JP2007335900A - Laser device, method of controlling power feed for the same, power feed control circuit for the same, and method of adjusting power feed control circuit for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser device in which an initial spike is suppressed effectively. <P>SOLUTION: The laser device is a pulse laser device excited by electric discharge, and comprises a laser-beam generating section and a power feed control section. The laser-beam generating section generates a laser beam, in response to the power feed by a high-frequency AC voltage or a high-frequency pulse-shaped alternating voltage, and is a laser generator that projects a laser beam, accompanied by initial spike, if only a regular power feed is applied in starting the power feed. To avoid the problem, the power feed control section conducts, in response to the output power request for the laser beam, a preliminary power feed to the laser-beam generating section to generate a laser beam, whose output power does not reach the level necessary for working, and while the laser beam generated by the preliminary power feed is projected, regular power feed is started that is capable of generating a laser beam of output power level that is not less than the necessary level. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a laser device used for punching an electronic multilayer substrate, a power supply control method for the laser device, a power supply control circuit for the laser device, and a method for adjusting the power supply control circuit.

2. Description of the Related Art Conventionally, various types of laser devices that can be used for punching an electronic multilayer substrate are known. For example, a CO ₂ laser device emits a laser beam that is oscillated and amplified in response to the supply of a high-frequency AC voltage or a high-frequency pulsed alternating voltage. The conventional power source included in the CO ₂ laser device is, for example, a laser beam generation unit (CO _{2) included in the} laser device in accordance with the switching from the Low level to the High level of the beam ON signal B input from the outside. In the case of a laser, a high-frequency AC voltage or a high-frequency pulsed alternating voltage is supplied to an excitation unit and a resonator placed in a CO ₂ atmosphere (for example, Patent Document 1).
JP 2000-4059 A

  In response to switching of the beam ON signal B to the high level, when the supply of the high-frequency alternating voltage or the high-frequency pulsed alternating voltage is started to the laser beam generation unit, the laser beam generation unit first outputs the output range for processing. It is known that after generating an excessive output laser beam that deviates from the above, that is, a so-called initial spike, a laser beam that converges to a value within the output range for the above processing while relaxing oscillation is known.

In FIG. 9, the beam ON signal B is represented by a solid line, and the output value of the laser beam emitted from the laser beam generation unit in response to the input of the beam ON signal B is represented by a thick dotted line. In the drawing, the oscillation threshold of the gain of the laser medium is indicated by a thin dotted line, and the gain of the laser medium is indicated by a one-dot chain line. As shown in the figure, after the beam ON signal B is switched to the high level, it takes t _ON time until the CO ₂ molecule is excited and the laser beam is emitted. In general, this time is called an oscillation delay time. The output of the laser beam first largely exceeds the processing output range due to the initial spike, and then converges to a value within the processing output range while relaxing oscillation. After the beam ON signal B is switched to the low level, the output value of the laser beam is attenuated to zero.

  The unevenness of the output value of the laser beam due to the initial spike is one of the causes that deteriorate the accuracy of laser processing. FIG. 10 shows a processing result when the processing target is a polyimide resin. (A) of FIG. 10 is the figure which looked at the polyimide resin from right above. FIG. 10B is a cross-sectional view of a polyimide resin including a laser processed portion. As shown in FIG. 9, since the laser beam output value oscillates greatly beyond the processing output range initially due to the initial spike, the laser beam diameter is blurred and the vicinity of the surface of the polyimide resin processing hole is melted and roughened. It becomes a state.

  FIG. 11 shows a processing result when the processing target is an epoxy resin. (A) of FIG. 11 is the figure which looked at the epoxy resin from right above. Further, FIG. 11B is a cross-sectional view of an epoxy resin including a portion to be laser processed. In the case of the epoxy resin, not only the surface of the processed hole becomes rough like the polyimide resin described above, but also the bad quality is conspicuous because debris scattered by the processing process adheres to the surface of the processed hole.

  If the voltage supplied to the laser beam generation unit is lowered, the output peak value of the laser beam that appears in the initial spike phenomenon can be kept low, but the laser beam output itself is also lowered, so that the working efficiency of laser processing is deteriorated. Has drawbacks.

  The present invention relates to a laser device, a power supply control method for a laser device, a power supply control circuit for a laser device, and a laser device that eliminates an adverse effect caused by the occurrence of an initial spike without reducing the output value of a laser beam for processing. It is an object of the present invention to provide a method for adjusting the power supply control circuit.

  The laser device according to claim 1 is a pulse laser device that is excited by electric discharge, and is necessary for processing the laser beam generation unit and the laser beam generation unit according to the output request of the laser beam. A power supply control unit that performs a preliminary power supply for generating a laser beam that does not satisfy the output value and starts a main power supply for generating a laser beam that is equal to or greater than the output value while the laser beam generated by the preliminary power supply is being emitted. The laser beam generation unit generates a laser beam in response to power supply of a high-frequency AC voltage or a high-frequency pulsed alternating voltage, and performs only main power supply when power supply starts. And a laser generator that emits a laser beam with an initial spike.

  The laser apparatus according to claim 2 is the laser apparatus according to claim 1, wherein the power supply control unit is configured to perform a preliminary power supply period, a period until the main power supply is started after the completion of the preliminary power supply, and a main power supply period. Among them, a means for adjusting at least one of them is provided.

  A power supply control method according to claim 3 is a power supply control method of a pulse laser device excited by discharge, and processes a laser beam generation unit included in the laser device in response to an output request of the laser beam. The first step of performing the preliminary power supply for generating the laser beam that does not satisfy the output value necessary for the above-mentioned, and the laser beam generation unit performing the laser beam emission in response to the preliminary power supply, And a second step of starting main power supply for generating a laser beam, wherein the laser beam generator generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage. Thus, the laser generator emits a laser beam with an initial spike when only the main power supply is performed at the start of power supply.

  The power supply control circuit for a laser device according to claim 4 is a power supply control circuit for a pulse laser device excited by discharge, and includes a power supply switch and a control circuit. Power is supplied to the laser beam generator of the laser device in response to an ON signal from the circuit, and the control circuit outputs an output necessary for processing from the laser beam generator in response to an output request of the laser beam. The power supply switch is turned on only during a period for generating a laser beam that is less than the value, and the standby power supply is adjusted, and the laser beam generated by the preliminary power supply is emitted while the laser beam is emitted. Including a control circuit in which the period from the completion of the preliminary power supply to the start of the main power supply is adjusted so as to start the main power supply by turning on the power supply switch so as to generate the laser beam. The control circuit includes first adjusting means for adjusting a period for performing the preliminary power supply, and second adjusting means for adjusting a period until the main power supply is started after completion of the preliminary power supply. The laser beam generation unit generates a laser beam in response to feeding of a high-frequency AC voltage or a high-frequency pulsed alternating voltage. When only the main feeding is performed at the start of feeding, a laser with an initial spike is generated. It is a laser generator that emits a light beam.

  The adjustment method of the power supply control circuit for the laser device according to claim 5 is the adjustment method of the power supply control circuit for the pulse laser device excited by discharge according to claim 4, wherein the output request of the laser beam is requested. And a first step of adjusting a period for performing the preliminary power supply by the first adjustment means so that a laser beam that does not satisfy an output value necessary for processing is generated from the laser beam generation unit of the laser device. The main discharge is started after the completion of the preliminary power supply by the second adjusting means so that the main power supply for generating a laser beam having the output value or more is started while the laser beam generated by the preliminary power supply is being emitted. And a second step of adjusting a period until the operation is performed.

    The laser device according to claim 1, after performing preliminary power supply for generating a laser beam that is less than an output value necessary for processing the laser beam generator, in response to an output request of the laser beam, While the laser beam generated by the preliminary power supply is being emitted, a stable laser beam without an initial spike is generated by starting the main power supply that generates a laser beam with a desired output above the output value. can do.

  According to a second aspect of the present invention, in accordance with deterioration of the laser beam generation unit or environmental change, the standby power supply period, the period until the main power supply is started after the completion of the preliminary power supply, and the main power supply period are included. Since at least one is adjustable, a stable laser beam without an initial spike can always be generated.

  According to the power supply control method of the laser device according to claim 3, since the main power supply is started while the laser beam less than the predetermined output value is generated by the preliminary power supply, the power supply is smoothly performed without an initial spike. It is possible to generate a laser beam that increases to a desired output that is equal to or higher than the predetermined output value.

When used, the power supply control circuit for a laser device according to claim 4 can generate a laser beam that smoothly increases to a desired output equal to or higher than the predetermined output value without an initial spike. Instead, the first adjustment means adjusts the _pre- feeding period T _pre so as to generate a laser beam that does not satisfy the output value necessary for processing the laser beam generator in response to the output request of the laser beam. Then, the second adjustment means adjusts the standby period τ so as to start the main power supply for generating a laser beam having a desired output equal to or higher than the output value while the laser beam generated by the preliminary power supply is emitted. can do.

According to a fifth aspect of the present invention, there is provided a method for adjusting a power supply control circuit for a pulse laser device excited by a discharge, wherein the power generation control circuit according to the fourth aspect is used to generate the laser beam in response to a laser beam output request. The first step of adjusting the _pre- feed period T _pre by the first adjusting means so that a laser beam that does not satisfy the output value necessary for processing is generated from the unit, and the emission of the laser beam generated by the pre-feed The second step of adjusting the period τ until the main discharge is started by the second adjusting means so that the main power supply for generating a laser beam having a desired output equal to or higher than the output value is started. By executing the above, it is possible to generate a stable laser beam without an initial spike.

(1) Overall Configuration FIG. 1 is a diagram illustrating a circuit configuration of a CO ₂ laser apparatus 100 according to an embodiment. The CO ₂ laser device 100 includes a laser beam generation unit 10 and a power supply control unit 80.

The laser beam generation unit 10 is a well-known CO ₂ laser generator, and an oscillator that resonates and amplifies a laser beam excitation unit and a laser beam excited by the excitation unit inside a tube 6 filled with CO _2. Is provided. The excitation unit is composed of a pair of electrodes 1a and 1b having dielectrics 2a and 2b on opposite surfaces with a predetermined gap. The oscillator is composed of light-transmissive reflective glasses 3 and 4 which are provided to face each other. The reflection glass 3 is a glass that has a transmittance of 30%, for example, and reflects 70% of the laser beam traveling from the inside of the tube 6 to the outside. The reflection glass 4 has a transmittance of 1%, for example, and reflects 99% of the laser beam traveling from the inside of the tube 6 to the outside.

The laser beam generation unit 10 is not limited to a CO ₂ laser generator, and may be replaced if it is of a type that generates an initial spike when power supply starts.

  In response to the switching of the beam ON signal B from the low level to the high level, the power supply control unit 80 stops the power supply immediately after the gain of the laser medium exceeds the oscillation threshold and Then, a preliminary power supply for generating a laser beam that does not satisfy the output value necessary for processing is performed, and a laser beam within the output range for processing is generated while the laser beam generated by the preliminary power supply is being emitted. Supply main power. At the start of the main power supply, an initial spike does not occur because the light beam generated by the preliminary power supply already exists in the laser beam generation unit 10. As a result, it is possible to generate a laser beam that is smoothly excited to a value within the output range for processing.

(2) Detailed Description of Power Supply Control Unit FIG. 2 is a diagram illustrating a specific circuit configuration of the power supply control unit 80. The power supply control unit 80 includes an AC power supply 20 that stably outputs a high-frequency AC voltage E, a switch 68 that opens and closes a circuit to which the AC power supply 20 and the laser beam generation unit 10 are connected, and a beam ON signal B The control circuit 50 outputs a drive signal D for controlling on / off of the switch 68 in response to switching to the high level. The switch 68 is turned on when the high level drive signal D is input, and closes the circuit. The voltage supplied to the laser beam generator 10 may be a high-frequency pulsed alternating voltage.

  FIG. 3 shows the beam ON signal B, the drive signal D output from the control circuit 50 to the switch 68 in response to the switching of the beam ON signal B from Low level to High level, and the value of the drive signal D. 5 is a time chart showing the voltage E supplied from the power supply control unit 80 to the laser beam generation unit 10 according to the above. Hereinafter, the configuration and operation of the control circuit 50 will be described with reference to FIGS. 2 and 3.

The control circuit 50 is roughly divided into a standby power supply processing unit C1, a period τ standby unit C2, and a main power supply processing unit C3. The standby power supply processing unit C1 outputs a high-level drive signal D only during the period T _pre in response to the switching of the beam ON signal B to the high level. The period τ standby unit C2 waits for the period τ to elapse after the standby power supply in the standby power supply processing unit C1 is completed. The main power supply processing unit C3 outputs a high-level drive signal D for the period _Tmain after the period τ in the period τ standby unit C2 elapses.

(2-1) Standby Power Supply Processing Unit The configuration of the standby power supply processing unit C1 will be described below. An external terminal 70 to which the beam ON signal B is input is connected to the set terminals of the flip-flops 52 and 56. The flip-flops 52 and 56 output a high level signal in response to the switching of the beam ON signal B to the high level. The output terminal of the flip-flop 56 is connected to one signal input terminal of the 2-input OR gate 67. The OR gate 67 outputs a high-level drive signal D in response to a high-level signal input from the flip-flop 56. As a result, the switch 68 is turned on, and power supply to the laser beam generation unit 10 is started.

  On the other hand, the output terminal of the flip-flop 52 is connected to one input terminal of the 2-input AND gate 53. The remaining input terminal of the AND gate 53 is connected to an output terminal of a clock generator 51 that outputs a high-frequency reference clock signal CLK. The output terminal of the AND gate 53 is connected to one signal input terminal of the adder 54. The AND gate 53 outputs the clock signal CLK input from the clock generation circuit 51 to the adder 54 as it is while the beam ON signal B is at a high level. The output terminal of the adder 54 is connected to one signal input terminal of the comparator 55 at the next stage and to the remaining signal input terminal of the adder 54. By adopting this configuration, the adder 54 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 55 at the next stage.

A reference voltage V _Tpre determined according to the standby power supply period T _pre is input to the remaining signal input terminals of the comparator 55. The reference voltage V _Tpre is supplied from a known DC power source having an output adjustment function (not shown). The comparator 55 outputs a high level signal when the value of the signal output from the adder 54 becomes larger than the reference voltage V _Tpre . The output terminal of the comparator 55 is connected to the reset terminals of the flip-flops 52 and 56 and the set terminal of the flip-flop 57. When a high level signal is input to the reset terminal of the flip-flop 52, the output of the flip-flop 52 is switched to the low level, and the operation of the standby power supply processing unit C1 is stopped.

  When a high level signal is input from the comparator 55 to the reset terminal of the flip-flop 56, the output of the flip-flop 56 returns to the low level. As a result, the drive signal D output from the OR gate 67 is switched to the Low level. As a result, the switch 68 is turned off, and the power supply to the laser beam generator 10 is stopped.

By adopting the above configuration, the standby power supply processing unit C1 outputs a high level drive signal D for a preset T _pre period in response to the switching of the beam ON signal B to the high level. The terminals 70 and 71 are connected and function to perform preliminary power supply to the laser beam generator 10.

(2-2) Period τ Standby Part Hereinafter, the configuration of the period τ standby part C2 will be described. One signal input terminal of the 2-input AND gate 58 is connected to the output terminal of the flip-flop 57, and the other signal input terminal is connected to the output terminal of the clock generator 51. The output of the flip-flop 57 is switched to a high level in accordance with the end of the standby power supply period T _pre in the standby power supply processing unit C1. In response to switching of the output of the flip-flop 57 to the high level, the AND gate 58 outputs the reference clock signal CLK to one signal input terminal of the adder 59 connected to the next stage. The output terminal of the adder 59 is input to one signal input terminal of the comparator 60 at the next stage and connected to the remaining signal input terminal of the adder 59. By adopting this configuration, the adder 59 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 60 at the next stage.

A reference voltage V _τ determined according to the standby period τ is input to the remaining signal input terminals of the comparator 60. The reference voltage _Vτ is supplied from a known DC power source having an output adjustment function (not shown). The comparator 60 outputs a high level signal when the signal value input from the adder 59 becomes larger than the reference voltage _Vτ , that is, after the standby period τ elapses. The signal output terminal of the comparator 60 is connected to the reset terminal of the flip-flop 57 and the set terminals of the flip-flops 61 and 65. The signal output from the flip-flop 57 in response to the high-level signal input to the reset terminal is switched to the low level, and the operation of the period τ standby unit C2 is stopped.

  By adopting the above configuration, the period τ standby unit C2 functions to wait for the period τ to elapse after the standby power supply in the standby power supply processing unit C1 ends.

(2-3) Main Power Supply Processing Unit Hereinafter, the configuration of the main power supply processing unit C3 will be described. The signals output from the flip-flops 61 and 65 in response to the high level signal input from the comparator 60 included in the period τ standby unit C2 are switched to the high level. The OR gate 67 receives the high level signal input from the flip-flop 65 and switches the drive signal D to the high level. As a result, the switch 68 is turned on, and main power feeding to the laser beam generator 10 is started.

  A high-frequency clock signal CLK output from the clock generation circuit 51 is input to the remaining signal input terminals of the 2-input AND gate 62. The output terminal of the AND gate 62 is connected to one signal input terminal of the adder 63. The AND gate 62 outputs the clock signal CLK input from the clock generation circuit 51 to the adder 63 as it is in response to a High level signal input from the flip-flop 61. The output terminal of the adder 63 is connected to one signal input terminal of the comparator 64 at the next stage and to the output terminal of the adder 63. By adopting this configuration, the adder 63 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 64 at the next stage.

A reference voltage V _Tmain that specifies the _main power supply period T _main is input to the remaining signal input terminals of the comparator 64. The reference voltage V _Tmain is supplied from a known DC power source having an output adjustment function (not shown). The comparator 64 outputs a high level signal when the signal value input from the adder 63 becomes larger than the reference voltage V _Tmain . The output terminal of the comparator 64 is connected to the reset terminals of the flip-flops 61 and 65. When a high level signal is input from the comparator 64 to the reset terminal of the flip-flop 65, the output of the flip-flop 65 returns to the low level. As a result, the drive signal D output from the OR gate 67 is switched to the low level, the switch 68 is switched off, and the main power supply to the laser beam generator 10 is stopped.

By adopting the above configuration, the main power feeding unit C3 functions to perform main power feeding for the period _Tmain after waiting for the period τ in the period τ standby unit C2.

  As described above, according to the laser apparatus 100 including the power supply control unit 80 configured as described above, it is possible to generate a laser beam that is smoothly excited to a value within the processing output range without an initial spike. Can do.

  Of the power supply control unit 80, in particular, a circuit including the control circuit 50 and the switch 68 is provided as a single power supply control circuit, and a circuit of a conventional laser device including a laser beam generation unit and a power source of a type that generates initial spikes. It is possible to improve the conventional laser device so as to generate a laser beam without an initial spike. In this case, a circuit corresponding to the power supply control unit 80 is configured by the power supply included in the conventional laser device and the power supply control circuit.

(3) Adjustment method of power supply control unit The light emission period T _main of the laser beam for processing needs to be changed depending on factors such as the object to be laser processed and the amount of processing. The period T _main can be changed as appropriate by adjusting the value of the reference voltage V _Tmain used in the main power supply processing unit C3 of the control circuit 50.

In addition, the timing at which the initial spike is generated varies depending on the assembly accuracy of the laser apparatus 100, variations in the components used, and the like. Furthermore, the timing also changes when the laser beam generator 10 used in the laser apparatus 100 is replaced with another type of laser generator that generates an initial spike. In addition, as described above, the power supply control circuit including the control circuit 50 and the switch 68 in the power supply control unit 80, in particular, a laser beam generation unit of a type that generates initial spikes and a power supply of a conventional laser apparatus configured with a power source. When it is attached to the circuit, the initial spike generation timing varies depending on the laser beam generation unit to be used. In these cases, it is necessary to adjust each value of the reference voltages V _Tpre and V _τ used in the standby power supply processing unit C1 and the period τ standby unit C2 of the power supply control unit 50 in accordance with the timing of occurrence of the initial spike. Adjustment of the values of the reference voltages V _Tpre and V _τ is performed by adjusting each output of the corresponding DC power supply with an output adjustment function.

Hereinafter, a specific adjustment procedure of the reference voltages V _Tpre , V _τ , and V _Tmain will be described. FIG. 4 shows a known measuring apparatus 200 that measures the output of the laser beam generated in the laser beam generator 10 from the output of the laser beam 16 leaking from the reflection mirror 4 constituting the resonator. The measuring apparatus 200 detects and detects the integrating sphere 201 that scatters the laser beam 16 leaking from the reflecting mirror 4 in the 2π direction by the inner grain, and the intensity of the scattered light inside the integrating sphere 201. A photodetector 202 that outputs an electrical signal at a level corresponding to the light intensity, and a signal output line of the photodetector 202 are connected to the signal input terminal 203a, and according to the intensity of the laser beam input from the photodetector 202. And an oscilloscope 203 for displaying the waveform.

Each value of the reference voltages V _Tpre , V _τ and V _Tmain is adjusted while checking the output waveform of the laser beam displayed by the oscilloscope 203. As described above, the values of these reference voltages can be changed by adjusting the output of each DC power supply with an output adjustment function.

First, the value of the reference voltage V _Tpre is set to a minimum value that can be set, and the reference voltage V _τ is set to a value at which the elapsed time of the standby time τ is usually sufficiently later than the timing at which the initial spike occurs. deep.

The value of the reference voltage V _Tpre is gradually increased from the minimum value. FIGS. 5A to 5C are diagrams showing the output of the laser beam displayed on the oscilloscope 203 in this case by a thick dotted line. In this figure, for easy understanding, the drive signal D output from the OR gate 67 in accordance with the value of the reference voltage V _Tpre is indicated by a solid line, and the oscillation threshold of the gain of the laser medium is indicated by a thin dotted line. It shows the gain by a dashed line.

As shown in FIG. 5A, when the reference voltage V _Tpre is small, that is, when the standby power supply period T _pre is short, the laser beam generation unit 10 does not emit the laser beam. As shown in FIG. 5B, when the reference voltage V _Tpre is further increased, that is, when the standby power supply period T _pre becomes longer, the laser beam generation unit 10 starts emitting the laser beam. Here, if power supply is stopped immediately after the gain of the laser medium exceeds the oscillation threshold, a low-power laser beam that does not satisfy the output value necessary for processing is emitted. Hereinafter, the value of the reference voltage when the gain of the laser medium exceeds the oscillation threshold is referred to as V _Tpre . If the reference voltage V _Tpre is further increased, as shown in FIG. 5C, the gain of the laser medium greatly exceeds the oscillation threshold, and an initial spike is generated.

Next, the value of the reference voltage V _Tmain is set to a value that can obtain the laser output time necessary for processing the object. The adjustment of the value of the reference voltage V _Tmain is not limited to this timing, and may be performed before the reference voltage V _Tpre is determined or after the reference voltage V _τ is determined.

Next, the value of the reference voltage _Vτ is gradually lowered. Thereby, the waiting period τ is gradually shortened. FIGS. 6A and 6B are diagrams showing the output of the laser beam displayed on the oscilloscope 203 in this case by a thick dotted line. As in FIG. 5, for easy understanding, the drive signal D output from the OR gate 67 according to the value of the reference voltage V _Tpre is shown by a solid line, and the oscillation threshold of the gain of the laser medium is shown by a thin dotted line. The gain of the laser medium is indicated by a one-dot chain line.

When the value of the reference voltage _Vτ is high, as shown in FIG. 6A, the main power supply is started after the output of the low-power laser beam generated by the preliminary power supply is completely completed. In this case, an initial spike appears with the start of main power feeding.

If the reference voltage _Vτ is further lowered, the start time of T _main is also advanced. If the timing is adjusted so that the laser emission by the main power supply starts before the emission of the low-power laser beam by the preliminary power supply is completed, the output of the laser beam becomes the state shown in FIG. The voltage value when the output of the laser beam reaches the state shown in FIG. 6B is determined as the reference voltage _Vτ .

By adjusting the reference voltages V _Tpre , V _Tmain, and V _τ by the above procedure, as shown in FIG. 6B, a laser that smoothly increases to a desired value for processing without an initial spike. Output can be obtained.

  FIG. 7 is a diagram showing the result of processing a polyimide resin by the laser beam shown in FIG. (A) of FIG. 7 is the figure which looked at the polyimide resin from right above. FIG. 7B is a cross-sectional view of a polyimide resin including a laser processed portion. Since there is no initial spike, the surface area of the polyimide resin hole is not roughened.

  FIG. 8 shows a processing result when the processing target is an epoxy resin. (A) of FIG. 8 is the figure which looked at the epoxy resin from right above. Further, FIG. 8B is a cross-sectional view of an epoxy resin including a portion to be laser processed. Since there is no initial spike, the vicinity of the hole surface of the epoxy resin is not roughened.

  As described above, the laser device 100 can generate a stable laser beam without an initial spike by the function of the power supply control unit 80.

It is a figure which shows the structure of a laser apparatus. It is a figure which shows the circuit structure of an electric power feeding control part. It is a time chart showing the drive signal D produced | generated with respect to the input of the beam ON signal B, and the voltage supplied with the said drive signal. It is a figure which shows the measuring apparatus of the laser output used for adjustment of an electric power feeding control part. It is a figure which shows the state of the laser output at the time of adjusting the reserve electric power feeding period _Tpre among electric power feeding control parts. It is a figure which shows the state of the laser output at the time of adjusting standby | waiting period (tau) among electric power feeding control parts. It is a figure showing the result of processing polyimide resin with a laser apparatus. It is a figure showing the result of processing an epoxy resin with a laser apparatus. It is a figure which represents the output value of the laser beam emitted from a laser beam generation part according to the input of the said beam ON signal B with a solid line, and the beam ON signal B with a thick dotted line. It is a figure showing the result of processing a polyimide resin with the conventional laser apparatus. It is a figure showing the result of processing an epoxy resin with the conventional laser apparatus.

Explanation of symbols

10 CO ₂ laser beam generation unit, 20 power supply, 50 power supply control unit, 100 laser device, C1 standby power supply processing unit, C2 standby period τ processing unit, C3 main power supply processing unit.

Claims (5)

A pulse laser device excited by discharge, a laser beam generation unit,
In response to the output request of the laser beam, the laser beam generation unit performs preliminary power supply for generating a laser beam that does not satisfy the output value necessary for processing, and the laser beam generated by the preliminary power supply is emitted. A power supply control unit for starting main power supply for generating a laser beam of the above output value or more during
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage, and when only the main feeding is performed at the start of feeding, the laser beam with an initial spike A laser generator that emits
A laser device characterized by that. The laser device according to claim 1,
The power supply control unit is a laser device including means for adjusting at least one of a period of standby power supply, a period from completion of standby power supply to a start of main power supply, and a period of main power supply. A power supply control method for a pulsed laser device excited by discharge,
A first step of performing preliminary power supply for generating a laser beam that is less than an output value necessary for processing with respect to a laser beam generator included in the laser device in response to an output request of the laser beam;
A second step of starting main power supply for generating a laser beam of the output value or more while the laser beam generator emits a laser beam in response to the preliminary power supply,
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage. When only the main feeding is performed at the start of feeding, a laser beam with an initial spike is generated. A laser generator that emits
A power supply control method for a laser device. A power supply control circuit for a pulsed laser device excited by discharge, including a power supply switch and a control circuit,
The power supply switch supplies power to the laser beam generation unit of the laser device in response to an ON signal from the control circuit.
The control circuit adjusts so that the power supply switch is turned on and the preliminary power supply is performed only during the period in which the laser beam generation unit generates a laser beam that does not satisfy the output value required for processing, in response to the output request of the laser beam. In order to start the main power supply by turning on the power supply switch so as to generate a laser beam of the above output value or more while the laser beam generated by the preliminary power supply is being emitted. Includes a control circuit, which is adjusted after completion until the main power supply is started,
The control circuit includes a first adjustment unit that adjusts a period for performing the preliminary power supply, and a second adjustment unit that adjusts a period until the main power supply is started after the completion of the preliminary power supply.
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage, and when only the main feeding is performed at the start of feeding, the laser beam with an initial spike A laser generator that emits
A power supply control circuit for a laser device. A method for adjusting a power supply control circuit for a pulse laser device excited by discharge according to claim 4,
In response to the output request of the laser beam, the first adjustment unit adjusts the period for performing the preliminary power supply so that the laser beam generation unit of the laser device generates a laser beam that does not satisfy the output value necessary for processing. A first step of
The main discharge is started after the completion of the preliminary power supply by the second adjusting means so that the main power supply for generating a laser beam having the output value or more is started while the laser beam generated by the preliminary power supply is being emitted. And a second step of adjusting the period until the adjustment of the power supply control circuit for the laser device.

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