JP2013089788A5 - - Google Patents

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JP2013089788A5
JP2013089788A5 JP2011229419A JP2011229419A JP2013089788A5 JP 2013089788 A5 JP2013089788 A5 JP 2013089788A5 JP 2011229419 A JP2011229419 A JP 2011229419A JP 2011229419 A JP2011229419 A JP 2011229419A JP 2013089788 A5 JP2013089788 A5 JP 2013089788A5
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pulse
modulation control
frequency modulation
control information
generating means
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JP2011229419A
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JP5734158B2 (en
JP2013089788A (en
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そして、上記の制御回路15が特許請求の範囲における制御手段に、選択回路18とLUT17とが特許請求の範囲におけるパルス周波数変調制御情報生成手段に、LUT17が特許請求の範囲のメモリ手段に、指令パルス発生回路19が特許請求の範囲における指令パルス発生手段に、ゲートパルス生成回路20とゲートドライブ回路16a,16bが特許請求の範囲におけるインバータ駆動手段に、それぞれ対応している。 Then, the control circuit 15 is instructed to control means in the claims, the selection circuit 18 and the LUT 17 are instructed to generate pulse frequency modulation control information in the claims, and the LUT 17 is instructed to memory means in the claims. The pulse generation circuit 19 corresponds to the command pulse generation means in the claims, and the gate pulse generation circuit 20 and the gate drive circuits 16a and 16b correspond to the inverter drive means in the claims.

Claims (6)

レーザ発振器に対してレーザ発振用の高周波の電圧パルスを出力する電力変換用のインバータと、このインバータの動作を制御する制御手段とを備え、
上記制御手段は、被加工物の加工条件に応じて上記電圧パルスのキャリア周波数をパルス周波数変調制御するための情報を生成するパルス周波数変調制御情報生成手段と、
上記パルス周波数変調制御情報生成手段で生成されたパルス周波数変調制御情報を反映させてパルス周波数変調された指令パルスを生成する指令パルス発生手段と、
上記指令パルス発生手段で発生された指令パルスに基づいて上記インバータのスイッチング素子をオンオフ制御するインバータ駆動手段とを備え、上記インバータ駆動手段の駆動により上記インバータからパルス周波数変調された上記電圧パルスを出力するレーザ加工機用電源装置。
An inverter for power conversion that outputs a high-frequency voltage pulse for laser oscillation to the laser oscillator, and a control means for controlling the operation of the inverter;
The control means includes pulse frequency modulation control information generating means for generating information for performing pulse frequency modulation control of the carrier frequency of the voltage pulse according to the processing conditions of the workpiece;
Command pulse generating means for generating pulse frequency modulated command pulses reflecting the pulse frequency modulation control information generated by the pulse frequency modulation control information generating means;
Inverter driving means for controlling on / off of the switching element of the inverter based on the command pulse generated by the command pulse generating means, and outputting the voltage pulse whose pulse frequency is modulated from the inverter by driving the inverter driving means. Power supply device for laser processing machines.
上記パルス周波数変調制御情報生成手段は、被加工物の加工条件に応じて上記電圧パルスのキャリア周波数をパルス周波数変調制御するための時間とキャリア周波数の関係を設定した情報が予め登録されたメモリ手段で構成されている請求項1に記載のレーザ加工機用電源装置。 The pulse frequency modulation control information generating means is a memory means in which information for setting the relationship between the time and the carrier frequency for pulse frequency modulation control of the carrier frequency of the voltage pulse in accordance with the processing conditions of the workpiece is registered in advance. The power supply device for a laser beam machine according to claim 1, comprising: 上記パルス周波数変調制御情報生成手段は、被加工物の加工材質に合わせて、上記インバータからレーザパルスの1パルス分に相当する一連の電圧パルスが出力されるたびに、パルス周波数変調制御用の情報を変更するものである請求項1または請求項2に記載のレーザ加工機用電源装置。 The pulse frequency modulation control information generating means generates information for pulse frequency modulation control every time a series of voltage pulses corresponding to one laser pulse is output from the inverter in accordance with the workpiece material of the workpiece. The power supply device for a laser beam machine according to claim 1 or 2, wherein: 上記パルス周波数変調制御情報生成手段からの上記パルス周波数変調制御情報に基づいて上記インバータからパルス周波数変調されて出力される電圧パルスのキャリア周波数が予め規定された周波数よりも高い場合には、上記指令パルス発生手段はレーザパルスの1パルス分に相当する一連の上記指令パルスの内、初期の立上りパルスのみパルス幅を長くする請求項1ないし請求項3のいずれか1項に記載のレーザ加工機用電源装置。 When the carrier frequency of the voltage pulse output by the pulse frequency modulation from the inverter based on the pulse frequency modulation control information from the pulse frequency modulation control information generating means is higher than a predetermined frequency, the command 4. The laser processing machine according to claim 1, wherein the pulse generating means lengthens the pulse width of only the initial rising pulse in the series of command pulses corresponding to one pulse of the laser pulse. 5. Power supply. 上記パルス周波数変調制御情報生成手段は、上記電圧パルスのキャリア周波数が、上記レーザ発振器の共振周波数よりも高い周波数から徐々に低くなるようなパルス周波数変調制御情報を生成するものである請求項1ないし請求項4のいずれか1項に記載のレーザ加工機用電源装置。 2. The pulse frequency modulation control information generating means generates pulse frequency modulation control information such that a carrier frequency of the voltage pulse gradually decreases from a frequency higher than a resonance frequency of the laser oscillator. The power supply device for laser processing machines of any one of Claim 4. 上記パルス周波数変調制御情報生成手段は、上記電圧パルスのキャリア周波数が、上記レーザ発振器の共振周波数よりも低い周波数から徐々に高くなるようなパルス周波数変調制御情報を生成するものである請求項1ないし請求項4のいずれか1項に記載のレーザ加工機用電源装置。 2. The pulse frequency modulation control information generating means generates pulse frequency modulation control information such that a carrier frequency of the voltage pulse gradually increases from a frequency lower than a resonance frequency of the laser oscillator. The power supply device for laser processing machines of any one of Claim 4.
JP2011229419A 2011-10-19 2011-10-19 Power supply device for laser processing machine Active JP5734158B2 (en)

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JP2013089788A JP2013089788A (en) 2013-05-13
JP2013089788A5 true JP2013089788A5 (en) 2013-11-21
JP5734158B2 JP5734158B2 (en) 2015-06-10

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Publication number Priority date Publication date Assignee Title
WO2016002001A1 (en) * 2014-07-01 2016-01-07 ギガフォトン株式会社 Laser device, euv generation system, and method for controlling laser device
JP7084759B2 (en) * 2018-03-29 2022-06-15 住友重機械工業株式会社 Laser processing equipment
JP7189674B2 (en) * 2018-04-20 2022-12-14 住友重機械工業株式会社 Laser processing machine and its power supply

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JP3782486B2 (en) * 1995-06-21 2006-06-07 キヤノン株式会社 Laser output control apparatus, exposure apparatus, and device manufacturing method
JPH09223836A (en) * 1996-02-14 1997-08-26 Amada Eng Center:Kk Laser power supply device
JPH09232658A (en) * 1996-02-21 1997-09-05 Amada Eng Center:Kk Laser power supply device
JPH10135554A (en) * 1996-10-25 1998-05-22 Matsushita Electric Ind Co Ltd Gas laser oscillating device
JP3991450B2 (en) * 1998-06-16 2007-10-17 三菱電機株式会社 High frequency AC power supply
JP2003243749A (en) * 2002-02-15 2003-08-29 Mitsubishi Electric Corp Laser power source apparatus
JP3846573B2 (en) * 2002-06-14 2006-11-15 三菱電機株式会社 Laser processing apparatus and control method of the processing apparatus
JP4135417B2 (en) * 2002-07-09 2008-08-20 三菱電機株式会社 LASER POWER SUPPLY DEVICE AND LASER DEVICE
JP2007335900A (en) * 2007-09-07 2007-12-27 Mitsubishi Electric Corp Laser device, method of controlling power feed for the same, power feed control circuit for the same, and method of adjusting power feed control circuit for the same
US8369373B2 (en) * 2009-10-13 2013-02-05 Coherent, Inc. Pre-ionization method for CO2 gas-discharge laser

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