JP2013089788A5 - - Google Patents
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- JP2013089788A5 JP2013089788A5 JP2011229419A JP2011229419A JP2013089788A5 JP 2013089788 A5 JP2013089788 A5 JP 2013089788A5 JP 2011229419 A JP2011229419 A JP 2011229419A JP 2011229419 A JP2011229419 A JP 2011229419A JP 2013089788 A5 JP2013089788 A5 JP 2013089788A5
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- pulse
- modulation control
- frequency modulation
- control information
- generating means
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Description
そして、上記の制御回路15が特許請求の範囲における制御手段に、選択回路18とLUT17とが特許請求の範囲におけるパルス周波数変調制御情報生成手段に、LUT17が特許請求の範囲のメモリ手段に、指令パルス発生回路19が特許請求の範囲における指令パルス発生手段に、ゲートパルス生成回路20とゲートドライブ回路16a,16bが特許請求の範囲におけるインバータ駆動手段に、それぞれ対応している。 Then, the control circuit 15 is instructed to control means in the claims, the selection circuit 18 and the LUT 17 are instructed to generate pulse frequency modulation control information in the claims, and the LUT 17 is instructed to memory means in the claims. The pulse generation circuit 19 corresponds to the command pulse generation means in the claims, and the gate pulse generation circuit 20 and the gate drive circuits 16a and 16b correspond to the inverter drive means in the claims.
Claims (6)
上記制御手段は、被加工物の加工条件に応じて上記電圧パルスのキャリア周波数をパルス周波数変調制御するための情報を生成するパルス周波数変調制御情報生成手段と、
上記パルス周波数変調制御情報生成手段で生成されたパルス周波数変調制御情報を反映させてパルス周波数変調された指令パルスを生成する指令パルス発生手段と、
上記指令パルス発生手段で発生された指令パルスに基づいて上記インバータのスイッチング素子をオンオフ制御するインバータ駆動手段とを備え、上記インバータ駆動手段の駆動により上記インバータからパルス周波数変調された上記電圧パルスを出力するレーザ加工機用電源装置。 An inverter for power conversion that outputs a high-frequency voltage pulse for laser oscillation to the laser oscillator, and a control means for controlling the operation of the inverter;
The control means includes pulse frequency modulation control information generating means for generating information for performing pulse frequency modulation control of the carrier frequency of the voltage pulse according to the processing conditions of the workpiece;
Command pulse generating means for generating pulse frequency modulated command pulses reflecting the pulse frequency modulation control information generated by the pulse frequency modulation control information generating means;
Inverter driving means for controlling on / off of the switching element of the inverter based on the command pulse generated by the command pulse generating means, and outputting the voltage pulse whose pulse frequency is modulated from the inverter by driving the inverter driving means. Power supply device for laser processing machines.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011229419A JP5734158B2 (en) | 2011-10-19 | 2011-10-19 | Power supply device for laser processing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011229419A JP5734158B2 (en) | 2011-10-19 | 2011-10-19 | Power supply device for laser processing machine |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013089788A JP2013089788A (en) | 2013-05-13 |
JP2013089788A5 true JP2013089788A5 (en) | 2013-11-21 |
JP5734158B2 JP5734158B2 (en) | 2015-06-10 |
Family
ID=48533401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011229419A Active JP5734158B2 (en) | 2011-10-19 | 2011-10-19 | Power supply device for laser processing machine |
Country Status (1)
Country | Link |
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JP (1) | JP5734158B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016002001A1 (en) * | 2014-07-01 | 2016-01-07 | ギガフォトン株式会社 | Laser device, euv generation system, and method for controlling laser device |
JP7084759B2 (en) * | 2018-03-29 | 2022-06-15 | 住友重機械工業株式会社 | Laser processing equipment |
JP7189674B2 (en) * | 2018-04-20 | 2022-12-14 | 住友重機械工業株式会社 | Laser processing machine and its power supply |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3782486B2 (en) * | 1995-06-21 | 2006-06-07 | キヤノン株式会社 | Laser output control apparatus, exposure apparatus, and device manufacturing method |
JPH09223836A (en) * | 1996-02-14 | 1997-08-26 | Amada Eng Center:Kk | Laser power supply device |
JPH09232658A (en) * | 1996-02-21 | 1997-09-05 | Amada Eng Center:Kk | Laser power supply device |
JPH10135554A (en) * | 1996-10-25 | 1998-05-22 | Matsushita Electric Ind Co Ltd | Gas laser oscillating device |
JP3991450B2 (en) * | 1998-06-16 | 2007-10-17 | 三菱電機株式会社 | High frequency AC power supply |
JP2003243749A (en) * | 2002-02-15 | 2003-08-29 | Mitsubishi Electric Corp | Laser power source apparatus |
JP3846573B2 (en) * | 2002-06-14 | 2006-11-15 | 三菱電機株式会社 | Laser processing apparatus and control method of the processing apparatus |
JP4135417B2 (en) * | 2002-07-09 | 2008-08-20 | 三菱電機株式会社 | LASER POWER SUPPLY DEVICE AND LASER DEVICE |
JP2007335900A (en) * | 2007-09-07 | 2007-12-27 | Mitsubishi Electric Corp | Laser device, method of controlling power feed for the same, power feed control circuit for the same, and method of adjusting power feed control circuit for the same |
US8369373B2 (en) * | 2009-10-13 | 2013-02-05 | Coherent, Inc. | Pre-ionization method for CO2 gas-discharge laser |
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2011
- 2011-10-19 JP JP2011229419A patent/JP5734158B2/en active Active
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