JP2013045777A - Work device for substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work device for a substrate with a non-contact power supply part which contributes to miniaturization and weight saving of the device at a low cost and has a stable power supply function while securing high power supply efficiency as compared to a conventional device.SOLUTION: A head drive mechanism for driving a work head includes: track restriction means (a guide rail 3); non-contact power supplying elements 61-63 installed in a row along the track restriction means 3; selection switches 81-83 which independently switch between conducting and nonconducting of the non-contact power supplying elements 61-63; a movable part 4 which holds the work head and is mounted on the track restriction means 3; a driving device which drives the movable part 4 along the track restriction means 3; a non-contact power receiving element 7 which is provided in the movable part 4, receives power from a part of the non-contact power supplying elements 61-63 and supplies the power to at least the work head or the driving device; and a power supply control part 9 which controls the selection switches 81-83 so as to electrically connect only to the non-contact power supplying element 62 which the non-contact power receiving element 7 approaches.

Description

  The present invention relates to a substrate working device such as a component mounting device or a substrate inspection device that performs a predetermined operation to produce a substrate on which a large number of components are mounted, and more specifically, to a work head held by a movable portion. The present invention relates to means for supplying power without contact.

  There are solder printing devices, component mounting devices, reflow devices, substrate inspection devices, etc. as substrate working devices that produce substrates with many components mounted, and these are connected by a substrate transport device to construct a substrate production line There are many cases. Of these, the component mounting apparatus generally includes a substrate transfer device that carries in and out a substrate, a component supply device that supplies components, and a component transfer device that includes a mounting head for mounting components and a head drive mechanism. is there. The head drive mechanism has, for example, a ball screw feed mechanism that is driven by a servo motor on each axis in order to drive the mounting head in the X-axis direction and the Y-axis direction orthogonal to each other in the horizontal plane. The mounting head has a suction nozzle that picks up and mounts parts by suction using negative pressure, and further includes a Z-axis direction drive mechanism that drives the suction nozzle up and down in the vertical Z-axis direction, and a suction nozzle centered on the Z-axis. Has an R-axis rotational drive mechanism for rotationally driving the motor.

  In order to supply electric power to various electrical components that generate and control negative pressure on the mounting head and to drive motors for the Z-axis and R-axis direction drive mechanisms, it is possible to deform between the fixed side and the movable part. They were connected with a power supply cable, or provided with a sliding energization section that could supply power while moving. In recent years, as a means for supplying power to the mounting head on the movable part side, a non-contact power feeding technique combining a non-contact power feeding element on the fixed side and a non-contact power receiving element on the movable part side has been proposed. By adopting the non-contact power feeding technology, there is no risk of metal fatigue or wear of the sliding current-carrying portion due to repeated deformation of the power feeding cable that tends to occur in the conventional technology, and reliability is improved. Further, the non-contact power feeding technique is also useful in a board inspection apparatus, and can feed power to an inspection camera that moves above the board and images a component mounting appearance. Patent Documents 1 and 2 disclose examples in which this kind of non-contact power feeding technology is incorporated in a substrate working device.

  The electronic component mounting apparatus disclosed in Patent Document 1 includes a non-contact power supply unit using electromagnetic induction of a coil on both opposing surfaces of the electronic component supply device and the mounting unit, and further includes a confirmation signal emitting unit and an incident unit on both sides. Department. With this configuration, it is possible to detect a mounting failure of the electronic component supply device depending on whether or not a confirmation signal is transmitted, and to reliably perform non-contact power supply. In Patent Document 1, the electronic component supply device is attached to and detached from the attachment portion, but the positional relationship is fixed, and the connection work and the separation work of the power supply terminals, which are conventionally required, become unnecessary.

  The electronic component supply device of Patent Document 2 filed by the applicant of the present application includes a plurality of component supply units including an electronic component supply cartridge and a moving body, and includes a power receiving unit provided in each of the moving bodies and a common power feeding unit. A contactless power feeding device. Furthermore, in the embodiment, as a specific configuration of the common power feeding unit, a primary winding disposed so as to cover the entire movement range of a plurality of moving bodies is illustrated. With this configuration, electric power can be supplied in a non-contact manner to each component supply unit moving from the primary winding.

  Further, Patent Document 3 discloses a transport device configured such that a moving body receives power from a power supply line laid along a track and travels along the track, and further, a power supply transformer is mounted on the moving body. Disclosed embodiments are disclosed. The feeder line is laid so as to cover the entire moving range of the moving body, and can supply power to the feeding transformer in a non-contact manner.

  A single power supply element such as a primary winding or a power supply line exemplified in Patent Documents 2 and 3 is magnetically coupled to a power receiving element on the moving body side to enable non-contact power supply. However, since the power feeding element is long and extends over the entire moving range of the moving body, a large amount of leakage magnetic flux is generated and power feeding efficiency is greatly reduced. The problem of a decrease in power supply efficiency also occurs in the case of non-contact power supply in which the power supply element and the power reception element are each composed of electrodes and are electric field coupled.

  In view of this, a technique has been proposed in which a large number of small power feeding elements are arranged along a fixed-side moving path, and only a part of the power feeding elements that are close to the moving body are energized. In this technique, it is necessary to detect the position of the moving body. For example, proximity sensors are arranged between the power feeding elements. Furthermore, it is necessary to independently control the energization of a large number of power feeding elements based on the position information. For example, a selection switch is provided for each power feeding element, and on / off control is performed from the control unit.

JP 2010-283257 A Japanese Patent Laid-Open No. 9-252193 JP 2004-217409 A

  By the way, in the non-contact power supply using the single long power supply element exemplified in Patent Documents 2 and 3, the power supply efficiency is greatly lowered as described above. On the other hand, in the non-contact power supply using a large number of small power supply elements, a large number of position detecting means are required, and the cost increases accordingly. Further, since a space for arranging a large number of position detection means on the fixed side is required, it is an obstacle to miniaturization and weight reduction. Furthermore, since the power supply function of the power supply element is not stable immediately after the start of power supply, the power supply function may become unstable if the start of power supply to the power supply element is delayed with respect to the approach of the moving body. Therefore, it is preferable to secure a certain amount of rising stabilization time for the power feeding element.

  The present invention has been made in view of the problems of the background art described above, and can contribute to downsizing and weight reduction of the apparatus at low cost, and has a stable power feeding function while ensuring high power feeding efficiency as compared with the prior art. It is an object to be solved to provide a substrate working apparatus including a non-contact power feeding unit.

  An invention of a substrate working apparatus according to claim 1 for solving the above-mentioned problems is a substrate working apparatus in which a work head driven by a head driving mechanism performs a predetermined work while facing a positioned substrate. The head drive mechanism includes a track limiting means extending in a moving direction, a plurality of non-contact power feeding elements arranged along the track limiting means, and a plurality of non-contact power feeding elements. A plurality of selection switches for independently switching energization, a movable part that holds the work head and is movably mounted on the trajectory limiting means, and a drive that moves the movable part along the trajectory limiting means A non-contact power receiving device that receives power at a distance from a device and a part of the plurality of non-contact power feeding elements provided in the movable portion and supplies power to at least the work head or the driving device. The plurality of selection switches are controlled so as to energize only a part of the non-contact power feeding elements to which the non-contact power receiving element is approaching based on the position of the movable unit on the track limiting means A power supply control unit.

  According to a second aspect of the present invention, in the first aspect, the movable unit includes a position detection unit that detects a position on the trajectory limiting unit, and the power supply control unit receives information on the position detected from the position detection unit. .

  According to a third aspect of the present invention, in the first aspect, the power supply control unit determines a position command value indicating a target position for moving the movable unit along the trajectory limiting unit and a speed when moving to the target position. At least one of the indicated speed command values is stored and output to the drive device, and the position of the movable part on the trajectory limiting means is estimated based on at least one of the position command value and the speed command value.

  The invention according to claim 4 is the contactless power receiving element according to any one of claims 1 to 3, wherein the power supply control unit is a noncontact power supply element among the plurality of noncontact power supply elements. Before the movable part reaches the position where the power supply to the power supply is to be started, the selection switch is turned on so as to energize the one non-contact power supply element.

  According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the driving device includes a plurality of stators arranged in line along the trajectory limiting means, and the movable portion. It is a linear motor comprised including the needle | mover driven with a part of electric power which the element for non-contact electric power reception received.

  In the substrate working device according to the first aspect of the present invention, it is possible to supply power to the non-contact power receiving elements of the movable part by energizing only some of the non-contact power feeding elements arranged along the track limiting means. . For this reason, the remaining many of the non-contact power feeding elements can be de-energized, and the power feeding efficiency is higher than the configuration using the single long power feeding element exemplified in Patent Documents 2 and 3. It can be secured.

  In the invention according to claim 2, the movable part has a position detection part for detecting a position on the trajectory limiting means, and the power feeding control part receives information on the position detected from the position detection part. Therefore, a large number of position detection means such as proximity sensors are not necessary, and the cost can be reduced accordingly. In addition, unlike a conventional proximity sensor, a large arrangement space is not required on the fixed side, which does not hinder downsizing and weight reduction of the substrate working device.

  In the invention according to claim 3, the power supply control unit also serves as a drive control unit for controlling the drive unit, and is on the trajectory limiting unit of the movable unit based on at least one of the position command value and the speed command value output to the drive unit. Estimate the position. Therefore, a large number of position detection means such as proximity sensors are not necessary, and the cost can be reduced accordingly. Further, since the position detecting means is unnecessary, it is possible to contribute to downsizing and weight reduction of the substrate working device.

  In the invention which concerns on Claim 4, before the movable part arrives at the position which wants to start the electric power feeding to the non-contact power receiving element by the non-contact power feeding element, the one non-contact power feeding element is energized. As a result, the one non-contact power supply element is energized before the start of power supply, can ensure the rising stabilization time, and the power supply function is stabilized.

  In the invention according to claim 5, the driving device is driven by a plurality of stators arranged in line along the trajectory limiting means, and a part of the electric power provided in the movable part and received by the non-contact power receiving element. The linear motor is configured to include a mover. That is, in addition to the power supply to the work head, the power supply to the linear motor can also be performed by the same non-contact power supply element and non-contact power reception element. In addition, the position of the movable part can be estimated from the information related to the drive control of the linear motor, and the position detecting means can be eliminated. As a result, it is possible to reduce the number of components and contribute to cost reduction, size reduction, and weight reduction of the substrate working device.

It is a perspective view showing the whole component mounting device (working device for substrates) of a 1st embodiment. It is a perspective view explaining an XY axis head drive mechanism in detail. It is a figure explaining the Y-axis direction drive function and non-contact electric power feeding function of the component mounting apparatus of 1st Embodiment. It is a figure explaining the processing flow of the non-contact electric power feeding control which the switch selection calculating part of a servo controller (electric power feeding control part) performs. It is a figure of the flowchart explaining the processing flow of non-contact electric power feeding control which a switch selection calculating part performs in 2nd Embodiment. It is a figure explaining the non-contact electric power feeding function of the component mounting apparatus of a conventional structure.

  A component mounting apparatus 1 according to a first embodiment corresponding to the substrate working apparatus of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing the overall configuration of the component mounting apparatus 1 of the first embodiment. As shown in the figure, the component mounting apparatus 1 is configured by arranging two sets of the same apparatus adjacent to each other. Hereinafter, one set will be described. The component mounting apparatus 1 is configured by assembling a substrate transport device 12, a component supply device 13, a component transfer device 14, a component camera 15, a control computer 16, and the like on a base 11. As shown by the XYZ coordinate axes in the upper right of FIG. 1, the horizontal width direction of the component mounting machine 1 (the direction from the upper left to the lower right in FIG. 1) is the X axis direction, and the horizontal longitudinal direction of the component mounting machine 1 (FIG. 1). The direction from the upper right to the lower left of the drawing) is the Y-axis direction, and the vertical height direction is the Z-axis direction.

  The board conveying device 12 is provided around the middle in the longitudinal direction of the component mounting machine 1. The substrate transfer device 12 is a so-called double conveyor type device in which the first transfer device 121 and the second transfer device 125 are arranged in parallel, and the two substrates K are operated in parallel to carry in and position in the X-axis direction. Take it out. The first transport device 121 is a pair of guide rails 122 and 123 that are arranged in parallel on the base 11 in parallel with the X-axis direction, and a pair of guide rails 122 and 123 that are guided by the guide rails 122 and 123, respectively, to transport the substrate K. Conveyor belt (not shown) or the like. Further, the first transport device 121 is provided with a clamp device (not shown) that pushes up and positions the substrate K transported to the component mounting position from the base 11 side. The second transport device 125 is configured in the same manner as the first transport device 121.

  The component supply device 13 is a feeder-type device, and is provided at the front portion in the longitudinal direction of the component mounter 1 (the left front side in FIG. 1). The component supply device 13 is configured by arranging a plurality of cassette type feeders 131 in parallel on the base 11. Each cassette type feeder 131 includes a main body 132 that is detachably attached to the base 11, a supply reel 133 that is rotatably and detachably attached to a rear portion of the main body 132 (front side of the component mounting apparatus 1), and a main body 132. And a component supply unit 134 provided at the front end (near the center of the component mounting apparatus 1). The supply reel 133 is a medium for supplying parts, and is wound with a carrier tape (not shown) holding a predetermined number of parts at regular intervals. The leading end of the carrier tape is pulled out to the component supply unit 134, and different components are supplied for each carrier tape.

  The component transfer device 14 is a so-called XY robot type device that can move in the X-axis direction and the Y-axis direction, and supplies components from the rear part (right rear side in FIG. 1) in the longitudinal direction of the component mounting machine 1 to the front part. It is arranged above the device 13. The component transfer device 14 includes an XY axis head drive mechanism 2 (mostly hidden in FIG. 1), a mounting head 17 and the like. The XY axis head drive mechanism 2 drives the mounting head 17 in the X axis direction and the Y axis direction.

  The mounting head 17 corresponds to the working head of the present invention driven by the XY-axis head driving mechanism 2, and has a suction nozzle 18 that picks up and mounts parts by using negative pressure. The mounting head 17 further includes a Z-axis direction drive mechanism that drives the suction nozzle 18 up and down in the vertical Z-axis direction, and an R-axis rotation drive mechanism that rotationally drives the suction nozzle 18 around the Z axis. The mounting head 17 has various electrical components that generate and control negative pressure, and each has a drive motor in the Z-axis direction drive mechanism and the R-axis rotation drive mechanism. Further, the mounting head 17 has a substrate camera (not shown) that images the positioned substrate K. Various electrical components, drive motors, and board cameras are driven by DC power.

  The component camera 15 is a device that determines the component suction state of the suction nozzle 18 of the component transfer device 14 and the quality of the component, and is disposed on the base 11 near the component supply unit 134 of the component supply device 13. . The control computer 16 is disposed on the upper front side of the upper cover 19. The control computer 16 is linked to the substrate transfer device 12, the component supply device 13, the component transfer device 14, and the component camera 15 by an information transmission line, and issues a command while appropriately exchanging information.

  FIG. 2 is a perspective view for explaining the XY-axis head driving mechanism 2 in detail, and is a view seen from a direction different by about 90 ° with the cover 19 of FIG. 1 removed. Of the XY-axis head drive mechanisms 2, the drive mechanism in the Y-axis direction corresponds to the head drive mechanism of the present invention, and any type of drive mechanism can be used as the drive mechanism in the X-axis direction. The XY-axis head drive mechanism 2 includes a Y-axis guide rail 3, a movable part 4, a linear motor 5, a plurality of non-contact power feeding elements 6, which are hidden in FIG. 2 and numbered in FIG. The device 7 includes a plurality of selection switches 81 to 83, a servo controller 9, and the like.

  The Y-axis guide rail 3 corresponds to the track limiting means of the present invention, and is stretched from the upper rear side of the base 11 toward the horizontal front. The Y-axis guide rail 3 extends in the Y-axis direction, which is the moving direction, and is disposed above the substrate transport device 12 and above the component supply device 13. The Y-axis guide rail 3 has two side portions 31 and 32 and a bottom portion 33 formed integrally, and the cross-sectional shape is a U-shape that opens upward. In FIG. 2, one side portion 31 is omitted on the rear side from the middle. An auxiliary rail 34 is disposed in parallel to the side of the other side surface portion 32.

  The movable part 4 is mounted above the Y-axis guide rail 3 and the auxiliary rail 34 so as to be movable in the Y-axis direction. The movable part 4 has an engaging part 48 protruding downward from the bottom part, and the engaging part 48 is engaged between the two side parts 31, 32 of the Y-axis guide rail 3. Thereby, the movable part 4 is guided in the Y-axis direction without sliding off from the Y-axis guide rail 3. Further, the movable part 4 is provided with an encoder part 49 (see FIG. 3) for detecting a position on the Y-axis guide rail 3. The encoder unit 49 corresponds to a position detection unit of the present invention, and detects a position (Y coordinate value) in the Y-axis direction with reference to a linear scale (not shown) arranged on the Y-axis guide rail 3. The position information Ye is output.

  The movable unit 4 holds the mounting head 17 via the X-axis guide rail 41. The X-axis guide rail 41 is a member that is assembled to the movable portion 4 and moves integrally in the Y-axis direction, and extends in the X-axis direction (right direction in FIG. 2). A pair of upper and lower head moving rails 42 and 43 are stretched in parallel with the X-axis direction on the upper and lower portions of the X-axis guide rail 41. A feeding rail 44 is stretched adjacent to and parallel to the upper head moving rail 42. Further, on the X-axis guide rail 41, a ball screw 45 rotatably supported at both ends thereof and an X-axis servo motor 46 that rotationally drives one end of the ball screw 45 are provided.

  On the other hand, the mounting head 17 has engaging portions 171 and 172 that engage with the moving rails 42 and 43, respectively, so as to be movable in the X-axis direction. Further, the mounting head 17 is provided with a nut (hidden in FIG. 2) that is screwed into the ball screw 45. The nut, the ball screw 45 on the X-axis guide rail 41 side, and the X-axis servo motor 46 constitute a ball screw feeding mechanism, and the mounting head 17 is driven in the X-axis direction. Further, the mounting head 17 has a sliding power receiving terminal 173 that slides on the power supply rail 44 and receives DC power. In FIG. 2, the suction nozzle 18 is temporarily removed.

  The linear motor 5 corresponds to the driving device of the present invention, and is received by the non-contact power receiving element 7 provided on the movable portion 4 and a plurality of stators 51 arranged in a row on the fixed Y-axis guide rail 3. And a mover 52 that is driven by a part of the electric power. The stator 51 is a permanent magnet in which N poles and S poles are alternately arranged on the inner sides of the two side surfaces 31 and 32 of the Y-axis guide rail 3 facing each other. FIG. 2 illustrates only one stator 51, and actually a large number of stators 51 are arranged at equal intervals.

  On the other hand, nine pairs of movers 52 are arranged in a row on the side surface of the engaging portion 48 at the bottom of the movable portion 4 so as to face the stator 51. The mover 52 is an exciting coil that is excited by electric power to generate a magnetic field. The magnetic field generated by the mover 52 changes depending on the position and time, and a propulsive force for moving the movable part 4 is generated by the action of the stationary magnetic field generated by the stator. The size of the stator 51, the magnetic field strength, the arrangement pitch, the number of the movers 52, the electrical performance, and the like can be appropriately designed according to the driving force required for the linear motor 5. In addition, compared with the case where the permanent magnet is provided in the movable part 4 and the exciting coil is arranged in the fixed side, this embodiment has the merit and large propulsive force that can limit the number of exciting coils more complicated than the permanent magnet. There are easy merits.

  The plurality of non-contact power feeding elements 6 are arranged on the upper surface of the bottom 33 of the Y-axis guide rail 3 along the Y-axis direction. On the other hand, the non-contact power receiving element 7 (see FIG. 3) is provided on the bottom surface of the engaging portion 48 of the movable portion 4 so as to face down and face one of the non-contact power feeding elements 6. Yes. The quantity and size of the non-contact power receiving element 7 are not particularly limited. The non-contact power feeding element 6 and the non-contact power receiving element 7 constitute a non-contact power feeding section so that the movable section 4 can be fed from the fixed side. Either a magnetic field coupling or an electric field coupling may be used as a coupling method of the non-contact power feeding unit. The contactless power feeding element 6 and the contactless power receiving element 7 are each a coil in the case of magnetic field coupling and an electrode in the case of electric field coupling. The plurality of non-contact power supply elements 6 can be switched between energization and non-energization independently by a plurality of selection switches 81 to 83 (see FIG. 3) in the power supply switch 89 which is omitted in FIG. It is configured.

  FIG. 3 is a diagram illustrating the Y-axis direction driving function and the non-contact power feeding function of the component mounting apparatus 1 according to the first embodiment. FIG. 3 illustrates three of the plurality of non-contact power feeding elements 6 arranged in the Y-axis direction 61, 62, 63, and the flow of power is indicated by solid arrows, Information and control flows are indicated by dashed arrows.

  First, details of the configuration will be described. As shown in FIG. 3, an AC power supply 88 and a plurality of selection switches 81, 82, 83 are provided in the power supply switching device 89. The AC power supply 88 outputs an AC voltage having a predetermined frequency at which the power supply efficiency from the contactless power supply elements 61, 62, 63 to the contactless power receiving element 7 is good. The selection switches 81, 82, 83 are provided in the same number as the non-contact power feeding elements 61, 62, 63, and the on / off control is independently performed between the AC power supply 88 and each of the non-contact power feeding elements 61, 62, 63. To be connected.

  On the other hand, the movable part 4 is provided with an AC-DC converter 4A, and a contactless power receiving element 7 is connected to the input side thereof. The AC-DC converter 4A has a function of converting AC power received by the non-contact power receiving element 7 into DC power. The DC power output from the AC-DC converter 4A is branched into four systems and supplied with power as shown. In the first system, DC power is supplied to the mounting head 17 via the power supply rail 44, and various electrical components, a driving motor, and a substrate camera on the mounting head 17 are driven. In the second system, DC power is supplied to various control boards 4B arranged on the movable part 4, and detection and calculation of the position of the mounting head 17 in the X-axis direction and driving of the X-axis servo motor 46 are performed. Done.

  In the third system, DC power is supplied to a linear controller 4C including a linear controller 4D and a power amplifier 4E. The linear controller 4D receives the encoder position information Ye from the encoder unit 49 and also receives at least one of the speed command value Vr and the position command value Yr from the servo controller 9. Then, the linear controller 4D creates a control signal that satisfies the command and sends it to the power amplifier 4E. Based on the control signal, the power amplifier 4 </ b> E converts the DC power into power that is supplied to the mover 52 (excitation coil) and outputs the power to the mover 52. In the fourth system, DC power is supplied to the encoder unit 49. The encoder unit 49 sends the encoder position information Ye to the linear controller 4D and the servo controller 9.

  The servo controller 9 corresponds to the power supply control unit of the present invention, and is configured by an electronic control device that incorporates a microcomputer and operates by software. The servo controller 9 has a non-contact power feeding control function, and only a part of the non-contact power feeding elements to which the non-contact power receiving element 7 is approaching based on the position of the movable part 4 on the Y-axis guide rail 3. The plurality of selection switches 81 to 83 are controlled so as to be energized. The servo controller 9 also serves as a drive control unit in the Y-axis direction, and drives the movable unit 4 by controlling the linear motor 5.

  Next, the Y-axis direction drive control function of the servo controller 9 will be described in detail. The servo controller 9 calculates at least one of the moving speed or the position of the movable portion 4 based on the received encoder position information Ye and a command from the control computer 16. Then, the servo controller 9 commands at least one of the speed command value Vr and the position command value Yr to the linear controller 4D.

  Here, the encoder position information Ye, the speed command value Vr, and the position command value Yr are information transferred between the movable portion 4 and the fixed side, and are remotely transmitted by a wireless optical communication device (not shown) in the first embodiment. To do. The information transmission means is not limited to this, and radio wave communication may be used, or wired communication may be used.

  Next, the non-contact power feeding control function of the servo controller 9 will be described in detail. The servo controller 9 includes a switch selection calculation unit 91. FIG. 4 is a flowchart illustrating a processing flow of contactless power feeding control performed by the switch selection calculation unit 91 of the servo controller 9. In step S1, the switch selection calculation unit 91 reads the position (Y coordinate value) Yi (i = 1 to n) of each contactless power feeding element 6i previously stored as data in the memory. Here, the subscript i is a number indicating the order of the non-contact power feeding elements 6i arranged in a row, and n indicates the total number of elements. Next, in step S2, the encoder position information Ye is obtained, and based on this, the current position Ynow of the non-contact power receiving element 7 of the movable part 4 is obtained. The encoder position information Ye is originally information for drive control, but if the current position Ynow of the non-contact power receiving element 7 is accurately indicated, the encoder position information Ye is equal (Ynow = Ye). Even if it is not shown accurately, the current position Ynow of the non-contact power receiving element 7 can be accurately obtained by performing a predetermined correction on the encoder position information Ye.

  Next, in step S3, the distance between the current position Ynow and the position Yi of each contactless power supply element 6i is compared with a predetermined distance D, and the number i of the contactless power supply element 6i that is equal to or less than the predetermined distance D is obtained. . The predetermined distance D can be appropriately set based on the size of the contactless power feeding element 6i and the contactless power receiving element 7 and the like. For example, when the predetermined distance D = (D0 / 2) is set as the distance D0 between the centers of adjacent non-contact power supply elements 6i, one non-contact power supply element 6i can be obtained almost always. If the predetermined distance D = D0, the two contactless power supply elements 6i can be obtained almost always. Furthermore, without setting the predetermined distance D, the only contactless power supply element 6i closest to the contactless power receiving element 7 may be obtained.

  Next, in step S4, the selection switch 8i corresponding to the i-th that satisfies the condition is turned on. Further, if there is any other selection switch that is in the on state, the off control is performed. As a result, one cycle of the power supply control is completed, and the process returns to step S2 to repeatedly control based on the new current position Ynow.

  With this non-contact power supply control, in the example of FIG. 3, only one selection switch 82 is turned on, an alternating current is supplied to the corresponding non-contact power supply element 62, and the other selection switches 81 and 83 are turned off. Has been. Then, the non-contact power receiving element 7 of the movable portion 4 is just spaced apart from the non-contact power feeding element 62, and non-contact power feeding is performed as indicated by the white arrow S in the figure to feed the movable portion 4. it can.

  Next, the effect of the component mounting apparatus 1 according to the first embodiment will be described in comparison with the conventional configuration. FIG. 6 is a diagram for explaining a non-contact power feeding function of a component mounting apparatus having a conventional configuration. As shown in the figure, in the conventional configuration, the proximity sensor 6X (shown with hatching for convenience) is disposed between the plurality of non-contact power feeding elements 60 on the Y-axis guide rail 30 to move the movable part 40. Is detected, and a detection signal is sent to the switch selection calculation unit 92. The switch selection calculation unit 92 performs on / off control of the plurality of selection switches 80 based on the detection signal. The driving device that drives the movable unit 40 in the Y-axis direction is provided separately from the non-contact power feeding unit.

  On the other hand, the component mounting apparatus 1 according to the first embodiment has the encoder unit 49 in the movable unit 4, and the power supply control unit 91 receives the encoder position information Ye from the encoder unit 49. Therefore, many proximity sensors 6X become unnecessary and the cost can be reduced. Further, the linear scale for position detection arranged on the Y-axis guide rail 30 is simple, and unlike the conventional proximity sensor 6X, a large arrangement space is unnecessary and lightweight. Furthermore, in addition to power feeding to the mounting head 17, power feeding to the mover 52 of the linear motor 5 can be performed by the same non-contact power feeding elements 61 to 63 and the non-contact power receiving element 7. Further, the position of the movable portion 4 can be estimated from the encoder position information Ye related to the drive control of the linear motor 5, and the conventional proximity sensor 6X can be eliminated. As a result, the number of parts can be reduced and the cost of the board working apparatus 1 can be reduced, and the size and weight can be reduced.

  Further, only a part of the plurality of contactless power supply elements 61 to 63 can be energized, and the remaining majority can be deenergized, and a single long power supply element exemplified in Patent Documents 2 and 3 High power supply efficiency can be ensured as compared with the configuration using.

  Next, the second embodiment in which the rise stabilization time of the non-contact power supply element is secured will be described mainly with respect to differences from the first embodiment. In the second embodiment, the configuration of the component mounting apparatus 1 is the same as that of the first embodiment shown in FIGS. 1 to 3, and the processing flow regarding the non-contact power supply control of the switch selection calculation unit 91 is different. In the second embodiment, before the movable part 4 reaches the position where the power supply to the non-contact power receiving element 7 by the single non-contact power supply element is to be started, the single non-contact power supply element is energized. The selection switch is turned on. That is, energization of the non-contact power feeding element is started prior to the start of power feeding by the rising stabilization time T1. FIG. 5 is a flowchart illustrating a processing flow of contactless power feeding control performed by the switch selection calculation unit 91 in the second embodiment.

In step S11, the switch selection calculation unit 91 reads the position (Y coordinate value) Yi (i = 1 to n) of each contactless power feeding element 6i previously stored as data in the memory. Next, in step S12, the encoder position information Ye is acquired, and based on this, the current position Ynow of the non-contact power receiving element 7 of the movable portion 4 is obtained. Further, in step S13, the expected position Ynext of the contactless power receiving element 7 of the movable part 4, that is, the expected position Ynext of the movable part 4 after the rise stabilization time T1 of the contactless power feeding elements 61 to 63 has elapsed is estimated. . For example, when the speed command value Vr is used in the drive control of the linear motor 5, the predicted position Ynext can be obtained by the following equation.
Expected position Ynext = Ynow + Vr × T1

  Next, in step S14, the distance between the current position Ynow and the position Yi of each contactless power supply element 6i is compared with a predetermined distance D, and the number i of the contactless power supply element 6i that is equal to or less than the predetermined distance D is obtained. . Further, the distance between the predicted position Ynext and the position Yi of each contactless power supply element 6i is compared with a predetermined distance E, and the number i of the contactless power supply element 6i that is equal to or less than the predetermined distance E is obtained. The predetermined distance E can be appropriately set in consideration of a margin for variations in the rising stabilization time T1. The numbers i obtained under the two conditions do not need to match.

  In step S15, the selection switch 8i corresponding to the range from the minimum value to the maximum value of the number i that satisfies the condition is turned on. Further, if there is any other selection switch that is in the on state, the off control is performed. The number of selection switches 8 i that are on-controlled can increase in relation to the moving speed of the movable portion 4. For example, when the movable part 4 is substantially stopped, one selection switch 8i that energizes the non-contact power feeding element 6i that is close to the current position Ynow is turned on. If the moving speed of the movable part 4 exceeds a certain speed, two selections are made so that the non-contact power supply element 6 (i + 1) on the traveling direction side is energized in addition to the non-contact power supply element 6i at the current position Ynow. The switches 8i and 8 (i + 1) are turned on. Furthermore, depending on the relationship between the rise stabilization time T1 of the contactless power feeding element 6i and the maximum moving speed of the movable portion 4, three or more selection switches may be controlled to be turned on. In step S15, one cycle of the power supply control is completed, and the process returns to step S12 to repeatedly control based on the new current position Ynow and the new predicted position Ynext.

  In short, by this non-contact power supply control, only the non-contact power supply element 6i in the range from the current position Ynow to the expected position Ynext is energized. Therefore, the non-contact power supply element in the vicinity of the expected position Ynext is energized before the start of power supply, can ensure the rising stabilization time T1, and the power supply function is stabilized.

  In addition, the linear motor 5 and the encoder part 49 of 1st and 2nd embodiment are not essential, and can be substituted elsewhere. For example, a ball screw feed mechanism can be used as a drive device that drives the movable portion 4. Specifically, a ball screw is disposed so as to be rotatable along the Y-axis guide rail 3, one end of the ball screw is rotationally driven by a Y-axis servo motor, and a nut that meshes with the ball screw is fixed to the movable portion 4. To do. At this time, the servo controller 9 outputs the rotation amount command value and the rotation speed command value to the Y-axis servo motor as an alternative to the position command value and the speed command value. Therefore, the switch selection calculation unit 91 can estimate the position of the movable unit 4 on the guide rail 3 based on at least one of the rotation amount command value and the rotation speed command value, and the encoder unit 49 is not necessary.

  In addition, the reason why the present invention is implemented in the Y-axis direction in the first and second embodiments and the conventional technique is used in the X-axis direction is that the movement amount, movement speed, and acceleration in the Y-axis direction are large. It depends on the effect becoming remarkable. Therefore, the present invention can be implemented also in the X-axis direction, and power can be supplied to the mounting head 17 via the double non-contact power supply unit.

  Furthermore, the present invention can also be implemented by a board working apparatus other than the component mounting apparatus 1, such as a board inspection apparatus. Various other applications and modifications are possible for the present invention.

1: Component mounting equipment (working equipment for substrates)
11: Base 12: Board transfer device 13: Component supply device
14: Component transfer device 15: Component camera 16: Control computer
17: Mounting head (working head) 18: Suction nozzle 19: Cover 2: XY axis head drive mechanism 3: Y axis guide rail (track limiting means)
31, 32: Side part 33: Bottom part 34: Auxiliary rail 4, 40: Movable part
41: X-axis guide rail 42, 43: Head moving rail
44: Feed rail 45: Ball screw 46: X-axis servo motor
48: Engagement part 49: Encoder part (position detection part)
4A: AC-DC converter 4B: Various control boards 4C: Linear control unit
4D: Linear controller 4E: Power amplifier 4E
5: Linear motor 51: Stator (permanent magnet) 52: Mover (excitation coil)
6, 60, 61 to 63: contactless power supply element 6X: proximity sensor 7: contactless power receiving element 81 to 83: selection switch 88: AC power supply 89: power supply switch 9: servo controller (power supply control unit) 91, 92 switch selection calculation unit Ye: encoder position information Vr: speed command value Yr: position command value Ynow: current position of the movable part Ynext: expected position of the movable part Yi: position of the contactless power feeding element

Claims (5)

A work apparatus for a substrate, in which a work head driven by a head drive mechanism performs a predetermined operation facing a positioned substrate,
The head drive mechanism is
Trajectory limiting means extending in the direction of travel;
A plurality of contactless power feeding elements arranged along the track limiting means;
A plurality of selection switches for independently switching energization and non-energization of each of the plurality of non-contact power feeding elements;
A movable part that holds the working head and is movably mounted on the track limiting means;
A drive device for moving the movable part along the trajectory limiting means;
A non-contact power receiving element that is provided in the movable portion and receives power while being opposed to a part of the plurality of non-contact power feeding elements, and feeds power to at least the working head or the driving device;
A power supply control unit that controls the plurality of selection switches so as to energize only some of the non-contact power supply elements that are close to the non-contact power reception element based on the position of the movable unit on the track limiting unit. A substrate working apparatus comprising:   The substrate working apparatus according to claim 1, wherein the movable unit includes a position detection unit that detects a position on the trajectory limiting unit, and the power supply control unit receives position information detected from the position detection unit. In claim 1, the power supply control unit,
At least one of a position command value indicating a target position for moving the movable part along the trajectory limiting means and a speed command value indicating a speed when moving to the target position is stored and output to the driving device. ,
A substrate working device that estimates a position of the movable portion on the trajectory limiting means based on at least one of the position command value and the speed command value. In any one of Claims 1-3,
The power supply control unit is configured such that the one of the plurality of non-contact power supply elements before the movable part reaches a position where power supply to the non-contact power reception element by one non-contact power supply element is desired. A substrate working device that turns on the selection switch so that a non-contact power supply element is energized. In any one of Claims 1-4,
The drive device includes a plurality of stators arranged along the track limiting means, and a mover provided on the movable part and driven by a part of the electric power received by the non-contact power receiving element. A substrate working device which is a linear motor including the substrate.

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