JP2013074089A - Adhesion method for optical element on optical element holding device, optical element holding device used therefor, and exposure device having optical element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesion method for optical element on optical element holding device, capable of fixing an optical element on an optical element holding device by removing distortion and/or deformation of the optical elements as much as possible even when the optical element is bonded to the optical element holding device, using adhesive.SOLUTION: The adhesion method for optical element LEN on optical element holding device 20 includes the steps for: locally tacking an optical element LEN on a holding frame member 20C, using first adhesive 20s for hardening by the radiation of optical energy; and bonding an outer periphery 20t of the optical element LEN to the holding frame member 20C, using second adhesive 20x with a hardening time slower than that of the first adhesive 20s.

Description

  The present invention relates to an exposure apparatus used for manufacturing a substrate such as a printed circuit board or a liquid crystal substrate, and more specifically, a method for bonding an optical element to an optical element holding device provided in the exposure apparatus, and an optical used in this method. The present invention relates to an element holding device.

  Conventionally, an exposure apparatus has been used for manufacturing a substrate such as a printed circuit board or a liquid crystal substrate. This exposure apparatus is provided with an optical element holding device. This optical element holding device is provided with a projection lens group as an optical element for mask pattern projection.

  Since the mask pattern is desirably projected on the surface of the target workpiece coated with a photosensitive material such as a photoresist by the projection lens group at an equal magnification or approximately two times, the projection lens group includes a target pattern. It is suitable to use one having a large area and a deep focal depth so that the surface of the workpiece can be exposed at once.

  By the way, when the projection lens group is fixed to the optical element holding device, if distortion or deformation occurs, for example, when the projection lens group deforms, astigmatism mainly occurs, and the mask pattern formed on the surface of the target workpiece. The image is distorted and the resolution is degraded.

JP 2001-343575 A

  Therefore, conventionally, the projection lens group is fixed to the optical element holding device using an adhesive. However, in the conventional method of bonding the projection lens group using the adhesive to the optical element holding device, the projection lens is distorted or deformed due to the contraction of the adhesive. It is generally difficult to fix the projection lens group to the optical element holding device by removing distortion and deformation of the projection lens group.

  The present invention has been made in view of the above circumstances, and even when an optical element is bonded and fixed to an optical element holding device using an adhesive, distortion and deformation of the optical element are removed as much as possible. It is intended to provide a method of adhering an optical element to an optical element holding device that can be fixed to the optical element holding device, an optical element holding device used in this method, and an exposure apparatus equipped with this optical element.

  The method for adhering an optical element to the optical element holding apparatus of the present invention is to temporarily fix the optical element to a holding frame member locally using a first adhesive that is cured by light energy irradiation, and then to the outer periphery of the optical element. The portion is bonded and fixed to the holding frame member using a second adhesive having a curing time slower than that of the first adhesive.

  Furthermore, in the method for adhering an optical element to the optical element holding device of the present invention, the holding frame member that forms a part of the optical element holding device and has a peripheral wall portion that holds the optical element on the inner peripheral side is provided. This first adhesion is performed by interposing a first adhesive that is cured by irradiating light energy between at least three locations between the peripheral wall portion and the outer peripheral portion of the optical element and spaced in the circumferential direction. The first adhesive curing step of irradiating the agent with light energy to cure the first adhesive, and curing between the inner peripheral side of the peripheral wall portion of the holding frame member and the outer peripheral portion of the optical element than the first adhesive It is desirable to bond and fix the optical element to the holding frame member by performing a second adhesive curing step of curing the second adhesive with a second adhesive having a slow curing time characteristic interposed therebetween. .

  The optical element is composed of a circular projection lens, and its peripheral wall portion is circular. The first adhesive may be an ultraviolet curable adhesive or a visible light curable adhesive.

  The holding frame member includes an annular frame member that surrounds the projection lens from its outer peripheral portion, a fixed portion that is fixed to the annular frame member, and a close contact portion that is in close contact with the outer peripheral portion of the projection lens by applying a first adhesive. And an auxiliary auxiliary member for bonding.

  The close contact portion may be made of a transmissive material that transmits light energy, or may have a through hole that allows light energy to pass through. Further, the close contact portion may be connected to the fixed portion via an elastic portion.

  A packing member for preventing the second adhesive from dripping may be interposed between the peripheral wall portion of the holding frame member and the outer peripheral portion of the optical element.

  The method for adhering an optical element to the optical element holding device according to the present invention includes a peripheral wall portion of a holding frame member that forms a part of the optical element holding device and has a peripheral wall portion that holds the optical element on the inner peripheral side. Of the optical element with respect to the holding frame member by interposing a first adhesive that is cured by irradiating light energy to at least three locations that exist between the optical element and the outer peripheral portion of the optical element and spaced apart in the circumferential direction. An adjustment step for adjusting the optical axis, a first adhesive curing step for curing the first adhesive by irradiating the first adhesive with light energy, and a peripheral wall portion of the holding frame member and an outer peripheral portion of the optical element. And a second adhesive curing step of curing the second adhesive by interposing a second adhesive having a curing time characteristic slower than the first adhesive on the optical element, thereby holding the optical element It is a method of adhesive fixing to And it may be.

  The holding frame member includes an annular frame member that surrounds the projection lens from the outer periphery thereof, a fixing portion that is fixed to the annular frame member, and a close contact portion that is in close contact with the outer periphery of the projection lens by applying the first adhesive. A method of adjusting the optical axis of the optical element using the auxiliary bonding member may be used.

  In the adhesion auxiliary member, the close contact portion and the fixed portion may be connected via an elastic portion.

The optical element holding device of the present invention includes an annular frame member formed with a peripheral wall portion that surrounds and holds the projection lens from its outer peripheral portion on the inner peripheral side,
An opening formed in at least three locations with a space in the circumferential direction of the annular frame member, a fixed portion fixed to the annular frame member, and a first adhesive are applied to be in close contact with the outer peripheral portion of the projection lens. And a bonding auxiliary member disposed in each opening portion, and the bonding auxiliary member has an elastic portion between the fixed portion and the close portion, and has an annular shape with the outer peripheral portion of the projection lens. A second adhesive having a slower curing time than the first adhesive is interposed between the peripheral wall portion of the frame member, and a resin that is cured by irradiating light energy through the opening is used for the first adhesive. It is characterized by.

  A packing member for preventing the second adhesive from dripping may be interposed between the peripheral wall portion of the holding frame member and the outer peripheral portion of the optical element.

  This optical element holding device is used in an exposure apparatus.

  According to the present invention, the optical element is temporarily fixed to the holding frame member locally using the first adhesive by irradiation of light energy, and then the second adhesive having a slow curing time is used for the outer peripheral portion of the optical element. Therefore, the optical element can be fixed to the optical holding device while suppressing distortion and deformation of the optical element.

  In addition, the first adhesive is cured in a short time by irradiation of light energy, and the optical element is temporarily fixed locally to the holding frame member, so that the optical element is fixed to the holding frame member using the second adhesive. In this case, another optical element can be temporarily fixed to another holding frame member, and the optical element can be attached to the optical holding device without impairing the production efficiency.

FIG. 1 is an explanatory view schematically showing an example of the configuration of an exposure apparatus according to the present invention. FIG. 2 is a perspective view schematically showing an enlarged configuration of the optical element holding device shown in FIG. FIG. 3 is a sectional view showing an example of the arrangement of the projection lens group. 4 is an enlarged perspective view partially showing a holding frame member provided at an upper end portion of the projection lens holding device shown in FIG. 3 and a projection lens fixed to the holding frame member. FIG. 5 is a perspective view showing the holding frame member in a state where the projection lens shown in FIG. 4 is removed. FIG. 6 is a perspective view showing an example of the auxiliary bonding member shown in FIG. FIG. 7 is an enlarged perspective view of a part of the holding frame member of the bonding auxiliary member shown in FIG. FIG. 8 is a partially enlarged perspective view for explaining an adhesion state of the projection lens to the holding frame member shown in FIG. FIG. 9 is a perspective view showing another configuration of the auxiliary bonding member.

  An optical element bonding method to an optical element holding apparatus according to the present invention will be described below together with an optical element holding apparatus and an exposure apparatus equipped with the optical element holding apparatus, with reference to the drawings.

FIG. 1 is an explanatory view schematically showing a configuration of an exposure apparatus 10 having an optical element holding apparatus 20 manufactured by using the method of bonding an optical element to an optical element holding apparatus according to the present invention. FIG. 2 is a perspective view schematically showing the configuration of the optical element holding device 20 shown in FIG.
(Overall configuration of exposure apparatus 10)
As shown in FIG. 1, the exposure apparatus 10 includes, as an illumination optical system 1, a light source unit 11, a cold mirror 12, an exposure shutter 13, and an ultraviolet bandpass filter 14 in order from the emission side along the optical axis direction. , An integrator lens 15, a collimator lens 16, and a plane mirror 17.

  The exposure apparatus 10 includes a mask stage 18 and a mask blind 19 as the mask stage mechanism 2, an optical element holding device 20 as a projection lens mechanism, a distortion correction unit 21, and a projection exposure stage 22. Have The exposure apparatus 10 uses ultraviolet light as an exposure light beam.

  In this embodiment, the light source unit 11 includes a mercury lamp 11a and an elliptical reflecting mirror 11b. The mercury lamp 11a is disposed at the first focal position of the elliptical reflecting mirror 11b. The mercury lamp 11 a is turned on / off by the control unit 24. Light from the mercury lamp 11 a is reflected by the elliptical reflecting mirror 11 b and guided to the cold mirror 12.

  The cold mirror 12 transmits heat rays in the infrared region and reflects light in other wavelength bands. Thereby, the heat rays in the infrared region are separated. The light reflected by the cold mirror 12 is guided to the exposure shutter 13 and the ultraviolet bandpass filter 14.

  The exposure shutter 13 is used for switching between transmission and blocking of light reflected by the cold mirror 12. The exposure shutter 13 is moved in and out of the optical path between the cold mirror 12 and the ultraviolet bandpass filter 14 by the illumination system moving mechanism 25.

  When the exposure shutter 13 is retracted from the optical path, the target work 23 is exposed, and when the exposure shutter 13 enters the optical path, the exposure of the target work 23 is stopped. The target work 23 is placed on the projection exposure stage 22.

  The ultraviolet bandpass filter 14 transmits light in the ultraviolet region. In this embodiment, an i-line bandpass filter that transmits i-line, which is a spectral line of mercury with a wavelength of 365 nm, is used.

  The reflected light from the cold mirror 12 is converted into light in the ultraviolet (i-line) wavelength band (actually, ultraviolet light having a high intensity in the vicinity of the i-line wavelength band) by the ultraviolet bandpass filter 14, and the integrator lens. 15 leads to.

  The integrator lens 15 is used to cancel the illuminance unevenness of the ultraviolet light and form a uniform illuminance distribution on the irradiated surface including the periphery of the irradiated surface of the target work 23. That is, the ultraviolet light has a uniform illuminance distribution by the integrator lens 15 and is guided to the collimator lens 16.

  The ultraviolet light is converted into a parallel light beam by the collimator lens 16, guided to the plane mirror 17, and reflected toward the mask stage 18 by the plane mirror 17.

  The mask stage 18 is provided on the reflected light path by the plane mirror 17. The mask stage 18 has a mask 18a. A mask pattern is formed on the mask 18a. The mask 18a is moved by the mask stage 18 in a direction perpendicular to the optical axis (projection optical axis) O of the reflected light path.

  The mask stage 18 is configured such that the mask 18 a is removable, and a mask having a mask pattern different from the mask 18 a can be attached to the mask stage 18.

  Each mask is provided with a plurality of mask side alignment marks (not shown). The ultraviolet light reflected by the plane mirror 17 passes through the mask 18a and illuminates the mask 18a. Thereby, a mask pattern image forming light beam for forming a mask pattern image corresponding to the shape of the mask pattern is guided to the optical element holding device 20 shown in an enlarged manner in FIG.

  The irradiation optical system 1 can be moved in the X-axis direction and the Y-axis direction within a plane orthogonal to the optical axis O with respect to the mask stage 18 by the illumination system moving mechanism 25. The illumination system moving mechanism 25 is driven and controlled by the control unit 24.

  A mask blind 19 is provided between the mask stage 18 and the optical element holding device 20. The mask blind 19 is provided so as to be able to advance and retreat in the traveling optical path of the mask pattern image forming light beam that has passed through the mask 18a.

  The mask blind 19 has a function of forming a mask pattern image of only a desired region on the target work 23 in the mask pattern of the mask 18a. The mask blind 19 is driven by a mask blind driving mechanism 26, and the mask blind driving mechanism 26 is also driven and controlled by the control unit 24.

  The optical element holding device 20 is used to project a mask pattern image onto the target work 23. The mask pattern formed on the mask 18 a is appropriately scaled, whereby a mask pattern image is formed on the surface of the target work 23.

  A projection lens group LENS is provided inside the optical element holding device 20 as shown in FIG. The configuration of the optical element holding device 20 will be described later.

  The surface of the target work 23 and the mask 18a are optically conjugate by the projection lens group LENS.

  A distortion correction unit 21 is provided between the optical element holding device 20 and the projection exposure stage 22. The distortion correction unit 21 is used to deform the mask pattern image formed on the imaging surface that is the surface of the target work 23 in accordance with the distortion of the target work 23.

  The distortion correction unit 21 is driven by a distortion correction drive mechanism 28, and the distortion correction drive mechanism 28 is also driven and controlled by the control unit 24.

  The projection exposure stage 22 can move the target work 23 in the XY direction within a plane orthogonal to the optical axis O by the stage drive mechanism 29, and appropriate means for holding the target work 23 by the projection exposure stage 22 can be used. Use. The control unit 24 is also used for driving control of the stage driving mechanism 29.

The target work 23 is coated or affixed with a photosensitive material such as a photoresist that photo-reacts to ultraviolet rays (i rays) on a silicon wafer, a glass substrate, a printed board, or the like.
(Schematic configuration of the optical element holding device 20)
The optical element holding device 20 has a lens barrel 20A as shown in FIG. In this lens barrel portion 20A, a projection lens group LENS as an optical element is arranged as shown in an enlarged manner in FIG.

  FIG. 3 shows the lens group LENS on the upper side of the mounting flange 20B (see FIG. 2) for fixing the lens barrel 20A to a structure (not shown). The illustration of the projection lens group LENS below the mounting flange 20B is omitted.

  The projection lens LEN is fixed to the lens barrel portion 20A via a holding frame member 20C as shown in FIG. The holding frame member 20C may be fixed to the inner peripheral portion of the lens barrel portion 20A by screws 20D shown in FIG. 3, or directly fixed to the end surface 20A ′ of the lens barrel portion 20A by screws 20E shown in FIG. In addition, a part of the lens barrel portion 20A may be configured.

Here, the holding frame member 20C will be described as being attached to the end surface 20A ′ of the lens barrel portion 20A.
(Configuration of holding frame member 20C)
FIG. 5 shows a perspective view of the holding frame member 20C. The holding frame member 20C is composed of a metal annular frame member. The annular frame member has a circular peripheral wall portion 20a that surrounds and holds the circular projection lens LEN from the outer peripheral portion 20t on the inner peripheral side. The annular frame member has an upper flange 20b and a lower flange 20c that are opposed to each other with a gap therebetween.

  A screw fastening hole 20d is formed in the lower flange 20c at intervals in the circumferential direction, and a screw punching hole 20e facing the screw fastening hole 20d is formed in the upper flange. The lower surface 20c 'of the lower flange 20c serves as a reference surface for the end surface of the lens barrel 20A.

  An annular stepped portion 20f is provided on the peripheral wall portion 20a, and the annular stepped portion 20f includes three semi-cylindrical support projections 20g that support the projection lens LEN from below with a space in the circumferential direction. Is formed. Here, the support protrusion 20g is disposed at a substantially symmetrical position of 120 degrees in the circumferential direction of the optical axis O. The number of the supporting projections 20g is three, but the number is not limited to this as long as it is three or more.

  In the peripheral wall portion 20a, as shown in a partially enlarged view in FIG. 6, openings 20h are formed at least at three locations with a space in the circumferential direction. Here, the opening 20h is disposed at a position corresponding to the support protrusion 20g, but is not limited thereto.

  An auxiliary bonding member 20i is provided in the opening 20h. As shown in an enlarged view of FIG. 7, the auxiliary member for adhesion 20i has a fixing portion 20j and a close contact portion 20k. The fixed portion 20j and the close contact portion 20k are connected to each other via the elastic portion 20m.

  Here, the auxiliary bonding member 20i is composed of a metal block 20i ', and by forming the notches 20n and 20p in the block 20i', the fixing portion 20j and the elastic portion 20m are defined.

  A screw insertion hole 20j 'is formed in the fixing portion 20j. The annular step portion 20f is formed with a screw hole (not shown) at the position where the opening 20h is formed. The bonding auxiliary member 20i is fixed to the annular stepped portion 20f by a fixing screw 20q. The screw insertion hole 20j 'is formed with some play with respect to the fixing screw 20q. Thereby, it is possible to adjust the optical axis of the projection lens LEN with respect to the annular frame member.

  A screw hole 20m 'is formed in the elastic portion 20m. The close contact portion 20k is composed of a rectangular parallelepiped acrylic plate as a transmission material capable of transmitting ultraviolet rays. The close contact portion 20k is fixed to the elastic portion 20m by a fixing screw 20r.

The close contact portion 20k is coated with a first adhesive 20s that is cured by irradiating light energy onto the surface facing the outer peripheral portion (edge portion) of the projection lens LEN. Here, an ultraviolet curable resin is used for the first adhesive 20s, but a visible light curable resin may be used.
(Adhesion method of projection lens LEN to holding frame member)
The assembly of the projection lens LEN to the holding frame member 20C is performed through the steps described below.

  First, the adhesion auxiliary member 20i is attached to the opening 20h of the annular frame member, and the projection lens LEN is placed on the holding frame member 20C.

  Next, the eccentricity of the optical axis of the projection lens LEN with respect to the annular frame member is confirmed using a known eccentricity inspection device (not shown), and if it is outside the intersection range planned in the optical design, the fixing screw 20q is set. Each bonding auxiliary member 20i is adjusted by loosening or tightening. At that time, the optical axis of the projection lens LEN is set at a right angle.

  The close contact portion 20k is in close contact with the outer peripheral portion 20t of the projection lens LEN via the first adhesive member 20s with an interval of several tens of micrometers.

  Next, the first adhesive member 20s is irradiated with ultraviolet rays (UV light) as light energy through the opening 20h. Thereby, the first adhesive member 20s is cured in a short time. Next, as shown in FIG. 8, a packing member 20w is inserted between the peripheral wall portion 20a and the outer peripheral portion 20t of the projection lens LEN to prevent the second adhesive described later from dripping. For example, a fluorine rubber string is used for the packing member 20w, but the present invention is not limited to this.

  Next, the second adhesive 20x is injected between the outer peripheral portion 20t of the projection lens LEN and the peripheral wall portion 20a of the annular frame member. As the second adhesive 20x, a self-curing resin having a curing time characteristic that is slower than the first adhesive 20s is used.

  In this embodiment, the packing member 20w is interposed between the peripheral wall portion 20a and the outer peripheral portion 20t so as to prevent the second adhesive 20x from dripping down. If the adhesive 20x is used, it is not always necessary to provide the packing member 20w.

  As described above, in the method of adhering the projection lens LEN to the holding device, the holding frame member 20C that forms a part of the optical element holding device 20 and has the peripheral wall portion 20a that holds the optical element on the inner peripheral side is formed. A holding frame member with a first adhesive 20 s interposed between the peripheral wall portion 20 a and the outer peripheral portion of the optical element and being cured by irradiating light energy to at least three locations that are spaced apart in the circumferential direction. An adjustment step of adjusting the optical axis of the optical element with respect to 20C, a first adhesive curing step of irradiating the first adhesive 20s with light energy to cure the first adhesive 20s, and a peripheral wall portion 20a of the holding frame member 20C The second adhesive 20x is cured by interposing a second adhesive 20x having a curing time characteristic slower than the first adhesive 20s between the outer periphery 20t of the optical element and the optical element. Optical element is adhesively fixed to the holding frame member 20C by performing an adhesive curing step.

  In summary, in the bonding method of the holding device of the projection lens LEN, the optical element is temporarily fixed locally to the holding frame member 20C using the first adhesive 20s that is cured by irradiation with light energy, and then the optical element. The outer peripheral portion 20t is fixed to the holding frame member 20C using the second adhesive 20x having a curing time slower than that of the first adhesive 20s. Therefore, the optical element can be fixed to the optical holding device 20 while suppressing distortion and deformation of the optical element.

  In addition, the first adhesive 20s is cured in a short time by irradiation with light energy, and the optical element is temporarily temporarily fixed to the holding frame member 20C. Therefore, the optical element is held on the holding frame using the second adhesive 20x. When fixing to the member 20C, another optical element can be temporarily fixed to another holding frame member, and the optical element can be attached to the optical holding apparatus without impairing the production efficiency.

  In the method for adhering the projection lens LEN to the holding device described above, after performing the adjustment step of adjusting the optical axis of the optical element with respect to the holding frame member 20C, the optical element is locally held using the first adhesive 20s. Although the frame member 20C is temporarily fixed, the method described below can be used as long as the holding frame member 20C is highly accurate so that the optical element does not need to be adjusted with respect to the holding frame member 20C.

  That is, a portion of the optical element holding device and a peripheral wall portion 20a of the holding frame member 20C in which a peripheral wall portion for holding the optical element is formed on the inner peripheral side and the outer peripheral portion 20t of the optical element, and the periphery thereof. Curing the first adhesive 20s by irradiating the first adhesive 20s with light energy through the first adhesive 20s that is cured by irradiating light energy to at least three locations that are spaced apart in the rotation direction. A second adhesive 20x having a curing time characteristic that is slower than the first adhesive 20s between the peripheral wall portion 20a of the holding frame member 20C and the outer peripheral portion 20t of the optical element. The optical element may be bonded and fixed to the holding frame member 20C by performing a second adhesive curing step of interposing and curing the second adhesive 20x.

The bonding method described above can also be applied to the other holding frame member 20C that holds the projection lens group LENS. These holding frame members 20C are attached to the lens barrel portion 20A while being centered using a known eccentricity inspection device (not shown).
(Another embodiment of the configuration of the bonding auxiliary member 20i)
FIG. 9 is a perspective view showing another configuration of the auxiliary bonding member 20i used in the bonding method according to the present invention. In this embodiment, the fixing portion 20j is composed of a leaf spring member. The fixing portion 20j is fixed to the annular step portion 20f by a fixing screw 20q.

  The elastic part 20m is formed by cutting out and bending up a leaf spring member. A rectangular parallelepiped acrylic plate as the close contact portion 20k is fixed to the elastic portion 20m by a fixing screw 20r. A first adhesive 20s is applied to the acrylic plate.

  Here, the close contact portion 20k is formed of an acrylic plate capable of transmitting light energy, but instead of providing an acrylic plate, the close portion 20k is configured by a notch through which light energy passes and a through hole including a through hole (not shown). Also good.

DESCRIPTION OF SYMBOLS 10 ... Exposure apparatus 20 ... Optical element holding | maintenance apparatus 20A ... Lens barrel part 20C ... Holding frame member 20t ... Outer peripheral part 20a ... Peripheral wall part 20i ... Adhesive auxiliary member 20j ... Fixed part 20k ... Close contact part 20m ... Elastic part 20s ... No. 1 adhesive 20x ... second adhesive LEN ... projection lens (optical element)

Claims (15)

  A first adhesive that is cured by light energy irradiation is used to temporarily fix the optical element to the holding frame member locally, and then the outer periphery of the optical element is cured with a second adhesive having a slower curing time than the first adhesive. A method of adhering an optical element to an optical element holding apparatus, wherein the optical element holding apparatus is bonded and fixed to the holding frame member using a slab. A part of the optical element holding device and a peripheral wall part that holds the optical element on the inner peripheral side are formed between the peripheral wall part of the holding frame member and the outer peripheral part of the optical element, and in the circumferential direction thereof. A first adhesive that cures the first adhesive by irradiating the first adhesive with a first adhesive that cures by irradiating the light energy to at least three locations that are spaced apart; An adhesive curing step;
A second adhesive having a curing time characteristic slower than the first adhesive is interposed between the inner peripheral side of the peripheral wall portion of the holding frame member and the outer peripheral portion of the optical element. And a second adhesive curing step for curing the agent to bond and fix the optical element to the holding frame member.   3. The optical element holding device according to claim 2, wherein the optical element includes a circular projection lens, the peripheral wall portion has a circular shape, and the first adhesive is an ultraviolet curable adhesive. 4. Method for bonding optical elements.   The optical element holding device according to claim 2, wherein the optical element includes a circular projection lens, the peripheral wall portion is circular, and the first adhesive is a visible light curable adhesive. Method of adhering optical element to the surface.   The holding frame member is in close contact with the outer periphery of the projection lens by applying an annular frame member that surrounds the projection lens from the outer periphery thereof, a fixing portion that is fixed to the annular frame member, and the first adhesive. 5. The method for adhering an optical element to an optical element holding device according to claim 3, wherein the adhering auxiliary member has a close contact portion.   6. The method for bonding an optical element to an optical element holding device according to claim 5, wherein the close contact portion is made of a transmissive material that transmits light energy.   6. The method for bonding an optical element to an optical element holding device according to claim 5, wherein the close contact portion has a passage hole through which light energy passes.   The method of adhering an optical element to an optical element holding device according to claim 5, wherein the close contact part is connected to the fixed part via an elastic part.   9. A packing member for preventing the second adhesive from dripping between a peripheral wall portion of the holding frame member and an outer peripheral portion of the optical element. A method for adhering an optical element to the optical element holding device according to any one of the preceding claims. An interval between the peripheral wall portion of the holding frame member, which forms a part of the optical element holding device and has a peripheral wall portion that holds the optical element on the inner peripheral side, and the outer peripheral portion of the optical element. An adjustment step of adjusting the optical axis of the optical element with respect to the holding frame member by interposing a first adhesive that is cured by irradiating light energy to at least three locations existing by opening
A first adhesive curing step of irradiating the first adhesive with the light energy to cure the first adhesive;
The second adhesive is cured by interposing a second adhesive having a curing time characteristic slower than the first adhesive between the peripheral wall portion of the holding frame member and the outer peripheral portion of the optical element. A method of bonding an optical element to an optical element holding device, wherein the optical element is bonded and fixed to the holding frame member by executing a second adhesive curing step.   The holding frame member is coated with an annular frame member that surrounds the projection lens as the optical element from its outer peripheral portion, a fixing portion that is fixed to the annular frame member, and a first adhesive, and is applied to the outer peripheral portion of the projection lens. The optical element holding device according to claim 10, further comprising an adhesion auxiliary member having a closely contacted portion, wherein the optical axis of the projection lens is adjusted using the adhesion auxiliary member. Method for bonding optical elements.   12. The method of bonding an optical element to an optical element holding device according to claim 11, wherein the adhering auxiliary member has the close contact portion and the fixing portion connected to each other through an elastic portion. An annular frame member formed with a peripheral wall portion surrounding and holding the projection lens from its outer peripheral portion on the inner peripheral side;
Openings formed in at least three locations at intervals in the circumferential direction of the annular frame member;
An adjunct auxiliary member disposed in each opening having a fixing portion fixed to the annular frame member and a close contact portion to which the first adhesive is applied and in close contact with the outer peripheral portion of the projection lens; The auxiliary bonding member has an elastic part between the fixed part and the close contact part, and the first adhesive is provided between the outer peripheral part of the projection lens and the peripheral wall part of the annular frame member. An optical element holding device, wherein a second adhesive having a slower curing time is interposed, and a resin that cures when irradiated with light energy through the opening is used for the first adhesive.   The optical element according to claim 13, wherein a packing member for preventing the second adhesive from dripping is interposed between a peripheral wall portion of the annular frame member and an outer peripheral portion of the projection lens. Holding device.   An exposure apparatus comprising the optical element holding device according to claim 13.