JP2013105948A5 - - Google Patents
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- Publication number
- JP2013105948A5 JP2013105948A5 JP2011249775A JP2011249775A JP2013105948A5 JP 2013105948 A5 JP2013105948 A5 JP 2013105948A5 JP 2011249775 A JP2011249775 A JP 2011249775A JP 2011249775 A JP2011249775 A JP 2011249775A JP 2013105948 A5 JP2013105948 A5 JP 2013105948A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- inert gas
- substrate holder
- processing
- transfer chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 24
- 239000011261 inert gas Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011249775A JP5785062B2 (ja) | 2011-11-15 | 2011-11-15 | 基板処理装置及び半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011249775A JP5785062B2 (ja) | 2011-11-15 | 2011-11-15 | 基板処理装置及び半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013105948A JP2013105948A (ja) | 2013-05-30 |
| JP2013105948A5 true JP2013105948A5 (https=) | 2014-11-13 |
| JP5785062B2 JP5785062B2 (ja) | 2015-09-24 |
Family
ID=48625271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011249775A Active JP5785062B2 (ja) | 2011-11-15 | 2011-11-15 | 基板処理装置及び半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5785062B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015125733A1 (ja) * | 2014-02-24 | 2015-08-27 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びプログラム |
| JP7682831B2 (ja) * | 2022-04-27 | 2025-05-26 | 川崎重工業株式会社 | 半導体製造装置システム |
| KR20240109498A (ko) * | 2023-01-04 | 2024-07-11 | 주식회사 원익아이피에스 | 기판 처리 장치 및 기판 처리 방법 |
-
2011
- 2011-11-15 JP JP2011249775A patent/JP5785062B2/ja active Active
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