JP2013095843A - Sheet manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet manufacturing device which can control the consumption of an adhesive.SOLUTION: The sheet manufacturing device includes a draw-out means 10 for drawing out a base sheet BS, the first lamination means 20A for laminating the first adhesion lalyer AD1 to one side of the base sheet BS, and the second lamination means 20B for laminating the second adhesive layer AD2 to one side of the base sheet BS so as to surround the first adhesive layer AD1, wherein at least one of the first lamination means 20A and the second lamination means 20B has printing means 21A, 21B having prescribed printing plates 22A, 22B, and the adhesives are printed with the printing plates 22A, 22B in prescribed shapes to laminate the adhesive layers AD1, AD2.

Description

  The present invention relates to a sheet manufacturing apparatus for manufacturing an adhesive sheet.

DESCRIPTION OF RELATED ART Conventionally, the sheet manufacturing apparatus which manufactures the adhesive sheet with which the some adhesive layer was provided in the base material sheet is known (for example, refer patent document 1).
The sheet manufacturing apparatus described in Patent Document 1 is an apparatus that manufactures an adhesive sheet that can be used in a dicing process or the like of a semiconductor wafer (hereinafter sometimes simply referred to as a wafer). The sheet manufacturing apparatus includes: a feeding unit that feeds an original fabric in which a strip-shaped adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet via an adhesive layer; and a cutting unit that cuts the fed original adhesive sheet And an adhesive sheet having a predetermined shape is manufactured by cutting with a cutting means.

JP 2008-126518 A

  However, since the sheet manufacturing apparatus described in Patent Document 1 manufactures an adhesive sheet having a predetermined shape by cutting an adhesive sheet provided with an adhesive layer in the entire area of one surface of the release sheet, The part of the adhesive is discarded, and there is a disadvantage that the adhesive is wasted.

  The objective of this invention is providing the sheet manufacturing apparatus which can suppress the consumption of an adhesive agent.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, and includes a feeding means for feeding out the base sheet, and one of the base sheets First laminating means for laminating the first adhesive layer on the surface, and second laminating means for laminating the second adhesive layer so as to surround the first adhesive layer on one surface of the base sheet. At least one of the first laminating means and the second laminating means is provided with a printing means having a predetermined plate, and each adhesive layer is printed by printing the adhesive in a predetermined shape with the plate. It is characterized by being laminated.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, and includes a feeding means for feeding out the base sheet, and one of the base sheets A second laminating means for laminating the second adhesive layer on the surface, and a first laminating means for laminating the first adhesive layer in the plane of the second adhesive layer. At least one of the second laminating means includes printing means having a predetermined plate, and the adhesive layers are stacked by printing the adhesive in a predetermined shape using the plate.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, and includes a feeding means for feeding out the base sheet, and one of the base sheets First laminating means for laminating the first adhesive layer on the surface of the substrate, and laminating the second adhesive layer on the other surface of the base sheet so as to protrude from the first adhesive layer in a plan view. 2 laminating means, and at least one of the first laminating means and the second laminating means is provided with a printing means having a predetermined plate, and each adhesive is printed by printing an adhesive in a predetermined shape with the plate. It is characterized by laminating an agent layer.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, and includes a feeding means for feeding out the base sheet, and one of the base sheets First laminating means for laminating the first adhesive layer on all or part of the surface of the substrate, and second laminating the second adhesive layer on the outer edge of the other surface of the base sheet in a ring shape. Laminating means, and at least one of the first laminating means and the second laminating means is provided with printing means having a predetermined plate, and each adhesive is printed in a predetermined shape by the plate. It is characterized by laminating layers.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, wherein the second adhesion is applied to the entire region or a partial region of one surface. A feeding means for feeding out the base material sheet on which the adhesive layer is laminated; and a first laminating means for laminating the first adhesive layer in the plane of the second adhesive layer in the base material sheet, The laminating unit includes a printing unit having a predetermined plate, and the first adhesive layer is stacked by printing the adhesive in a predetermined shape using the plate.

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, wherein the second adhesion is applied to the entire region or a partial region of the other surface. A feeding means for feeding out the base material sheet on which the adhesive layer is laminated, and a first means for laminating the first adhesive layer on one surface of the base material sheet so as to be inside the second adhesive layer in a plan view. Laminating means, wherein the first laminating means comprises printing means having a predetermined plate, and the first adhesive layer is laminated by printing the adhesive in a predetermined shape with the plate. .

  The sheet manufacturing apparatus of the present invention is a sheet manufacturing apparatus that manufactures an adhesive sheet provided with a first adhesive layer and a second adhesive layer, wherein the first adhesion is applied to the entire region or a partial region of one surface. A step of feeding out the base material sheet on which the agent layer is laminated, and a second step of annularly laminating the second adhesive layer so that the other surface of the base material sheet includes the first adhesive layer in a plan view. Laminating means, wherein the first laminating means comprises printing means having a predetermined plate, and the first adhesive layer is laminated by printing the adhesive in a predetermined shape with the plate. .

  The sheet manufacturing apparatus of the present invention preferably includes an intermediate layer stacking unit that stacks an intermediate layer between the first adhesive layer and the second adhesive layer.

  According to the present invention as described above, at least one of the first and second laminating means includes printing means having a predetermined plate, and each adhesive is printed by printing the adhesive in a predetermined shape using the plate. Since the layers are stacked, the adhesive layer can be formed into an arbitrary shape. For this reason, the quantity of the adhesive agent to discard can be reduced and consumption of an adhesive agent can be suppressed.

  In addition, if an intermediate layer laminating means for laminating the intermediate layer is provided between the first adhesive layer and the second adhesive layer, the adhesive layers are not bonded to each other, so one adhesive layer It is possible to prevent the other adhesive layer from being peeled off together when peeling.

The side view of the sheet manufacturing apparatus concerning a 1st embodiment of the present invention. FIG. 3 is a perspective view showing an example of use of the adhesive sheet of the first embodiment. The side view of the sheet manufacturing apparatus which concerns on 2nd Embodiment of this invention. The side view of the sheet manufacturing apparatus which concerns on 3rd and 4th embodiment of this invention. The side view of the sheet manufacturing apparatus which concerns on 5th Embodiment of this invention.

Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
In the second to fourth embodiments, the same components as those described in the next first embodiment and components having the same functions are denoted by the same reference numerals as those of the first embodiment. These descriptions are omitted or simplified. Moreover, in each figure, in order to make the content of the present invention easy to understand, the shape and arrangement state of each component are exaggerated.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
In FIG. 1, the sheet manufacturing apparatus 1A includes a feeding unit 10 that feeds a belt-shaped base sheet BS and a first stacking unit 20A that stacks the first adhesive layer AD1 by printing on one surface of the base sheet BS. And a second laminating means 20B for laminating by printing the second adhesive layer AD2 at a position different from the first adhesive layer AD1 on one surface of the base sheet BS, and the adhesive layers AD1, AD2 The adhesive layers AD1 and AD2 are laminated on one surface of the base sheet BS by the curing means 30 as the solidification promoting means for curing, the release sheet supply means 40 for supplying the release sheet RL, and the lamination means 20A and 20B. Temporary attachment means 50 for temporarily attaching the release sheet RL to the original adhesive sheet OS, and the adhesive sheet AS1 is formed by cutting the original adhesive sheet OS along the outer edge portion of the second adhesive layer AD2. Cutting means 60, collecting means 70 for collecting the unnecessary sheet US formed around the adhesive sheet AS1, and winding for winding up the first original fabric RS1 on which the plurality of adhesive sheets AS1 are temporarily attached to the release sheet RL Means 80.

  The adhesive sheet AS1 manufactured by the sheet manufacturing apparatus 1A is attached to the wafer WF as the adherend and the ring frame RF as the adherend as shown in FIG. A wafer WF is held, and includes a disk-shaped base sheet BS and a first adhesive layer AD1 and a second adhesive layer AD2 provided at different positions on one surface of the base sheet BS. I have. The first adhesive layer AD1 is formed in a circular shape that matches the shape of the wafer WF, and is provided in the center of the base sheet BS. The adhesive used for the first adhesive layer AD1 is not particularly limited, and examples thereof include those having thermoplasticity, thermal polymerization, and the like used for a die attach film. The second adhesive layer AD2 is formed in an annular shape so as to be within the plane of the ring frame RF, and is arranged concentrically with respect to the first adhesive layer AD1. The second adhesive layer AD2 is made of an adhesive layer that is less brittle than the first adhesive layer AD1. The adhesive used for such second adhesive layer AD2 is not particularly limited, and examples thereof include pressure-sensitive adhesives.

  The feeding means 10 winds and supports the base sheet BS in a roll shape and supports the support roller 12 rotatably provided by a rotation motor 11 as a driving device, and the base sheet BS drawn from the support roller 12. And a drive roller 14 that is rotatably provided by a rotation motor 13 as a drive device, and a pinch roller 15 that sandwiches the base sheet BS between the drive roller 14.

  The first stacking unit 20A includes a rotary screen printer 21A as a printing unit. The rotary screen printer 21A is rotatably provided by a rotating motor 24A as a driving device above the base sheet BS conveyed in the left-right direction in FIG. 1, and a predetermined printing pattern is formed on a cylindrical surface. The rotary screen 22A serving as the plate, the squeegee (not shown) provided inside the rotary screen 22A, and the rotary screen 22A as opposed to the rotary screen 22A with the base sheet BS interposed therebetween are rotated by the rotary motor 25A as a drive device. An impression cylinder 23A is provided. The rotary screen printer 21A rotates the rotary screen 22A and the impression cylinder 23A, and the molten adhesive stored in the rotary screen 22A passes through holes (not shown) formed on the surface of the rotary screen 22A. By extruding with a squeegee, the first adhesive layer AD1 is printed and laminated on one surface of the base sheet BS.

  The second stacking means 20B has the same configuration as the first stacking means 20A, and can be described by replacing the symbol at the end A of the first stacking means 20A with B. Therefore, the description thereof is omitted.

  The curing unit 30 is provided on the downstream side in the transport direction of the base sheet BS with respect to the first stacking unit 20A. Depending on the curing characteristics of the first adhesive layer AD1 and the second adhesive layer AD2, for example, hot air, Those that generate fixing energy such as ultraviolet rays, microwaves, cold winds, and natural winds are employed.

The release sheet supply means 40 includes a support roller 42 that is wound around and supported by the release sheet RL and that can be rotated by a rotation motor 41 as a drive device.
The temporary attachment means 50 is rotatably provided by a rotation motor 51 as a driving device, and a guide roller 52 that guides the release sheet RL fed from the release sheet supply means 40 in the conveying direction of the base sheet BS, and an induction And a pinch roller 53 disposed to face the roller 52.

  The cutting means 60 includes a die cut roller 62 having a cutting blade 61 for forming a circular cut CU in the original adhesive sheet OS, and a platen roller disposed opposite to the die cut roller 62 with the original adhesive sheet OS and the release sheet RL interposed therebetween. 63. The cutting blade 61 forms a cut CU having a depth that does not penetrate the release sheet RL from the base sheet BS side, forms a circular adhesive sheet AS1 inside the cut CU, and forms a strip-like shape outside the cut CU. The unnecessary sheet S3 is formed. Note that the die cut roller 62 and the platen roller 63 are rotatably provided in synchronization by rotation motors 64 and 65 as drive devices, respectively. The cutting blade 61 is preferably subjected to non-adhesion treatment such as a fluororesin coating so that the adhesive of the original adhesive sheet OS does not adhere.

  The collection means 70 includes a peeling roller 71 that peels the unnecessary sheet US from the peeling sheet RL, and a collection roller 73 that is rotatably provided by a rotation motor 72 as a drive device and collects the unnecessary sheet US.

  The winding means 80 is rotatable by a driving roller 82 that is rotatably provided by a rotating motor 81 as a driving device, a pinch roller 83 that is disposed to face the driving roller 82, and a rotating motor 84 that is a driving device. And a take-up roller 85 for winding up the first original fabric RS1 temporarily attached to one surface of the release sheet RL at a predetermined interval via the adhesive layers AD1 and AD2.

In the sheet manufacturing apparatus 1A described above, as a procedure for manufacturing the first raw fabric RS1, first, as shown in FIG. 1, the wound base material sheet BS and release sheet RL are respectively supported by the supporting roller 12 and the supporting roller 42. The base sheet BS and the release sheet RL are passed through as shown in FIG.
In this state, the rotation motors 11 and 13 rotate the motors 24BB, 25B, 24A, 25A, 41, 51, 64, 65, 72, 81, and 84 to drive the support roller 12, the drive roller 14, and the rotary screen 22B. 22A, impression cylinders 23B and 23A, support roller 42, guide roller 52, die cut roller 62, platen roller 63, recovery roller 73, drive roller 82, and take-up roller 85 are rotated to feed out the base sheet BS.

  When each roller rotates, the molten second adhesive layer AD2 is annularly laminated on one surface of the base sheet BS fed from the support roller 12 by the rotary screen printer 21B, and then the rotary screen printer The first adhesive layer AD1 in a molten state is laminated in a circular shape on the inner side of the second adhesive layer AD2 by 21A to form the original adhesive sheet OS. Thus, by using the printing method, the adhesive layers AD1 and AD2 can be easily laminated in a complicated shape. Moreover, the production time of the adhesive sheet AS1 can be shortened by laminating the first adhesive layer AD1 while laminating the second adhesive layer AD2.

  The formed original adhesive sheet OS is sandwiched between the guide roller 52 and the pinch roller 53 by the temporary attachment means 50 after the adhesive layers AD1 and AD2 are cured by the curing means 30, and from the release sheet supply means 40. It is temporarily attached to the supplied release sheet RL. Thereafter, the original adhesive sheet OS temporarily attached to the release sheet RL is cut by the cutting means 60 at the outer edge portion of the second adhesive layer AD2 to form a circular adhesive sheet AS1 and an unnecessary sheet US. It is formed. Then, the unnecessary sheet US is peeled off from the release sheet RL and collected by the collection roller 73, and the first original fabric RS1 in which the plurality of adhesive sheets AS1 are temporarily attached on the release sheet RL is taken up by the take-up roller 85. It is done.

  According to the first embodiment as described above, the adhesive layers AD1 and AD2 are laminated by printing the adhesive in a predetermined shape by the laminating means 20A and 20B. The amount of adhesive to be discarded can be reduced, and consumption of the adhesive can be suppressed. In the sheet manufacturing apparatus 1A, the cutting means 60 and the collecting means 70 are not necessarily provided. In this case, after adhering to the ring frame RF by the second adhesive layer AD2, the base sheet BS may be cut by a cutting means such as an appropriate cutter.

[Second Embodiment]
Next, 2nd Embodiment of this invention is described based on drawing.
The sheet manufacturing apparatus 1B of the present embodiment is different from the sheet manufacturing apparatus 1A of the first embodiment in that the cutting means 60 and the recovery means 70 are not provided. That is, as shown in FIG. 3, the sheet manufacturing apparatus 1 </ b> B includes a feeding unit 10, a first stacking unit 20 </ b> A, a second stacking unit 20 </ b> B, a curing unit 30, a release sheet supply unit 40, and a temporary bonding unit 50. And a winding means 80.

  The adhesive sheet AS2 manufactured by the sheet manufacturing apparatus 1B includes a base sheet BS, a circular second adhesive layer AD2 provided on one surface of the base sheet BS, and the second adhesive layer AD2. And a circular first adhesive layer AD1 laminated on the base sheet BS. In addition, each 2nd adhesive bond layer AD2 is taken as the magnitude | size from which an outer edge part protrudes from 1st adhesive bond layer AD1.

  In this sheet manufacturing apparatus 1B, when the base sheet BS and the release sheet RL are set as shown in FIG. 3 and each roller is rotated to feed the base sheet BS, a rotary screen is formed on one surface of the base sheet BS. The molten second adhesive layer AD2 is laminated in a circular shape by the printing machine 21B, and then the molten first adhesive layer AD1 is circularly formed on the second adhesive layer AD2 by the rotary screen printing machine 21A. By laminating, the adhesive sheet AS2 is formed. The adhesive sheet AS2 is temporarily attached to the release sheet RL supplied from the release sheet supply means 40 after the adhesive layers AD1 and AD2 are cured by the curing means 30, and the adhesive sheet AS2 is placed on the release sheet RL. The temporarily attached second original fabric RS2 is taken up by the take-up roller 85.

  The adhesive sheet AS2 manufactured in this way is attached to the wafer WF and the ring frame RF by, for example, a sheet attaching device (not shown), and then the outer edge portion of the second adhesive layer AD2, that is, the ring frame RF. Cut in-plane.

The effect similar to 1st Embodiment can be acquired also by the above 2nd Embodiment.
Note that the sheet manufacturing apparatus 1B may be provided with a cutting means 60 similar to that of the sheet manufacturing apparatus 1A to form an original fabric in which a plurality of adhesive sheets AS2 are temporarily attached to the release sheet RL.
Further, the second laminating means 20B in the sheet manufacturing apparatus 1B is omitted, and a sheet in which the second adhesive layer AD2 is laminated in advance on the entire area or a partial area of one surface of the base sheet BS is fed from the feeding means 10. The first adhesive layer AD1 may be laminated in the plane of the second adhesive layer AD2 in the base sheet BS. Also in such a case, the sheet manufacturing apparatus 1B is provided with the cutting means 60 similar to the sheet manufacturing apparatus 1A of the first embodiment, and a raw material in which a plurality of adhesive sheets AS2 are temporarily attached is formed on the release sheet RL. Alternatively, for example, after being affixed to the wafer WF and the ring frame RF by a sheet affixing device (not shown) or the like, the outer edge portion of the second adhesive layer AD2, that is, the surface of the ring frame RF is cut. May be.

[Third Embodiment]
Next, 3rd Embodiment of this invention is described based on drawing.
As shown in FIG. 4, the sheet manufacturing apparatus 1 </ b> C of the present embodiment is a base sheet so that the feeding means 10 is in the opposite direction to the sheet manufacturing apparatus 1 </ b> A, that is, one surface of the base sheet BS is on the lower side. The first laminating means 20A is configured to print the first adhesive layer AD1 on one surface (the lower surface in FIG. 4) of the base sheet BS, and the curing means 30 is associated therewith. The configuration differs from the sheet manufacturing apparatus 1A of the first embodiment in that it is also provided on the lower side in FIG. Then, after the rotary screen printer 21A prints the first adhesive layer AD1 on the lower surface in FIG. 4 of the base sheet BS, the added curing means 30 is the first adhesive from the lower surface side in FIG. 4 of the base sheet BS. The operation differs from the sheet manufacturing apparatus 1A of the first embodiment in that the layer AD1 is cured.

  The adhesive sheet AS3 manufactured by the sheet manufacturing apparatus 1C includes a base sheet BS, a circular first adhesive layer AD1 provided on one surface of the base sheet BS, and the other surface of the base sheet BS. And an annular second adhesive layer AD2. The first adhesive layer AD1 is provided in the center portion of the base sheet BS, and the second adhesive layer AD2 is provided in a size that protrudes from the first adhesive layer AD1 in plan perspective. In use, the adhesive sheet AS3 is cut in the plane of the ring frame RF in the same manner as the adhesive sheet AS2.

The effects similar to those of the first embodiment can be obtained by the third embodiment as described above.
The sheet manufacturing apparatus 1C may be provided with cutting means 60 similar to that of the sheet manufacturing apparatus 1A of the first embodiment to form an original fabric in which a plurality of adhesive sheets AS2 are temporarily attached on the release sheet RL.
Moreover, it is good also as a structure which provides 2nd adhesive bond layer AD2 in the whole area | region of the other surface of base sheet BS.
In these cases, the second adhesive layer AD2 is configured to be laminated on the entire region or a partial region of the other surface of the base sheet BS with the sheet manufacturing apparatus for the adhesive sheet AS3, and the second adhesive layer is seen through in plan view. The first adhesive layer AD1 is laminated on one surface of the base sheet BS so as to be inside the AD2, that is, the second adhesive layer AD2 protrudes from the first adhesive layer AD1 in a plan view. What should I do? Further, the first stacking means 20A in the sheet manufacturing apparatus 1C is omitted, and the second adhesive layer AD2 previously stacked in the whole area or a partial area of the other surface of the base sheet BS is fed out from the feeding means 10. The first adhesive layer AD1 may be laminated on one surface of the base sheet BS so as to be inside the second adhesive layer AD2 in a plan perspective. Such a sheet manufacturing apparatus 1C may also be provided with a cutting means 60 similar to that of the sheet manufacturing apparatus 1A of the first embodiment to form an original fabric in which a plurality of adhesive sheets AS3 are temporarily attached on the release sheet RL. .

[Fourth Embodiment]
Next, 4th Embodiment of this invention is described based on drawing.
The sheet manufacturing apparatus 1D of the adhesive sheet AS4 of the present embodiment has the same configuration as the sheet manufacturing apparatus 1C of the third embodiment, and the rotary screen printing machine 21B has the other surface (the upper side in FIG. 4). After the second adhesive layer AD2 is printed in a ring shape on the surface), the rotary screen printing machine 21A performs the first adhesion on the entire region or a partial region of one surface (the lower surface in FIG. 4) of the base sheet BS. The agent layer AD1 is printed. The adhesive sheet AS4 is annularly provided at the outer edge of the base sheet BS, the first adhesive layer AD1 provided in the entire region of one surface of the base sheet BS, and the other surface of the base sheet BS. And a second adhesive layer AD2. In use, the adhesive sheet AS4 is cut in the plane of the ring frame RF in the same manner as the adhesive sheet AS2.

The effect similar to 1st Embodiment can be acquired also by the above 4th Embodiment.
Note that the sheet manufacturing apparatus 1D may be provided with the cutting means 60 similar to that of the sheet manufacturing apparatus 1A of the first embodiment to form an original fabric in which a plurality of adhesive sheets AS2 are temporarily attached on the release sheet RL.
Further, the first laminating means 20A in the sheet manufacturing apparatus 1D is omitted, and the first adhesive layer AD1 previously laminated on the entire area or a partial area of one surface of the base sheet BS is fed out from the feeding means 10. The second adhesive layer AD2 may be printed in a ring shape on the other surface of the base sheet BS so that the first adhesive layer AD1 is included in a plan view. Such a sheet manufacturing apparatus 1D may also be provided with a cutting means 60 similar to that of the sheet manufacturing apparatus 1A to form an original fabric in which a plurality of adhesive sheets AS4 are temporarily attached on the release sheet RL.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, as in the sheet manufacturing apparatus 1E shown in FIG. 5, an intermediate layer ML is formed between the first stacking unit 20A and the second stacking unit 20B with the same configuration as the first and second stacking units 20A and 20B. The adhesive layer AS5 having the intermediate layer ML may be manufactured by providing the intermediate layer stacking means 20C for stacking. Since the intermediate layer ML may be made of paper, film, or the like, the paper, film, or the like is appropriately changed to the second adhesive layer instead of the one having the same structure as the first and second laminating means 20A, 20B. What can be laminated | stacked on AD2 is employable. When the intermediate layer ML is provided in this way, for example, when the diced wafer WF (chip) is picked up together with the first adhesive layer AD1 and bonded to the substrate or the like, the second adhesive is adhered to the first adhesive layer AD1. Bonding can be ensured by preventing bonding with the agent layer AD2 attached.

  Moreover, you may comprise either one of the 1st lamination | stacking means 20A and the 2nd lamination | stacking means 20B by lamination methods other than the printing method.

In the above embodiment, the rotary screen printing machine as the printing unit is exemplified, but as the printing unit, for example, solvent coating method, gravure printing, screen printing, further, letterpress printing, intaglio printing, planographic printing, stencil printing, etc. Any printing method can be adopted, and there is no limitation as long as the material to be laminated can be printed (laminated) on the base sheet BS.
In the first to third embodiments, the second stacking unit 20B is provided on the upstream side of the first stacking unit 20A in the conveyance direction of the base sheet BS. However, the first stacking unit 20A is the second stacking unit. You may provide upstream from the means 20B.

In the embodiment, the outer edge portion of the second adhesive layer AD2 is formed continuously in the circumferential direction, but the outer edge portion may be formed intermittently along the circumferential direction.
Further, the first adhesive layer AD1 may be a pressure-sensitive adhesive, and the second adhesive layer AD2 may be an adhesive having thermoplasticity, thermal polymerization property, or the like.

  In addition, the types and materials of the adhesive sheets AS1 to AS5 in the present invention are not particularly limited. For example, the adhesive sheets AS1 to AS5 have a layer other than the intermediate layer ML between the first adhesive layer AD1 and the second adhesive layer AD2. It may be more than one layer. Further, the adhesive sheets AS1 to AS5 may be a protective sheet, a dicing tape, a die attach film, or the like. The wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, etc., and the adhesive sheet to be attached to such a wafer is not limited to a protective sheet, dicing tape, die attach film, but any other sheet, film, tape, etc. An adhesive sheet having an arbitrary use and shape can be applied. Further, the adherend may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. As described above, as an adherend, not only a glass plate, a steel plate, a resin plate, and other members, but also other forms of members and articles can be targeted.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

1A to 1E Sheet manufacturing apparatus 10 Feeding means 20A First laminating means 20B Second laminating means 20C Intermediate layer laminating means 21A to 21C Rotary screen printer (printing means)
22A-22C Rotary screen (version)
30 Curing means (solidification promoting means)
AD1 1st adhesive layer AD2 2nd adhesive layer BS Base material sheet ML Intermediate layer AS1 to AS5 Adhesive sheet WF Wafer (Substrate)

Claims (8)

A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out the base sheet;
First laminating means for laminating the first adhesive layer on one surface of the base sheet;
A second laminating means for laminating the second adhesive layer so as to surround the first adhesive layer on one surface of the base sheet;
At least one of the first laminating unit and the second laminating unit includes a printing unit having a predetermined plate, and the adhesive layers are stacked by printing the adhesive in a predetermined shape using the plate. Characteristic sheet manufacturing apparatus. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out the base sheet;
Second laminating means for laminating the second adhesive layer on one surface of the base sheet;
A first laminating means for laminating the first adhesive layer in the plane of the second adhesive layer;
At least one of the first laminating unit and the second laminating unit includes a printing unit having a predetermined plate, and the adhesive layers are stacked by printing the adhesive in a predetermined shape using the plate. Characteristic sheet manufacturing apparatus. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out the base sheet;
First laminating means for laminating the first adhesive layer on one surface of the base sheet;
A second laminating means for laminating the second adhesive layer so as to protrude from the first adhesive layer in a plan view on the other surface of the base sheet,
At least one of the first laminating unit and the second laminating unit includes a printing unit having a predetermined plate, and the adhesive layers are stacked by printing the adhesive in a predetermined shape using the plate. Characteristic sheet manufacturing apparatus. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out the base sheet;
First laminating means for laminating the first adhesive layer on the entire area or a partial area of one surface of the base sheet;
A second laminating means for annularly laminating the second adhesive layer on the outer edge of the other surface of the base sheet;
At least one of the first laminating unit and the second laminating unit includes a printing unit having a predetermined plate, and the adhesive layers are stacked by printing the adhesive in a predetermined shape using the plate. Characteristic sheet manufacturing apparatus. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out a base material sheet on which the second adhesive layer is laminated in the entire region or a partial region of one surface;
First laminating means for laminating the first adhesive layer in the plane of the second adhesive layer in the base sheet,
The sheet stacking apparatus according to claim 1, wherein the first stacking unit includes a printing unit having a predetermined plate, and the first adhesive layer is stacked by printing the adhesive in a predetermined shape using the plate. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A feeding means for feeding out a base material sheet on which the second adhesive layer is laminated in the entire region or a partial region of the other surface;
A first laminating means for laminating the first adhesive layer on the one surface of the base sheet so as to be inside the second adhesive layer in a plan perspective,
The sheet stacking apparatus according to claim 1, wherein the first stacking unit includes a printing unit having a predetermined plate, and the first adhesive layer is stacked by printing the adhesive in a predetermined shape using the plate. A sheet manufacturing apparatus for manufacturing an adhesive sheet provided with a first adhesive layer and a second adhesive layer,
A step of feeding out the base sheet in which the first adhesive layer is laminated on the entire region or a partial region of one surface;
A second laminating means for laminating the second adhesive layer in an annular manner so that the other surface of the base sheet includes the first adhesive layer in a plan view,
The sheet stacking apparatus according to claim 1, wherein the first stacking unit includes a printing unit having a predetermined plate, and the first adhesive layer is stacked by printing the adhesive in a predetermined shape using the plate.   The sheet manufacturing apparatus according to claim 2, further comprising an intermediate layer stacking unit that stacks an intermediate layer between the first adhesive layer and the second adhesive layer.

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