JP2013093616A5 - - Google Patents

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Publication number
JP2013093616A5
JP2013093616A5 JP2013019325A JP2013019325A JP2013093616A5 JP 2013093616 A5 JP2013093616 A5 JP 2013093616A5 JP 2013019325 A JP2013019325 A JP 2013019325A JP 2013019325 A JP2013019325 A JP 2013019325A JP 2013093616 A5 JP2013093616 A5 JP 2013093616A5
Authority
JP
Japan
Prior art keywords
photoelectric conversion
waveguide
conversion device
semiconductor substrate
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013019325A
Other languages
English (en)
Japanese (ja)
Other versions
JP5393904B2 (ja
JP2013093616A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013019325A priority Critical patent/JP5393904B2/ja
Priority claimed from JP2013019325A external-priority patent/JP5393904B2/ja
Publication of JP2013093616A publication Critical patent/JP2013093616A/ja
Publication of JP2013093616A5 publication Critical patent/JP2013093616A5/ja
Application granted granted Critical
Publication of JP5393904B2 publication Critical patent/JP5393904B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013019325A 2011-02-09 2013-02-04 光電変換装置 Active JP5393904B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013019325A JP5393904B2 (ja) 2011-02-09 2013-02-04 光電変換装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011026353 2011-02-09
JP2011026353 2011-02-09
JP2013019325A JP5393904B2 (ja) 2011-02-09 2013-02-04 光電変換装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2011223301A Division JP5197823B2 (ja) 2011-02-09 2011-10-07 光電変換装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013216483A Division JP5784092B2 (ja) 2011-02-09 2013-10-17 光電変換装置

Publications (3)

Publication Number Publication Date
JP2013093616A JP2013093616A (ja) 2013-05-16
JP2013093616A5 true JP2013093616A5 (zh) 2013-07-11
JP5393904B2 JP5393904B2 (ja) 2014-01-22

Family

ID=48616442

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013019325A Active JP5393904B2 (ja) 2011-02-09 2013-02-04 光電変換装置
JP2013216483A Active JP5784092B2 (ja) 2011-02-09 2013-10-17 光電変換装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2013216483A Active JP5784092B2 (ja) 2011-02-09 2013-10-17 光電変換装置

Country Status (1)

Country Link
JP (2) JP5393904B2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6444066B2 (ja) 2014-06-02 2018-12-26 キヤノン株式会社 光電変換装置および撮像システム
JP6173259B2 (ja) * 2014-06-02 2017-08-02 キヤノン株式会社 光電変換装置および撮像システム
KR102648213B1 (ko) * 2021-11-22 2024-03-18 한국전자통신연구원 광전 변환 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007201163A (ja) * 2006-01-26 2007-08-09 Fujifilm Corp 固体撮像素子の製造方法および固体撮像素子
JP2007227643A (ja) * 2006-02-23 2007-09-06 Fujifilm Corp 固体撮像装置
JP2008091800A (ja) * 2006-10-04 2008-04-17 Canon Inc 撮像素子及びその製造方法並びに撮像システム
JP2008192951A (ja) * 2007-02-07 2008-08-21 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
JP2009099700A (ja) * 2007-10-16 2009-05-07 Sony Corp 固体撮像装置の製造方法
JP2009252983A (ja) * 2008-04-04 2009-10-29 Canon Inc 撮像センサー、及び撮像センサーの製造方法
JP2009283637A (ja) * 2008-05-21 2009-12-03 Panasonic Corp 固体撮像装置とその製造方法
JP5428400B2 (ja) * 2009-03-04 2014-02-26 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器

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