CN207317517U - A kind of high-frequency plasma starts the device of fusing in cold crucible - Google Patents

A kind of high-frequency plasma starts the device of fusing in cold crucible Download PDF

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Publication number
CN207317517U
CN207317517U CN201721394976.7U CN201721394976U CN207317517U CN 207317517 U CN207317517 U CN 207317517U CN 201721394976 U CN201721394976 U CN 201721394976U CN 207317517 U CN207317517 U CN 207317517U
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plasma
induction
cold crucible
argon gas
plasma torch
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CN201721394976.7U
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唐皇哉
胡树金
张清勇
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Rui For Electronic Material (tianjin) Co Ltd
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Rui For Electronic Material (tianjin) Co Ltd
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Abstract

It the utility model is related to the device that a kind of high-frequency plasma starts fusing in cold crucible, the device includes cold crucible, the electromagnetic induction coil circumferentially disposed along cold crucible, induction plasma torch, along induction plasma torch around the plasma induction coil set, argon gas air supply system and jacking system;Induction plasma torch is located at the surface of cold crucible, induction plasma torch and plasma induction coil are all connected on the jacking system of control induction plasma torch lifting, the upper end of induction plasma torch sets argon gas to be passed through mouth, and argon gas is passed through mouth and is connected with argon gas air supply system.By ionizing argon gas, pure plasma flame is formed, melts powder, while sensing heating is carried out to material powder by the magnetic field that electromagnetic induction coil produces, complete the startup fusion process of cold crucible;So that startup fusion process is rapid, and the induction plasma does not have any electrode, ensure that startup fusion process is pollution-free.

Description

A kind of high-frequency plasma starts the device of fusing in cold crucible
Technical field
The utility model belongs to cold crucible and prepares high purity metal oxides technical field, more particularly to a kind of high frequency etc. from Daughter starts the device of fusing in cold crucible.
Background technology
Cold crucible wall is made of tens of water-cooled coppers, is directly heated material using load coil, is particularly suitable for The melting of high pure oxide.Induction coil produces induction field, and induction field acts on cold earthenware through the gap of plumbers shed Raw material in crucible.If raw material is conductor, sensing electric current can be induced, so as to carry out sensing heating to raw material.But due to High pure oxide (such as aluminium oxide, zirconium oxide) is insulator at normal temperatures, it is impossible to direct sensing heating, it is therefore desirable to pass through Special method obtains a certain amount of melt, by further heating of the melt in induction field, so that around driving The melting of oxide, this process commonly referred to as start fusing.Starting fusing has a variety of methods, for example is put into metal, Huo Zheshi Ink etc..
When carrying out high pure oxide production using cold crucible, it is desirable to which any pollution cannot be remained by starting fusing.If adopt With metal, unoxidized metal or graphite are either easily remained during graphite in high pure oxide, therefore this method uses There is limitation.
Patent CN104790034A discloses one kind water fuel plasma flame and melts a part of material, so as to start to open Dynamic fusing.Although this method water fuel will not pollute, the metal material of anode and cathode still can be by plasma band Enter into high-purity material, bring pollution.
The content of the invention
The utility model provides a kind of high-frequency plasma in cold earthenware to solve technical problem present in known technology Start the device of fusing in crucible, using plasma flame carries out startup fusing, ensures that startup fusion process is pollution-free.
The utility model is adopted the technical scheme that to solve technical problem present in known technology:
A kind of high-frequency plasma starts the device of fusing in cold crucible, including cold crucible and circumferentially disposed along cold crucible Electromagnetic induction coil, further include induction plasma torch, along induction plasma torch around set the plasma line of induction Circle, argon gas air supply system and jacking system;The induction plasma torch is located at the surface of cold crucible, the induction plasma Body torch and plasma induction coil be all connected to control induction plasma torch lifting jacking system on, it is described sensing etc. from The upper end of daughter torch sets argon gas to be passed through mouth, and the argon gas is passed through mouth and is connected with argon gas air supply system.
The supply frequency of the plasma induction coil is 3M Hz.
The jacking system includes supporting rack, turbine screw lift, motor, lead and lifting support;The turbine Screw lift is fixed on the support supporting plate inside supporting rack, and the top of the screw of the turbine screw lift is fixed on liter On the lower face of descending branch frame, the worm screw of the turbine screw lift is connected by shaft coupling with the output shaft of motor;It is described to lead Pilot hole to the top of column through support supporting plate, and be fixed on the lower face of lifting support, the screw and lead Bottom is equipped with a limited block, and the induction plasma torch is fixed on lifting support.
A kind of method that high-frequency plasma using above device starts fusing in cold crucible, includes the following steps:
1) material powder is loaded into cold crucible, makes material powder highly on electromagnetic induction coil along height and lower edge Between height;
2) drive induction plasma torch and plasma induction coil to move by jacking system, make induction plasma The distance between the lower port of torch and material powder surface are 10cm;
3) argon gas air supply system is opened, the argon gas of argon gas from induction plasma torch upper end is passed through mouth entrance, from sensing The lower port outflow of plasma torch, and adjust to desired flow;
4) power supply of plasma induction coil is opened, ionizes the argon gas in induction plasma torch, forms plasma Body flame;
5) plasma flame is ejected into material powder surface, melts material powder, while opens electromagnetic induction coil Power supply, by electromagnetic induction coil produce magnetic field to melt carry out sensing heating;
6) when forming enough melts, induction plasma torch and plasma induction coil are moved by jacking system Walk.
In the step 1), material powder is highly in the middle of electromagnetic induction coil height.
In the step 3), the flow of argon gas is 1-8m3/min。
The principle of the utility model enters in high-frequency plasma torch for argon gas, and radio-frequency induction coil ionizes argon gas, shape Into pure plasma flame, plasma flame is ejected into high pure oxide powder surface, melts high pure oxide powder Change, form melt, while melt is heated by electromagnetic induction coil, will by jacking system when forming enough melts Induction plasma torch and plasma induction coil are removed, and complete the startup fusion process of cold crucible.
The utility model has the advantages and positive effects of:
For the utility model by the way that argon gas is sent into induction plasma torch, radio-frequency induction coil ionizes argon gas, is formed Pure plasma flame, plasma flame melts high purity metal oxides powder, while passes through electromagnetic induction coil The magnetic field of generation carries out sensing heating to material powder, when forming enough melts, by jacking system by induction plasma Body torch and plasma induction coil are removed, and complete the startup fusion process of cold crucible;Induction plasma is the purest Superelevation temperature-heat-source, direct sensing heating argon gas, DIE Temperature is up to 10,000 degree, it is ensured that quick igniting so that it is fast to start fusion process Speed, and the induction plasma does not have any electrode, ensure that startup fusion process is pollution-free.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model.
In figure:1- cold crucibles;2- electromagnetic induction coils;3- induction plasma torches;4- plasma induction coils;51- Supporting rack;52- motors;53- leads;54- lifting supports;55- supports supporting plate;56- screws;57- worm screws;58- limited blocks;6- Argon gas is passed through mouth;7- material powders;8- plasma flames.
Embodiment
For that can further appreciate that the invention, features and effects of the utility model, the following examples are hereby given, and coordinates Attached drawing describes in detail as follows:
Referring to Fig. 1, a kind of high-frequency plasma starts the device of fusing, including cold crucible 1 in cold crucible, along cold earthenware The circumferentially disposed electromagnetic induction coil 2 of crucible 1, induction plasma torch, along induction plasma torch 3 around the plasma set Induction coil 4, argon gas air supply system and jacking system;Induction plasma torch is located at the surface of cold crucible 1, induction plasma Body torch 3 and plasma induction coil 4 are all connected on the jacking system of control induction plasma torch lifting, plasma body-sensing Answer coil 4 by cable with control its work plasma electrical source case connect, plasma electrical source case is installed on jacking system Lifting support 54 on, for the movement of be more convenient for induction plasma torch 3 and plasma induction coil 4, by induction plasma Body torch 3 and plasma induction coil 4 are fixed on the lifting support 54 of jacking system, and the upper end of induction plasma torch 3 is set Put argon gas and be passed through mouth 6, argon gas is passed through mouth 6 and is connected with argon gas air supply system.3 He of induction plasma torch is driven by jacking system Plasma induction coil 4 moves, and jacking system includes supporting rack 51, turbine screw lift, motor 52, lead 53 and rises Descending branch frame 54;Turbine screw lift is fixed on the support supporting plate 55 inside supporting rack 51, the screw of turbine screw lift 56 top is fixed on the lower face of lifting support 54, and the worm screw 57 of turbine screw lift passes through shaft coupling and motor 52 Output shaft is connected;The top of lead 53 passes through the pilot hole of support supporting plate 55, and is fixed on the lower face of lifting support 54, The bottom of screw 56 and lead 53 is equipped with a limited block 58, avoids excessive operation turbine screw lift, makes turbine screw The screw of elevator departs from.Worm screw 57 is driven to rotate by motor 52, worm screw 57 drives the turbine rotation engaged, and then band Dynamic screw 56 moves up and down, and screw 56, which moves up and down, drives lifting support 54 to move up and down, and then drives induction plasma Torch moves up and down, and without manually being operated, alleviates the labor intensity of worker, improves work efficiency, and avoids manually It is dangerous caused by operation;And further positioning is done by lead 53, prevent lifting support 54 from being transported in horizontal circumferencial direction It is dynamic, it is ensured that the lifting of lifting support is steady.
A kind of method that high-frequency plasma using above device starts fusing in cold crucible, includes the following steps:
1) material powder 7 is loaded into cold crucible 1,7 height of material powder is in the center of 2 height of electromagnetic induction coil Between, induced field is most strong at this time;
2) drive induction plasma torch 3 and plasma induction coil 4 to move by jacking system, make induction plasma The distance between the lower port of body torch 3 and 7 surface of material powder are 10cm, ensure the DIE Temperature of plasma flame sprayed It is ejected on material powder surface;
3) argon gas air supply system is opened, the argon gas of argon gas from 3 upper end of induction plasma torch is passed through mouth 6 and enters, from sense Answer the lower port of plasma torch 3 to flow out, and adjust the flow of argon gas in 1-8m3/min;
4) power supply of plasma induction coil 4 is opened, the supply frequency of adjustment plasma induction coil 4 is 3MHz, The argon gas in induction plasma torch 3 is ionized, forms plasma flame 8;
5) plasma flame 8 is ejected into 7 surface of material powder, melts material powder, while opens electromagnetic induction line The power supply of circle 2, sensing heating is carried out by the magnetic field that electromagnetic induction coil 2 produces to melt;
6) when forming enough melts, by jacking system by induction plasma torch 3 and plasma induction coil 4 Remove cold crucible.
The above is only the preferred embodiment to the utility model, and not the utility model is made in any form Limitation, it is every according to the technical essence of the utility model to any simple modification made for any of the above embodiments, equivalent variations with Modification, belongs in the range of technical solutions of the utility model.

Claims (3)

1. a kind of high-frequency plasma starts the device of fusing in cold crucible, including cold crucible and circumferentially disposed along cold crucible Electromagnetic induction coil, it is characterised in that:Induction plasma torch is further included, along induction plasma torch around the plasma set Body induction coil, argon gas air supply system and jacking system;The induction plasma torch is located at the surface of cold crucible, the sense Plasma torch and plasma induction coil is answered to be all connected on the jacking system of control induction plasma torch lifting, it is described The upper end of induction plasma torch sets argon gas to be passed through mouth, and the argon gas is passed through mouth and is connected with argon gas air supply system.
2. a kind of high-frequency plasma according to claim 1 starts the device of fusing in cold crucible, it is characterised in that: The supply frequency of the plasma induction coil is 3MHz.
3. a kind of high-frequency plasma according to claim 1 starts the device of fusing in cold crucible, it is characterised in that: The jacking system includes supporting rack, turbine screw lift, motor, lead and lifting support;The turbine screw lifting Machine is fixed on the support supporting plate inside supporting rack, and the top of the screw of the turbine screw lift is fixed on lifting support On lower face, the worm screw of the turbine screw lift is connected by shaft coupling with the output shaft of motor;The top of the lead The pilot hole through support supporting plate is held, and is fixed on the lower face of lifting support, the bottom of the screw and lead is all provided with There is a limited block, the induction plasma torch is fixed on lifting support.
CN201721394976.7U 2017-10-25 2017-10-25 A kind of high-frequency plasma starts the device of fusing in cold crucible Active CN207317517U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107606946A (en) * 2017-10-25 2018-01-19 睿为电子材料(天津)有限公司 The apparatus and method that a kind of high-frequency plasma starts fusing in cold crucible
CN109734286A (en) * 2019-03-18 2019-05-10 中国核电工程有限公司 Melting method and device are opened in glass raw material preheating
CN111876614A (en) * 2020-09-01 2020-11-03 南通泰德电子材料科技有限公司 Non-contact high-frequency heating purification device for high-purity aluminum

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107606946A (en) * 2017-10-25 2018-01-19 睿为电子材料(天津)有限公司 The apparatus and method that a kind of high-frequency plasma starts fusing in cold crucible
CN109734286A (en) * 2019-03-18 2019-05-10 中国核电工程有限公司 Melting method and device are opened in glass raw material preheating
CN111876614A (en) * 2020-09-01 2020-11-03 南通泰德电子材料科技有限公司 Non-contact high-frequency heating purification device for high-purity aluminum

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