JP2013112540A - Method and apparatus for manufacturing quartz glass cylinder material - Google Patents

Method and apparatus for manufacturing quartz glass cylinder material Download PDF

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JP2013112540A
JP2013112540A JP2011257786A JP2011257786A JP2013112540A JP 2013112540 A JP2013112540 A JP 2013112540A JP 2011257786 A JP2011257786 A JP 2011257786A JP 2011257786 A JP2011257786 A JP 2011257786A JP 2013112540 A JP2013112540 A JP 2013112540A
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quartz glass
heat source
raw material
furnace
material powder
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JP5763508B2 (en
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Masakazu Kudo
正和 工藤
Miyuki Sato
深幸 佐藤
Yukihiro Izawa
幸宏 井澤
Tadaaki Kato
忠章 加藤
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Tosoh Quartz Corp
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Tosoh Quartz Corp
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484—Means for supporting, rotating or translating the article being formed
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484—Means for supporting, rotating or translating the article being formed
    • C03B19/1492—Deposition substrates, e.g. targets

Abstract

PROBLEM TO BE SOLVED: To inexpensively manufacture various quartz glass cylinder materials.SOLUTION: A furnace 1 is composed of a furnace roof 2, a furnace bottom 3 and a furnace wall 4. The furnace bottom 3 is supported by a column support 7, and since the column support 7 rotates and can move up and down, the furnace bottom 3 can rotate and move up and down with respect to heat sources 5 which is circularly arranged on the furnace roof 2 and heats quartz glass material powder. Such quartz glass material powder is supplied to the heat sources 5 and melted. By lowering the furnace bottom 3 while rotating with respect to the heat sources 5, the molten quartz glass material powder accumulates and solidifies in a cylinder shape on the furnace bottom 3, and a cylindrical quartz glass cylinder material 8 is obtained.

Description

本発明は、石英ガラスシリンダー材料の製造方法及び製造装置に関し、特に半導体の製造工程で用いられる熱処理用炉芯管などを作製するための高純度石英ガラスシリンダー材料の製造方法及び製造装置に関する。   The present invention relates to a method and an apparatus for producing a quartz glass cylinder material, and more particularly to a method and an apparatus for producing a high-purity quartz glass cylinder material for producing a furnace core tube for heat treatment used in a semiconductor production process.

従来、石英ガラス製のリング材及び円筒状材料の製造方法は、石英ガラスインゴットから不要な領域をコアドリルで抜いたり、あるいは研削によって除去するものであった。
しかしながら、コア抜きまたは研削による製造方法によって得られるシリンダー材料は、インゴットの大きさに依存するもので、大型のものが得られず、また、インゴットから所望の形状にコアドリルなどで加工除去して最終的なシリンダー材料を得るため、最終的に得られるシリンダー材料の重量よりも多くの石英ガラスが除去されることから、大きなインゴットを必要とし、材料効率が低く、コストがかかっていた。 Conventionally, a manufacturing method of a ring material and a cylindrical material made of quartz glass has been to remove unnecessary regions from the quartz glass ingot with a core drill or by grinding.
However, the cylinder material obtained by the manufacturing method by core removal or grinding depends on the size of the ingot, so that a large-sized material cannot be obtained, and it is processed and removed from the ingot to a desired shape with a core drill or the like. In order to obtain a typical cylinder material, more quartz glass was removed than the weight of the finally obtained cylinder material, which required a large ingot, low material efficiency, and high cost.

こうした問題を解決するため、特許文献１（特開２００２−９７０３１号公報）では、炉内で溶融した石英ガラスを炉底部に設けたノズルを用いて溶融石英ガラスを引き下げ、要求する最終形状により近い概形とし、更に、その石英ガラスを研削などの機械加工を施して最終形状の石英ガラス製品を作製する技術が提案されている。
また、特許文献２（特開２００４−５９４００号公報）では、高周波コイルによる誘導加熱発熱体の耐火性ヘッド上に石英ガラス原料粉末を供給して溶融し、石英ガラス溶融体を耐火性ヘッドの外周縁から流下させながら固化させ、この下端部を一定速度で回転しつつ降下する支持部材により引き下げる石英ガラス円筒体の製造方法が提案されている。 In order to solve such a problem, in Patent Document 1 (Japanese Patent Laid-Open No. 2002-97031), the fused silica glass is pulled down using a nozzle provided in the furnace bottom portion of the fused quartz glass in the furnace, and is closer to the required final shape. There has been proposed a technique for making a quartz glass product having a final shape by subjecting the quartz glass to machining such as grinding.
In Patent Document 2 (Japanese Patent Application Laid-Open No. 2004-59400), a quartz glass raw material powder is supplied and melted on a refractory head of an induction heating heating element using a high frequency coil, and the quartz glass melt is removed from the refractory head. There has been proposed a method of manufacturing a quartz glass cylinder that is solidified while flowing down from the periphery and pulled down by a support member that descends while rotating at the lower end thereof at a constant speed.

特開２００２−９７０３１号公報JP 2002-97031 A 特開２００４−５９４００号公報JP 2004-59400 A

しかしながら、特許文献１のノズルによる溶融石英ガラスの引き下げ法は、ノズルや炉の耐火材が高価なため、製品コストを下げるために連続運転が要求され、大量に石英ガラスシリンダー材料を製作しなければならず、少量の生産にはコスト的に対応できなかった。また、製造する製品の形状に合わせてその都度ノズルや炉を変更する必要があり、製作する石英ガラスシリンダー材料の大きさや形状にも限度があった。   However, the method of pulling down the fused silica glass by the nozzle of Patent Document 1 is expensive for the refractory material of the nozzle and the furnace, so that continuous operation is required to reduce the product cost, and a quartz glass cylinder material must be manufactured in large quantities. In other words, it could not cope with a small amount of production in terms of cost. Moreover, it is necessary to change the nozzle and furnace each time according to the shape of the product to be manufactured, and there is a limit to the size and shape of the quartz glass cylinder material to be manufactured.

特許文献２の耐火性ヘッドの外周縁から流下させながら固化させて石英ガラスシリンダー材料を製造する方法は、成形する石英ガラスシリンダー材料の内径が大きくなると、それに対応して耐火性ヘッドの外径を大きくしなければならず、耐火性ヘッド上に堆積された石英ガラス溶融体をバランス良く耐火性ヘッド外周縁から流下させることが困難となり、また、耐火性ヘッド自体を発熱体としているために炉体外周部に高周波加熱装置を設けなければならず、装置が大掛かりなものとなり、設備のためのコストがかかるという問題があった。
本発明は、このような従来技術の課題を解消し、少量多品種の石英ガラスシリンダー材料の製造を低コストで、また、大きさや形状の変更に対して柔軟に対応できるようにすることを課題とするものである。 In the method of manufacturing a quartz glass cylinder material by solidifying while flowing down from the outer peripheral edge of the fireproof head of Patent Document 2, the outer diameter of the fireproof head is correspondingly increased when the inner diameter of the quartz glass cylinder material to be molded is increased. It is difficult to make the quartz glass melt deposited on the refractory head flow down from the outer periphery of the refractory head in a well-balanced manner, and because the refractory head itself is a heating element, There is a problem that a high-frequency heating device has to be provided in the peripheral portion, and the device becomes large and costs for equipment are increased.
It is an object of the present invention to eliminate such problems of the prior art, and to manufacture a small amount of various types of quartz glass cylinder materials at low cost and flexibly respond to changes in size and shape. It is what.

本発明の石英ガラスシリンダー材料製造方法は、炉天井に石英ガラス原料粉を溶融する火炎バーナー等の熱源を円周上に配置し、石英ガラス原料粉を熱源で溶融しながら炉底を炉天井に設けた熱源に対して回転させて溶融した石英ガラス原料粉を炉底に落下させ、円形状に溶融石英ガラスを積層させ、熱源の焦点が溶融石英ガラス積層体の上面から一定距離となるように炉底を降下させて固化させ、円筒形の石英ガラス積層体として石英ガラスシリンダー材料を得るものである。   In the quartz glass cylinder material manufacturing method of the present invention, a heat source such as a flame burner for melting quartz glass raw material powder is disposed on the circumference of the furnace ceiling, and the furnace bottom is placed on the furnace ceiling while melting the quartz glass raw material powder with the heat source. The quartz glass raw material powder melted by rotating with respect to the installed heat source is dropped on the bottom of the furnace, the fused silica glass is laminated in a circular shape, and the focal point of the heat source is at a certain distance from the upper surface of the fused silica glass laminate The furnace bottom is lowered and solidified to obtain a quartz glass cylinder material as a cylindrical quartz glass laminate.

また、本発明の石英ガラスシリンダー材料の製造装置は、炉天井に円形に配置した焦点を有する火炎バーナー等の熱源と、この熱源に対して炉底を水平に回転させる回転手段、及び昇降させる昇降手段と、石英ガラス原料粉を熱源に供給する原料供給手段とからなる石英ガラスシリンダー材料の製造装置である。   The quartz glass cylinder material manufacturing apparatus according to the present invention includes a heat source such as a flame burner having a focal point arranged in a circle on the furnace ceiling, a rotating means for rotating the furnace bottom horizontally with respect to the heat source, and an elevating and lowering operation. A quartz glass cylinder material manufacturing apparatus comprising means and raw material supply means for supplying quartz glass raw material powder to a heat source.

石英ガラス原料粉を溶融する熱源としては、火炎バーナー、若しくは、プラズマトーチを使用することができる。
火炎バーナーとしては、酸水素火炎バーナー、または、プロパン火炎バーナー、若しくは炭化水素−酸素ガス火炎バーナー等が使用できる。
また、石英ガラス原料粉を溶融する熱源は、メイン熱源、若しくは、メイン熱源とサブ熱源の組み合わせから構成されており、いずれの熱源も、形成する石英ガラスシリンダー材料の円筒形の上部にその焦点を結ぶように炉の上部、具体的には炉天井に固定設置されているものである。 As a heat source for melting the quartz glass raw material powder, a flame burner or a plasma torch can be used.
As the flame burner, an oxyhydrogen flame burner, a propane flame burner, a hydrocarbon-oxygen gas flame burner, or the like can be used.
The heat source for melting the quartz glass raw material powder is composed of a main heat source or a combination of a main heat source and a sub heat source, and each heat source focuses on the cylindrical upper part of the quartz glass cylinder material to be formed. It is fixedly installed on the top of the furnace, specifically on the furnace ceiling.

プラズマトーチとしては、本願出願人の発明である特開平４−３２５４２５号、特開平７−１２６０１９号公報、及び特開平７−１２６０３４号に開示されているプラズマトーチを使用することができる。
製作される円筒形の石英ガラスシリンダー材料の円周上にプラズマアークのカップリング帯域が形成されるように、プラズマアノードトーチとプラズマカソードトーチからなるツインプラズマトーチを対称に炉天井に配置し、トーチ角度及び炉天井への挿入深さを調節できるようにして炉底との距離を微調整できるようにする。
プラズマアノードトーチとプラズマカソードトーチから生成されるプラズマアークにより円周上に形成されるプラズマアークカップリング領域に石英ガラス原料粉を連続的に供給し、カップリング帯域近傍を溶融部の頂点として円形状に石英ガラス原料粉を溶融して積層するものであり、前述の火炎バーナーと基本的には同じである。 As the plasma torch, plasma torches disclosed in Japanese Patent Application Laid-Open Nos. 4-325425, 7-1226019, and 7-126034, which are the inventions of the present applicant, can be used.
A twin plasma torch consisting of a plasma anode torch and a plasma cathode torch is placed symmetrically on the furnace ceiling so that a plasma arc coupling zone is formed on the circumference of the cylindrical quartz glass cylinder material to be manufactured. The distance from the furnace bottom can be finely adjusted by adjusting the angle and the depth of insertion into the furnace ceiling.
Silica glass raw material powder is continuously supplied to the plasma arc coupling region formed on the circumference by the plasma arc generated from the plasma anode torch and plasma cathode torch, and the circular shape with the vicinity of the coupling zone as the apex of the melting part The quartz glass raw material powder is melted and laminated, and is basically the same as the above-mentioned flame burner.

本発明によって任意の外径のリング材及びシリンダー形状の石英ガラスシリンダー材料を作製でき、外径４００ｍｍ超の大口径のものを製造することが可能である。
本発明においては、従来使用されていた高価なノズルが不要であり、溶融石英ガラスが炉体に接触しない非接触式なので耐火材の寿命が長くなり、耐火材の交換の頻度を少なくできるので製造装置の維持費用を抑制することができ、大型リングや炉心管を低コストで製作することが可能となる。 According to the present invention, it is possible to produce a ring material having an arbitrary outer diameter and a quartz glass cylinder material having a cylindrical shape, and it is possible to produce a large diameter having an outer diameter exceeding 400 mm.
In the present invention, an expensive nozzle that has been used conventionally is unnecessary, and since the fused silica glass is a non-contact type in which it does not contact the furnace body, the life of the refractory material is increased, and the frequency of replacement of the refractory material can be reduced. The maintenance cost of the apparatus can be suppressed, and a large ring or a core tube can be manufactured at a low cost.

石英ガラスシリンダー製造装置の正面断面図。Front sectional drawing of a quartz glass cylinder manufacturing apparatus. 石英ガラス原料粉を溶融する熱源の配置の概念図。The conceptual diagram of arrangement | positioning of the heat source which fuse | melts quartz glass raw material powder. 石英ガラス原料粉を溶融する熱源の他の配置の概念図。The conceptual diagram of other arrangement | positioning of the heat source which fuse | melts quartz glass raw material powder. 製作例１の石英ガラスシリンダー材料の写真。A photograph of the quartz glass cylinder material of Production Example 1.

図１に本発明の石英ガラスシリンダー材料の製造装置を示す。
炉１は、炉天井２、炉底３及び炉壁４から構成されている。炉底３は耐火材で構成されており、更に耐火材粉が敷き詰めてあり、回転テーブル６によって回転可能としてある支柱７に支持されている。支柱７は、回転すると共に昇降可能としてあるので、炉底３は炉内において回転及び昇降自在である。 FIG. 1 shows an apparatus for producing a quartz glass cylinder material of the present invention.
The furnace 1 includes a furnace ceiling 2, a furnace bottom 3, and a furnace wall 4. The furnace bottom 3 is made of a refractory material and is further spread with refractory material powder, and is supported by a support column 7 which can be rotated by a rotary table 6. Since the column 7 rotates and can be raised and lowered, the furnace bottom 3 can be rotated and raised and lowered in the furnace.

炉天井２には、焦点を有する石英ガラス原料粉を溶融する熱源５、たとえば火炎バーナーが、図２及び図３に示すように製作される円筒形の石英ガラスシリンダー材料８の円周上に配置される。石英ガラス原料粉を溶融する熱源５は、焦点を有するものであればよく、火炎バーナーであれば、酸水素火炎バーナー、プロパン火炎バーナーのいずれでもよく、また、プラズマトーチも焦点を有する熱源として利用することができる。   On the furnace ceiling 2, a heat source 5 for melting the quartz glass raw material powder having a focus, for example, a flame burner, is arranged on the circumference of a cylindrical quartz glass cylinder material 8 manufactured as shown in FIGS. 2 and 3. Is done. The heat source 5 for melting the quartz glass raw material powder has only to have a focal point. If it is a flame burner, either an oxyhydrogen flame burner or a propane flame burner may be used, and a plasma torch is also used as a focal heat source. can do.

石英ガラス原料粉を溶融する熱源５は、石英ガラス原料粉が供給される原料供給部（図示しない）が付設されている。この原料供給部には石英ガラス原料粉を貯留するホッパー（図示しない）が接続されており、石英ガラス原料粉が連続的に石英ガラス原料粉を溶融する熱源５に供給される。石英ガラス原料粉が原料供給部において詰まるのを防止するため、振動装置（図示しない）が装備されており、常時、または必要に応じて振動装置が詰まり防止のため駆動される。   The heat source 5 for melting the quartz glass raw material powder is provided with a raw material supply unit (not shown) to which the quartz glass raw material powder is supplied. A hopper (not shown) for storing the quartz glass raw material powder is connected to the raw material supply unit, and the quartz glass raw material powder is supplied to the heat source 5 that continuously melts the quartz glass raw material powder. In order to prevent the quartz glass raw material powder from clogging in the raw material supply unit, a vibration device (not shown) is provided, and the vibration device is driven at all times or as necessary to prevent clogging.

石英ガラス原料粉を溶融する熱源５は、単独でも良いが、石英ガラス原料粉を均一に加熱溶融するために原料供給部を有する石英ガラス原料粉を溶融する熱源５を図２に示すように、メイン熱源５１とし、製作する石英ガラスシリンダー材料の円周上に原料供給部を有しないサブ熱源５２を複数配置することも可能である。サブ熱源５２を円周上に複数個設置することによって、溶融堆積する石英ガラス原料粉の温度を一定に維持することが可能となり、製作する石英ガラスシリンダー材料の厚さの制御が容易となる。メイン熱源５１を複数個とした場合は、それぞれに原料粉の詰まり防止のため振動装置を設置する。   As shown in FIG. 2, the heat source 5 for melting the quartz glass raw material powder may be used alone, but the heat source 5 for melting the quartz glass raw material powder having the raw material supply unit for uniformly heating and melting the quartz glass raw material powder is shown in FIG. As the main heat source 51, it is possible to arrange a plurality of sub heat sources 52 that do not have the raw material supply section on the circumference of the quartz glass cylinder material to be manufactured. By installing a plurality of sub heat sources 52 on the circumference, it is possible to keep the temperature of the fused silica glass raw material powder constant, and it becomes easy to control the thickness of the quartz glass cylinder material to be manufactured. When there are a plurality of main heat sources 51, a vibration device is installed in each of them to prevent clogging of raw material powder.

サブ熱源５２は、特に大型の石英ガラスシリンダー材料の製造に有効であり、製品全体がバランス良く最適に加熱されるようにメイン熱源５１と同様に製品の円筒形の外形に合致する円周上に設置するものであり、原料供給装置は付設されていない。
サブ熱源５２は、石英ガラス原料粉の溶融状態を維持するために設けたものであり、作製する石英ガラスシリンダー材料の円周上に適宜の間隔で複数設置して石英ガラス原料粉の溶融と積層固化が円滑に行われるようにするものである。 The sub heat source 52 is particularly effective for manufacturing a large quartz glass cylinder material, and on the circumference that matches the cylindrical outer shape of the product in the same manner as the main heat source 51 so that the entire product is heated optimally in a balanced manner. It is installed, and no raw material supply device is attached.
The sub heat sources 52 are provided to maintain the molten state of the quartz glass raw material powder, and a plurality of sub heat sources 52 are installed at appropriate intervals on the circumference of the quartz glass cylinder material to be produced and fused and laminated. Solidification is performed smoothly.

図３に示すようにメイン熱源５１には、石英ガラス原料粉が供給されるが、常温で供給されるため溶融部の温度が低下し、石英ガラス原料粉の溶融積層が不均一になる恐れがあり、この場合には、メイン熱源５１の前に予熱用としてしてサブ熱源５２ａを配置するのが好ましく、メイン熱源５１から離れた位置のサブ熱源５２ｂは、溶融状態を維持する保温用として機能することになる。
この装置において、製作する石英ガラスシリンダー材料８の外径及び内径に応じて石英ガラス原料粉の供給量と炉底３の回転速度を定め、溶融された石英ガラス原料粉が均一に積層固化するように炉底３の降下速度を定める。 As shown in FIG. 3, quartz glass raw material powder is supplied to the main heat source 51. However, since it is supplied at room temperature, the temperature of the melting part is lowered, and there is a possibility that the molten lamination of the quartz glass raw material powder becomes non-uniform. In this case, it is preferable to dispose the sub heat source 52a for preheating before the main heat source 51, and the sub heat source 52b located away from the main heat source 51 functions as a heat retaining member for maintaining a molten state. Will do.
In this apparatus, the supply amount of the quartz glass raw material powder and the rotation speed of the furnace bottom 3 are determined according to the outer diameter and inner diameter of the quartz glass cylinder material 8 to be manufactured, so that the fused quartz glass raw material powder is uniformly laminated and solidified. The lowering speed of the bottom 3 is determined.

製作例１
酸水素火炎バーナーを石英ガラス原料粉を溶融するメイン熱源として使用して石英ガラス原料粉を溶融し、円筒状の石英ガラスシリンダー材料８を製作した。
石英ガラス原料粉が供給される原料供給装置を有するメインバーナー１本、サブバーナー３本を炉天井２に直径４００ｍｍの円周上に等間隔に配置した。
メインバーナーに水素を平均５９ｍ3／ｈｒ、酸素を平均２９．５ｍ3／ｈｒでメインバーナー及びサブバーナーに均等に供給し、石英ガラス原料粉の平均フィード量１．０ｋｇ／ｈｒでメインバーナーに供給した。
支柱７を０．０７ｒｐｍで回転させることによって炉底３をメインバーナーに対して回転させると共に、炉底を下降速度９．９ｍｍ／ｈｒで下降させたところ、外径約４３５ｍｍ×内径３６５ｍｍ×高さ２００ｍｍの石英ガラスシリンダー材料８を得た。得られた石英ガラスシリンダーを図４に示す。 Production example 1
The quartz glass raw material powder was melted by using an oxyhydrogen flame burner as a main heat source for melting the quartz glass raw material powder to produce a cylindrical quartz glass cylinder material 8.
One main burner and three sub-burners having a raw material supply device to which quartz glass raw material powder is supplied were arranged on the furnace ceiling 2 on a circumference of 400 mm in diameter at equal intervals.
Supply hydrogen to the main burner evenly to the main burner and sub-burner at an average of 59 m 3 / hr and oxygen at an average of 29.5 m 3 / hr, and supply to the main burner at an average feed rate of 1.0 kg / hr of quartz glass raw material powder did.
The furnace bottom 3 is rotated with respect to the main burner by rotating the column 7 at 0.07 rpm, and the furnace bottom is lowered at a descending speed of 9.9 mm / hr. A 200 mm quartz glass cylinder material 8 was obtained. The obtained quartz glass cylinder is shown in FIG.

製作例２
プラズマトーチを石英ガラス原料粉を溶融する熱源として使用して石英ガラス原料粉を溶融し、円筒状の石英ガラスシリンダー材料８を製作した。
直径４００ｍｍの円形の円周上にプラズマアークのカップリング領域が生成されるように、アノードトーチとカソードトーチを対称的に配置し、ツインプラズマトーチの出力を１００ｋｗとした。石英ガラス原料粉の平均フィード量を４．２ｋｇ／ｈｒとして、支柱７を１．００ｒｐｍで回転させると共に、下降速度１２．０ｍｍ／ｈｒで下降させたところ、外径約４４０ｍｍ×内径３６０ｍｍ×高さ２００ｍｍの石英ガラスシリンダー材料が得られた。 Production example 2
Using a plasma torch as a heat source for melting the quartz glass raw material powder, the quartz glass raw material powder was melted to produce a cylindrical quartz glass cylinder material 8.
The anode torch and the cathode torch were arranged symmetrically so that a plasma arc coupling region was generated on a circular circumference having a diameter of 400 mm, and the output of the twin plasma torch was 100 kW. When the average feed amount of the quartz glass raw material powder is 4.2 kg / hr and the support column 7 is rotated at 1.00 rpm and lowered at a descending speed of 12.0 mm / hr, the outer diameter is about 440 mm × the inner diameter is 360 mm × the height. A 200 mm quartz glass cylinder material was obtained.

以上に説明したように、本発明によれば、石英ガラスシリンダー材料を従来に比較して簡単な設備で製作することができる。
石英ガラス原料粉を溶融する熱源を円形に配置する際の直径、石英ガラス原料粉の供給量、また、石英ガラス原料粉を溶融する熱源への燃料またはエネルギーの供給量、炉底の回転速度、及び下降速度を適宜調整することによって石英ガラスシリンダー材料の外径と内径を調節することができる。 As described above, according to the present invention, the quartz glass cylinder material can be manufactured with simpler equipment than in the past.
Diameter when the heat source for melting the quartz glass raw material powder is arranged in a circle, the supply amount of the quartz glass raw material powder, the supply amount of fuel or energy to the heat source for melting the quartz glass raw material powder, the rotation speed of the furnace bottom, And the outer diameter and inner diameter of the quartz glass cylinder material can be adjusted by appropriately adjusting the descending speed.

１ 炉
２ 炉天井
３ 炉底
４ 炉壁
５ 熱源（火炎バーナー、プラズマトーチ）
５１ メイン熱源（メインバーナー）
６ 回転テーブル
７ 支柱
８ 石英ガラスシリンダー材料 1 Furnace 2 Furnace ceiling 3 Furnace bottom 4 Furnace wall 5 Heat source (flame burner, plasma torch)
51 Main heat source (main burner)
6 Rotary table 7 Prop 8 Quartz glass cylinder material

Claims (5)

炉天井に石英ガラス原料粉を溶融する焦点を有する熱源を円周上に配置し、この熱源で石英ガラス原料粉を溶融しながら炉底を熱源に対して回転させて溶融し、溶融した石英ガラス原料粉を炉底に落下させて円形状に溶融石英ガラスを積層させ、熱源の焦点が溶融石英ガラス積層体の上面から一定距離となるように炉底を降下させて固化させ、円筒形の石英ガラス積層体とする石英ガラスシリンダー材料の製造方法。 A quartz heat source that has a focal point for melting quartz glass raw material powder on the furnace ceiling is arranged on the circumference, and melts by rotating the furnace bottom with respect to the heat source while melting the quartz glass raw material powder with this heat source. The raw material powder is dropped onto the furnace bottom and fused quartz glass is laminated in a circular shape, and the furnace bottom is lowered and solidified so that the focal point of the heat source is at a certain distance from the upper surface of the fused silica glass laminate. A method for producing a quartz glass cylinder material for a glass laminate. 請求項１において、熱源が原料供給装置を有するメイン熱源単独、若しくは、メイン熱源とサブ熱源との組み合わせである石英ガラスシリンダー材料の製造方法。 2. The method for producing a quartz glass cylinder material according to claim 1, wherein the heat source is a main heat source having a raw material supply device alone or a combination of a main heat source and a sub heat source. 炉天井に円形に配置した焦点を有する熱源と、この熱源に対して炉底を回転させる回転手段及び昇降させる昇降手段と、石英ガラス原料粉を熱源に供給する原料供給手段とからなる石英ガラスシリンダー材料の製造装置。 A quartz glass cylinder comprising a heat source having a focus arranged in a circle on the furnace ceiling, a rotating means for rotating the furnace bottom with respect to the heat source, an elevating means for raising and lowering, and a raw material supply means for supplying quartz glass raw material powder to the heat source Material production equipment. 請求項３において、熱源の焦点が溶融積層された溶融石英ガラス積層体の上面位置となるように炉底の降下速度を制御する制御手段を有する石英ガラスシリンダー材料の製造装置。 4. The apparatus for producing a quartz glass cylinder material according to claim 3, further comprising a control means for controlling a descending speed of the furnace bottom so that a focal point of the heat source is an upper surface position of the fused and laminated quartz glass laminate. 請求項３において、熱源が、火炎バーナーまたはプラズマトーチのいずれかである石英ガラスシリンダー材料の製造装置。 4. The apparatus for producing a quartz glass cylinder material according to claim 3, wherein the heat source is either a flame burner or a plasma torch.
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US9533909B2 (en) 2014-03-31 2017-01-03 Corning Incorporated Methods and apparatus for material processing using atmospheric thermal plasma reactor
US9550694B2 (en) 2014-03-31 2017-01-24 Corning Incorporated Methods and apparatus for material processing using plasma thermal source
US10167220B2 (en) 2015-01-08 2019-01-01 Corning Incorporated Method and apparatus for adding thermal energy to a glass melt

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JPH07126025A (en) * 1993-10-27 1995-05-16 Shinetsu Quartz Prod Co Ltd Quartz glass article and production thereof
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9533909B2 (en) 2014-03-31 2017-01-03 Corning Incorporated Methods and apparatus for material processing using atmospheric thermal plasma reactor
US9550694B2 (en) 2014-03-31 2017-01-24 Corning Incorporated Methods and apparatus for material processing using plasma thermal source
US9908804B2 (en) 2014-03-31 2018-03-06 Corning Incorporated Methods and apparatus for material processing using atmospheric thermal plasma reactor
US10167220B2 (en) 2015-01-08 2019-01-01 Corning Incorporated Method and apparatus for adding thermal energy to a glass melt

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