JP4278336B2 - Laser device, laser device power supply control method, laser device power supply control circuit, and laser device power supply control circuit adjustment method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a laser device used for punching an electronic multilayer substrate, a power supply control method for the laser device, a power supply control circuit for the laser device, and a method for adjusting the power supply control circuit.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, various types of laser devices that can be used for drilling an electronic multilayer substrate are known. For example, CO₂The laser device emits a laser beam that is oscillated and amplified in response to the supply of a high-frequency AC voltage or a high-frequency pulsed alternating voltage. CO₂The conventional power source provided in the laser device is, for example, a laser beam generation unit (CO) provided in the laser device in accordance with the switching from the Low level to the High level of the beam ON signal B input from the outside.₂In case of laser, CO₂It consists of an excitation part and a resonator placed in the atmosphere. ) Is supplied with a high-frequency AC voltage or a high-frequency pulsed alternating voltage.
[0003]
[Problems to be solved by the invention]
  In response to the switching of the beam ON signal B to the high level, when the supply of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage to the laser beam generation unit is started,The laser beam generatorExcessive laser beam that is outside the processing output range at first, the so-called initial spikeTheAfter it occurs, it converges to a value within the output range for machining while relaxing oscillation.Output laser beamIt is known.
[0004]
In FIG. 9, the beam ON signal B is represented by a solid line, and the output value of the laser beam emitted from the laser beam generation unit in response to the input of the beam ON signal B is represented by a thick dotted line. In the drawing, the oscillation threshold of the gain of the laser medium is indicated by a thin dotted line, and the gain of the laser medium is indicated by a one-dot chain line. As shown in the figure, after the beam ON signal B switches to the high level, the CO₂T until the molecule is excited and the laser beam is emitted._ONIt only takes time. In general, this time is called an oscillation delay time. The output of the laser beam first largely exceeds the processing output range due to the initial spike, and then converges to a value within the processing output range while relaxing oscillation. After the beam ON signal B is switched to the low level, the output value of the laser beam is attenuated to zero.
[0005]
The unevenness of the output value of the laser beam due to the initial spike is one of the causes that deteriorate the accuracy of laser processing. FIG. 10 shows a processing result when the processing target is a polyimide resin. (A) of FIG. 10 is the figure which looked at the polyimide resin from right above. FIG. 10B is a cross-sectional view of a polyimide resin including a laser processed portion. As shown in FIG. 9, since the laser beam output value oscillates greatly beyond the processing output range initially due to the initial spike, the laser beam diameter is blurred and the vicinity of the surface of the polyimide resin processing hole is melted and roughened. It becomes a state.
[0006]
FIG. 11 shows a processing result when the processing target is an epoxy resin. (A) of FIG. 11 is the figure which looked at the epoxy resin from right above. Further, FIG. 11B is a cross-sectional view of an epoxy resin including a portion to be laser processed. In the case of the epoxy resin, not only the surface of the processed hole becomes rough like the polyimide resin described above, but also the bad quality is conspicuous because debris scattered by the processing process adheres to the surface of the processed hole.
[0007]
If the voltage supplied to the laser beam generation unit is lowered, the output peak value of the laser beam that appears in the initial spike phenomenon can be kept low, but the laser beam output itself is also lowered, so that the working efficiency of laser processing is deteriorated. Has drawbacks.
[0008]
The present invention relates to a laser device, a power supply control method for a laser device, a power supply control circuit for a laser device, and a laser device that eliminates an adverse effect caused by the occurrence of an initial spike without reducing the output value of a laser beam for processing. It is an object of the present invention to provide a method for adjusting the power supply control circuit.
[0009]
[Means for Solving the Problems]
  The laser device according to claim 1 is excited by electric discharge.laserA laser beam generator and one pulse according to the laser beam output request.In shapeIn the process of generating the laser beam, the laser beam generation unit performs a preliminary power supply for generating a laser beam that does not satisfy the output value necessary for processing, and the laser beam generated by the preliminary power supply is emitted. A power supply control unit that starts main power supply for generating a laser beam having the output value or higher during the operation, and the laser beam generation unit supplies high-frequency AC voltage or high-frequency pulsed alternating voltage. Accordingly, the laser generator generates a laser beam and emits a laser beam with an initial spike when only the main power supply is performed at the start of power supply.
[0010]
According to a second laser device of the present invention, in the first laser device, the power supply control unit includes a period of the preliminary power supply, a period until the main power supply is started after the completion of the preliminary power supply, and the main power supply period. , Characterized in that it comprises means for adjusting at least one.
[0011]
  The power supply control method for a laser device according to claim 3 is excited by discharge.laserA power supply control method for an apparatus, wherein one pulse is generated according to a laser beam output request.In shapeIn the process of generating a laser beam, a first step of performing preliminary power supply for generating a laser beam that is less than an output value necessary for processing with respect to a laser beam generator provided in the laser device, and according to the preliminary power supply While the laser beam generator is emitting the laser beamTo the aboveAnd a second step of starting main power supply for generating a laser beam having an output value or more, and the laser beam generator generates a laser beam in response to feeding of a high-frequency AC voltage or a high-frequency pulsed alternating voltage. This is a laser generator that emits a laser beam with an initial spike when only the main power supply is performed at the start of power supply.
[0012]
  The power supply control circuit of the laser device according to claim 4 is excited by discharge.And the above in the laser apparatus which consists of a laser beam generation part (10) and an electric power feeding control circuitA power supply control circuit, one pulse according to the laser beam output requestIn shapeIn the process of generating the laser beam, so as to generate a laser beam that is less than the output value necessary for processing the laser beam generation unit,Standby power supplyFirst adjusting means capable of adjusting the period for performing(C1 )And during the period from the completion of the preliminary power supply to the start of the main power supply so as to start the main power supply that generates a laser beam of the above output value or more while the laser beam generated by the preliminary power supply is being emitted. Adjustable second adjustment means(C2 )And a power supply control unit having(80)The laser beam generation unit generates a laser beam in response to feeding of a high-frequency AC voltage or a high-frequency pulsed alternating voltage. The laser generator emits a laser beam with a spike.
[0013]
  The laser device according to claim 5.ofThe method for adjusting the power supply control circuit is excited by discharge according to claim 4.laserapparatusofA method for adjusting a power supply control circuit, in which one pulse is generated in response to a laser beam output request.In shapeIn the process of generating the laser beam, the first adjustment unit adjusts the period for performing the preliminary power supply so that the laser beam generation unit of the laser apparatus generates a laser beam that does not satisfy the output value necessary for processing. After the completion of the preliminary power supply by the second adjustment means, so that the main power supply for generating the laser beam having the output value or more is started while the laser beam generated by the preliminary power supply is being emitted, mainPower supplyAnd a second step of adjusting the period until the start of the process.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
(1) Overall configuration
FIG. 1 shows CO according to an embodiment.₂1 is a diagram illustrating a circuit configuration of a laser device 100. FIG. CO₂The laser device 100 includes a laser beam generation unit 10 and a power supply control unit 80.
[0015]
The laser beam generator 10 is a well-known CO₂Laser generator, CO₂Are filled with a laser beam excitation unit and an oscillator for resonance amplification of the laser beam excited by the excitation unit. The excitation unit is composed of a pair of electrodes 1a and 1b having dielectrics 2a and 2b on opposite surfaces with a predetermined gap. The oscillator is composed of light-transmissive reflective glasses 3 and 4 which are provided to face each other. The reflection glass 3 is a glass that has a transmittance of 30%, for example, and reflects 70% of the laser beam traveling from the inside of the tube 6 to the outside. The reflection glass 4 has a transmittance of 1%, for example, and reflects 99% of the laser beam traveling from the inside of the tube 6 to the outside.
[0016]
The laser beam generation unit 10 is configured to₂The present invention is not limited to a laser generator, and any type that generates an initial spike when power feeding starts can be used.
[0017]
In response to the switching of the beam ON signal B from the low level to the high level, the power supply control unit 80 stops the power supply immediately after the gain of the laser medium exceeds the oscillation threshold and Then, a preliminary power supply for generating a laser beam that does not satisfy the output value necessary for processing is performed, and a laser beam within the output range for processing is generated while the laser beam generated by the preliminary power supply is being emitted. Supply main power. At the start of the main power supply, an initial spike does not occur because the light beam generated by the preliminary power supply already exists in the laser beam generation unit 10. As a result, it is possible to generate a laser beam that is smoothly excited to a value within the output range for processing.
[0018]
(2) Detailed description of power supply control unit
FIG. 2 is a diagram illustrating a specific circuit configuration of the power supply control unit 80. The power supply control unit 80 includes an AC power supply 20 that stably outputs a high-frequency AC voltage E, a switch 68 that opens and closes a circuit to which the AC power supply 20 and the laser beam generation unit 10 are connected, and a beam ON signal B The control circuit 50 outputs a drive signal D for controlling on / off of the switch 68 in response to switching to the high level. The switch 68 is turned on when the high level drive signal D is input, and closes the circuit. The voltage supplied to the laser beam generator 10 may be a high-frequency pulsed alternating voltage.
[0019]
FIG. 3 shows the beam ON signal B, the drive signal D output from the control circuit 50 to the switch 68 in response to the switching of the beam ON signal B from Low level to High level, and the value of the drive signal D. 5 is a time chart showing the voltage E supplied from the power supply control unit 80 to the laser beam generation unit 10 according to the above. Hereinafter, the configuration and operation of the control circuit 50 will be described with reference to FIGS. 2 and 3.
[0020]
The control circuit 50 is roughly divided into a standby power supply processing unit C1, a period τ standby unit C2, and a main power supply processing unit C3. In response to the switching of the beam ON signal B to the high level, the standby power supply processing unit C1_preThe high level drive signal D is output only during the period. The period τ standby unit C2 waits for the period τ to elapse after the standby power supply in the standby power supply processing unit C1 is completed. The main power supply processing unit C3 performs the period T after the elapse of the period τ in the period τ standby unit C2._mainOnly a high level drive signal D is output.
[0021]
(2-1) Standby power supply processing unit
Hereinafter, the configuration of the standby power supply processing unit C1 will be described. An external terminal 70 to which the beam ON signal B is input is connected to the set terminals of the flip-flops 52 and 56. The flip-flops 52 and 56 output a high level signal in response to the switching of the beam ON signal B to the high level. The output terminal of the flip-flop 56 is connected to one signal input terminal of the 2-input OR gate 67. The OR gate 67 outputs a high-level drive signal D in response to a high-level signal input from the flip-flop 56. As a result, the switch 68 is turned on, and power supply to the laser beam generation unit 10 is started.
[0022]
On the other hand, the output terminal of the flip-flop 52 is connected to one input terminal of the 2-input AND gate 53. The remaining input terminal of the AND gate 53 is connected to an output terminal of a clock generator 51 that outputs a high-frequency reference clock signal CLK. The output terminal of the AND gate 53 is connected to one signal input terminal of the adder 54. The AND gate 53 outputs the clock signal CLK input from the clock generation circuit 51 to the adder 54 as it is while the beam ON signal B is at a high level. The output terminal of the adder 54 is connected to one signal input terminal of the comparator 55 at the next stage and to the remaining signal input terminal of the adder 54. By adopting this configuration, the adder 54 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 55 at the next stage.
[0023]
The remaining signal input terminal of the comparator 55 is connected to the standby power supply period T_preReference voltage V determined according to_TpreIs entered. The reference voltage V_TpreIs supplied from a well-known DC power source having an output adjustment function (not shown). The comparator 55 is configured such that the value of the signal output from the adder 54 is the reference voltage V_TpreWhen the signal becomes larger than that, a high level signal is output. The output terminal of the comparator 55 is connected to the reset terminals of the flip-flops 52 and 56 and the set terminal of the flip-flop 57. When a high level signal is input to the reset terminal of the flip-flop 52, the output of the flip-flop 52 is switched to the low level, and the operation of the standby power supply processing unit C1 is stopped.
[0024]
When a high level signal is input from the comparator 55 to the reset terminal of the flip-flop 56, the output of the flip-flop 56 returns to the low level. As a result, the drive signal D output from the OR gate 67 is switched to the Low level. As a result, the switch 68 is turned off, and the power supply to the laser beam generator 10 is stopped.
[0025]
By adopting the above-described configuration, the standby power supply processing unit C1 performs a preset T according to the switching of the beam ON signal B to the high level._preDuring this period, the high level drive signal D is output, the terminals 70 and 71 are connected, and the laser beam generator 10 functions to perform preliminary power feeding.
[0026]
(2-2) Period τ standby section
Hereinafter, the configuration of the period τ standby unit C2 will be described. One signal input terminal of the 2-input AND gate 58 is connected to the output terminal of the flip-flop 57, and the other signal input terminal is connected to the output terminal of the clock generator 51. The output of the flip-flop 57 is the standby power supply period T in the standby power supply processing unit C1._preIn response to the end of, it switches to the High level. In response to switching of the output of the flip-flop 57 to the high level, the AND gate 58 outputs the reference clock signal CLK to one signal input terminal of the adder 59 connected to the next stage. The output terminal of the adder 59 is input to one signal input terminal of the comparator 60 at the next stage and connected to the remaining signal input terminal of the adder 59. By adopting this configuration, the adder 59 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 60 at the next stage.
[0027]
The remaining signal input terminal of the comparator 60 has a reference voltage V determined according to the standby period τ._τIs entered. The reference voltage V_τIs supplied from a well-known DC power source having an output adjustment function (not shown). In the comparator 60, the signal value input from the adder 59 is the reference voltage V._τIn other words, a high level signal is output after the waiting period τ has elapsed. The signal output terminal of the comparator 60 is connected to the reset terminal of the flip-flop 57 and the set terminals of the flip-flops 61 and 65. The signal output from the flip-flop 57 in response to the high-level signal input to the reset terminal is switched to the low level, and the operation of the period τ standby unit C2 is stopped.
[0028]
By adopting the above configuration, the period τ standby unit C2 functions to wait for the period τ to elapse after the standby power supply in the standby power supply processing unit C1 ends.
[0029]
(2-3) Main power supply processing unit
Hereinafter, the configuration of the main power supply processing unit C3 will be described. The signals output from the flip-flops 61 and 65 in response to the high level signal input from the comparator 60 included in the period τ standby unit C2 are switched to the high level. The OR gate 67 receives the high level signal input from the flip-flop 65 and switches the drive signal D to the high level. As a result, the switch 68 is turned on, and main power feeding to the laser beam generator 10 is started.
[0030]
A high-frequency clock signal CLK output from the clock generation circuit 51 is input to the remaining signal input terminals of the 2-input AND gate 62. The output terminal of the AND gate 62 is connected to one signal input terminal of the adder 63. The AND gate 62 outputs the clock signal CLK input from the clock generation circuit 51 to the adder 63 as it is in response to a High level signal input from the flip-flop 61. The output terminal of the adder 63 is connected to one signal input terminal of the comparator 64 at the next stage and to the output terminal of the adder 63. By adopting this configuration, the adder 63 functions as an accumulator, and outputs a signal representing the accumulated value of the input clock signal to the comparator 64 at the next stage.
[0031]
The remaining signal input terminals of the comparator 64 are connected to the main power supply period T_mainReference voltage V_TmainIs entered. The reference voltage V_TmainIs supplied from a well-known DC power source having an output adjustment function (not shown). In the comparator 64, the signal value input from the adder 63 is the reference voltage V._TmainWhen the signal becomes larger than that, a high level signal is output. The output terminal of the comparator 64 is connected to the reset terminals of the flip-flops 61 and 65. When a high level signal is input from the comparator 64 to the reset terminal of the flip-flop 65, the output of the flip-flop 65 returns to the low level. As a result, the drive signal D output from the OR gate 67 is switched to the low level, the switch 68 is switched off, and the main power supply to the laser beam generator 10 is stopped.
[0032]
By adopting the above configuration, the main power feeding unit C3 waits for the period τ in the period τ standby unit C2, and then the period T_mainOnly functions to perform the main power supply.
[0033]
As described above, according to the laser apparatus 100 including the power supply control unit 80 configured as described above, it is possible to generate a laser beam that is smoothly excited to a value within the processing output range without an initial spike. Can do.
[0034]
Of the power supply control unit 80, in particular, a circuit including the control circuit 50 and the switch 68 is provided as a single power supply control circuit. It is possible to improve the conventional laser apparatus so as to generate a laser beam without an initial spike. In this case, a circuit corresponding to the power supply control unit 80 is configured by the power supply included in the conventional laser device and the power supply control circuit.
[0035]
(3) Adjustment method of power supply control unit
[0036]
Laser light emission period T for processing_mainNeeds to be changed depending on factors such as the object to be laser processed and the amount of processing. Period T_mainIs the reference voltage V used in the main power supply processing unit C3 of the control circuit 50._TmainIt can be changed as appropriate by adjusting the value of.
[0037]
In addition, the timing at which the initial spike is generated varies depending on the assembly accuracy of the laser apparatus 100, variations in the components used, and the like. Furthermore, the timing also changes when the laser beam generator 10 used in the laser apparatus 100 is replaced with another type of laser generator that generates an initial spike. In addition, as described above, the power supply control circuit including the control circuit 50 and the switch 68 in the power supply control unit 80, in particular, a laser beam generation unit of a type that generates initial spikes and a power supply of a conventional laser apparatus that includes a power source. When it is attached to the circuit, the initial spike generation timing varies depending on the laser beam generation unit to be used. In these cases, the reference voltage V used in the standby power supply processing unit C1 and the period τ standby unit C2 of the power supply control unit 50 according to the timing of occurrence of the initial spike._TpreAnd V_τIt is necessary to adjust each value of. Reference voltage V_TpreAnd V_τIs adjusted by adjusting each output of the corresponding DC power supply with an output adjustment function.
[0038]
Reference voltage V_Tpre, V_τAnd V_TmainA specific adjustment procedure will be described. FIG. 4 shows a known measuring apparatus 200 that measures the output of the laser beam generated in the laser beam generator 10 from the output of the laser beam 16 leaking from the reflection mirror 4 constituting the resonator. The measuring apparatus 200 detects and detects the integrating sphere 201 that scatters the laser beam 16 leaking from the reflecting mirror 4 in the 2π direction by the inner grain, and the intensity of the scattered light inside the integrating sphere 201. A photodetector 202 that outputs an electrical signal at a level corresponding to the light intensity, and a signal output line of the photodetector 202 are connected to the signal input terminal 203a, and according to the intensity of the laser beam input from the photodetector 202. And an oscilloscope 203 for displaying the waveform.
[0039]
Reference voltage V_Tpre, V_τAnd V_TmainThese values are adjusted while confirming the output waveform of the laser beam displayed by the oscilloscope 203. As described above, the values of these reference voltages can be changed by adjusting the output of each DC power supply with an output adjustment function.
[0040]
First, the reference voltage V_TpreIs set to the lowest possible value and the reference voltage V_τIs set to a value at which the elapse timing of the standby time τ is sufficiently later than the timing at which the initial spike is normally generated.
[0041]
Reference voltage V_TpreThe value of is gradually increased from the minimum value. FIGS. 5A to 5C are diagrams showing the output of the laser beam displayed on the oscilloscope 203 in this case by a thick dotted line. This figure shows the reference voltage V for ease of understanding._TpreThe drive signal D output from the OR gate 67 in accordance with the value of is indicated by a solid line, the oscillation threshold of the gain of the laser medium is indicated by a thin dotted line, and the gain of the laser medium is indicated by a one-dot chain line.
[0042]
As shown in FIG. 5A, the reference voltage V_TpreIs small, that is, the standby power supply period T_preIs short, the laser beam is not emitted from the laser beam generator 10. As shown in FIG. 5B, the reference voltage V_TpreIs larger, that is, the standby power supply period T_preBecomes longer, laser beam emission starts from the laser beam generator 10. Here, if power supply is stopped immediately after the gain of the laser medium exceeds the oscillation threshold, a low-power laser beam that does not satisfy the output value necessary for processing is emitted. Hereinafter, the value of the reference voltage when the gain of the laser medium exceeds the oscillation threshold is expressed as V_TpreAnd Furthermore, the reference voltage V_TpreAs shown in FIG. 5C, the gain of the laser medium greatly exceeds the oscillation threshold value, and an initial spike is generated.
[0043]
Next, the reference voltage V_TmainIs set to a value that provides the laser output time required to process the object. The reference voltage V_TmainThe adjustment of the value of is not limited to this timing, but the reference voltage V_TpreBefore determining the reference voltage V_τIt may be executed after deciding.
[0044]
Next, the reference voltage V_τGradually lower the value of. Thereby, the waiting period τ is gradually shortened. FIGS. 6A and 6B are diagrams showing the output of the laser beam displayed on the oscilloscope 203 in this case by a thick dotted line. As in FIG. 5, for ease of understanding, the reference voltage V_TpreThe drive signal D output from the OR gate 67 in accordance with the value of is indicated by a solid line, the oscillation threshold of the gain of the laser medium is indicated by a thin dotted line, and the gain of the laser medium is indicated by a one-dot chain line.
[0045]
Reference voltage V_τWhen the value of is high, as shown in FIG. 6A, the main power supply is started after the output of the low-power laser beam generated by the preliminary power supply is completely completed. In this case, an initial spike appears with the start of main power feeding.
[0046]
Reference voltage V_τIf T is further reduced, T_mainThe start time of will also be advanced. If the timing is adjusted so that the laser emission by the main power supply starts before the emission of the low-power laser beam by the preliminary power supply is completed, the output of the laser beam becomes the state shown in FIG. The voltage value when the output of the laser beam is in the state shown in FIG._τTo decide.
[0047]
The reference voltage V_Tpre, V_TmainAnd V_τBy adjusting, as shown in FIG. 6B, it is possible to obtain a laser output that smoothly increases to a desired value for processing without an initial spike.
[0048]
FIG. 7 is a diagram showing the result of processing a polyimide resin by the laser beam shown in FIG. (A) of FIG. 7 is the figure which looked at the polyimide resin from right above. FIG. 7B is a cross-sectional view of a polyimide resin including a laser processed portion. Since there is no initial spike, the surface area of the polyimide resin hole is not roughened.
[0049]
FIG. 8 shows a processing result when the processing target is an epoxy resin. (A) of FIG. 8 is the figure which looked at the epoxy resin from right above. Further, FIG. 8B is a cross-sectional view of an epoxy resin including a portion to be laser processed. Since there is no initial spike, the vicinity of the hole surface of the epoxy resin is not roughened.
[0050]
As described above, the laser device 100 can generate a stable laser beam without an initial spike by the function of the power supply control unit 80.
[0051]
【The invention's effect】
  Claim 1In response to the output request of the laser beam, the laser device performs preliminary power supply for generating a laser beam less than a predetermined output value to the laser beam generation unit, and then emits the laser beam generated by the preliminary power supply. While the operation is being performed, a stable laser beam without an initial spike can be generated by starting main power feeding that generates a laser beam having a desired output of the predetermined value or more.
[0052]
  Claim 2The laser device can adjust at least one of the period of the preliminary power supply, the period from the completion of the preliminary power supply to the start of the main power supply, and the period of the main power supply according to the deterioration of the laser beam generation unit and the environmental change. Therefore, a stable laser beam without an initial spike can always be generated.
[0053]
  Claim 3According to the power supply control method of the laser device, since the main power supply is started while the laser beam that does not satisfy the predetermined output value is generated by the preliminary power supply, the predetermined output value is smoothly supplied without an initial spike. A laser beam that increases to the desired output can be generated.
[0054]
  Claim 4Laser equipmentofThe power supply control circuit generates a laser beam that is less than a predetermined value for the laser beam generation unit according to the output request of the laser beam by the first adjustment unit according to the type of the laser beam generation unit to be used. Pre-power supply period T_preThe standby period τ is set so as to start the main power supply for generating a laser beam having a desired output equal to or higher than the predetermined value while the laser beam generated by the preliminary power supply is emitted by the second adjusting means. Can be adjusted.
[0055]
  Claim 5Laser equipmentofAccording to the adjustment method of the power supply control circuit, the first adjustment means generates a preliminary power supply period T so that a laser beam less than a predetermined value is generated from the laser beam generation unit in response to a laser beam output request._preAdjust the firstProcessAnd for the above standby power supplyThereforeThe resulting laser beamIs injectionThe second adjustment unit adjusts the period τ until the main discharge is started by the second adjustment unit so that the main power supply for generating the laser beam having a desired output of the predetermined value or more is started.Process,By executing the above, it is possible to generate a stable laser beam without an initial spike.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a laser device.
FIG. 2 is a diagram illustrating a circuit configuration of a power supply control unit.
FIG. 3 is a time chart showing a drive signal D generated in response to an input of a beam ON signal B and a voltage supplied by the drive signal.
FIG. 4 is a diagram illustrating a laser output measuring device used for adjustment of a power feeding control unit.
FIG. 5 shows a standby power supply period T in the power supply control unit._preIt is a figure which shows the state of the laser output at the time of adjusting.
FIG. 6 is a diagram showing a state of laser output when adjusting a standby period τ in a power supply control unit.
FIG. 7 is a diagram illustrating a result of processing a polyimide resin by a laser device.
FIG. 8 is a diagram illustrating a result of processing an epoxy resin by a laser device.
FIG. 9 is a diagram showing a beam ON signal B as a solid line, and an output value of a laser beam emitted from a laser beam generator in response to the input of the beam ON signal B as a thick dotted line.
FIG. 10 is a diagram showing a result of processing a polyimide resin by a conventional laser device.
FIG. 11 is a diagram illustrating a result of processing an epoxy resin by a conventional laser device.
[Explanation of symbols]
10 CO₂Laser beam generation unit, 20 power source, 50 power supply control unit, 100 laser device, C1 standby power supply processing unit, C2 standby period τ processing unit, C3 main power supply processing unit.

Claims (5)

A laser device (100) excited by discharge, comprising:
A laser beam generator (10) ;
In the process of generating one pulsed laser beam in response to the output request of the laser beam, pre-feeding is performed to generate a laser beam that is less than the output value necessary for processing the laser beam generation unit, A power supply control unit (80) for starting main power supply for generating a laser beam having the output value or more while the laser beam generated by the preliminary power supply is being emitted;
With
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage, and when only the main feeding is performed at the start of feeding, the laser beam with an initial spike A laser generator that emits
A laser device characterized by that. The laser device according to claim 1,
The power supply control unit is a laser device including means for adjusting at least one of a period of standby power supply, a period from completion of standby power supply to a start of main power supply, and a period of main power supply. A power supply control method for a laser device (100) excited by discharge,
In the process of generating one pulsed laser beam in response to the output request of the laser beam, a laser beam that does not satisfy the output value required for processing with respect to the laser beam generation unit (10) included in the laser device. A first step of performing preliminary power supply to be generated;
A second step of the laser beam generating unit starts the main power supply to generate said output value or more laser beams while performing an injection of the laser beam in response to the preliminary feeding, in made,
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage, and when only the main feeding is performed at the start of feeding, the laser beam with an initial spike A laser generator that emits
A power supply control method for a laser device. The power supply control circuit in the laser apparatus excited by discharge and comprising a laser beam generation unit (10) and a power supply control circuit ,
In the process of generating one pulsed laser beam in response to the output request of the laser beam, pre-feeding is performed so that the laser beam generator generates a laser beam that does not satisfy the output value necessary for processing. First adjusting means (C1 ) capable of adjusting the period to be performed;
The adjustment of the period from the completion of the preliminary power supply to the start of the main power supply is started so that the main power supply for generating a laser beam having the output value or more is started while the laser light beam generated by the preliminary power supply is being emitted. Possible second adjusting means (C2 ) ;
The power supply control unit (80) having
The laser beam generation unit generates a laser beam in response to feeding of a high-frequency alternating voltage or a high-frequency pulsed alternating voltage, and when only the main feeding is performed at the start of feeding, the laser beam with an initial spike A laser generator that emits
A power supply control circuit for a laser device. A method for adjusting a power supply control circuit of a laser device excited by discharge according to claim 4,
In the process of generating one pulsed laser beam in response to the output request of the laser beam, a laser beam that is less than the output value necessary for processing is generated from the laser beam generation unit of the laser device. A first step of adjusting a period for performing preliminary power feeding by the first adjusting means;
As the main power supply to generate said output value or more of the laser beam is started while the emission of the laser beam caused by the preliminary feeding is, after completion of the preliminary fed by the second adjusting means to start the main power supply And a second step of adjusting the period until the adjustment of the power supply control circuit of the laser device.

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