JP2013080612A - Dielectric barrier discharge lamp and ultraviolet radiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve adhesion of a discharge tube and an electrode in press contact with an outer periphery of the discharge tube.SOLUTION: The dielectric barrier discharge lamp comprises: a discharge tube 21 filled with discharging gas; a pair of electrodes 22A and 22B opposed to each other on an outer periphery 21a of the discharge tube 21; a pair of pressing members 23A and 23B pressing a pair of the electrodes 22A and 22B into contact with the outer periphery 21a while elastically deforming them; and a pair of stationary blocks 24A and 24B to which both longitudinal ends of a pair of the pressing members 23A and 23B are fixed while a pair of the pressing members 23A and 23B bring a pair of the electrodes 22A and 22B into contact with the outer periphery 21a. While a pair of the pressing members 23A and 23B are isolated from a pair of the electrodes 22A and 22B, a center part contact face 23X of each of the pressing members 23A and 23B is swollen in a pressing direction more than an outside part contact face 23Y.

Description

  The present invention relates to a dielectric barrier discharge lamp and an ultraviolet irradiation apparatus using the dielectric barrier discharge lamp.

  In the conventional dielectric barrier discharge lamp, as shown in Patent Document 1, a solid electrode or a mesh electrode is disposed on the upper surface of the discharge tube, and a mesh electrode is disposed on the lower surface. And the lower surface is used as a light extraction region for extracting light, and ultraviolet light is emitted from the mesh gaps of the mesh electrodes arranged on the lower surface. For this reason, there is a problem that a part of the light emitted from the light extraction region is shielded by the mesh electrode mesh and the light transmittance is lowered.

  For this reason, the present applicant has a long discharge tube and a pair of electrodes in order to improve the light transmittance of the light extraction region in the discharge tube, and is along the longitudinal direction of the discharge tube. A part of the outer peripheral surface is used as a light extraction region, and the pair of electrodes are arranged such that the light extraction region is positioned between the pair of electrodes in the circumferential direction of the outer peripheral surface of the discharge tube. The applicant uses a plate spring for the pair of electrodes, and the plate spring is elastically deformed and brought into close contact with the outer peripheral surface by a pressing member, thereby making it possible to reduce the labor and cost of forming the electrode on the discharge tube by vapor deposition or the like. We are thinking of reducing Here, the pressing member that elastically deforms and closely contacts the electrode is configured to be fixed to the insulator by screwing both ends in the longitudinal direction to the insulator that accommodates both ends of the discharge tube. .

  However, since this pressing member receives an elastic return force (repulsive force) from the elastically deformed electrode, the pressing member is curved and deformed outward by this repulsive force. Specifically, the deformation due to the repulsive force is small at both end portions (fixed end portions) of the pressing member fixed to the insulator, but the farther away from the both end portions, that is, the closer to the central portion in the longitudinal direction of the discharge tube, The elastic deformation of the pressing member itself due to the repulsive force increases. If it does so, the press of the leaf | plate spring in the longitudinal direction center part of a discharge tube will become sweet, and there exists a problem that the adhesiveness of the longitudinal direction center part and electrode of a discharge tube worsens.

  As a result of the poor adhesion of the electrodes, there arises a problem that the light intensity at the center in the longitudinal direction of the discharge tube is lowered. In addition, in the part where the adhesion of the electrode is poor (the central part in the longitudinal direction of the discharge tube), microsputtering occurs between the electrode and the discharge tube, and not only the discharge tube is devitrified but also stress concentration occurs in that part Leading to early damage. Further, particles are generated by microsputtering, and, for example, the transmittance of the front glass provided in front of the light emission side of the discharge tube is decreased, the insulating performance of the insulating member is decreased, or the light intensity of the lamp itself is decreased.

JP 2010-287418 A

  Therefore, the present invention has been made to solve the above-mentioned problems all at once, and it is a main intended problem to improve the adhesion between the discharge tube and the electrode pressed against the outer peripheral surface of the discharge tube. It is what.

  That is, the dielectric barrier discharge lamp according to the present invention has a long discharge tube filled with a discharge gas and a long shape provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube. A pair of electrodes formed, a pair of elongated pressing members that contact the pair of electrodes against the outer peripheral surface in an elastically deformed state, and the pair of pressing members that connect the pair of electrodes to the outer peripheral surface And a pair of fixing blocks to which both ends in the longitudinal direction of the pair of pressing members are fixed, and the pair of pressing members are separated from the pair of electrodes, The center contact surface for contacting the electrode with the longitudinal center portion of the discharge tube has the electrode connected to the discharge tube more than the outer contact surface for contacting the electrode with the longitudinal outer portion on both sides of the longitudinal center portion of the discharge tube. Press to press Characterized in that it bulges toward.

  If this is the case, the central contact surface bulges more in the pressing direction than the outer contact surface, so in the state where both longitudinal ends of the pressing member are fixed to the fixed block, the central contact surface And the outer surface contact surface is substantially linear along the outer peripheral surface of the discharge tube, and the displacement caused by the repulsive force of the electrode in the central portion in the longitudinal direction of the pressing member is offset, and the outer peripheral surface of the central portion in the longitudinal direction of the discharge tube Adhesion with the electrode can be improved. Thereby, the fall of the light intensity of the center part of the longitudinal direction of a discharge tube can be prevented, and uniform light intensity can be obtained along a longitudinal direction. Further, microspatter generated between the discharge tube and the electrode along the longitudinal direction of the discharge tube can be suppressed, and devitrification of the discharge tube and generation of particles can be prevented.

  As a specific configuration in which the central portion contact surface bulges in the pressing direction than the outer portion contact surface, the outer portion contact surface is opposite to the pressing direction as it goes outward in the longitudinal direction. It is desirable that the surface is an inclined surface. If this is the case, it suffices to perform a process such as notching the outer side in the longitudinal direction of the pressing member, and the manufacturing of the pressing member can be simplified.

  At this time, it is desirable that the central contact surface is a flat surface along the longitudinal direction. If it is this, manufacture of a press member can be made easier.

  As another specific configuration, it is desirable that the contact surface of each pressing member that presses the electrode against the discharge tube has a curved shape that bulges toward the pressing direction. In this case, by adjusting the curved curvature, the electrodes can be brought into contact with each other with a uniform pressing force along the longitudinal direction in a state where both ends in the longitudinal direction of the pressing member are fixed to the fixed block.

  As for the problem that the center part in the longitudinal direction of the pressing member is bent due to the repulsive force of the electrode, the pair of electrodes are substantially flat plate springs, and the pressing member is the plate. It is conceivable that the spring is bent in the width direction perpendicular to the longitudinal direction. Thus, the effect of the present invention can be made more remarkable by applying the present invention to a pressing member that presses a substantially flat plate spring.

  It is desirable that the pressing member has a substantially C-shaped longitudinal sectional shape, and the electrode is pressed against the outer peripheral surface by the C-shaped opening end surface of the pressing member. In this case, the substantially flat plate spring is curved and pressed against the outer peripheral surface of the discharge tube by the C-shaped opening end surface, so that each side portion along the longitudinal direction of the electrode is surely secured by the outer peripheral surface of the discharge tube. Can be contacted.

  It is desirable that the pair of pressing members apply an external voltage to the pair of electrodes. If this is the case, a separate component for applying a voltage to the electrode becomes unnecessary, and the contact of the electrode with the discharge tube and the power supply to the electrode can be configured by the same member.

  The dielectric barrier discharge lamp according to the present invention has a long discharge tube filled with a discharge gas, and a long discharge tube provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube. A pair of electrodes formed, a pair of elongated pressing members that contact the pair of electrodes against the outer peripheral surface in an elastically deformed state, and the pair of pressing members that connect the pair of electrodes to the outer peripheral surface A pair of fixed blocks to which both ends in the longitudinal direction of the pair of pressing members are fixed in a state of being in contact with each other, and in each of the pressing members, a machine of a portion that presses an electrode to the central portion in the longitudinal direction of the discharge tube The mechanical strength is greater than the mechanical strength of the portion that presses the electrode against the outer side in the longitudinal direction on both sides of the central portion in the longitudinal direction of the discharge tube.

  If it is such, in a press member, the mechanical strength of the part which presses an electrode to the longitudinal direction center part of a discharge tube is larger than the mechanical strength of the part which presses an electrode to the longitudinal direction outer side part of a discharge tube. Therefore, in the state where both ends of the pressing member are fixed to the fixed block, the central portion in the longitudinal direction of the discharge tube is hardly deformed by the repulsive force of the electrode, and the adhesion of the electrode can be improved. Thereby, the illumination intensity fall of a discharge tube center part can be prevented, and uniform light intensity can be obtained along a longitudinal direction. Further, it is possible to prevent microsputtering that causes devitrification of the discharge tube and generation of particles.

  Furthermore, the dielectric barrier discharge lamp according to the present invention has a long discharge tube filled with a discharge gas and a long discharge tube provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube. A pair of electrodes formed, a pair of elongated pressing members that contact the pair of electrodes against the outer peripheral surface in an elastically deformed state, and the pair of pressing members that connect the pair of electrodes to the outer peripheral surface A pair of fixed blocks to which both ends in the longitudinal direction of the pair of pressing members are fixed in contact with each other, and each of the pressing members is disposed at the center in the longitudinal direction of the discharge tube in each of the pressing members. It has a deformation | transformation suppression part which suppresses a deformation | transformation of the part which presses.

  If it is such, since each press member has a deformation | transformation suppression part which suppresses a deformation | transformation of the part which presses the said electrode in the longitudinal direction center part of a discharge tube, the both ends of the press member were fixed to the fixed block In the state, the central portion in the longitudinal direction of the discharge tube is hardly deformed by the repulsive force of the electrode, and the adhesion of the electrode can be improved. Thereby, the illumination intensity fall of a discharge tube center part can be prevented, and uniform light intensity can be obtained along a longitudinal direction. Further, it is possible to prevent microsputtering that causes devitrification of the discharge tube and generation of particles.

  According to the present invention configured as described above, it is possible to improve the adhesion between the discharge tube and the electrode pressed against the outer peripheral surface of the discharge tube, and the adhesion between the discharge tube and the electrode is reduced. Various problems can be solved.

It is a top view which shows the lamp unit of this embodiment. It is the top view which shows the dielectric barrier discharge lamp of the embodiment, and the enlarged view of a fixed block. It is a front view which shows the dielectric barrier discharge lamp of the embodiment. It is sectional drawing which shows the dielectric barrier discharge lamp of the embodiment. It is a top view of the electrode of the embodiment. It is the component development view and assembly drawing of the dielectric barrier discharge lamp of the embodiment. It is the front view, side view, and top view which show the pressing member of the embodiment. It is a schematic diagram which shows the attachment part of the fixed block of the embodiment. It is an expanded view of the connection metal fitting of the embodiment. It is a schematic diagram which shows the state which fixed the press member of this invention, and the state which fixed the conventional press member. It is a top view which shows the press member of deformation | transformation embodiment. It is a top view which shows the press member of deformation | transformation embodiment. It is a top view which shows the press member of deformation | transformation embodiment. It is a top view which shows the press member of deformation | transformation embodiment. It is sectional drawing which shows the press member of deformation | transformation embodiment.

  Hereinafter, an embodiment of an ultraviolet irradiation device according to the present invention will be described with reference to the drawings.

  The ultraviolet irradiation apparatus according to the present embodiment decomposes and removes organic matter adhering to the surface of the object to be processed by irradiating the object to be processed such as a semiconductor substrate or a glass substrate with ultraviolet rays. The thing is washed. This ultraviolet irradiation device has one or a plurality of lamp units 100 shown in FIG. 1. The lamp unit 100 includes a plurality of (for example, ten) dielectric barrier discharge lamps 2 and a plurality of these dielectrics. The barrier discharge lamp 2 is held in units so that the longitudinal directions thereof are parallel to each other at equal intervals, and has a power supply member 3 that supplies power to the plurality of dielectric barrier discharge lamps 2.

  The power supply member 3 includes a first power supply member 3A and a second power supply member 3B that are substantially U-shaped in plan view. The first power supply member 3A and the second power supply member 3B are made of a conductive material such as an aluminum alloy or stainless steel, and are connected to each other through the insulating member 4 in plan view. It becomes a substantially rectangular frame shape.

  The first power supply member 3A is electrically connected to the high voltage terminal side of the power supply device for applying an alternating voltage, and one fixing block 24A of the dielectric barrier discharge lamp 2 is electrically connected by screw fixing. The On the other hand, the second power supply member 3B is electrically connected to the ground terminal side of the power supply device, and the other fixing block 24B of the dielectric barrier discharge lamp 2 is electrically connected by screw fixing. As described above, the first power supply member 3A and the second power supply member 3B support one end and the other end of each of the plurality of dielectric barrier discharge lamps 2 as a unit so that the dielectric barrier discharge lamp 2 bends. Is made as small as possible, the mechanical strength of the lamp unit 100 is increased, and the handling of the lamp unit 100 is facilitated.

  As shown in FIGS. 2 to 4, the dielectric barrier discharge lamp 2 includes a long discharge tube 21 filled with a discharge gas, a pair of electrodes 22 </ b> A and 22 </ b> B, and a pair of pressing members 23 </ b> A and 23 </ b> B. And a pair of fixed blocks 24A and 24B. Hereinafter, each part is explained in full detail.

The discharge tube 21 is a round tube having a circular cross section in which both ends of a cylinder made of synthetic quartz glass are closed. The discharge space formed inside the discharge tube 21 is filled with a dielectric barrier discharge gas. As the dielectric barrier discharge gas, a rare gas such as xenon (Xe), argon (Ar), or krypton (Kr), or a halogen gas such as fluorine (F ₂ ) or chlorine (Cl ₂ ) is used. be able to. The dielectric barrier discharge lamp 2 emits excimer light having different wavelengths (172 nm, 222 nm, 308 nm, etc.) depending on the type of gas. For example, in order to decompose an organic compound, the dielectric barrier discharge lamp 2 that emits excimer light having a center wavelength of 172 nm is used by using xenon (Xe) as a discharge gas.

  The pair of electrodes 22 </ b> A and 22 </ b> B has a long shape provided in contact with the outer peripheral surface 21 a along the longitudinal direction of the discharge tube 21 while being elastically deformed and facing each other. Specifically, each of the electrodes 22A and 22B is a flat plate spring having a length substantially equal to that of the discharge tube 21, and a position where light extraction regions 21P for extracting light in the discharge tube 21 are sandwiched from both sides in the circumferential direction. (See FIG. 4). In the present embodiment, the discharge tube 21 is provided at a position that is symmetric with respect to the central axis. The material of the electrodes 22A and 22B may be any material having conductivity such as phosphor bronze, stainless steel, beryllium copper, etc., but a material with particularly high corrosion resistance is preferable. In this embodiment, the thickness is about 0.03 mm. Stainless steel leaf springs are used.

  As shown in FIG. 5 in particular, the electrodes 22A and 22B of the present embodiment have a plurality of slits 221 and 222 formed in the width direction orthogonal to the longitudinal direction. A plurality of the slits 221 and 222 are formed in the side portion and the central portion along the longitudinal direction of the electrodes 22A and 22B, respectively. When the electrodes 22A and 22B are thermally expanded, the slits 221 and 222 allow the thermal expansion to escape to the gap formed by the slits 221 and 222, and the electrodes 22A and 22B are expanded and deformed by the thermal expansion. Then, the adhesion with the outer peripheral surface 21a of the discharge tube 21 is prevented from being lowered. In addition, the code | symbol 223 in FIG. 5 is a processus | protrusion which functions as a shift | offset | difference prevention part which prevents the electrodes 22A and 22B from shifting | deviating with respect to the press members 23A and 23B mentioned later. The protrusion 223 is bent at a substantially right angle and inserted into the groove 231 of the pressing members 23A and 23B (see FIG. 6).

  Then, as shown in FIG. 6, the electrodes 22A and 22B are pressed against the outer peripheral surface 21a of the discharge tube 21 by the corresponding pressing members 23A and 23B so as to be along the outer peripheral surface 21a of the discharge tube 21. It is elastically deformed and contacts the outer peripheral surface 21a of the discharge tube 21.

  The pair of pressing members 23A and 23B are long enough to press the pair of electrodes 22A and 22B against the outer peripheral surface 21a of the discharge tube 21 in an elastically deformed state, as shown in FIGS. It is a scale. Specifically, each of the pressing members 23A and 23B is a rod-like member extending along the longitudinal direction of the discharge tube 21, and a groove 231 along the longitudinal direction is formed in an opposing surface facing the outer peripheral surface 21a of the discharge tube 21. Has been. Further, through holes 23H for screw fixing to fixing blocks 24A and 24B described later are formed at both longitudinal ends of the pressing members 23A and 23B (see FIG. 7). In the pressing members 23A and 23B of the present embodiment, the cross-sectional shape in the longitudinal direction is substantially C-shaped, and more specifically, the cross-sectional shape in the longitudinal direction is generally U-shaped. If the pressing members 23A and 23B are made of stainless steel, anodizing is not necessary. For example, if a general-purpose C channel used for holding a mirror or the like is used, the cost can be further reduced.

  In the pressing members 23A and 23B having such a configuration, the C-shaped opening end surface 23x contacts each side portion along the longitudinal direction of the electrodes 22A and 22B and presses the outer peripheral surface 21a of the discharge tube 21 (see FIG. 6). The pair of pressing members 23A, 23B is screwed to the pair of fixing blocks 24A, 24B by the through holes 23H in the state where the electrodes 22A, 22B are pressed against the discharge tube 21 (FIG. See 2).

  As shown in FIG. 2 and the like, the pair of fixed blocks 24A and 24B accommodate both ends of the discharge tube 21 in the longitudinal direction and press the pair of electrodes 22A and 22B on the outer peripheral surface 21a of the discharge tube 21. Both ends in the longitudinal direction of the pair of pressing members 23A and 23B are fixed. Specifically, each of the fixed blocks 24A and 24B has a substantially rectangular shape in plan view, and is formed of an insulating material such as ceramics. And each fixed block 24A, 24B is a fixed block enlarged view of FIG. 2, and as shown in FIG. 4, the front surface of the dielectric barrier discharge lamp 2 is the surface on which the end of the dielectric barrier discharge lamp 2 is mounted. A discharge tube housing portion 241 for housing the end portion is provided. The discharge tube housing portion 241 is a recess having a substantially circular cross section corresponding to the outer shape of the dielectric barrier discharge lamp 2.

  Each of the fixing blocks 24A and 24B is formed with a pressing member fixing portion 242 in which the pair of pressing members 23A and 23B are screw-fixed on left and right side wall portions sandwiching the discharge tube housing portion 241. The pressing member fixing portion 242 has female screw holes (not shown) formed along the pressing direction on the left and right side surfaces of the fixing blocks 24A and 24B. The female screw hole is a screw into which a fixing screw N1 passed through the through hole 23H of the pressing members 23A and 23B is screwed. The pressing members 23A and 23B are fastened and fixed to the fixing blocks 24A and 24B by the fixing screw N1, so that the C-shaped opening end surface 23x of the pressing members 23A and 23B connects the electrodes 22A and 22B to the outer peripheral surface 21a of the discharge tube 21. Press contact.

  Furthermore, through holes 24H into which fixing screws N2 for screw fixing to the power supply members 3A and 3B are inserted are formed in the rear ends 243 of the fixing blocks 24A and 24B. The through hole 24H is a hole having an opening area larger than the male screw portion of the fixing screw N2, and is a long hole extending in the longitudinal direction of the discharge tube 21 in the present embodiment. And the fixing screw N2 inserted in this through-hole 24H is screwed together by the internal thread part formed in electric power feeding member 3A, 3B. Thereby, the fixing blocks 24A and 24B are screwed to the power feeding members 3A and 3B. Note that the upper and lower surfaces of the rear end 243 are both flat surfaces.

  The dielectric barrier discharge lamp 2 configured as described above is, as shown in FIG. 1 or 8, viewed from a direction (upward in FIG. 8) perpendicular to the longitudinal direction of the discharge tube 21 with respect to the power supply members 3A and 3B. Screwed. At this time, since the through hole 24H is a long hole along the longitudinal direction of the discharge tube, the longitudinal dimension of the dielectric barrier discharge lamp 2 varies depending on the mounting accuracy and processing tolerance of the dielectric barrier discharge lamp 2. Even if there is, the variation is absorbed by the through hole 24H and can be reliably screwed to the power supply members 3A and 3B.

  Further, in order to apply the voltage from the power supply members 3A and 3B to the electrodes 22A and 22B via the pressing members 23A and 23B, the fixed blocks 24A and 24B are provided with power supply members 3A and 3B and It has the connection metal fitting 5 which electrically connects the pressing members 23A and 23B.

  As shown in FIG. 9, the connection fitting 5 is substantially T-shaped in the unfolded state, and comes into contact with the upper and lower surfaces of the rear end portions 243 of the fixing blocks 24 </ b> A and 24 </ b> B so that the rear end portion 243 is attached. It has a sandwiching portion 51 that is bent so as to be sandwiched in a substantially U-shape, and an extending portion 52 that extends substantially vertically from the center of the sandwiching portion 51. The extending portion 52 is formed with a through hole 52H into which a fixing screw N1 for fixing the pressing members 23A and 23B to the fixing blocks 24A and 24B is inserted. When the pressing members 23A and 23B are fixed to the fixing blocks 24A and 24B, the connection fitting 5 is fastened together with the fixing screw N1 to ensure electrical contact with the pressing members 23A and 23B. Further, as shown in FIG. 8, the sandwiching portion 51 of the connection fitting 5 is disposed so as to sandwich the upper and lower surfaces of the rear end portions 243 of the fixing blocks 24 </ b> A and 24 </ b> B. Further, a through hole (long hole) 51H having substantially the same shape as the through hole H24 is formed in the sandwiching portion 51 corresponding to the through hole 24H provided in the fixing blocks 24A and 24B. When the fixing blocks 24A and 24B are screwed to the power supply members 3A and 3B, the lower portions 51a of the sandwiching portions 51 on the lower surfaces of the fixing blocks 24A and 24B are in surface contact with the power supply members 3A and 3B to make electrical contact. Is secured. Further, since the upper portion 51b of the sandwiching portion 51 on the upper surfaces of the fixing blocks 24A and 24B is in contact with the fixing screw N2, and the fixing screw N2 is in contact with the power feeding members 3A and 3B, also in the upper portion 51b of the sandwiching portion 51. Electrical contact is ensured.

  As shown in FIG. 1, one electrode 22A of the pair of electrodes 22A and 22B is electrically connected to the high voltage terminal side of the power supply device by a fixing block 24A attached to one end of the dielectric barrier discharge lamp 2. Are connected to each other to become a high voltage application side electrode, and the other electrode 22B of the pair of electrodes 22A and 22B is connected to the ground terminal side of the power supply device by a fixing block 24B attached to the other end of the dielectric barrier discharge lamp 2. Is electrically connected to the ground electrode. In order to prevent discharge between the adjacent dielectric barrier discharge lamps 2, the high voltage application side electrodes 22A or the ground side electrodes 22B of the adjacent dielectric barrier discharge lamps 2 are arranged to face each other.

  Thus, as shown in FIG. 7, the pressing members 23A and 23B in the dielectric barrier discharge lamp 2 of the present embodiment are separated from the pair of electrodes 22A and 22B, that is, the electrodes 22A and 22B are disposed on the discharge tube 21. In the state before pressing (natural state where no external force is applied), the central contact surface 23X that makes the electrodes 22A, 22B contact the longitudinal central portion of the discharge tube 21 in each of the pressing members 23A, 23B It is configured to bulge toward the pressing direction in which the electrodes 22A, 22B are pressed against the discharge tube 21 rather than the outer portion contact surface 23Y that contacts the electrodes 22A, 22B with the longitudinal outer portions on both sides of the longitudinal central portion. Yes.

  In the present embodiment, on the side surfaces of the pressing members 23A and 23B facing the electrodes 22A and 22B, that is, the C-shaped opening end surface 23x, there is a central contact surface 23X that contacts the electrodes 22A and 22B with the central portion in the longitudinal direction of the discharge tube 21. The outer side contact surface 23Y that contacts the electrodes 22A and 22B with the outer side in the longitudinal direction of the discharge tube 21 (the portion other than the central portion in the longitudinal direction and not accommodated in the discharge tube accommodating portion 241) is directed in the pressing direction. It is configured to bulge out.

  Specifically, the central contact surface 23X of the pressing members 23A and 23B is a flat surface along the longitudinal direction of the pressing members 23A and 23B, and the outer contact surface 23Y has a pressing direction as it goes outward in the longitudinal direction. Is an inclined surface inclined to the opposite side. In other words, the longitudinal outer side portion having the outer side contact surface 23Y of the pressing members 23A and 23B is reduced in width so that the C-shaped opening end 23x has a downward slope toward the outer side in the longitudinal direction in plan view. It is configured. In addition, through holes 23H are formed at both ends in the longitudinal direction further outside the longitudinal outer portion that forms the outer contact surface 23Y, and both the longitudinal ends are fixed to the fixing blocks 24A and 24B by screws. .

  Here, the longitudinal dimension of the flat surface which is the central contact surface 23X and the inclined surface which is the external contact surface 23Y or the inclination angle of the inclined surface of the pressing members 23A and 23B is the longitudinal dimension of the discharge tube 21, the discharge tube 21. It is determined by the shape or material such as the thickness or width dimension that determines the effective irradiation width of the electrode, the elastic restoring force of the electrodes 22A and 22B, or the shape or material that determines the mechanical strength of the pressing members 23A and 23B. It is done.

  By fixing both ends of the thus configured pressing members 23A, 23B to the fixing blocks 24A, 24B, the central contact surface 23X of the pressing members 23A, 23B causes the electrodes 22A, 22B to become the outer peripheral surface 21a of the discharge tube 21. The outer side contact surfaces 23Y of the pressing members 23A and 23B are connected to the outer peripheral surface 21a of the discharge tube 21 with the electrodes 22A and 22B being deformed to the discharge tube 21 side. Adhere closely. That is, in the state where the pressing members 23A and 23B are fixed to the fixing blocks 24A and 24B, the electrode contact surfaces 23s (the center contact surface 23X and the outer contact surface 23Y) of the pressing members 23A and 23B are substantially linear, It will be in the state contact | adhered to the outer peripheral surface 21a of the discharge tube 21 over the whole longitudinal direction of 22A, 22B. By the inclined surface 23Y formed on the pressing members 23A and 23B, the displacement due to the deformation of the central portion in the longitudinal direction of the pressing members 23A and 23B is canceled, regardless of the deformation of the central portion in the longitudinal direction of the pressing members 23A and 23B. The electrodes 22A and 22B can be brought into close contact with the outer peripheral surface 21a of the discharge tube 21. In addition, compared with the case where the conventional press member is used, FIG. 10 shows the adhesion between the outer peripheral surface of the discharge tube at the center in the longitudinal direction and the electrode when the press members 23A and 23B of the present embodiment are used. It is a schematic diagram which shows that is improving.

  According to the ultraviolet irradiation device according to the present embodiment configured as described above, since the central contact surface 23X bulges in the pressing direction from the outer contact surface 23Y, both ends in the longitudinal direction of the pressing members 23A and 23B. In a state where the portion is fixed to the fixed block, the center portion contact surface 23X and the outer portion contact surface 23Y are substantially linear along the outer peripheral surface 21a of the discharge tube 21, and the electrode 22A is formed at the center portion in the longitudinal direction of the pressing members 24A and 24B. The displacement caused by the repulsive force of 22B is canceled out, and the adhesion between the outer peripheral surface 21a at the center portion in the longitudinal direction of the discharge tube 21 and the electrodes 22A and 22B can be improved. Thereby, the fall of the light intensity of the longitudinal direction center part of the discharge tube 21 can be prevented, and uniform light intensity can be obtained along a longitudinal direction. Further, microspatter generated between the discharge tube 21 and the electrodes 22A and 22B along the longitudinal direction of the discharge tube 21 can be suppressed, and devitrification of the discharge tube 21 and generation of particles can be prevented. .

The present invention is not limited to the above embodiment.
For example, the pressing member of the above embodiment has both end portions in the longitudinal direction having inclined surfaces, but as shown in FIG. 11, it is longer in the longitudinal direction than the width dimension of the central portion in the longitudinal direction of the pressing members 23A and 23B. It may have a step shape configured such that the width dimension of the portion is reduced. Even in such a case, it is possible to offset the displacement due to the deformation of the central portion in the longitudinal direction of the pressing members 23A and 23B, and to bring the electrode into close contact with the outer peripheral surface of the discharge tube. In addition, in FIG. 11, although it was a two-stage shape which consists of a longitudinal direction center part and a longitudinal direction outer side part, it is good also as a multistage shape of three or more steps.

  As shown in FIG. 12, the electrode contact surfaces 23s of the pressing members 23A and 23B may be formed in a curved shape that bulges in the pressing direction in plan view. Even if it is such, the displacement by the deformation | transformation of the longitudinal direction center part of a press member can be canceled, and an electrode can be stuck to the outer peripheral surface of a discharge tube. Further, by adjusting the curvature of the electrode contact surface 23s, the electrode can be contacted with a uniform pressing force along the longitudinal direction.

  Furthermore, as shown in FIG. 13, by making the entire pressing member into a bent shape or a curved shape that bulges in the pressing direction, the portion that presses the electrode in the central portion in the longitudinal direction of the discharge tube is formed in the longitudinal direction of the discharge tube. You may comprise so that it may bulge toward a pressing direction rather than the part which presses an electrode to a direction outer side part.

  In addition, in each pressing member, the mechanical strength of the portion that presses the electrode to the central portion in the longitudinal direction of the discharge tube is greater than the mechanical strength of the portion that presses the electrode to both longitudinal ends of the discharge tube. It may be configured. For example, as shown in FIG. 14, by pressing the width dimension (the dimension along the pressing direction) of the central portion in the longitudinal direction of the pressing member to be larger than the width dimension of both end portions in the longitudinal direction, the pressing direction of the central portion in the longitudinal direction It is conceivable to make the mechanical strength against deformation along the direction larger than the mechanical strength against deformation along the pressing direction at both ends in the longitudinal direction. In this case, the entire electrode contact surface 23s of the pressing member is a flat surface.

  In addition, each pressing member 23A, 23B may have a deformation suppressing portion 232 that suppresses deformation of at least the central portion in the longitudinal direction of each pressing member 23A, 23B. As this deformation | transformation suppression part 232, as shown in FIG. 15, ribs, such as an uneven | corrugated strip formed along the longitudinal direction in the bottom wall (intermediate part of U-shape) of pressing member 23A, 23B, can be considered, for example. It is also conceivable that the groove formed in each pressing member has a partial arc shape having the same diameter as the outer peripheral surface of the discharge tube so that the pressing member is solid and difficult to deform.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Ultraviolet irradiation apparatus 2 ... Dielectric barrier discharge lamp 21 ... Discharge tube 21a ... Outer peripheral surface 22A, 22B ... Electrode 23A, 23B ... Pressing member 24A, 24B ... Holding block

Claims (10)

A long discharge tube filled with a discharge gas;
A pair of elongated electrodes provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube;
A pair of pressing members having an elongated shape that contacts the pair of electrodes against the outer peripheral surface in an elastically deformed state; and
With the pair of pressing members in contact with the outer peripheral surface of the pair of electrodes, a pair of fixing blocks to which both longitudinal ends of the pair of pressing members are fixed,
In the state where the pair of pressing members are separated from the pair of electrodes, the center contact surfaces that contact the electrodes with the center portion in the longitudinal direction of the discharge tube in each pressing member are on both sides of the center portion in the longitudinal direction of the discharge tube. A dielectric barrier discharge lamp, wherein the dielectric barrier discharge lamp bulges in a pressing direction in which the electrode is pressed against the discharge tube rather than an outer surface contact surface where the electrode is brought into contact with an outer portion in the longitudinal direction.   2. The dielectric barrier discharge lamp according to claim 1, wherein the outer portion contact surface is an inclined surface that is inclined to the opposite side to the pressing direction as going outward in the longitudinal direction.   3. The dielectric barrier discharge lamp according to claim 2, wherein the central contact surface is a flat surface along the longitudinal direction.   2. The dielectric barrier discharge lamp according to claim 1, wherein a contact surface for pressing the electrode against the discharge tube in each pressing member has a curved shape bulging in the pressing direction.   5. The dielectric barrier discharge lamp according to claim 1, wherein the pair of electrodes are substantially flat plate springs. The pair of pressing members has a substantially C-shaped cross-sectional shape in the longitudinal direction,
6. The dielectric barrier discharge lamp according to claim 1, wherein the pair of electrodes are pressed against the outer peripheral surface by a C-shaped opening end surface of the pair of pressing members. .   The dielectric barrier discharge lamp according to claim 1, wherein the pair of pressing members applies an external voltage to the pair of electrodes. A long discharge tube filled with a discharge gas;
A pair of elongated electrodes provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube;
A pair of pressing members having an elongated shape that contacts the pair of electrodes against the outer peripheral surface in an elastically deformed state; and
With the pair of pressing members in contact with the outer peripheral surface of the pair of electrodes, a pair of fixing blocks to which both longitudinal ends of the pair of pressing members are fixed,
In each of the pressing members, the mechanical strength of the portion that presses the electrode to the longitudinal central portion of the discharge tube is the mechanical strength of the portion that presses the electrode to the longitudinal outer portion on both sides of the longitudinal central portion of the discharge tube. A dielectric barrier discharge lamp characterized by being larger than. A long discharge tube filled with a discharge gas;
A pair of elongated electrodes provided opposite to each other on the outer peripheral surface along the longitudinal direction of the discharge tube;
A pair of pressing members having an elongated shape that contacts the pair of electrodes against the outer peripheral surface in an elastically deformed state; and
With the pair of pressing members in contact with the outer peripheral surface of the pair of electrodes, a pair of fixing blocks to which both longitudinal ends of the pair of pressing members are fixed,
Each said pressing member has a deformation | transformation suppression part which suppresses a deformation | transformation of the part which presses the said electrode in the longitudinal direction center part of the said discharge tube in each said pressing member, The dielectric barrier discharge lamp characterized by the above-mentioned.   An ultraviolet irradiation device using the dielectric barrier discharge lamp according to claim 1.