JP2013113583A5 - - Google Patents

Download PDF

Info

Publication number
JP2013113583A5
JP2013113583A5 JP2011256775A JP2011256775A JP2013113583A5 JP 2013113583 A5 JP2013113583 A5 JP 2013113583A5 JP 2011256775 A JP2011256775 A JP 2011256775A JP 2011256775 A JP2011256775 A JP 2011256775A JP 2013113583 A5 JP2013113583 A5 JP 2013113583A5
Authority
JP
Japan
Prior art keywords
light
slit
slit portion
spectroscopic
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011256775A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013113583A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011256775A priority Critical patent/JP2013113583A/ja
Priority claimed from JP2011256775A external-priority patent/JP2013113583A/ja
Publication of JP2013113583A publication Critical patent/JP2013113583A/ja
Publication of JP2013113583A5 publication Critical patent/JP2013113583A5/ja
Pending legal-status Critical Current

Links

JP2011256775A 2011-11-24 2011-11-24 分光器 Pending JP2013113583A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011256775A JP2013113583A (ja) 2011-11-24 2011-11-24 分光器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011256775A JP2013113583A (ja) 2011-11-24 2011-11-24 分光器

Publications (2)

Publication Number Publication Date
JP2013113583A JP2013113583A (ja) 2013-06-10
JP2013113583A5 true JP2013113583A5 (enExample) 2014-07-03

Family

ID=48709264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011256775A Pending JP2013113583A (ja) 2011-11-24 2011-11-24 分光器

Country Status (1)

Country Link
JP (1) JP2013113583A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105938013B (zh) * 2016-04-20 2019-12-17 杭州远方光电信息股份有限公司 一种光谱仪及其校正方法
CN112213272B (zh) * 2019-07-10 2024-01-12 中微半导体设备(上海)股份有限公司 一种光谱检测设备、终点检测系统和方法
CN118882818A (zh) * 2024-07-16 2024-11-01 广东中科谛听科技有限公司 一种用于光谱仪的光学强度监测与校正装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190731A (ja) * 1982-04-30 1983-11-07 Shimadzu Corp パツシエンルンゲ形分光器
JP3035388B2 (ja) * 1991-09-02 2000-04-24 オリンパス光学工業株式会社 プラズマエッチャーのエンドポイント検出装置
JP3043129B2 (ja) * 1991-09-05 2000-05-22 オリンパス光学工業株式会社 プラズマエッチャーのエンドポイント検出装置
JPH06109538A (ja) * 1992-09-30 1994-04-19 Shimadzu Corp 分光分析装置
JP3912801B2 (ja) * 1994-06-27 2007-05-09 横河電機株式会社 光スペクトル測定装置
JP3193265B2 (ja) * 1995-05-20 2001-07-30 東京エレクトロン株式会社 プラズマエッチング装置
JP2003214951A (ja) * 2002-01-28 2003-07-30 Matsushita Electric Works Ltd 分光計測装置及び分光計測方法
JP2006201127A (ja) * 2005-01-24 2006-08-03 Maki Mfg Co Ltd 分光装置

Similar Documents

Publication Publication Date Title
JP2017506531A5 (enExample)
JP2011232032A5 (enExample)
WO2010058311A3 (en) Filter wheel spectrometer
JP2011080980A5 (enExample)
JP2014095702A5 (enExample)
JP2011028171A5 (ja) 回折光学素子、それを用いた分光測色装置および画像形成装置
WO2014012095A3 (en) Curved volume phase holographic (vph) diffraction grating with tilted fringes and spectrographs using same
WO2014028380A3 (en) Multispectral imaging using silicon nanowires
TW201614200A (en) Light sensor modules and spectrometers including an optical grating structure
JP2014086393A5 (enExample)
EA027842B8 (ru) Спектрально-селективная панель
JP2017506763A5 (enExample)
CN103868596B (zh) 一种大孔径空间外差干涉光谱成像方法及光谱仪
WO2014033324A3 (de) Sicherheitselement sowie sicherheitsdokument
WO2010086283A3 (de) Echelle-spektrometeranordnung mit interner vordispersion
JP2013007830A5 (enExample)
JP2013113583A5 (enExample)
WO2014076009A3 (en) Position measurement system, grating for a position measurement system and method
WO2019060348A3 (en) Solid state image sensor with on-chip filter and extended spectral response
WO2011094513A3 (en) Superior analyzer for raman spectra with high acceptance cone, resolution, transmission, and quantum efficiency, and strong background reduction
WO2010127339A3 (en) Grating structure for directing non-polarized light
JP2013242178A5 (enExample)
EP2647983A3 (en) Spectroscopic apparatus
WO2014183039A3 (en) Combination optical filter and diffraction grating and associated systems and methods
WO2018061607A8 (ja) 波長分散型蛍光ｘ線分析装置