JP2013108757A - Circularity measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve a circularity measuring instrument capable of preventing a measurement point from being deviated from a measuring plane by changing only an attachment direction of a detector holder without changing attachment of a detector even when changing a measuring position and a measuring direction.SOLUTION: The circularity measuring instrument includes: a base 21; a turntable 22 for rotating a placed workpiece 32; a column 24 extended in parallel with a rotational axis of the turntable and capable of moving in parallel with a measuring plane including the rotational axis of the turntable and a measurement point of the workpiece; a carriage 25 movably supported along the column 24; a detector holder 29 attached to the carriage 25; and a detector 30 attached to the detector holder 29 so that a probe 31 can be displaced on the measuring plane. The detector holder 29 can be attached to the carriage 25 on a different rotational position around the rotational axis vertical to the measuring plane, and even when the detector holder is attached to the different rotational position, a state that the probe can be displaced on the measuring plane is maintained.

Description

  The present invention relates to a roundness measuring apparatus.

  A roundness measuring device that measures the roundness of a cylindrical outer peripheral surface or inner peripheral surface of an object to be measured (workpiece) is widely used.

FIG. 1 is an external view of a conventional roundness measuring apparatus.
The roundness measuring device includes a base 1 having a base, a rotatable stage 2 provided on the base 1, a rotation drive unit 3 having a motor for rotationally driving the stage 2, and a base. 1, a carriage 5 movable along the column 4, an arm 6 movable relative to the carriage 5, a detector holder 9 attached to the tip of the arm 6, and a detector And a detector 10 attached to the holder 9. The detector 10 includes a measuring element 11 and a displacement detection unit such as a differential transformer, and outputs an electrical signal indicating the displacement of the measuring element 11.

  The workpiece 12 is placed on the table 2 and rotated so that the central axis of the cylindrical surface of the workpiece 12 substantially coincides with the rotation axis of the table 2. The column 4 is a column extending in parallel with the rotation axis of the mounting table 2. The carriage 5 is movable along the column 4 and is generally moved manually along the guide surface of the column 4, but may be automatically moved using a motor or the like. The arm 6 is manually moved to the guide surface of the carriage 5, but may be automatically moved using a motor or the like. The detector holder 9 is an L-shaped member, with one end attached to the tip of the arm 6 and the detector 10 attached to the other end.

  When performing measurement, the workpiece 12 is placed on the mounting table 2 such that the central axis of the cylindrical surface of the workpiece 12 substantially coincides with the rotation axis of the mounting table 2. The carriage 5 is moved to adjust the vertical position so that the probe 11 contacts the position measured by the workpiece 12, and the arm 6 is moved to adjust the radial position. In this state, the roundness of the workpiece 12 is measured. When high-precision measurement is performed, the workpiece 12 is rotated, and the center axis of the cylindrical portion of the workpiece 12 and the rotation axis of the mounting table 2 are rotated. The eccentricity is measured, and the measurement is performed after the center axis of the cylindrical portion of the work 12 is adjusted to be exactly coincident with the rotation axis of the work table 2 by the XY moving mechanism provided on the work table 2. At this time, it is desirable that the measuring element 11 is near the center of the displacement range.

FIG. 2 is a top view of the roundness measuring apparatus of FIG.
As shown in FIG. 2, the column 4 is provided on the right side of the mounting table 2. The arm 6, the detector holder 9, and the detector 10 are arranged on a straight line, and the rotation center axis of the stage 2 is positioned on the extension. The measuring element 11 is provided at the tip of the detector 10 and is displaced in a plane formed by this straight line and the rotation center axis of the mounting table 2. Therefore, when the diameter of the cylindrical surface to be measured by the workpiece 12 is different, the arm 6 is moved so that the probe 11 contacts the cylindrical surface to be measured. Here, the plane formed by the measurement point in contact with the cylindrical surface measured by the probe 11 and the rotation center axis of the mounting table 2 is referred to as a measurement plane, and the direction between the rotation center axis of the mounting table 2 and the measurement point is the diameter. It is called a direction. In other words, even when the diameter of the cylindrical surface to be measured is different, the arm 6, the detector holder 9, and the detector 10 are moved in the radial direction along the measurement plane, and the measuring element 11 is an intersection of the measurement plane and the cylindrical surface. It touches the cylindrical surface on the line to be moved and is displaced on the measurement plane. The displacement of the probe 11 on the measurement plane, that is, in the plane including the rotation center axis of the stage 2 (the central axis of the cylindrical surface) is an essential matter for measuring the roundness with high accuracy. .

  The first reason for providing the column 4 on the right side of the stage 2 (or the left side) is to move the arm 6 on the measurement plane, and the second reason is that when measuring different cylindrical surfaces, This is because the difference in the radius (diameter) of the cylindrical surface can be detected by detecting the movement amount of the arm 6.

  For the reasons described above, in the conventional roundness measuring device, the column 4 is provided on the side (right side or left side) of the mounting table 2. Therefore, the base 1 to which the column 4 is fixed is a rectangle that is long in the radial direction in the top view. Furthermore, since the arm 6 is moved in the radial direction according to the radius of the cylindrical surface to be measured, it is necessary to determine the installation space in consideration of the case where the arm 6 has moved to the maximum in the right direction. For the reasons described above, the conventional roundness measuring apparatus requires a rectangular installation space that is long in the radial direction, and the space required for installation is large.

Next, the measurement operation will be described in more detail.
FIGS. 3A and 3B are diagrams for explaining an operation when measuring the roundness of the outer cylindrical surface 12, FIG. 3A is a top view, FIG. 3B is a side view, and FIG. 3C is a workpiece (outside). The displacement of the probe 11 in contact with the (cylindrical surface) 12 is shown.

  As described above, the arm 6, the detector holder 9, and the detector 10 are arranged in a substantially straight line along the measurement plane, and the probe 11 is displaced in the measurement plane. As shown by solid lines in FIGS. 3A and 3B, the carriage 5 is positioned so that the measuring element 11 is at a height position measured by the outer cylinder surface 12 in a state where the measuring element 11 is not in contact with the outer cylinder surface 12. Adjust the height. Thereafter, as indicated by a broken line, the arm 6 is moved with respect to the carriage 5 to bring the measuring element 11 into contact with the outer cylindrical surface 12. Thus, as shown in FIG. 3C, when the probe 11 comes into contact with the outer cylinder surface 12 and the outer cylinder surface 12 rotates, the probe 11 changes in radius of the outer cylinder surface 12, that is, true. Displaces according to the circularity. The detector 10 detects the amount of displacement of the probe 11 and outputs it as an electrical signal.

  In recent years, detection signals have been digitally processed and corrected. The positional deviation (eccentricity) between the central axis of the cylindrical surface and the rotation axis of the mounting table 2, and the central axis of the cylindrical surface and the mounting material An error caused by the direction difference of the rotation axis of the table 2 can be corrected to some extent.

  The detector 10 supports the measuring element 11 so as to be displaced within a predetermined plane. When measuring roundness, it is necessary that the plane on which the probe 11 is displaced coincide with the measurement plane, and if it does not coincide, a measurement error occurs.

  FIG. 4 is an external view showing a state in which the roundness of the outer cylindrical surface of the work 12 having a collar portion is measured.

  As shown in FIG. 4, the measuring element 11 is brought into contact with the outer cylinder surface to be measured. Here, the point where the probe 11 of the workpiece 12 contacts is referred to as a measurement point P. The outer cylinder surface and the measurement plane intersect at two places, and there are two intersecting lines. Although the measurement point P can exist on any crossing line, the measurement point P on the side where the column 4 is provided is usually selected to perform measurement. This is because, in order to select a measurement point on the side opposite to the side on which the column 4 is provided, it is necessary to increase the amount of movement of the arm 6, and in the case of a workpiece 12 having a large radius, the arm 6 is attached to the workpiece 12. This is because contact may occur.

  FIG. 5 is a side view showing a state in which the roundness of the outer cylindrical surface of the work 12 having a collar portion is measured.

  As shown in FIG. 5, the L-shaped detector holder 9 is attached to the holder fixing portion 7 at the tip of the arm 6 with a screw or the like. The detector 10 is attached to the detector joint 13 at the tip of the detector holder 9 with a screw or the like. The detector 10 has an elongated shape and is attached to the detector holder 9 so as to extend parallel to the rotation axis of the stage 2. Here, it is desirable that the probe 11 extends beyond the side surface of the detector 10. This is because when measuring the workpiece 12 having a long outer cylinder surface, the depth from the upper surface of the workpiece 12 in the portion below the outer cylinder surface that can be measured is limited. As shown in FIG. 5, when the probe 11 extends beyond the side surface of the detector 10, the measurement depth from the tip of the probe 11 to the detector holder 9 is the measurement depth. If the probe 11 does not extend to the outside of the side surface of the detector 10, there is a problem that the length of the probe 11 becomes almost the measurement depth and becomes very short.

  The reason why the detector holder 9 is L-shaped and the detector 10 is attached is inverted U-shaped when measuring the roundness of the inner cylindrical surface of the workpiece 12, as will be described later. is there.

  FIG. 6 is an external view showing a state in which the roundness of the inner cylindrical surface of the workpiece 12 having a collar portion is measured.

  As shown in FIG. 6, the measuring element 11 is brought into contact with the measurement point P on the inner cylinder surface. As the measurement point P, in order to reduce the movement amount of the arm 6, the measurement point on the side where the column 4 is provided is generally selected.

  FIG. 7 is a side view of a state in which the roundness of the inner cylindrical surface of the workpiece 12 having a collar portion is measured.

As shown in FIG. 7, a space is formed between the vertical portion of the L-shaped detector holder 9 and the detector 10, and the portion between the outer cylinder surface and the inner cylinder surface can be accommodated in this space. In the case of the inner cylinder surface, it is possible to measure the roundness to the corresponding depth.
Here, when the mounting direction of the detector 10 to the detector holder 9 is changed, the tip position of the probe 11, that is, the measurement point changes. Therefore, as shown in FIGS. 5 and 7, the probe 11 is configured such that the tip of the probe 11 is positioned on the rotation axis to which the detector 10 is attached. Thereby, even if the attachment direction with respect to the detector joint 13 at the tip of the detector holder 9 of the detector 10 is rotated by 180 degrees, the position of the tip of the probe 11 does not change, and the measurement points coincide.

  As apparent from the comparison with FIG. 5, when the measuring element 11 is brought into contact with the measuring point on the side where the column 4 on the outer cylinder surface and the inner cylinder surface is provided, the direction of the detector 10 attached to the detector holder 9 is 180. Need to rotate degrees. Therefore, when the roundness of the inner cylinder surface is measured after measuring the roundness of the outer cylinder surface, or vice versa, the detector 10 is detached from the detector joint 13 at the tip of the detector holder 9 and 180 After the rotation, the detector 10 needs to be attached to the detector joint 13 at the tip of the detector holder 9 again. When the attachment of the detector 10 is changed, it is inevitable that a deviation occurs in the attachment position and the rotation direction.

  The roundness measuring apparatus is required not only to measure the roundness of the outer cylinder surface and the inner cylinder surface but also to measure the flatness of the collar portion of the workpiece having the collar portion.

  FIG. 8 is an external view showing a state in which the flatness of the upper surface of the collar portion of the work 12 having the collar portion is measured.

  From the state shown in FIG. 6, the attachment direction of the L-shaped detector holder 9 with respect to the tip of the arm 6 (holder fixing portion) is rotated 90 degrees, and the probe 11 is on the intersection line between the upper surface of the collar portion and the measurement plane. Place them so that they touch each other. Then, when the workpiece 12 is rotated and the displacement of the probe 11 is measured by the detector 10, the deviation (flatness) of the collar portion from the plane can be measured. The reason why the L-shaped detector holder 9 is rotated and attached to the back side is to facilitate the operation from the front side.

  FIG. 9 is an external view showing a state in which the flatness of the lower surface of the collar portion of the work 12 having the collar portion is measured. 8 differs from the state of FIG. 8 in that the direction of the detector 10 attached to the detector holder 9 is rotated by 180 degrees.

  As described above, in the conventional roundness measuring device, the arm of the L-shaped detector holder 9 is used for measuring the roundness of the cylindrical surface of the workpiece and for measuring the flatness of the collar portion. A first rotation shaft for rotating the attachment direction with respect to the tip of 6 (holder fixing portion) by 90 degrees was provided. Furthermore, it is detected when measuring the roundness of the outer cylinder surface, when measuring the roundness of the inner cylinder surface, when measuring the flatness of the upper surface of the collar part, and when measuring the flatness of the lower surface. The second rotating shaft for rotating the attaching direction of the detector 10 at the tip of the detector holder 9 to the detector joint 13 by 180 degrees is provided. That is, the conventional roundness measuring device requires two rotating shafts.

  Further, as shown in FIGS. 5 and 7, when the attachment direction of the detector holder 9 at the tip of the detector 10 to the detector joint 13 is rotated by 180 degrees, the position of the tip of the probe 11 changes, and the measurement point Will not match. As shown in FIGS. 5 and 7, even if the tip of the measuring element 11 is positioned on the rotation axis for mounting the detector 10, a change in position due to mounting error is inevitable.

  FIG. 10 and FIG. 11 are diagrams showing examples of other detectors in which the measurement point does not change due to the rotation of the detector, (A) shows the case of measuring the outer cylinder surface, and (B) shows the inner cylinder. The case where a surface is measured is shown.

  As shown in FIGS. 10 and 11, a special measuring element 14 whose tip is located on the second rotating shaft for attaching the detector 10 to the detector joint 13 is used. With this configuration, the position of the measurement point hardly changes even when the detector 10 is rotated. However, since the detector 10 and the detector holder 9 exist above the probe 10, there is a problem that the measurement depth is limited.

  Furthermore, since the first rotation axis for rotating the L-shaped detector holder 9 does not necessarily coincide with the measurement plane, the angle attached to the tip (holder fixing portion) of the arm 6 of the detector holder 9 is changed. Then, there is a problem that the tip of the probe 11 is displaced from the measurement plane, in other words, the measurement point is not located on the measurement plane.

  Of course, the measurement points for measuring the flatness of the upper surface and the lower surface of the collar portion do not necessarily have to be located on the measurement plane, but it is desirable that the deviation is small in order to accurately manage the positions of the measurement points.

JP-A-8-313247 JP 2003-302218 A JP 2006-145344 A

  In the present invention, even when changing the position and direction of measurement of the workpiece, it is not necessary to change the mounting of the detector, it is only necessary to change the mounting direction of the detector holder, the measuring point does not change, and the measuring point is changed. The purpose is to realize a roundness measuring device that does not deviate from the measurement plane.

  In order to solve the above problems, the roundness measuring device of the present invention is provided with a column movable on the back side parallel to the measurement plane, and an L-shaped detector on a carriage movable in the vertical direction along the column. Attach the holder, and then attach the detector to the detector holder so that the probe can be displaced on the measurement plane.When the column is moved, the probe moves on the measurement plane and the mounting direction of the detector holder is changed. Also, the probe is configured to be positioned on the measurement plane.

  That is, the roundness measuring apparatus of the present invention includes a base, a turntable that is fixed to the base and rotates a mounted work, and extends parallel to the rotation axis of the turntable, and the rotation axis of the turntable A column movable in parallel to the measurement plane including the workpiece measurement point, a carriage supported so as to be movable along the column, a detector holder attached to the carriage, and the probe can be displaced on the measurement plane. A detector attached to the detector holder, and the detector holder can be attached to the carriage at different rotational positions around a rotational axis perpendicular to the measurement plane, and can be attached to different rotational positions. It is characterized in that the state in which the probe of the detector can be displaced in the measurement plane is maintained.

  In the roundness measuring apparatus of the present invention, the column moves to both sides of the mounting table, so that the roundness of the outer cylindrical surface and the inner cylindrical surface can be measured without changing the mounting direction of the detector. Further, since the detector holder rotates about a rotation axis perpendicular to the measurement plane, the measuring element remains on the measurement plane even if the detector holder is rotated when measuring the flatness of the upper and lower surfaces of the collar portion. To position. For this reason, one rotation axis is sufficient.

  Even if the detector holder can be attached to the holder fixing part manually (manually) by changing the mounting direction, it is possible to change the mounting direction automatically by providing a holder rotating mechanism that rotates around the holder fixing part. Also good.

  According to the present invention, it is possible to realize a roundness measuring device that is small in size, easy to operate, and has a small measurement error by reducing a position error accompanying a posture change.

FIG. 1 is an external view of a conventional roundness measuring apparatus. FIG. 2 is a top view of the roundness measuring apparatus of FIG. FIG. 3 is a diagram for explaining an operation in measuring the roundness of the outer cylindrical surface. FIG. 4 is an external view showing a state in which the roundness of the outer cylindrical surface of the workpiece having the collar portion is measured. FIG. 5 is a side view of a state in which the roundness of the outer cylindrical surface of the workpiece having the collar portion is measured. FIG. 6 is an external view showing a state in which the roundness of the inner cylindrical surface of the workpiece having the collar portion is measured. FIG. 7 is a side view of a state in which the roundness of the inner cylindrical surface of the workpiece having the collar portion is measured. FIG. 8 is an external view showing a state in which the flatness of the upper surface of the collar portion of the workpiece having the collar portion is measured. FIG. 9 is an external view showing a state in which the flatness of the lower surface of the collar portion of the workpiece having the collar portion is measured. FIG. 10 is a diagram illustrating an example of a detector in which a change in measurement point due to rotation of the detector does not occur. FIG. 11 is a diagram illustrating an example of a detector in which a change in measurement point due to rotation of the detector does not occur. FIG. 12 is an external view of the roundness measuring apparatus according to the first embodiment of the present invention as seen from the front side. FIG. 13 is an external view of the roundness measuring apparatus according to the first embodiment of the present invention viewed from the back side. FIG. 14 is a top view of the roundness measuring apparatus according to the first embodiment. FIG. 15 is a side view showing a state in which the roundness of the outer cylindrical surface of the workpiece having the collar portion is measured. FIG. 16 is an external view showing a state in which the roundness of the inner cylindrical surface of the workpiece having the collar portion is measured. FIG. 17 is a side view showing a state in which the roundness of the inner cylindrical surface of the workpiece having the collar portion is measured. FIG. 18 is a diagram illustrating a state in which the flatness of the upper surface of the collar portion of the workpiece having the collar portion is measured. FIG. 19 is a diagram illustrating a state in which the flatness of the lower surface of the collar portion of the workpiece having the collar portion is measured. FIG. 20 is an external view seen from the front side of the roundness measuring apparatus according to the second embodiment of the present invention.

  12 and 13 are external views of the roundness measuring apparatus according to the first embodiment of the present invention as seen from the front side and the back side.

  The roundness measuring apparatus according to the first embodiment includes a table-like base 21, a rotatable table 22 provided on the base 21, and a rotational drive having a motor for rotationally driving the table 22. (Not shown), a column 24 provided on the back surface of the base 21, a carriage 25 movable along the column 24, a detector holder 29 attached to the carriage 25, and attached to the detector holder 29 Detector 30. The detector 30 has a probe 31 and a displacement detector such as a differential transformer, and outputs an electrical signal indicating the displacement of the probe 31. Since the detector holder 29 is attached, the carriage 25 is also referred to as a holder fixing portion.

  The column 24 is provided with vertical guides 51 and 52 and a vertical feed screw 53. The carriage 25 is engaged with the vertical feed screw 53 by a vertical feed nut. When the vertical feed knob 55 is rotated, the vertical feed screw 53 is rotated to move in the vertical direction. Instead of the vertical feed knob 55, a motor or the like that rotates the vertical feed screw 53 can be provided to automatically move the carriage 25 in the vertical direction. Since the carriage 25 is guided by the highly accurate vertical guides 51 and 52, the posture does not change even if it moves. Therefore, even if the detector holder 29 and the detector 30 attached to the carriage 25 move in the vertical direction, the posture does not change, and only the position (height) in the vertical direction changes.

  Further, radial guides 71 and 72 and a radial feed screw 73 are provided on the back surface of the base 21. The column 24 is engaged with the radial feed screw 73 by a radial feed nut 74, and rotating the radial feed knob 75 causes the radial feed screw 73 to rotate and move parallel to the radial direction. The column 24 is movable to the right side and the left side of the stage 22. Instead of the radial feed knob 75, a motor or the like that rotationally drives the radial feed screw 73 may be provided to automatically move the column 24 parallel to the radial direction. Since the column 24 is guided by the high-precision radial guides 71 and 72, the posture does not change even if it moves. Therefore, even if the detector holder 29 and the detector 30 attached to the column 24 (carriage 25) move in parallel with the radial direction, the posture does not change, and only the radial position changes. In other words, in order to measure the roundness of cylindrical surfaces having different radii, even if the column 24 is moved parallel to the radial direction, the probe 31 of the detector 30 contacts the workpiece 32 on the measurement plane.

The detector holder 29 and the detector 30 are the same as those of the conventional example shown in FIG.
In order to detect a change in the height position of the upper surface and the lower surface of the collar portion of the work 32, that is, flatness, the detector holder 29 can be attached to the carriage 25 in three different directions by 90 degrees. For this reason, an attachment shaft extending in a direction perpendicular to the measurement plane is provided on the holder fixing portion of the carriage 25, and an alignment member is provided on the detector holder 29. The attachment shaft is aligned in three directions that are different by 90 degrees. It is comprised so that a member may be fitted and attached. A conventional mechanism can be used as it is.

  Since the detector 30 can measure the outer cylindrical surface, the inner cylindrical surface, and the upper and lower surfaces of the collar portion without changing the mounting direction with respect to the detector holder 29, the mounting direction is changed with respect to the detector holder 29. There is no need to make it possible. However, when the general-purpose detector 30 can be attached, the attachment direction may be changed.

  When performing measurement, the work 32 is placed on the stage 2 such that the central axis of the cylindrical surface of the work 32 substantially coincides with the rotation axis of the stage 22. The carriage 25 is moved to adjust the vertical position so that the probe 31 contacts the position to be measured by the workpiece 32, and the column 24 is moved to adjust the radial position. In this state, the roundness of the workpiece 32 is measured. When high-precision measurement is performed, the workpiece 32 is rotated, and the center axis of the cylindrical portion of the workpiece 32 and the rotation axis of the mounting table 22 are rotated. The eccentricity is measured, and the XY movement mechanism provided on the mounting table 22 is adjusted so that the central axis of the cylindrical portion of the workpiece 32 is more accurately aligned with the rotation axis of the mounting table 22. At this time, it is desirable that the probe 31 is near the center of the displacement range.

FIG. 14 is a top view of the roundness measuring apparatus according to the first embodiment.
As shown in FIG. 14, the column 24 is provided on the back surface of the stage 22 so as to be movable in parallel with the measurement plane. The detector holder 29 extends from the carriage 25 in a direction perpendicular to the measurement plane, and the detector 30 is attached so that the probe 31 is displaced on the measurement plane. When the diameters of the cylindrical surfaces to be measured by the workpiece 32 are different, the column 24 is moved in parallel with the measurement plane, so that the detector holder 29 and the detector 30 are moved in the radial direction along the measurement plane. 31 contacts the cylindrical surface on a line intersecting the measurement plane and the cylindrical surface, and is displaced on the measurement plane. As described above, the displacement of the probe 31 on the measurement plane is an essential item for measuring the roundness with high accuracy, and the first embodiment satisfies this essential item.

  As is clear from comparison between FIG. 2 and FIG. 14, the roundness measuring device of the first embodiment has a significantly longer lateral length (radial direction) than the conventional roundness measuring device. It can be seen that the installation space is greatly reduced because the arm does not protrude sideways.

  As described above, in the conventional roundness measuring device, the difference in the radius (diameter) of the cylindrical surface can be detected by detecting the movement amount of the arm 6, but the roundness measuring device of the first embodiment. However, similarly, it can be detected by detecting the amount of movement of the column 24.

  Next, the case where each part of the workpiece is measured by the roundness measuring apparatus of the first embodiment will be described in detail.

  FIG. 15 is a side view showing a state in which the roundness of the outer cylindrical surface of the workpiece 32 having a collar portion is measured. As shown in FIG. 15, the probe 31 is brought into contact with the measurement point P on the outer cylinder surface to be measured.

FIG. 16 is an external view showing a state in which the roundness of the inner cylindrical surface of the workpiece 32 having a collar portion is measured.
FIG. 17 is a side view showing a state in which the roundness of the inner cylindrical surface of the workpiece 32 having the collar portion is measured.

  As shown in FIGS. 16 and 17, the probe 31 is brought into contact with the measurement point P on the inner cylinder surface. As the measurement point P, a measurement point on the inner cylinder surface opposite to the measurement point at which the roundness of the outer cylinder surface in FIG. The column 24 can be moved on both sides of the rotation axis of the mounting table 22 over the entire plane of the base 21, and no particular problem occurs even at the opposite measurement point.

  The direction of the detector 30 when measuring the roundness of the inner cylinder surface is the same as when measuring the roundness of the outer cylinder surface, and it is necessary to change the attachment to the detector holder 29 in the detection period 30. There is no.

  FIG. 18 is a diagram illustrating a state in which the flatness of the upper surface of the collar portion of the workpiece 32 having the collar portion is measured, (A) is an external view, and (B) is a side view.

  From the state shown in FIG. 16, the attachment direction of the L-shaped detector holder 29 with respect to the carriage 25 (holder fixing portion) is rotated by 90 degrees, and the probe 31 contacts on the intersection line between the upper surface of the collar portion and the measurement plane. Arrange to do. Then, when the workpiece 32 is rotated and the displacement of the probe 31 is measured by the detector 30, the deviation (flatness) of the collar portion from the plane can be measured. As described above, even if the attachment direction of the L-shaped detector holder 9 is changed by 90 degrees, the probe 31 only rotates in the measurement plane.

  FIG. 19 is a diagram illustrating a state in which the flatness of the lower surface of the collar portion of the workpiece 32 having the collar portion is measured, (A) is an external view, and (B) is a side view. The direction in which the carriage 25 of the L-shaped detector holder 29 is attached differs from the state of FIG. 18 by 180 degrees. In other words, the L-shaped detector holder 29 is attached by rotating 90 degrees in the reverse direction.

  As described above, in the roundness measuring apparatus according to the first embodiment, it is only necessary to provide one rotation shaft for rotating the L-shaped detector holder 29 with respect to the carriage 25, and further, the L-shaped detection is performed. Since the instrument holder 29 is rotated about a rotation axis perpendicular to the measurement plane, the measurement point is located in the measurement plane even if it is rotated, and there is no need to rotate the detector 30. The position, that is, the measurement point does not change.

  FIG. 20 is an external view seen from the front side of the roundness measuring apparatus according to the second embodiment of the present invention.

  In the roundness measuring apparatus according to the second embodiment, a motor 33 and gears 34 and 35 are provided in a holder fixing portion of a carriage 25 to which a detector holder 29 is attached, and 90 degrees each in accordance with a signal from the outside. Unlike the second embodiment, the other parts are the same in rotating. In other words, in the roundness measuring apparatus of the second embodiment, the motor holder 33 is driven by an external signal, so that the detector holder 29 shown in FIGS. 12, 13, and 16 faces upward, The state can be automatically switched between the state facing the left direction shown in FIG. 18 and the state facing the right direction shown in FIG.

  Although the first and second embodiments have been described above, it goes without saying that various modifications are possible.

  The present invention is applicable to a roundness measuring device and a measuring device having a similar function.

21 Base 22 Loading table 24 Column 25 Carriage 29 Detector holder 30 Detector 31 Measuring element 32 Workpiece

Claims (2)

Base and
A turntable that is fixed to the base and rotates the mounted workpiece;
A column extending parallel to the rotation axis of the turntable and movable in parallel to the measurement plane including the rotation axis of the turntable and the measurement point of the workpiece;
A carriage supported movably along the column;
A detector holder attached to the carriage;
A detector attached to the detector holder so that the probe can be displaced in the measurement plane, and
The detector holder can be attached to the carriage at different rotational positions around a rotation axis perpendicular to the measurement plane, and the probe of the detector can be displaced on the measurement plane even when attached to different rotational positions. A roundness measuring device characterized in that a simple state is maintained.   The roundness measuring apparatus according to claim 1, further comprising a holder rotating mechanism that rotates the detector holder about the holder fixing portion as a rotation center.

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