JP2013072836A5 - - Google Patents

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Publication number
JP2013072836A5
JP2013072836A5 JP2011214087A JP2011214087A JP2013072836A5 JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5 JP 2011214087 A JP2011214087 A JP 2011214087A JP 2011214087 A JP2011214087 A JP 2011214087A JP 2013072836 A5 JP2013072836 A5 JP 2013072836A5
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JP
Japan
Prior art keywords
physical quantity
quantity detector
movable
base
support
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Application number
JP2011214087A
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English (en)
Japanese (ja)
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JP5838694B2 (ja
JP2013072836A (ja
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Priority to JP2011214087A priority Critical patent/JP5838694B2/ja
Priority claimed from JP2011214087A external-priority patent/JP5838694B2/ja
Publication of JP2013072836A publication Critical patent/JP2013072836A/ja
Publication of JP2013072836A5 publication Critical patent/JP2013072836A5/ja
Application granted granted Critical
Publication of JP5838694B2 publication Critical patent/JP5838694B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011214087A 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器 Expired - Fee Related JP5838694B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011214087A JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011214087A JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Publications (3)

Publication Number Publication Date
JP2013072836A JP2013072836A (ja) 2013-04-22
JP2013072836A5 true JP2013072836A5 (https=) 2014-10-30
JP5838694B2 JP5838694B2 (ja) 2016-01-06

Family

ID=48477437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011214087A Expired - Fee Related JP5838694B2 (ja) 2011-09-29 2011-09-29 物理量検出器、物理量検出デバイス及び電子機器

Country Status (1)

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JP (1) JP5838694B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6897187B2 (ja) * 2017-03-16 2021-06-30 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス、電子機器および移動体
JP2019158476A (ja) * 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP7735705B2 (ja) * 2021-07-28 2025-09-09 セイコーエプソン株式会社 物理量センサーデバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165572U (https=) * 1987-04-15 1988-10-27
JP2600393B2 (ja) * 1989-09-25 1997-04-16 日産自動車株式会社 半導体加速度センサの製造方法
JPH07229924A (ja) * 1994-02-21 1995-08-29 Tokai Rika Co Ltd 加速度センサ及びその製造方法
JP2009133807A (ja) * 2007-10-30 2009-06-18 Kyocera Corp センサおよびセンサ装置
JP2011064652A (ja) * 2009-09-18 2011-03-31 Seiko Epson Corp 加速度検出器

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