JP2013081098A - Surface acoustic wave device - Google Patents
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この発明は、弾性表面波（ＳＡＷ：Ｓｕｒｆａｃｅ Ａｃｏｕｓｔｉｃ Ｗａｖｅ）フィルタや弾性表面波発振器などの弾性表面波装置に関し、特に、温度に対する周波数特性を安定化させた弾性表面波装置に関する。 The present invention relates to a surface acoustic wave device such as a surface acoustic wave (SAW) filter and a surface acoustic wave oscillator, and more particularly to a surface acoustic wave device having stabilized frequency characteristics with respect to temperature.
弾性表面波装置は、水晶などの圧電性基板上に、櫛型（ＩＤＴ：ＩｎｔｅｒＤｉｇｉｔａｌ Ｔｒａｎｓｄｕｃｅｒ）電極・弾性表面波素子が配置されたものであり、温度変化に対する周波数の変動を低減するために、圧電性基板にＳＴカット水晶板を用いたものが知られている。また、複数の異なる弾性表面波素子を同一基板上に並列に配設することで、広い温度範囲において温度特性を良好・安定化した技術が知られている（例えば、特許文献１等参照。）。 In the surface acoustic wave device, an interdigital transducer (IDT) electrode and a surface acoustic wave element are arranged on a piezoelectric substrate such as a quartz crystal. A substrate using an ST cut quartz plate as a conductive substrate is known. In addition, a technique is known in which a plurality of different surface acoustic wave elements are arranged in parallel on the same substrate so that the temperature characteristics are improved and stabilized in a wide temperature range (see, for example, Patent Document 1). .
すなわち、所定のオイラー角で切り出された水晶基板の表面上に、櫛型電極の幅ピッチ比（電極幅／電極ピッチ）が異なる複数の弾性表面波素子が、弾性表面波の伝搬方向が一致するように配置されている。また、複数の弾性表面波素子が電気的に並列に接続され、各弾性表面波素子の幅ピッチ比は、温度特性曲線において所定・所望の頂点温度が得られるように設定されている。そして、各弾性表面波素子の温度特性曲線が並列に結合・合成されることで、広い温度範囲にわたって安定した（良好な）温度特性が得られるものである。 That is, a plurality of surface acoustic wave elements having different comb-shaped electrode width / pitch ratios (electrode width / electrode pitch) on the surface of a quartz substrate cut out at a predetermined Euler angle have the same propagation direction of the surface acoustic wave. Are arranged as follows. A plurality of surface acoustic wave elements are electrically connected in parallel, and the width / pitch ratio of each surface acoustic wave element is set so that a predetermined / desired vertex temperature is obtained in the temperature characteristic curve. Then, by combining and synthesizing the temperature characteristic curves of the respective surface acoustic wave elements in parallel, a stable (good) temperature characteristic can be obtained over a wide temperature range.
ところで、特許文献１の技術では、複数の弾性表面波素子を並列に接続するため、配線の引き回し（またがり配線）が必要となり、引き回しでの結合などを考慮しなければならず、また、実装が容易ではない。しかも、複数の弾性表面波素子を基板上に配設しなければならないため、装置が大型化してしまう。 By the way, in the technique of Patent Document 1, in order to connect a plurality of surface acoustic wave elements in parallel, it is necessary to lay out wiring (stradded wiring). It's not easy. Moreover, since a plurality of surface acoustic wave elements must be disposed on the substrate, the apparatus becomes large.
そこでこの発明は、広い温度範囲において温度特性が良好で、しかも、実装が容易で、小型化が可能な弾性表面波装置を提供することを目的とする。 SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a surface acoustic wave device that has good temperature characteristics in a wide temperature range, is easy to mount, and can be miniaturized.
上記目的を達成するために請求項１に記載の発明は、所定のオイラー角で切り出された水晶基板の表面上に、一対の櫛型電極からなる弾性表面波素子が配設され、前記櫛型電極を構成する平棒状の電極片の幅と配設ピッチとの比である幅ピッチ比が、前記電極片のＳＡＷ伝搬と直交方向において、複数異なるように前記櫛型電極が形成され、前記各幅ピッチ比は、当該幅ピッチ比での周波数温度特性曲線において所定の頂点温度が得られるように設定されている、ことを特徴とする弾性表面波装置である。 In order to achieve the above object, according to a first aspect of the present invention, a surface acoustic wave element comprising a pair of comb-shaped electrodes is disposed on a surface of a quartz substrate cut out at a predetermined Euler angle, and the comb-shaped The comb-shaped electrodes are formed such that a width-pitch ratio, which is a ratio of a width of a flat rod-shaped electrode piece constituting the electrode and an arrangement pitch, differs in a plurality in a direction orthogonal to the SAW propagation of the electrode piece, The width pitch ratio is a surface acoustic wave device characterized in that a predetermined vertex temperature is obtained in a frequency temperature characteristic curve at the width pitch ratio.
この発明によれば、電極片のＳＡＷ伝搬と直交方向において幅ピッチ比が複数異なり、電極片のＳＡＷ伝搬と直交方向に複数の異なる櫛型電極・弾性表面波素子が配置された状態となる。 According to the present invention, a plurality of width pitch ratios are different in the direction orthogonal to the SAW propagation of the electrode pieces, and a plurality of different comb electrodes / surface acoustic wave elements are arranged in the direction orthogonal to the SAW propagation of the electrode pieces.
請求項１に記載の発明によれば、電極片のＳＡＷ伝搬と直交方向に複数の異なる櫛型電極・弾性表面波素子が配置された状態となり、しかも、所定の頂点温度が得られるように各幅ピッチ比が設定されている。すなわち、温度特性曲線・頂点温度が異なる複数の櫛型電極・弾性表面波素子が並列に配置された状態となり、広い温度範囲において良好・安定な温度特性を得ることが可能となる。 According to the first aspect of the present invention, a plurality of different comb-shaped electrodes and surface acoustic wave elements are arranged in a direction orthogonal to the SAW propagation of the electrode pieces, and each of the respective apex temperatures is obtained so as to obtain a predetermined vertex temperature. The width / pitch ratio is set. That is, a plurality of comb-shaped electrodes and surface acoustic wave elements having different temperature characteristic curves and apex temperatures are arranged in parallel, and good and stable temperature characteristics can be obtained in a wide temperature range.
さらに、一対の櫛型電極のみで複数の異なる幅ピッチ比を構成するため、複数の弾性表面波素子を並列に接続する必要がなく、配線の引き回しが不要となる。このため、引き回しでの結合などを考慮する必要がなく、アイソレーションが高くなり、また、実装も容易となる。しかも、複数の弾性表面波素子を基板上に配設する必要がないため、装置を小型化することが可能となる。 Furthermore, since a plurality of different width pitch ratios are formed by only a pair of comb-shaped electrodes, it is not necessary to connect a plurality of surface acoustic wave elements in parallel, and wiring is not required. For this reason, it is not necessary to consider the coupling in the routing, the isolation is increased, and the mounting is facilitated. In addition, since it is not necessary to dispose a plurality of surface acoustic wave elements on the substrate, the apparatus can be miniaturized.
以下、この発明を図示の実施の形態に基づいて説明する。 The present invention will be described below based on the illustrated embodiments.
図１は、この実施の形態に係る弾性表面波装置１を示す概略平面図である。この弾性表面波装置１は、所定のオイラー角で切り出された水晶基板２の表面上に、一対の櫛型電極３からなる弾性表面波素子４が配設された装置である。 FIG. 1 is a schematic plan view showing a surface acoustic wave device 1 according to this embodiment. The surface acoustic wave device 1 is a device in which a surface acoustic wave element 4 composed of a pair of comb-shaped electrodes 3 is disposed on the surface of a quartz substrate 2 cut out at a predetermined Euler angle.
水晶基板２は、ＳＴカット水晶板で、ＳＴカット水晶板のＸ軸方向（電気軸方向）が弾性表面波の伝搬方向となっている。具体的には、オイラー角（φ，θ，ψ）が（０°，０°，０°）の水晶板を、電気軸（Ｘ軸）回りにθ＝１１３〜１３５°回転させて得られるＳＴカット水晶板の新しい座標軸に沿って切り出されるもので、このＳＴカット水晶板の新しいＺ軸（Ｚ’軸）回りにさらにψ＝±（４０〜４９）°回転させ、弾性表面波の伝播方向がこの方向になるように作製されたものである。 The quartz substrate 2 is an ST cut quartz plate, and the X-axis direction (electrical axis direction) of the ST cut quartz plate is the propagation direction of the surface acoustic wave. Specifically, ST obtained by rotating a quartz plate having Euler angles (φ, θ, ψ) of (0 °, 0 °, 0 °) around the electric axis (X axis) by θ = 113 to 135 °. It is cut along the new coordinate axis of the cut quartz plate, and further rotated by ψ = ± (40 to 49) ° around the new Z axis (Z ′ axis) of this ST cut quartz plate, and the propagation direction of the surface acoustic wave is It was produced in this direction.
つまり、水晶基板２のオイラー角（φ，θ，ψ）は、（０°，１１３〜１３５°，±（４０〜４９°））となっており、このようなＳＴカット水晶板を用いた弾性表面波装置は、温度特性が極めて良好であることが知られている。さらに、この実施の形態では、Ｚ’軸回りに面内回転を行わせることで、容易に極値（極大値と極小値）を有する周波数温度特性曲線が得られるように、次の関係式が成り立つように、オイラー角が設定されている。
ψ＝０．３２９５×θ＋３．３３１８°±１．１２５°
That is, the Euler angles (φ, θ, ψ) of the quartz substrate 2 are (0 °, 113 to 135 °, ± (40 to 49 °)), and elasticity using such an ST cut quartz plate is used. It is known that surface wave devices have very good temperature characteristics. Further, in this embodiment, the following relational expression is obtained so that a frequency temperature characteristic curve having extreme values (maximum value and minimum value) can be easily obtained by performing in-plane rotation around the Z ′ axis. The Euler angle is set to hold.
ψ = 0.3295 × θ + 3.3318 ° ± 1.125 °
櫛型電極３は、アルミニウムなどの金属製で、平棒状、つまり薄膜状で長く延びた、電極指（電極片）３１で構成されている。また、電極指３１の幅と配設ピッチとの比である幅ピッチ比が、電極指３１のＳＡＷ伝搬と直交方向において複数異なるように、櫛型電極３が形成されている。すなわち、図２に示すように、一方の櫛型電極３における電極指３１の幅を符号Ｌとし、配設ピッチを符号Ｐとし場合に、幅ＬをピッチＰで除算した値（Ｌ／Ｐ）である幅ピッチ比ηが、電極指３１のＳＡＷ伝搬と直交方向において、複数（３つ）異なるように形成されている。ここで、符号Ｓは、一方の櫛型電極３の電極指３１と、隣接する他方の櫛型電極３の電極指３１とのスペース・間隔であり、水晶基板２の表面が露出している部分の距離である。 The comb-shaped electrode 3 is made of a metal such as aluminum, and is composed of electrode fingers (electrode pieces) 31 that are long in a flat bar shape, that is, in a thin film shape. Further, the comb-shaped electrode 3 is formed so that a width pitch ratio, which is a ratio between the width of the electrode finger 31 and the arrangement pitch, differs in a plurality in the direction orthogonal to the SAW propagation of the electrode finger 31. That is, as shown in FIG. 2, when the width of the electrode finger 31 in one comb-shaped electrode 3 is L and the arrangement pitch is P, the value obtained by dividing the width L by the pitch P (L / P) The width pitch ratio η is a plurality (three) different in the direction orthogonal to the SAW propagation of the electrode finger 31. Here, symbol S is the space / interval between the electrode finger 31 of one comb-shaped electrode 3 and the electrode finger 31 of the other adjacent comb-shaped electrode 3, and the portion where the surface of the quartz substrate 2 is exposed Is the distance.
具体的には、この実施の形態では、電極指３１がＳＡＷ伝搬と直交方向に３つの領域Ｍ１〜Ｍ３に分けられ、図１中の上部である第１の領域Ｍ１では、
幅Ｌ：スペースＳ＝０．４：０．６
ピッチＰ＝１．００５
に設定され、ピッチＰに対して電極指３１の幅Ｌが細くなっている。
Specifically, in this embodiment, the electrode finger 31 is divided into three regions M1 to M3 in the direction orthogonal to the SAW propagation, and in the first region M1, which is the upper part in FIG.
Width L: Space S = 0.4: 0.6
Pitch P = 1.005
The width L of the electrode finger 31 is narrower than the pitch P.
また、図１中の中央部である第２の領域Ｍ２では、
幅Ｌ：スペースＳ＝０．５：０．５
ピッチＰ＝１．０００
に設定され、ピッチＰに対して電極指３１の幅Ｌが中位になっている。
Further, in the second region M2, which is the central portion in FIG.
Width L: Space S = 0.5: 0.5
Pitch P = 1.000
The width L of the electrode finger 31 is medium with respect to the pitch P.
さらに、図１中の下部である第３の領域Ｍ３では、
幅Ｌ：スペースＳ＝０．６：０．４
ピッチＰ＝０．９９５
に設定され、ピッチＰに対して電極指３１の幅Ｌが太くなっている。
Further, in the third region M3 which is the lower part in FIG.
Width L: Space S = 0.6: 0.4
Pitch P = 0.995
The width L of the electrode finger 31 is thicker than the pitch P.
つまり、各領域Ｍ１〜Ｍ３における幅ピッチ比η１〜η３が、次の関係を有するように設定されている。
第１の幅ピッチ比η１＜第２の幅ピッチ比η２＜第３の幅ピッチ比η３
That is, the width pitch ratios η1 to η3 in the regions M1 to M3 are set to have the following relationship.
First width pitch ratio η1 <second width pitch ratio η2 <third width pitch ratio η3
ここで、上記の幅Ｌ、スペースＳおよびピッチＰの数値は、説明するための疑似的なイメージ値であり、実際の櫛型電極３として適正な数値ではなく、実際の数値は、電気的な仕様などに基づいて設定される。例えば、幅Ｌ：スペースＳ＝０．５：０．５の場合、幅ＬおよびスペースＳを弾性表面波の波長λの１／４とし、ピッチＰを波長λとする、などと設定する。 Here, the numerical values of the width L, the space S, and the pitch P are pseudo image values for explanation, and are not proper numerical values for the actual comb-shaped electrode 3, but the actual numerical values are electrical values. It is set based on specifications. For example, when width L: space S = 0.5: 0.5, the width L and space S are set to ¼ of the wavelength λ of the surface acoustic wave, and the pitch P is set to the wavelength λ.
このような各領域Ｍ１〜Ｍ３における幅ピッチ比η１〜η３は、その幅ピッチ比ηでの周波数温度特性曲線において所定・所望の頂点温度が得られるように設定されている。すなわち、オイラー角が所定値で、電極指３１の膜厚Ｈと弾性表面波の波長λとの比（Ｈ／λ）が所定値における、幅ピッチ比ηと周波数温度特性曲線の頂点温度Ｔとの関係（幅ピッチ比ηがいくつの場合には、頂点温度Ｔがいくつになる、という関係）が予め得られており、この関係に基づいて、所定・所望の頂点温度が得られるように各幅ピッチ比η１〜η３が設定されている。 The width / pitch ratios η1 to η3 in each of the regions M1 to M3 are set so as to obtain a predetermined / desired vertex temperature in the frequency temperature characteristic curve at the width / pitch ratio η. That is, when the Euler angle is a predetermined value and the ratio (H / λ) between the film thickness H of the electrode finger 31 and the surface acoustic wave wavelength λ is a predetermined value, the width pitch ratio η and the apex temperature T of the frequency temperature characteristic curve (A relationship that the apex temperature T becomes how many when the width / pitch ratio η is any number) is obtained in advance, and based on this relationship, each of the predetermined and desired apex temperatures is obtained. The width pitch ratios η1 to η3 are set.
ここで、各頂点温度は、後述するように弾性表面波装置１の温度特性が得られた場合に、その温度特性が使用温度範囲で良好、安定となるように選択される。具体的には、例えば、最も小さい第１の幅ピッチ比η１では、頂点温度Ｔ１が約７０℃、第２の幅ピッチ比η２では、頂点温度Ｔ２が約３０℃、最も大きい第３の幅ピッチ比η３では、頂点温度Ｔ３が約−１０℃になるように、各幅ピッチ比η１〜η３が設定されている。 Here, when the temperature characteristic of the surface acoustic wave device 1 is obtained as will be described later, each vertex temperature is selected so that the temperature characteristic is good and stable in the operating temperature range. Specifically, for example, at the smallest first width pitch ratio η1, the vertex temperature T1 is about 70 ° C., and at the second width pitch ratio η2, the vertex temperature T2 is about 30 ° C., the largest third width pitch. In the ratio η3, the width pitch ratios η1 to η3 are set so that the vertex temperature T3 is about −10 ° C.
そして、このような櫛型電極３のそれぞれに、端子線５が接続されているものである。 A terminal wire 5 is connected to each of the comb electrodes 3.
このような構成の弾性表面波装置１によれば、電極指３１のＳＡＷ伝搬と直交方向において幅ピッチ比η１〜η３が異なり、電極指３１のＳＡＷ伝搬と直交方向に３つの異なる櫛型電極・弾性表面波素子が並列に配置されたのと同じ状態となる。すなわち、図１中の上部において、横に延びた第１の領域Ｍ１が第１の弾性表面波素子を構成し、図１中の中央部において、横に延びた第２の領域Ｍ２が第２の弾性表面波素子を構成し、図１中の下部において、横に延びた第３の領域Ｍ３が第３の弾性表面波素子を構成し、これらが並列に接続された構成となっている。 According to the surface acoustic wave device 1 having such a configuration, the width pitch ratios η1 to η3 are different in the direction orthogonal to the SAW propagation of the electrode finger 31, and three different comb electrodes / This is the same state as when the surface acoustic wave elements are arranged in parallel. That is, in the upper part in FIG. 1, the first region M1 extending laterally constitutes the first surface acoustic wave element, and in the central part in FIG. 1, the second region M2 extending laterally is the second. In the lower part of FIG. 1, a third region M3 extending laterally constitutes a third surface acoustic wave element, and these are connected in parallel.
そして、図３に示すように、頂点温度Ｔ１が約７０℃である第１の弾性表面波素子の周波数温度特性曲線Ｃ１と、頂点温度Ｔ２が約３０℃である第２の弾性表面波素子の周波数温度特性曲線Ｃ２と、頂点温度Ｔ３が約−１０℃である第３の弾性表面波素子の周波数温度特性曲線Ｃ３とが結合・合成された曲線が、本弾性表面波素子４の温度特性曲線Ｃとなる。この温度特性曲線Ｃは、図示のように、広い温度範囲にわたって安定しており（周波数偏差がゼロに近く）、良好な温度特性が得られるものである。ここで、安定している温度範囲が、弾性表面波装置１の使用温度範囲を含んでいる。言い換えると、安定している温度範囲が使用温度範囲を含むように、各頂点温度Ｔ１〜Ｔ３、つまり各幅ピッチ比η１〜η３が設定されている。 Then, as shown in FIG. 3, the frequency-temperature characteristic curve C1 of the first surface acoustic wave element having the apex temperature T1 of about 70 ° C. and the second surface acoustic wave element having the apex temperature T2 of about 30 ° C. A curve obtained by combining and synthesizing the frequency temperature characteristic curve C2 and the frequency temperature characteristic curve C3 of the third surface acoustic wave element having the apex temperature T3 of about −10 ° C. is the temperature characteristic curve of the surface acoustic wave element 4. C. As shown in the figure, this temperature characteristic curve C is stable over a wide temperature range (frequency deviation is close to zero), and good temperature characteristics can be obtained. Here, the stable temperature range includes the operating temperature range of the surface acoustic wave device 1. In other words, the vertex temperatures T1 to T3, that is, the width pitch ratios η1 to η3 are set so that the stable temperature range includes the use temperature range.
さらに、一対の櫛型電極３のみで複数の異なる幅ピッチ比η１〜η３、領域Ｍ１〜Ｍ３を構成するため、複数の弾性表面波素子を並列に接続する必要がなく、配線の引き回しが不要となる。つまり、図１に示すように、またがり配線（配線の交差）がなく、各櫛型電極３から直線的に端子線５を配設すればよい。このため、引き回しでの結合などを考慮する必要がなく、アイソレーションが高くなり、また、平面のみの配線となるため、実装も容易で、電気的特性や信頼性も向上する。しかも、複数の弾性表面波素子を水晶基板２上に配設する必要がないため、装置１を小型化することが可能となる。 Furthermore, since a plurality of different width pitch ratios η1 to η3 and regions M1 to M3 are configured by only a pair of comb-shaped electrodes 3, it is not necessary to connect a plurality of surface acoustic wave elements in parallel, and wiring is unnecessary. Become. That is, as shown in FIG. 1, there is no straddle wiring (intersection of wiring), and the terminal wires 5 may be arranged linearly from each comb electrode 3. For this reason, it is not necessary to consider the coupling in the routing, the isolation is increased, and the wiring is only a plane, so that mounting is easy, and electrical characteristics and reliability are improved. In addition, since it is not necessary to dispose a plurality of surface acoustic wave elements on the quartz substrate 2, the apparatus 1 can be miniaturized.
以上、この発明の実施の形態について説明したが、具体的な構成は、上記の実施の形態に限られるものではなく、この発明の要旨を逸脱しない範囲の設計の変更等があっても、この発明に含まれる。例えば、上記の実施の形態では、各領域Ｍ１〜Ｍ３における幅ピッチ比η１〜η３を変えるために、幅ＬとピッチＰの双方を変える場合を例に説明したが、一方のみを変えて幅ピッチ比η１〜η３を変えるようにしてもよい。また、上記の実施の形態では、電極指３１をＳＡＷ伝搬と直交方向に３つの領域Ｍ１〜Ｍ３に分け、各領域Ｍ１〜Ｍ３における幅ピッチ比η１〜η３を異なるようにしているが、使用する温度範囲や弾性表面波の波長などに応じて、電極指３１をＳＡＷ伝搬と直交方向に２つの領域に分けたり、４つ以上の領域に分けたりしてもよい。 Although the embodiment of the present invention has been described above, the specific configuration is not limited to the above embodiment, and even if there is a design change or the like without departing from the gist of the present invention, Included in the invention. For example, in the above embodiment, in order to change the width pitch ratios η1 to η3 in each of the regions M1 to M3, the case of changing both the width L and the pitch P has been described as an example. The ratios η1 to η3 may be changed. In the above embodiment, the electrode finger 31 is divided into three regions M1 to M3 in a direction orthogonal to the SAW propagation, and the width pitch ratios η1 to η3 in the regions M1 to M3 are different from each other. Depending on the temperature range, the surface acoustic wave wavelength, and the like, the electrode finger 31 may be divided into two regions orthogonal to the SAW propagation, or may be divided into four or more regions.
１ 弾性表面波装置
２ 水晶基板
３ 櫛型電極
３１ 電極指（電極片）
４ 弾性表面波素子
５ 端子線
Ｌ 幅
Ｓ スペース
Ｐ 配設ピッチ
DESCRIPTION OF SYMBOLS 1 Surface acoustic wave apparatus 2 Quartz substrate 3 Comb-shaped electrode 31 Electrode finger (electrode piece)
4 Surface acoustic wave element 5 Terminal line L Width S Space P Arrangement pitch
Claims (1)
前記櫛型電極を構成する平棒状の電極片の幅と配設ピッチとの比である幅ピッチ比が、前記電極片のＳＡＷ伝搬と直交方向において、複数異なるように前記櫛型電極が形成され、
前記各幅ピッチ比は、当該幅ピッチ比での周波数温度特性曲線において所定の頂点温度が得られるように設定されている、
ことを特徴とする弾性表面波装置。
On the surface of the quartz substrate cut out at a predetermined Euler angle, a surface acoustic wave element composed of a pair of comb electrodes is disposed,
The comb electrodes are formed so that a width pitch ratio, which is a ratio of the width of the flat rod-shaped electrode pieces constituting the comb electrode and the arrangement pitch, is different in a plurality in a direction orthogonal to the SAW propagation of the electrode pieces. ,
Each width pitch ratio is set so as to obtain a predetermined vertex temperature in the frequency temperature characteristic curve at the width pitch ratio.
A surface acoustic wave device.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018026695A (en) * | 2016-08-10 | 2018-02-15 | 株式会社日本製鋼所 | Bonded substrate, surface acoustic wave element, surface acoustic wave device, and method of manufacturing bonded substrate |
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