JP2013077768A5 - - Google Patents
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- JP2013077768A5 JP2013077768A5 JP2011217932A JP2011217932A JP2013077768A5 JP 2013077768 A5 JP2013077768 A5 JP 2013077768A5 JP 2011217932 A JP2011217932 A JP 2011217932A JP 2011217932 A JP2011217932 A JP 2011217932A JP 2013077768 A5 JP2013077768 A5 JP 2013077768A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011217932A JP5804881B2 (en) | 2011-09-30 | 2011-09-30 | Semiconductor laser module for direct writing exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011217932A JP5804881B2 (en) | 2011-09-30 | 2011-09-30 | Semiconductor laser module for direct writing exposure equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013077768A JP2013077768A (en) | 2013-04-25 |
| JP2013077768A5 true JP2013077768A5 (en) | 2014-04-24 |
| JP5804881B2 JP5804881B2 (en) | 2015-11-04 |
Family
ID=48481013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011217932A Active JP5804881B2 (en) | 2011-09-30 | 2011-09-30 | Semiconductor laser module for direct writing exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5804881B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9772394B2 (en) | 2010-04-21 | 2017-09-26 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
| WO2012141868A1 (en) | 2011-04-15 | 2012-10-18 | Faro Technologies, Inc. | Enhanced position detector in laser tracker |
| US9482529B2 (en) | 2011-04-15 | 2016-11-01 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
| CN104094081A (en) | 2012-01-27 | 2014-10-08 | 法罗技术股份有限公司 | Inspection method with barcode identification |
| US9041914B2 (en) | 2013-03-15 | 2015-05-26 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
| JP7381871B2 (en) | 2019-12-24 | 2023-11-16 | 東亜ディーケーケー株式会社 | Light source unit and analyzer |
| US11754782B2 (en) * | 2021-05-06 | 2023-09-12 | Stmicroelectronics (Research & Development) Limited | Mechanically held polymer lenses for photonics device maintaining placement reference to die |
| CN115548856B (en) * | 2022-12-01 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Direction-adjustable laser emission light source, adjusting method thereof and optical instrument |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6196424A (en) * | 1984-10-17 | 1986-05-15 | Fujitsu Ltd | Optical semiconductor module structure |
| JPH0324614U (en) * | 1989-07-21 | 1991-03-14 | ||
| JPH0529170U (en) * | 1991-09-27 | 1993-04-16 | 三菱電機株式会社 | Laser diode module |
| JPH10339836A (en) * | 1997-06-06 | 1998-12-22 | Dainippon Screen Mfg Co Ltd | Plotting head for light beam plotting device |
| JP2004165304A (en) * | 2002-11-11 | 2004-06-10 | Furukawa Electric Co Ltd:The | Semiconductor laser module |
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2011
- 2011-09-30 JP JP2011217932A patent/JP5804881B2/en active Active