JP2013093537A5 - - Google Patents

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Publication number
JP2013093537A5
JP2013093537A5 JP2012048340A JP2012048340A JP2013093537A5 JP 2013093537 A5 JP2013093537 A5 JP 2013093537A5 JP 2012048340 A JP2012048340 A JP 2012048340A JP 2012048340 A JP2012048340 A JP 2012048340A JP 2013093537 A5 JP2013093537 A5 JP 2013093537A5
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JP
Japan
Prior art keywords
silicon substrate
metal ions
aqueous solution
concentration
hydrofluoric acid
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Application number
JP2012048340A
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English (en)
Japanese (ja)
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JP2013093537A (ja
JP5467697B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2012048340A external-priority patent/JP5467697B2/ja
Priority to JP2012048340A priority Critical patent/JP5467697B2/ja
Priority to PCT/JP2012/069445 priority patent/WO2013051329A1/fr
Priority to KR1020147011341A priority patent/KR101442461B1/ko
Priority to CN201280048866.9A priority patent/CN103918090B/zh
Priority to SG11201401113RA priority patent/SG11201401113RA/en
Priority to TW101128542A priority patent/TWI489646B/zh
Publication of JP2013093537A publication Critical patent/JP2013093537A/ja
Publication of JP2013093537A5 publication Critical patent/JP2013093537A5/ja
Publication of JP5467697B2 publication Critical patent/JP5467697B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012048340A 2011-10-07 2012-03-05 太陽電池の製造方法 Expired - Fee Related JP5467697B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012048340A JP5467697B2 (ja) 2011-10-07 2012-03-05 太陽電池の製造方法
SG11201401113RA SG11201401113RA (en) 2011-10-07 2012-07-31 Method for manufacturing solar cell
KR1020147011341A KR101442461B1 (ko) 2011-10-07 2012-07-31 태양 전지의 제조 방법
CN201280048866.9A CN103918090B (zh) 2011-10-07 2012-07-31 太阳电池的制造方法
PCT/JP2012/069445 WO2013051329A1 (fr) 2011-10-07 2012-07-31 Procédé de fabrication de cellule solaire
TW101128542A TWI489646B (zh) 2011-10-07 2012-08-08 Method for manufacturing solar cells

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011223205 2011-10-07
JP2011223205 2011-10-07
JP2012048340A JP5467697B2 (ja) 2011-10-07 2012-03-05 太陽電池の製造方法

Publications (3)

Publication Number Publication Date
JP2013093537A JP2013093537A (ja) 2013-05-16
JP2013093537A5 true JP2013093537A5 (fr) 2013-10-31
JP5467697B2 JP5467697B2 (ja) 2014-04-09

Family

ID=48043500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012048340A Expired - Fee Related JP5467697B2 (ja) 2011-10-07 2012-03-05 太陽電池の製造方法

Country Status (6)

Country Link
JP (1) JP5467697B2 (fr)
KR (1) KR101442461B1 (fr)
CN (1) CN103918090B (fr)
SG (1) SG11201401113RA (fr)
TW (1) TWI489646B (fr)
WO (1) WO2013051329A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013142122A1 (fr) * 2012-03-19 2013-09-26 Alliance For Sustainable Energy, Llc Gravure antireflet de surfaces de silicium assistée par du cuivre
GB201205178D0 (en) * 2012-03-23 2012-05-09 Nexeon Ltd Etched silicon structures, method of forming etched silicon structures and uses thereof
CN103219428B (zh) * 2013-04-12 2015-08-19 苏州大学 一种晶体硅太阳能电池的绒面结构及其制备方法
JP2015053398A (ja) * 2013-09-06 2015-03-19 株式会社ジェイ・イー・ティ 太陽電池の製造方法
CN107978511A (zh) * 2017-11-20 2018-05-01 武汉新芯集成电路制造有限公司 氧化层及半导体器件的形成方法
KR102046255B1 (ko) 2018-06-21 2019-11-18 한국생산기술연구원 나노 텍스쳐링 구조를 갖는 태양전지의 제조방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003242229A1 (en) * 2002-06-06 2003-12-22 Kansai Technology Licensing Organization Co., Ltd. Method for producing polycrystalline silicon substrate for solar cell
JP2007194485A (ja) 2006-01-20 2007-08-02 Osaka Univ 太陽電池用シリコン基板の製造方法
JP2009152302A (ja) * 2007-12-19 2009-07-09 Canon Inc 光起電力素子の形成方法
US20090236317A1 (en) * 2008-03-21 2009-09-24 Midwest Research Institute Anti-reflection etching of silicon surfaces catalyzed with ionic metal solutions

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