JP2013104470A - Feed screw driving device and part mounting machine using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a feed screw driving device avoiding influence by thermal expansion of a feed screw and capable of silencing a drive device.SOLUTION: The feed screw driving device has the feed screw, a pair of gear mechanisms arranged both ends of the feed screw respectively, a pair of motors driving the feed screw respectively via the pair of gear mechanisms, and a pair of supporting parts supporting both ends of the feed screw respectively, one of the pair of supporting parts a fixed supporting part supporting the feed screw not movably in an axial direction, and the other one of the pair of supporting parts is a movable supporting part supporting the feed screw movably in the axial direction, the gear mechanism arranged in the fixed supporting part side has a helical gear fixed to the fixed supporting part side end of the feed screw and to an output shaft of the fixed supporting part side motor respectively, the gear mechanism arranged in the movable supporting part side has a spur gear fixed to the movable supporting part side end of the feed screw and the output shaft of the movable supporting part side motor, respectively.

Description

  The present invention relates to a feed screw driving device driven by a motor and a component mounting machine using the same.

  As an example of a feed screw driving device driven by a motor, for example, the invention described in Patent Document 1 is known. In the invention described in Patent Document 1, the driven portion can be moved in the linear direction by driving a pair of motors respectively connected to both ends of the ball screw. In the invention described in Patent Document 1, the output per motor is reduced by driving the ball screw by a pair of motors, compared with the case of driving the ball screw by one motor, and the motor is small. We are trying to make it. Further, in the invention described in Patent Document 1, the resonance frequency is increased by driving the ball screw by a pair of motors to reduce vibration noise.

JP 2000-069782 A

  However, the invention described in Patent Document 1 does not consider the thermal expansion of the ball screw. When the ball screw extends due to thermal expansion, the axial rigidity and torsional rigidity of the ball screw change, and the natural frequency of the ball screw driving mechanism changes. Therefore, it affects the stability of the control system and the residual vibration during positioning. In addition, since the natural frequency of the ball screw drive mechanism changes, vibration noise is not always reduced.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a feed screw drive device that can avoid the influence of thermal expansion of the feed screw and can reduce the noise of the drive device.

  A feed screw driving device according to a first aspect includes a feed screw, a pair of gear mechanisms respectively provided at both ends of the feed screw, a pair of motors respectively driving the feed screw via the pair of gear mechanisms, and a feed A feed screw driving device including a pair of support portions that respectively support both ends of the screw, wherein one of the pair of support portions is a fixed support portion that supports the feed screw so as not to move in the axial direction. The other support portion is a movable support portion that supports the feed screw so as to be movable in the axial direction, and the gear mechanism provided on the fixed support portion side includes the end portion of the feed screw on the fixed support portion side and the pair of motors. The gear mechanism provided on the movable support portion side includes a helical gear fixed to the output shaft of the fixed support portion side motor provided on the fixed support portion side. And out of a pair of motors Characterized in that it comprises a spur gear fixed to the output shaft of the movable support part side motor provided in the support portion.

  According to a second aspect of the present invention, there is provided a feed screw driving device according to the first aspect, wherein the fixed support portion side motor and the movable support portion side motor are based on the rotation phase information detected by the rotation detection device that rotates synchronously with the fixed support portion side motor. The motor control part which controls synchronously is provided.

  According to a third aspect of the present invention, there is provided a component mounter in which a substrate carrying device for carrying a substrate in a component mounting position along a carrying path, positioning and carrying it out, and a plurality of component containing devices for housing a plurality of components are detachably attached. A component mounter comprising: a component supply device; and a component transfer device that collects a component from a component storage device and mounts the component on a positioned substrate; and the component transfer device is positioned with the component supply device. The transfer device drive mechanism to be moved between the two is constituted by the feed screw drive device according to claim 1 or 2.

  According to the feed screw driving device of the first aspect, since the feed screw can be driven by the pair of motors, the output per motor is reduced as compared with the case where the feed screw is driven by one motor. Thus, the fixed support portion side motor and the movable support portion side motor can be reduced in size. In addition, since the spur gear is provided in the gear mechanism provided on the movable support portion side, changes in the axial rigidity and torsional rigidity of the feed screw can be reduced even if the feed screw extends in the axial direction due to thermal expansion. The change in the natural frequency of the feed screw driving device can be reduced. Therefore, it is possible to suppress the deterioration of the feed screw due to thermal expansion, improve the stability of the control system, and reduce the influence on the residual vibration during positioning. Furthermore, since the gear mechanism provided on the fixed support portion side is provided with a helical gear, it is possible to improve the quietness of the feed screw driving device as compared with the case where both the pair of gear mechanisms are provided with a spur gear. it can.

  According to the feed screw drive device according to claim 2, the fixed support portion side motor and the movable support portion are based on the rotation phase information detected by the rotation detection device of the fixed support portion side motor connected to the helical gear. The feed screw can be driven by synchronously controlling the side motor. Helical gears can increase the gear meshing ratio and reduce torque fluctuations compared to spur gears, so based on the rotational phase information of the movable support side motor connected to the spur gears. Compared with the case of driving the feed screw, the controllability of the fixed support part side motor and the movable support part side motor can be improved. Therefore, the feed screw drive device according to claim 2 can improve the feed accuracy and positioning accuracy of the feed screw drive device.

  According to the component mounter of the third aspect, the transfer device driving mechanism for moving the component transfer device between the component supply device and the positioned substrate is the feed screw driving device according to claim 1 or 2. Therefore, it is possible to take measures against the thermal expansion of the feed screw, and it is possible to make the transfer device drive mechanism compact and improve the quietness.

It is a block diagram which shows the structure of a feed screw drive device. It is a block diagram which shows an example of a structure of a motor control part. It is a block diagram which shows an example of the control block of a motor control part. It is a perspective view which shows an example of a component mounting machine. It is a perspective view which shows an example of a transfer apparatus drive mechanism.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Each figure is a conceptual diagram and does not define the dimensions of the detailed structure.

(1) Lead Screw Drive Device FIG. 1 is a configuration diagram showing the configuration of the feed screw drive device. The feed screw driving device according to the present embodiment includes a feed screw 1, a pair of gear mechanisms 2 provided at both ends of the feed screw 1, and a pair for driving the feed screw 1 via the pair of gear mechanisms 2. Motor 3, a pair of support portions 4 that respectively support both ends of the feed screw 1, and a motor control portion 5 that controls the pair of motors 3 synchronously.

  In the feed screw 1, a feed screw shaft 11 is pivotally supported by a pair of support portions 4 via bearings 12 and 12. The feed screw shaft 11 and the bearing 12 are held by the pair of support portions 4 by nuts 18, and one end side of the feed screw shaft 11 in the left direction in the drawing is further held by a presser portion 19. A ball nut 13 is screwed to the feed screw shaft 11, and a driven portion 14 is connected to the ball nut 13. The driven portion 14 is mounted on the guides 15 and 15 so as to be movable in the axial direction X shown in FIG. As the feed screw 1, for example, a ball screw drive mechanism used in a known positioning mechanism or feed mechanism can be used. When the feed screw shaft 11 rotates, a ball (not shown) rolls between the feed screw shaft 11 and the ball nut 13, and the rotational motion of the feed screw shaft 11 is converted into linear motion. Thereby, the driven part 14 can be linearly guided in the axial direction X.

  One of the pair of support portions 4 is a fixed support portion 41 that supports the feed screw 1 so as not to move in the axial direction X, and the other of the pair of support portions 4 supports the feed screw 1 so as to be movable in the axial direction X. It is the movable support part 42 which does. The fixed support part 41 and the movable support part 42 are formed integrally with the base. The fixed support portion 41 has a recess 411 that can be fitted to the bearing 12, and one bearing 12 that pivotally supports the feed screw 1 is fitted in the recess 411. Thereby, the fixed support portion 41 supports the feed screw 1 so as not to move in the axial direction X. The movable support portion 42 has a contact portion 421 extending in the axial direction X, and the other bearing 12 that pivotally supports the feed screw 1 is slidably contacted with the contact portion 421. Thereby, the movable support part 42 is supporting the feed screw 1 so that a movement to the axial direction X is possible.

  The gear mechanism 2 provided on the fixed support portion 41 side includes a helical gear 21. In the helical gear 21, a first helical gear 211 and a second helical gear 212 are engaged. The first helical gear 211 is connected to the fixed support portion side end 16 of the feed screw 1, and the second helical gear 212 is provided on the fixed support portion 41 side of the pair of motors 3. The output shaft 311 of the fixed support portion side motor 31 is connected via a coupling (not shown). In the first helical gear 211 and the second helical gear 212, the teeth are inclined with respect to the rotation shaft and the tooth contact is dispersed, so that the first helical gear 211 and the second helical gear 212 are excellent in silence and can reduce torque fluctuation. . The first helical gear 211 and the second helical gear 212 are bearings (not shown) that receive a thrust load and have an inclination angle of a tooth streak with respect to the rotation shaft so that the gears cancel the thrust load. It is pivotally supported.

  The gear mechanism 2 provided on the movable support portion 42 side includes a spur gear 22. The spur gear 22 is meshed with the first spur gear 221 and the second spur gear 222. The first spur gear 221 is connected to the movable support part side end 17 of the feed screw 1, and the second spur gear 222 is a movable support part side provided on the movable support part 42 side of the pair of motors 3. The motor 32 is connected to the output shaft 321 via a coupling (not shown). The first spur gear 221 and the second spur gear 222 have teeth that are parallel to the rotation axis, and the tooth width is set so that they can be engaged even when the feed screw 1 extends in the axial direction X due to thermal expansion. .

  In the present embodiment, the spur gear 22 is provided in the gear mechanism 2 provided on the movable support portion 42 side. Therefore, even if the feed screw 1 extends in the axial direction X due to thermal expansion, the axial rigidity and torsion of the feed screw 1 are increased. The change in rigidity can be reduced, and the change in the natural frequency of the feed screw driving device can be reduced. Therefore, deterioration of the feed screw 1 due to thermal expansion can be suppressed, the stability of the control system is improved, and the influence on residual vibration during positioning can be reduced. Furthermore, since the gear mechanism 2 provided on the fixed support portion 41 side is provided with the helical gear 21, compared with the case where both the pair of gear mechanisms 2 are provided with the spur gear 22, the quietness of the feed screw driving device is improved. Can be improved.

If the number of teeth of the first helical gear 211 and the second helical gear 212 is Z11 and Z12, and the rotational speed is W11 and W12, the rotational speed W11 can be expressed by the following mathematical formula 1. Further, when the number of teeth of the first spur gear 221 and the second spur gear 222 is Z21 and Z22 and the rotation speed is W21 and W22, the rotation speed W21 can be expressed by the following expression 2.
(Equation 1)
W11 = Z12 / Z11 × W12
(Equation 2)
W21 = Z22 / Z21 × W22

Since the first helical gear 211 and the first spur gear 221 are connected to both ends of the feed screw 1, the rotational speed W11 and the rotational speed W21 are equal. As will be described later, the motor current of the movable support side motor 32 has the same current value as the motor current of the fixed support side motor 31 and the current direction is controlled in the reverse direction. W22 is equal. From the above, the relationship between the number of teeth Z11, Z12, Z21, and Z22 can be expressed by the following formula 3. Note that these relationships can be similarly obtained from the relationship between the number of teeth and the torque. In addition, the helical gear 21 and the spur gear 22 of the pair of gear mechanisms 2 can each include three or more gears.
(Equation 3)
Z12 / Z11 = Z22 / Z21

  In the pair of motors 3, a fixed support portion side motor 31 is provided on the fixed support portion 41 side, and a movable support portion side motor 32 is provided on the movable support portion 42 side. In the present embodiment, since the feed screw 1 can be driven by a pair of motors 3, the output per motor is reduced and fixed support compared to the case where the feed screw 1 is driven by one motor. The part side motor 31 and the movable support part side motor 32 can be reduced in size.

  The fixed support unit side motor 31 is provided with a rotation detection device 33 that detects rotational phase information of the fixed support unit side motor 31. The rotation detection device 33 can output the rotation phase information of the fixed support unit side motor 31 in synchronization with the rotation of the fixed support unit side motor 31. As the fixed support unit side motor 31, the movable support unit side motor 32, and the rotation detection device 33, known servo motors and position detectors employed in numerical controllers can be used. For example, an AC servo motor, an encoder, etc. are mentioned. When an incremental encoder is used, the rotational phase information is a count value obtained by counting a pulse train corresponding to the rotational displacement amount of the fixed support unit side motor 31. When an absolute encoder is used, the rotational phase information is an output code corresponding to the rotational displacement amount of the fixed support portion side motor 31. The rotational phase information can include various data such as error information of the fixed support unit side motor 31 and is transmitted to the servo amplifier 51 via the information transmission path 54 at predetermined intervals.

(2) Configuration of Motor Control Unit FIG. 2 is a configuration diagram illustrating an example of the configuration of the motor control unit. The motor control unit 5 includes servo amplifiers 51 and 51 that drive the pair of motors 3, a servo controller 52 that synchronously controls the two servo amplifiers 51 and 51, and a host controller that gives a movement command to be controlled to the servo controller 52. 53.

  The servo amplifier 51 includes a CPU 510, a memory 511, an input / output interface 512, and a communication interface 513, and is connected via a bus 515 so that various data and control signals can be transmitted and received. The rotation phase information transmitted from the rotation detection device 33 is transmitted to the memory 511 via the input / output interface 512 and the bus 515. The CPU 510 can transmit rotational phase information of the fixed support unit side motor 31 to the servo controller 52 via the bus 515 and the communication interface 513.

  The servo controller 52 includes a CPU 520, a memory 521, and communication interfaces 522 to 524, and is connected via a bus 525 so that various data and control signals can be transmitted and received. The rotational phase information of the fixed support unit side motor 31 transmitted from the servo amplifier 51 is transmitted to the memory 521 via the communication interface 522 and the bus 525. The CPU 520 can transmit the rotational phase information of the fixed support unit side motor 31 to the host controller 53 via the bus 525 and the communication interface 524.

  The host controller 53 includes a CPU 530, a memory 531 and a communication interface 532, and is connected via a bus 533 so that various data and control signals can be transmitted and received. The movement command of the control target calculated by the CPU 530 is transmitted to the memory 521 of the servo controller 52 via the bus 533, the communication interfaces 532 and 524, and the bus 525. In the servo controller 52 and the servo amplifiers 51 and 51, the CPUs 510 and 520 and the memories 511 and 521 can perform various calculations for servo control described later. The power converter 514 such as an inverter supplies motor currents based on various calculation results to the fixed support unit side motor 31 and the movable support unit side motor 32 via the power transmission path 55, so that the fixed support unit side motor 31 and The movable support part side motor 32 can be driven.

  Between the communication interfaces 532 and 524, between the communication interfaces 522 and 513, and between the communication interfaces 523 and 513, various data and control signals are respectively connected by an information transmission path 54 so as to be able to transmit and receive, thereby forming a network. The various data includes rotational phase information of the fixed support unit side motor 31 and the above-described various calculation results. The communication means, protocol, etc. in the information transmission path 54 are not particularly limited. As the network, for example, a servo network can be used. In addition, without configuring a network, for example, various data and control signals can be individually transmitted and received by known serial communication (RS-232C) or the like.

  Note that input / output data such as rotational phase information of the fixed support side motor 31 can also be transmitted by direct memory access (DMA). The DMA can transmit and receive various data between the input / output device and the memories 511, 521, and 531 without passing through the CPUs 510, 520, and 530. For example, the rotation phase information of the fixed support portion side motor 31 can be directly transmitted between the rotation detection device 33 and the memories 511, 521, and 531.

(3) Control by Motor Control Unit FIG. 3 is a block diagram illustrating an example of a control block of the motor control unit. The motor control unit 5 includes a servo control unit 6 that controls the fixed support unit side motor 31 and the movable support unit side motor 32 when viewed as a control block for servo control. The servo control unit 6 includes a profile generation unit 61 that generates commands for the fixed support unit side motor 31 and the movable support unit side motor 32, and a position control that controls the positions of the fixed support unit side motor 31 and the movable support unit side motor 32. Unit 62, speed control unit 63 that controls the speed of fixed support unit side motor 31 and movable support unit side motor 32, current control unit 641 that controls the motor current of fixed support unit side motor 31, and movable support unit side And a current control unit 642 for controlling the motor current of the motor 32. The profile generation unit 61, the position control unit 62, and the speed control unit 63 are arranged in the servo controller 52, and the current control units 641 and 642 are arranged in the servo amplifiers 51 and 51.

  The profile generation unit 61 calculates position commands for the fixed support unit side motor 31 and the movable support unit side motor 32 based on the movement command from the host controller 53. The position control unit 62 generates a speed command from the deviation between the position command from the profile generation unit 61 and the rotation phase information from the rotation detection device 33. The speed control unit 63 generates a current command (torque command) from the deviation between the speed command from the position control unit 62 and the speed information of the fixed support unit side motor 31. The speed information of the fixed support unit side motor 31 can be calculated from the frequency of the rotational phase information. Moreover, the detection result of the speed detector which detects the speed of the fixed support part side motor 31 can also be used for the speed information of the fixed support part side motor 31. The method of position control and speed control is not particularly limited. For example, known feedback control such as PID control can be used.

  The current control unit 641 generates a drive signal for the power converter 514 that drives the fixed support unit side motor 31 from the deviation between the current command (torque command) from the speed control unit 63 and the motor current of the fixed support unit side motor 31. To do. As a motor current of the fixed support portion side motor 31, a detection result of a current detector (not shown) built in the servo amplifier 51 can be used. The rotation phase information from the rotation detector 33 can be used to adjust the power factor. The current control unit 642 inverts the drive signal of the power converter 514 that drives the fixed support unit side motor 31 (inverts the sign of the motor current) and drives the power converter 514 that drives the movable support unit side motor 32. Generate a signal. Thereby, the motor current command value of the movable support part side motor 32 is the same as the motor current command value of the fixed support part side motor 31 and the current direction is opposite.

  The drive signal of the power converter 514 can be expressed by, for example, a duty ratio that is a ratio of an ON width and an OFF width of a pulse in PWM control. In PWM control, a motor current flows in a corresponding phase when the switching element is ON, and the motor current changes according to the time (ON width) that the switching element is ON. In other words, the motor current increases as the ON width increases, and the motor current decreases as the ON width decreases. The power converter 514 supplies the motor current based on the drive signal generated by the current control units 641 and 642 to the fixed support unit side motor 31 and the movable support unit side motor 32 via the power transmission path 55, thereby fixing and supporting the power converter 514. The part side motor 31 and the movable support part side motor 32 can be driven.

  The motor control unit 5 rotates the pair of gear mechanisms 2 by rotating the fixed support unit side motor 31 and the movable support unit side motor 32 in the opposite directions, respectively. The feed screw shaft 11 of the feed screw 1 is rotated by the rotation of the pair of gear mechanisms 2, and the driven portion 14 is linearly guided in the axial direction X. In the present embodiment, the fixed support unit side motor 31 and the movable support unit side motor 32 are connected to the helical gear 21 based on the rotation phase information detected by the rotation detection device 33 of the fixed support unit side motor 31. The feed screw 1 can be driven by synchronous control. The helical gear 21 can increase the gear meshing ratio and reduce the torque fluctuation as compared with the spur gear 22, so that the rotational phase of the movable support portion side motor 32 connected to the spur gear 22 can be reduced. Compared to the case where the feed screw 1 is driven based on the information, the controllability of the fixed support portion side motor 31 and the movable support portion side motor 32 can be improved. Therefore, the feed screw driving device according to the present embodiment can improve the feed accuracy and positioning accuracy of the feed screw drive device.

(4) Component mounter The component mounter 7 is demonstrated as an example to which the feed screw drive device of this embodiment is applied. The component mounter 7 is a component supply in which a substrate transport device 71 that carries a substrate into a component mounting position along a transport path, positions and unloads, and a plurality of component storage devices 721 that store a plurality of components are detachably attached. The apparatus 72 and the component transfer apparatus 73 which extract | collects components from the component storage apparatus 721 and mounts on the positioned board | substrate are provided. The transfer device drive mechanism 731 for moving the component transfer device 73 between the component supply device 72 and the positioned substrate is configured by the feed screw drive device described in (1) to (3).

  FIG. 4 is a perspective view showing an example of a component mounting machine. FIG. 5 is a perspective view showing an example of the transfer device drive mechanism. As shown in FIG. 4, the component mounter 7 includes a component supply device 72, a board transfer device 71, and a component transfer device 73. The component supply device 72 is configured by arranging a plurality of cassette type feeders 771 side by side on a base frame 790. A cassette type feeder 771 corresponding to the component storage device 721 includes a main body 772 that is detachably attached to the base frame 790, a supply reel 773 provided at the rear of the main body 772, and a component take-out portion 774 provided at the tip of the main body 772. And. The supply reel 773 is wound and held with a long and narrow tape in which electronic components are sealed at a predetermined pitch, and the tape is pulled out at a predetermined pitch by a sprocket (not shown) to release the sealed state of the electronic components and remove the component. 774 can be sent out sequentially.

  A component camera 775 that detects a holding position of the electronic component is provided between the component supply device 72 and the substrate transfer device 71. The component camera 775 can detect a positional shift and an angular shift of the electronic component sucked by a suction nozzle (not shown) of the component mounting head 710 with respect to the suction nozzle. The detection result of the positional deviation and the angular deviation can be used when correcting the mounting position of the electronic component.

  The board conveying device 71 is for conveying a printed board in the X-axis direction shown in FIG. 4, and is of a so-called double conveyor type in which two rows of first conveying devices 761 and second conveying devices 762 are arranged. The first transport device 761 and the second transport device 762 are horizontally arranged on a base 763 with a pair of guide rails 764a, 764b, 765a, 765b facing each other in parallel. The first transport device 761 and the second transport device 762 have a pair of conveyor belts (not shown) that support and transport the printed circuit boards guided by the guide rails 764a, 764b, 765a, and 765b, respectively. Are arranged in parallel to face each other. Further, the substrate transport device 71 is provided with a clamp device (not shown) that pushes up and clamps the printed circuit board transported to a predetermined position, and the printed circuit board can be positioned and fixed at the mounting position by the clamp device.

  The component transfer device 73 is of the XY robot type, is mounted on the base frame 790 and is disposed above the substrate transfer device 71 and the component supply device 72. The component transfer device 73 includes a Y-axis slider 712 that is moved in the Y-axis direction by a Y-axis servomotor 711. An X-axis slider 713 shown in FIG. 5 is guided by the Y-axis slider 712 so as to be movable in the X-axis direction orthogonal to the Y-axis direction. The X-axis slider 713 corresponds to the transfer device drive mechanism 731.

  The X-axis slider 713 includes a pair of guide rails 15 and 15 extending in the X-axis direction fixed to the Y-axis slider 712 and a pair of guide blocks (not shown) fixed to the X-axis slider 713. Is held movable. The X-axis slider 713 includes the feed screw driving device described above in (1) to (3). The component mounting head 710 shown in FIG. 5 corresponds to the driven unit 14 shown in FIG. The motor control unit 5 rotates the pair of gear mechanisms 2 by rotating the fixed support unit side motor 31 and the movable support unit side motor 32 in the opposite directions, respectively. The feed screw shaft 11 of the feed screw 1 is rotated by the rotation of the pair of gear mechanisms 2, and the component mounting head 710 is linearly guided in the axial direction X. Note that the Y-axis slider 712 can also include the feed screw driving device described in (1) to (3), similarly to the X-axis slider 713.

  Next, an operation for mounting the electronic component on the printed board will be described. First, based on a command from a control device (not shown), the conveyor belt of the board conveying device 71 is driven, and the printed board is guided to the guide rails 764a and 764b (765a and 765b) and conveyed to a predetermined position. Then, the printed circuit board is pushed up and clamped by the clamping device, and is positioned and fixed at a predetermined position. Subsequently, the Y-axis servo motor 711, the fixed support portion side motor 31 and the movable support portion side motor 32 are driven, so that the Y axis slider 712 and the X axis slider 713 are moved, and the component mounting head 710 supplies the components. The component 72 is moved to the component take-out part 774 of the device 72. Then, after the electronic component is sucked and held by the suction nozzle of the component mounting head 710, the Y-axis servo motor 711, the fixed support portion side motor 31 and the movable support portion side motor 32 are driven, so that the Y axis slider 712 and The X-axis slider 713 is moved, and the component mounting head 710 is moved to above the mounting position of the printed board. Then, the electronic component sucked and held by the suction nozzle is mounted on the printed board.

  In this embodiment, the transfer device drive mechanism 731 that moves the component transfer device 73 between the component supply device 72 and the positioned substrate is the feed screw drive device described in (1) to (3). Since it is comprised, the thermal expansion countermeasure of the feed screw 1 is possible, and the transfer apparatus drive mechanism 731 can be made compact and the quietness can be improved.

(5) Others The present invention is not limited to the embodiments described above and shown in the drawings, and can be implemented with appropriate modifications without departing from the scope of the invention.

1: Feed screw 16: Fixed support side end 17: Movable support side end 2: Pair of gear mechanisms 21: Helical gears 22: Spur gear 3: Pair of motors 31: Fixed support side motors 32: Movable support portion side motor 33: rotation detection device 4: a pair of support portions 41: fixed support portion 42: movable support portion 5: motor control portion 7: component mounter 71: substrate transport device 72: component supply device 721: component accommodation Device 73: Component transfer device 731: Transfer device drive mechanism

Claims (3)

A feed screw, a pair of gear mechanisms respectively provided at both ends of the feed screw, a pair of motors that respectively drive the feed screw via the pair of gear mechanisms, and the both ends of the feed screw; A feed screw drive device comprising a pair of support portions to support,
One of the pair of support portions is a fixed support portion that supports the feed screw so as not to move in the axial direction, and the other of the pair of support portions is movable that supports the feed screw so as to be movable in the axial direction. Support part,
The gear mechanisms provided on the fixed support portion side are respectively connected to the fixed support portion side end portion of the feed screw and the output shaft of the fixed support portion side motor provided on the fixed support portion side of the pair of motors. With a fixed helical gear,
The gear mechanisms provided on the movable support side are respectively connected to the movable support side end of the feed screw and the output shaft of the movable support side motor provided on the movable support side of the pair of motors. A feed screw driving device comprising a fixed spur gear.   The motor control part which carries out synchronous control of the said fixed support part side motor and the said movable support part side motor based on the rotation phase information detected by the rotation detection apparatus which carries out synchronous rotation with the said fixed support part side motor. The feed screw drive device described. A board transfer device that carries a substrate into a component mounting position along a transfer path, positions it, and carries it out; a component supply device in which a plurality of component storage devices that accommodate a plurality of components are detachably attached; and the component storage device A component mounting machine comprising: a component transfer device that collects the component and mounts the component on the positioned substrate,
3. A component mounting machine in which a transfer device drive mechanism for moving the component transfer device between the component supply device and the positioned substrate is constituted by a feed screw drive device according to claim 1 or 2. .

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