JP2013061338A5 - - Google Patents

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Publication number
JP2013061338A5
JP2013061338A5 JP2012200751A JP2012200751A JP2013061338A5 JP 2013061338 A5 JP2013061338 A5 JP 2013061338A5 JP 2012200751 A JP2012200751 A JP 2012200751A JP 2012200751 A JP2012200751 A JP 2012200751A JP 2013061338 A5 JP2013061338 A5 JP 2013061338A5
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JP
Japan
Prior art keywords
mass body
mass
substrate
micromachining
mechanical connection
Prior art date
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Pending
Application number
JP2012200751A
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English (en)
Japanese (ja)
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JP2013061338A (ja
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Publication of JP2013061338A publication Critical patent/JP2013061338A/ja
Publication of JP2013061338A5 publication Critical patent/JP2013061338A5/ja
Pending legal-status Critical Current

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JP2012200751A 2011-09-13 2012-09-12 機械的に頑強なマイクロマシニングによるジャイロスコープのための三質量体連結振動の技術 Pending JP2013061338A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161534146P 2011-09-13 2011-09-13
US61/534,146 2011-09-13

Publications (2)

Publication Number Publication Date
JP2013061338A JP2013061338A (ja) 2013-04-04
JP2013061338A5 true JP2013061338A5 (enExample) 2015-11-05

Family

ID=46762913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012200751A Pending JP2013061338A (ja) 2011-09-13 2012-09-12 機械的に頑強なマイクロマシニングによるジャイロスコープのための三質量体連結振動の技術

Country Status (3)

Country Link
US (1) US8955381B2 (enExample)
EP (1) EP2570770B1 (enExample)
JP (1) JP2013061338A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
EP4166902A1 (en) * 2014-05-21 2023-04-19 InvenSense, Inc. Mems sensor with decoupled drive system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
US6044707A (en) * 1997-06-20 2000-04-04 Aisin Seiki Kabushiki Kaisha Angular rate sensor
US7377167B2 (en) * 2004-02-27 2008-05-27 The Regents Of The University Of California Nonresonant micromachined gyroscopes with structural mode-decoupling
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
JP2008281485A (ja) * 2007-05-11 2008-11-20 Toyota Motor Corp 角速度検出装置

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