the container main body 2, it is not limited to this, As a structure formed so that the side rail flange for conveyance with a forklift may protrude from a side wall Good.

DESCRIPTION OF SYMBOLS 1,71 ... Board | substrate storage container, 2,72 ... Container main body, 2a, 72a ... Opening, 3 ... Cover body, 5 ... Support member, 51A, 51B ... Column member (fixed part), 52, 92A, 92B ... Shelf part (Clamping plate), 52a ... inclined surface (inclined surface for positioning), 61, 81 ... support piece, 64, 84A, 84B ... insert piece, 64a ... inclined surface (inclined surface for positioning), 91 ... fixing part.

Claims (7)

A container main body having an opening for storing the substrate, a lid for closing the opening of the container main body, a support member provided on the inner surface of the container main body for supporting the substrate, and fixing the support member to the container main body A substrate storage container having a fixing part,
The support member has a plurality of support pieces on which the substrate can be placed,
The fixing portion has a plurality of clamping plates that clamp the support pieces at a predetermined interval,
The substrate storage container, wherein the support piece is fitted between the holding plates. The support piece includes a plurality of insertion pieces inserted between the holding plates,
The substrate storage container according to claim 1, wherein the insertion piece has a positioning inclined surface that defines an insertion direction, and is inserted between the sandwiching plates. The fixing portion includes the plurality of sandwiching plates and includes a pair of support members extending in the vertical direction,
The pair of support members are arranged to be spaced apart in the front-rear direction on the opening side and the back side of the container body, and support the plurality of support pieces from both sides in the front-rear direction,
The plurality of support pieces supported and integrated by the pair of support members are disposed on both sides in the width direction of the container body,
The base storage container according to claim 1 or 2, wherein the pair of support members are respectively fixed to side walls facing the container body.   4. The substrate storage container according to claim 3, wherein the support member is made of a highly rigid material having higher rigidity than the support piece.   5. The substrate storage container according to claim 4, wherein the support member is made of a metal material selected from aluminum, an aluminum alloy, and a magnesium alloy as the high-rigidity material.   The substrate storage container according to claim 5, wherein a coating process is applied to a surface of the support member formed of the metal material. A support member that is fixed to an inner wall surface of a container body that accommodates the substrate and supports the substrate;
A plurality of support pieces on which the substrate can be placed;
A plurality of support members extending in the vertical direction and fixing the plurality of support pieces,
The support member has a plurality of sandwiching plates that are arranged at predetermined intervals in the vertical direction and sandwich the support piece.
The support member has an insertion piece inserted between the holding plates, and the insertion piece is inserted between the holding plates.

Images