JP2013055096A - Paste applying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a paste applying device capable of preventing leakage of paste by eliminating looseness of a screw fastening part of a syringe.SOLUTION: The paste applying device comprises: a casing part 31 for holding a rotation member 32 to which a paste feeding port 16e provided at a lower end of a syringe 16 is attachably/detachably connected via a screw fastening part rotatably around an axial line AZ, forming an emission space 31b fitted with an emission screw part 32b provided at a lower part of the rotation member 32, and rotating the emission screw part 32b in the emission space 31b around the axial line AZ to pressure-feed the paste; and an emitting rotary driving mechanism for actuating a pump mechanism 18 and emitting the paste from an emission port 17a by rotating the rotation member 32 in a predetermined direction relatively to the casing part 31. A rotation direction of the rotation member 32 when emitting the paste is set to a direction opposite to the rotation direction during fastening with the screw fastening part.

Description

  The present invention relates to a paste application device that discharges a paste stored in a syringe and applies it to an application object.

  In a die bonding process for manufacturing a semiconductor device, a paste for bonding a semiconductor chip to a substrate such as a lead frame is applied. Conventionally, this paste application is performed by discharging a paste with a dispenser, and a dispenser having a configuration in which paste stored in a syringe is pushed out by air pressure and discharged from a discharge port by a paste discharge screw is known. (For example, refer to Patent Document 1). In the prior art shown in this patent document, a syringe containing a paste is connected in series above a pump mechanism using a paste discharge screw by screw fastening, and the paste is supplied from the syringe to the pump mechanism by pneumatic pressure. Yes.

JP 2009-136826 A

  However, the prior art having the above-described configuration has the following disadvantages due to the configuration in which the syringe is connected to the pump mechanism by screw fastening. That is, in the configuration of the prior art, the syringe rotates together with the paste discharge screw of the pump mechanism, and is rotatably supported by the rotation support portion at the intermediate position. However, a so-called galling phenomenon in which the rotation of the syringe cannot be supported smoothly for some reason such as the inclination of the mounting posture of the syringe may occur in this rotation support portion. In such a case, only the paste discharge screw of the pump mechanism is rotationally driven in a state where the rotation of the syringe is obstructed, so that the screw fastening portion connecting the syringe is loosened, causing problems such as paste leakage. .

  Then, an object of this invention is to provide the paste application | coating apparatus which eliminates the looseness of the screw fastening part of a syringe and can prevent the leakage of a paste.

  The paste application device of the present invention is a paste application device that applies a paste contained in a syringe to an object to be applied, and is arranged with its axis aligned with the axial line of the cylindrical syringe. A rotating member to which a paste feeding port provided at a lower end portion is detachably connected via a screw fastening portion, and the rotating member is rotatably held around the axis, and provided at a lower portion of the rotating member. A casing part that forms a pumping mechanism for pumping the paste by rotating the discharging screw part around the axis in the discharging space, wherein a discharging space into which the discharging screw part is fitted is formed; A discharge port provided in communication with the discharge space at an end of the sheet, and a pen provided through the rotating member in the axial direction and opened in the paste supply port and the discharge screw portion. A paste feeding path for feeding paste from the syringe to the pump mechanism, and air pressure in a state allowing the rotation around the axis of the syringe inside the syringe. By supplying the air pressure supply means for supplying the paste in the syringe to the pump mechanism via the paste supply path, and by rotating the rotating member relative to the casing portion in a predetermined direction. A discharge rotation drive mechanism that operates the pump mechanism to discharge the supplied paste from the discharge port, and the rotation direction of the rotating member when discharging the paste is when the screw fastening portion is fastened. The rotation direction is set in the opposite direction.

  According to the present invention, the paste feeding port provided at the lower end of the syringe holds the rotating member detachably connected via the screw fastening portion so as to be rotatable about the axis, and is provided at the lower portion of the rotating member. A discharge space is formed in which the discharge screw portion is fitted, and a casing portion that forms a pump mechanism for pumping paste by rotating the discharge screw portion around the axis in the discharge space, and a rotating member as the casing portion The rotation direction of the rotating member at the time of discharging the paste in a configuration including a rotation driving mechanism for discharging the discharged paste from the discharge port by operating the pump mechanism by relative rotation in a predetermined direction Is set in the direction opposite to the direction of rotation at the time of fastening by the screw fastening part, so that loosening of the screw fastening part at the time of rotation of the syringe can be eliminated and leakage of the paste can be prevented. That.

The perspective view of the die-bonding apparatus of one embodiment of this invention The side view of the paste coating apparatus of one embodiment of this invention The fragmentary sectional view of the paste application device of one embodiment of the present invention Explanatory drawing of the pump mechanism of the paste coating apparatus of one embodiment of this invention Explanatory drawing of paste application | coating operation | movement in the paste application | coating apparatus of one embodiment of this invention Explanatory drawing of paste application | coating operation | movement in the paste application | coating apparatus of one embodiment of this invention The figure which shows the relationship between the rotation direction at the time of the paste discharge of the rotating member in the paste coating device of one embodiment of this invention, and the rotation direction at the time of fastening by a screw fastening part.

  First, the structure of the die bonding apparatus will be described with reference to FIG. In FIG. 1, a wafer sheet 2 is held in a chip supply unit 1 by a holding table (not shown). A plurality of semiconductor chips 3 are attached to the wafer sheet 2 in a lattice arrangement. A conveyance path 5 is disposed on the side of the chip supply unit 1. The conveyance path 5 conveys the lead frame 6 and positions the lead frame 6 at the paste application position and the bonding position. A bonding head 4 is disposed above the chip supply unit 1, and the bonding head 4 moves horizontally and moves up and down by a head moving mechanism (not shown).

  A paste application unit 9 is disposed on the side of the conveyance path 5. The paste application unit 9 is configured by mounting a paste application unit 15 having a function of discharging and applying the paste 7 in the syringe 16, which is a substantially cylindrical container, on the moving table 10. The moving table 10 is configured by stacking an X-axis table 12 on a Y-axis table 11 and further connecting a Z-axis table 14 in the vertical direction via an L-shaped bracket 13 thereon. The Y-axis table 11, the X-axis table 12, and the Z-axis table 14 include a Y-axis motor 11a, an X-axis motor 12a, and a Z-axis motor 14a, respectively. By driving the X-axis motor 12a, the Y-axis motor 11a and the Z-axis motor 14a, the paste application unit 15 moves horizontally and vertically on the lead frame 6.

  In the syringe 16 attached to the paste application unit 15, a paste 7 for adhering the semiconductor chip 3 to the lead frame 6 is stored. The paste 7 in the syringe 16 is fed by the pneumatic pressure supplied from the tube 19, and the paste 7 is further applied to the application nozzle 17 provided at the lower end by a pump mechanism 18 (see FIG. 2) provided in the paste application unit 15. It is discharged from. The chip bonding part to which the semiconductor chip 3 on the upper surface of the lead frame 6 is bonded is an application area 6a to which the paste is applied. The discharge port of the application nozzle 17 is located in the application area 6a, and the paste 7 is applied from the application nozzle 17. By moving the paste application unit 15 while discharging, the paste 7 is applied in a predetermined application pattern in the application area 6 a set at the chip mounting position on the surface of the lead frame 6. After applying the paste, the lead frame 6 is sent to the bonding position 8 on the conveyance path 5 and positioned. Then, the semiconductor chip 3 picked up from the chip supply unit 1 by the nozzle 4a of the bonding head 4 is bonded onto the paste 7 applied in the application area 6a.

  Next, the structure of the paste application unit 15 will be described with reference to FIGS. 2, 3, and 4. 3A, 3B, and 3C show the AA, BB, and CC sections in FIG. 2, respectively. The paste application unit 15 is a paste application device that applies the paste 7 accommodated in the syringe 16 to the lead frame 6 that is an object to be applied. In FIG. 2, the elevating member 20 is mounted on the side surface of the Z-axis table 14 arranged vertically, and the holding block 21 and the motor bracket 22 extend in the Y direction on the upper and lower portions of the elevating member 20. Is provided. Motors 23 </ b> A and 23 </ b> B are arranged in a vertical posture on the motor bracket 22, and the rotations of the motors 23 </ b> A and 23 </ b> B are controlled by the control unit 41.

  As shown in FIG. 3A, the motors 23 </ b> A and 23 </ b> B are disposed at symmetrical positions with respect to the center line (arrow b) of the syringe 16. Drive gears 26A and 26B are coupled to lower ends of the drive shafts 25A and 25B connected to the motors 23A and 23B via the coupling 24, respectively. The drive gears 26A and 26B mesh with the driven gears 27A and 27B, respectively.

  A substantially cylindrical casing portion 31 is pivotally supported on the holding block 21 through a bearing 30 in a vertical posture. A fitting hole 31a is formed in the casing portion 31 along a vertical axis AZ, and a discharge port 17a (see FIG. 4B) for discharging paste is formed at the lower end portion of the casing portion 31. The formed application nozzle 17 is provided so as to protrude. A rotating member 32 having an inner hole 32a formed along the central axis is fitted in the fitting hole 31a, and the rotating member 32 is pivoted in a vertical posture through a bearing 35 fitted to the casing portion 31. It is supported and is rotatable with respect to the casing part 31.

  A disc-shaped syringe mounting plate 33 is coupled to the upper end portion of the rotating member 32, and a mounting portion 16 b provided at the lower end portion of the syringe 16 is detachably mounted on the syringe mounting plate 33. The syringe 16 is pivotally supported at its intermediate position by a rotation support portion 28 held by the holding block 21 (see also FIG. 1). On the upper surface of the syringe mounting plate 33, a mounting male screw portion 33a having a male screw formed on the outer periphery protrudes upward, and a mounting female screw in which a female screw to be screwed with the mounting male screw portion 33a is formed on the mounting portion 16b. A portion 16d is provided. These threaded portions are provided in the form of a right-hand thread that is fastened by rotation in the clockwise direction. In the syringe mounting state in which the mounting female screw portion 16 d is screwed to the mounting male screw portion 33 a and fastened, the syringe 16 is in a coaxial position where the vertical axis AZ coincides with the axis AZ of the rotating member 32.

  In this syringe mounting state, the paste feeding protrusion 16c provided so as to protrude downward into the mounting female screw portion 16d is fitted into a fitting hole 33b provided through the syringe mounting plate 33. The paste feed protrusion 16c is provided with a paste feed port 16e communicating with the inside of the syringe 16, and the inside of the syringe 16 communicates with the internal hole 32a via the paste feed port 16e. In the above configuration, the rotating member 32 is arranged with its axis aligned with the axis AZ of the substantially cylindrical syringe 16, and the paste feed port 16e provided at the lower end of the syringe 16 is detachably connected. It is like that. And the casing part 31 hold | maintains the rotation member 32 rotatably around the axis line AZ via the bearing 35. As shown in FIG.

  The mounting female screw portion 16 d and the mounting male screw portion 33 a constitute a screw fastening portion that detachably connects the paste feeding port 16 e provided at the lower end portion of the syringe 16 to the rotating member 32. As shown in the partially enlarged view of FIG. 2, the lower surface 16 f of the mounting female screw portion 16 d is in contact with the upper surface 33 c of the syringe mounting plate 33 when the syringe 16 is mounted on the syringe mounting plate 33. For this reason, the screwing allowance for screwing the mounting male screw portion 33a into the mounting female screw portion 16d cannot be made larger than this state. That is, the lower surface 16f of the mounting female screw portion 16d and the upper surface 33c of the syringe mounting plate 33 serve as a screwing restricting means for limiting the upper limit of the screwing allowance in the screw fastening portion including the mounting female screw portion 16d and the mounting male screw portion 33a. .

  A flange portion 16 a extending laterally is provided at the upper end portion of the syringe 16, and a lid member 37 for closing the opening on the upper surface of the syringe 16 is attached to the flange portion 16 a. A tube 19 (see also FIG. 1) is connected to an air supply hole 37 a provided in the lid member 37 via a rotary joint 39, and the tube 19 is further connected to an air supply source 38. By operating the air supply source 38, air pressure is supplied into the syringe 16 through the tube 19 and the air supply hole 37a. The supply of air pressure is controlled on / off and strength by an air pressure control unit (not shown) in which the air pressure control valve is controlled by the control unit 41.

  A piston 40 is mounted inside the syringe 16, and a downward pressing force (arrow a) acts on the piston 40 by the supplied air pressure. By this pressing force, the paste 7 stored in the syringe 16 is pressed downward and fed into the internal hole 32a of the rotating member 32 via the paste feeding port 16e. The air supply source 38 and the tube 19 are supplied to the inside of the syringe 16 by supplying air pressure in a state that allows rotation around the axis AZ of the syringe 16, so that the paste 7 in the syringe 16 is a paste feeding path. Pneumatic pressure supply means for feeding to the pump mechanism 18 through the hole 32a is configured.

  The syringe mounting plate 33 is coupled to the driven gear 27B via the coupling member 34. The driven gear 27 </ b> B is fitted on the outer periphery of the casing portion 31 via a bearing 36 and is rotatably supported with respect to the casing portion 31. As shown in FIG. 3B, the driven gear 27B meshes with the drive gear 26B, and drives the motor 23B to rotate (arrow c) the drive gear 26B via the drive shaft 25B. 27B rotates, and this rotation is transmitted to the rotating member 32 via the coupling member 34 and the syringe mounting plate 33 (arrow d). Then, as the rotating member 32 rotates, the paste 7 is discharged by the pump mechanism 18 described below. A driven gear 27 </ b> A is coupled to the outer periphery of the casing portion 31. The driven gear 27A is meshed with the drive gear 26A, and the driven gear 27A is rotated by driving the motor 23A and rotating the drive gear 26A via the drive shaft 25A (arrow e). Rotates (arrow f).

  The pump mechanism 18 will be described with reference to FIG. As shown in FIG. 4A, a discharge screw portion 32b having a screw groove for transferring the paste 7 downward in the axial direction is provided at the lower portion of the rotating member 32, and the discharge screw portion 32b is fitted. It fits into the discharge space 31b below the hole 31a. The discharge screw portion 32b has a paste outlet hole 32c communicating with the lower end portion of the internal hole 32a. Therefore, the paste 7 sent from the syringe 16 through the internal hole 32a is fed into the discharge space 31b.

  The motor 23B is driven to rotate the rotating member 32, and the discharge screw portion 32b is rotated in the paste feed direction (the direction of the arrow h shown in FIG. 4) in the discharge space 31b. The paste 7 fed to is fed under pressure in the axial direction by the rotation of the discharge screw portion 32b. Here, the discharge screw portion 32b is provided in the form of a left-hand thread that discharges by rotating counterclockwise. The casing member 31 provided with the discharge space 31b and the rotary member 32 provided with the discharge screw portion 32b are configured to pump the paste 7 by rotating the discharge screw portion 32b around the axis AZ in the discharge space 31b. Form.

  The paste 7 pumped by the pump mechanism 18 is discharged from the discharge port 17a. The discharge port 17a is provided at the end of the casing portion 31 so as to communicate with the discharge space 31b. In the above-described configuration, the internal hole 32a is formed by passing the rotary member 32 in the axial direction, and connecting the paste feed port 16e and the paste lead-out hole 32c provided in the discharge screw portion 32b. This is a paste feeding path for feeding the paste to the pump mechanism 18. The motor 23B, the drive gear 26B, and the driven gear 27B rotate the rotating member 32 relative to the casing portion 31 in a predetermined direction, thereby operating the pump mechanism 18 to feed the paste 7 fed from the discharge port 17a. A discharge rotary drive mechanism for discharging is configured.

  As shown by the arrow D in FIG. 4B, the application nozzle 17 is provided with a plurality (two in this case) of discharge ports 17a, whereby the paste 7 is discharged from the application nozzle 17 and leads. In the paste application operation for applying to the application area 6a of the frame 6, the paste 7 can be applied simultaneously to a plurality of application points. A direction reference line (arrow g) in the arrangement of the plurality of discharge ports 17a is set for the application nozzle 17, and here, the direction connecting the two discharge ports 17a matches the direction reference line. In the paste application operation, a direction adjusting operation for aligning the direction reference line with a predetermined direction in the application area 6a of the lead frame 6 is performed.

  That is, the motor 23A is controlled by the control unit 41 and the casing unit 31 is rotationally driven (arrow i) as shown in FIG. 5A, whereby the direction reference line of the discharge port 17a is applied to the application area 6a to be applied. Match the direction of application. 5B and 5C, the direction reference line (arrow g) shown in FIG. 4B is aligned with the application direction in the application area 6a, and the paste 7 is discharged from the discharge port 17a to the application area 6a. An example of application is shown. In the above configuration, the motor 23A, the drive gear 26A, and the driven gear 27A rotate the casing portion 31 provided to be rotatable about the axis AZ, thereby rotating the direction reference line in the arrangement of the plurality of discharge ports 17a to a desired rotation. The casing part rotational drive mechanism which positions to a position is comprised.

  When the casing 23 is rotated by driving the motor 23 </ b> A, the control unit 41 controls the motors 23 </ b> A and 23 </ b> B to simultaneously drive the motors 23 </ b> A and 23 </ b> B and synchronize the rotating member 32 with the casing 31. The rotating member 32 is prevented from rotating relative to the casing portion 31 (arrow j). Thereby, it is possible to prevent the paste 7 from being unnecessarily discharged in the rotating operation of the casing portion 31.

  When the pump mechanism 18 is operated in the paste applying operation described above, or in the casing portion rotating operation for adjusting the direction of the discharge port 17a, the syringe 16 also rotates integrally (see arrow k shown in FIG. 6). At this time, as shown in FIG. 6, the tube 19 that supplies air pressure into the syringe 16 is connected via the rotary joint 39, so that the tube 19 is in a fixed state even when the syringe 16 rotates. Therefore, the problem of bending of the tube which has occurred in the prior art in which the syringe is arranged in parallel with the discharge unit does not occur. In other words, the tube 19 does not bend as the syringe 16 rotates, so that the material of the tube 19 does not deteriorate. This deterioration causes the tube to break at an unexpected timing, causing paste leakage, etc. There is no problem that requires In addition, since the pump mechanism 18 and the syringe 16 are arranged coaxially, it is possible to reduce the space occupied by the paste application device.

  Next, with reference to FIG. 7, the relationship between the rotation direction when the mounting male screw portion 33a is screwed to the mounting female screw portion 16d and the rotation direction when the rotating member 32 discharges the paste will be described. As shown in FIG. 7A, in order to mount the syringe 16 on the syringe mounting plate 33, the mounting portion 16b is rotated in the clockwise direction (arrow l). In order to discharge the paste from the discharge port 17a, the rotating member 32 is rotated counterclockwise (arrow m). That is, in the present embodiment, the rotation direction of the rotating member 32 when discharging the paste is set to be opposite to the rotating direction when fastened by the screw fastening portion for attaching the syringe 16 to the rotating member 32.

  Thus, in the configuration in which the intermediate position of the syringe 16 is rotatably supported by the rotation support portion 28, the rotation support portion 28 cannot smoothly support the rotation of the syringe 16 for some reason such as the inclination of the mounting posture of the syringe 16. Even when the galling phenomenon occurs, the screw fastening portion for mounting the syringe 16 on the rotating member 32 does not loosen. That is, in such a case, only the rotating member 32 is rotationally driven in a state in which the rotation of the syringe 16 is obstructed, but the rotation (arrow m) of the rotating member 32 causes the mounting portion 16b in the screw fastening portion. It acts to rotate relative to the fastening direction (arrow l).

  As described above, when the syringe 16 is mounted on the syringe mounting plate 33, the lower surface 16f of the mounting female screw portion 16d is in contact with the upper surface 33c of the syringe mounting plate 33, and the upper limit of the screwing allowance is restricted. Therefore, the fastening state of the screw fastening portion is maintained in this state. Therefore, even if the rotation of the syringe 16 is inhibited, problems such as leakage of paste due to looseness of the screw fastening portion do not occur.

  Furthermore, in the said structure, the syringe 16 can be rotated by arbitrary rotation operation | movement patterns by controlling motor 23A, 23B by the control part 41. FIG. That is, it is possible to rotate only the syringe 16 without causing the pump mechanism 18 to function, and the rotation of the syringe 16 causes the paste 7 stored therein to rotate as the syringe 16 rotates due to viscosity. It can be made to flow in the direction. By adjusting the rotation pattern of the syringe 16 in the rotation of the paste 7, that is, reversal of the rotation direction and acceleration / deceleration, the viscosity of the paste 7 in the syringe 16 is adjusted prior to the discharge for applying the paste 7. It is possible to perform stirring and kneading operations for the purpose of various patterns.

  The paste coating apparatus of the present invention has an effect of eliminating the looseness of the screw fastening portion of the syringe and preventing the leakage of the paste, and is used for joining in the electronic equipment manufacturing field such as paste coating for die bonding. It is useful in the paste application field.

3 Semiconductor chip 6 Lead frame 6a Application area 7 Paste 9 Paste application part 10 Moving table 15 Paste application unit 16 Syringe 16d Mounting female screw part 16e Paste feed port 17 Application nozzle 17a Ejection port 18 Pump mechanism 19 Tube 23A, 23B Motor 26A, 26B Drive gear 27A, 27B Driven gear 28 Rotation support portion 31 Casing portion 31b Discharge space 32 Rotating member 32a Internal hole 32b Discharge screw portion 32c Paste outlet hole 33 Syringe mounting plate 33a Mounting male screw portion 39 Rotating joint

Claims (2)

A paste application device for applying a paste contained in a syringe to an application object,
A rotating member that is arranged with its axis aligned with the axis of the cylindrical syringe and that is coaxially disposed, and a paste feeding port provided at the lower end of the syringe is detachably connected via a screw fastening portion;
The rotary member is rotatably held around the axis, and a discharge space is formed in which a discharge screw portion provided at a lower portion of the rotary member is fitted, and the discharge screw portion is arranged around the axis in the discharge space. A casing part that forms a pump mechanism for pumping the paste by rotating; a discharge port provided in communication with the discharge space at an end of the casing part;
The rotary member penetrates in the axial direction, and is formed by communicating a paste outlet hole provided in the paste feeding port and the discharge screw portion, and feeds the paste from the syringe to the pump mechanism. Paste feeding path for,
Pneumatic pressure supply means for feeding the paste in the syringe to the pump mechanism via the paste feed path by supplying pneumatic pressure to the inside of the syringe while allowing rotation around the axis of the syringe. When,
A rotation driving mechanism for discharging that causes the pump mechanism to operate and discharge the supplied paste from the discharge port by rotating the rotating member in a predetermined direction relative to the casing portion;
The paste application apparatus, wherein a rotation direction of the rotating member when discharging the paste is set to be opposite to a rotation direction when the screw fastening portion is fastened.   The paste application device according to claim 1, further comprising a screwing restricting unit that restricts an upper limit of a screwing allowance in the screw fastening portion.

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