JP2013095006A5

JP2013095006A5 -

Info

Publication number: JP2013095006A5
Application number: JP2011238371A
Authority: JP
Filing date: 2011-10-31
Publication date: 2014-08-21

Description

また、上記課題を解決するために、本発明に係る貼付方法は、被貼付部材に対し、貼始端と該貼始端に対向した貼終端とを有する貼付部材を貼始端から貼終端にかけて貼り付けていく貼付方法であって、
ワークステージに被貼付部材を載置するステップと、ワークステージの載置面に対向して設けられた保持シートに保持された貼付部材とワークステージ上の被貼付部材とが所定のギャップになるように保持シートを下降させるステップと、保持シートを上方から押圧する押圧機構により保持シートを押圧して貼付部材の貼始端を被貼付部材に押し付けるとともに、貼終端を貼始端よりも上方に位置させた状態で、保持シートを押圧機構に沿って上方に折り曲げるために保持シートの一端と押圧機構との間に設けられた剥離機構を、押圧機構とともに貼始端側に位置する保持シートの一端側から貼終端側に位置する保持シートの他端側に移動させるステップと、を含む貼付プロセスを備えたことを特徴とする。 Moreover, in order to solve the said subject, the sticking method which concerns on this invention sticks the sticking member which has a sticking end and the sticking end opposite to this sticking end from a sticking end to a sticking end with respect to a to-be-pasted member. It is a method of pasting,
The step of placing the member to be pasted on the work stage, and the pasting member held on the holding sheet provided facing the work stage placing surface and the member to be stuck on the work stage form a predetermined gap. The holding sheet is lowered by a pressing mechanism that presses the holding sheet from above and the sticking end of the sticking member is pressed against the sticking member and the sticking end is positioned above the sticking end. state, the holding sheet peeling mechanism provided between the one end and the pressing mechanism of the holding sheet to bend upward along the pressing mechanism, from one end of the holding sheet located pasting the pressing mechanism start-end side and moving the other end of the holding sheet located bonded final end side, characterized by comprising a sticking process comprising.

Claims

For a member to be pasted, a pasting method in which a pasting member having a pasting end and a pasting end facing the pasting end is pasted from the pasting end to the pasting end,
Placing the member to be pasted on a work stage;
Lowering the holding sheet so that a predetermined gap is formed between the sticking member held by a holding sheet provided facing the mounting surface of the work stage and the adherend member on the work stage; ,
In a state where the holding sheet is pressed by a pressing mechanism that presses the holding sheet from above to press the sticking end of the sticking member against the sticking member, and the sticking end is positioned above the sticking end. , the holding said peeling mechanism provided between one end of the holding sheet holding sheet to bend upward along the pressing mechanism and the pressing mechanism, located at the bonded start end side together with the pressing mechanism and moving from one end side of the sheet to the other end of the holding sheet located at the bonded end-end side,
A pasting method comprising: a pasting process including: