CN102958344A - Working device for substrate - Google Patents
Working device for substrate Download PDFInfo
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- CN102958344A CN102958344A CN2012102954509A CN201210295450A CN102958344A CN 102958344 A CN102958344 A CN 102958344A CN 2012102954509 A CN2012102954509 A CN 2012102954509A CN 201210295450 A CN201210295450 A CN 201210295450A CN 102958344 A CN102958344 A CN 102958344A
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Abstract
The present invention relates to a working device for a substrate, and the device is low in costs, miniature and light and is provided with a non-contact power supply part for providing stable power supply function and ensuring high power supply efficiency compared with the prior art. A head driving mechanism for driving a working head comprises a track limiting mechanism; non-contact power supply components arranged along the track limiting mechanism; selection switches for independently switching electricity of each non-contact power supply component; a movable part use for maintaining the working head and arranged on the track limiting mechanism; a drive device for enabling the movable part to move along the track limiting mechanism; a non-contact power receiving component arranged on the movable part and used for receiving power from one part of the non-contact power supply component and at least supplying power for the working head or the driving device; and a power supply control part for controlling the selection switch.
Description
Technical field
The present invention relates to carry out in order to produce the substrate that a plurality of elements are installed the substrate apparatus for work such as the element fixing apparatus of regulation operation and base board checking device, more particularly, relate to by the mechanism of cordless to the operation head power supply that remains in movable part.
Background technology
The substrate apparatus for work of the substrate of a plurality of elements is installed as production, solder printing device, element fixing apparatus, reflux and base board checking device etc. are arranged, and are to utilize substrate transfer apparatus that these devices are coupled together and be built into the substrate production line mostly.Wherein, element fixing apparatus generally possess to substrate move into the substrate transfer apparatus of taking out of, feed element component supplying apparatus, have the mounting head of installation elements and the component moving and loading device of a driving mechanism.Driving mechanism for example has the ball-screw feed mechanism that utilizes servo motor to drive at each axle for X-direction and Y direction drive installation head along quadrature in horizontal plane.Mounting head has the negative pressure utilized and element is adsorbed the suction nozzle that picks up and install, and, have on vertical Z-direction suction nozzle is carried out the Z-direction driving mechanism that lifting drives and the R axle rotary drive mechanism that suction nozzle is rotated driving centered by Z axis.
For the supply capabilities such as CD-ROM drive motor to various Denso spares, Z axis and the R direction of principal axis driving mechanism of the generation of carrying out negative pressure in mounting head and control, in the past, utilize deformable power supply to be connected between fixation side and the movable part side with cable, or the slip conducting parts that can power in mobile is set.In recent years, as the means to the mounting head supply capability of movable part side, the non-contact power that has proposed the combination fixation side is subjected to the non-contact power technology of electricity usefulness element with the noncontact of element and movable part side.By adopting the non-contact power technology, can eliminate the possibility of the metal fatigue that is caused with the repeated deformation of cable by power supply that produces easily in the prior art or the wearing and tearing of slip conducting parts etc., thus the raising reliability.In addition, the non-contact power technology is useful too to base board checking device, can power to inspection camera mobile above substrate and capturing element installation outward appearance.Patent documentation 1 and patent documentation 2 disclose uses substrate with the example in the apparatus for work with this non-contact power technology.
The electronic element installation device of patent documentation 1 possesses the non-contact power supply supply unit that has utilized the electromagnetic induction of coil at electronic component supply device and these both sides' of installation portion forward surface, also possesses injection part and the incident section confirmed with signal on electronic component supply device and these both sides of installation portion.In this structure, can confirm to come the installation of detected electrons component supplying apparatus bad with signal according to whether having transmitted, can carry out effectively non-contact power supply and supply with.In patent documentation 1, though electronic component supply device can load and unload with respect to installation portion, position relationship is fixed, and does not need in the past necessary power supply connection operation and the detached job of terminal.
The electronic component supply device of the patent documentation 2 that the application's applicant applies for possesses a plurality of component feeding unit that comprise electronic component feed cassette and moving body, comprises the non-contact power supply that is made of the power receiving section that is arranged at each moving body and shared power supply.And, in execution mode, as the concrete structure of the power supply that shares, example with a winding of striding and the mode of the whole moving range of a plurality of moving bodys disposes.By this structure, can be by cordless from a winding to each mobile component feeding unit supply capability.
In addition, disclose following Handling device in the patent documentation 3, its moving body is from receiving electric power along the supply lines of track laying and travel at this track, and, the mode of having carried supply transformer at moving body is also disclosed.Supply lines can be by cordless to the supply transformer supply capability to stride and the mode of the whole moving range of moving body is laid.
The power supply that patent documentation 2 and 3 exemplified windings or supply lines etc. are single can be carried out magnetic Field Coupling and be carried out non-contact power with element with the electricity that is subjected on mobile side with element.But power supply is to stride and the length of the whole moving range of moving body and therefore large element, can produce more leakage flux with element, and power supplying efficiency declines to a great extent.In power supply with element and consisted of by electrode respectively with element by electricity and can produce equally the problem that power supplying efficiency descends when carrying out the non-contact power of mode of field coupled.
Therefore, the technology of switching on element with element and the part power supply that only moving body approached along a plurality of small-sized power supplies of the mobile route spread configuration of fixation side has been proposed.In this technology, need to detect the position of moving body, for example, between each power supply is with element, dispose respectively proximity transducer.And, need to carry out independent control to a plurality of power supplies with the energising of element according to positional information, for example, with element selector switch is set in each power supply respectively, and carries out break-make control by control part.
Patent documentation 1: TOHKEMY 2010-283257 communique
Patent documentation 2: Japanese kokai publication hei 9-252193 communique
Patent documentation 3: TOHKEMY 2004-217409 communique
Yet the power supply large using patent documentation 2 and 3 illustrated single length is with in the non-contact power of element, and as mentioned above, power supplying efficiency declines to a great extent.On the other hand, using a plurality of small-sized power supplies with in the non-contact power of element, need a plurality of position detecting mechanisms, cost can correspondingly increase.In addition, in fixation side the space that disposes a plurality of position detecting mechanisms need to be arranged, therefore, hinder miniaturization and lightweight.And power supply is unstable with element function of supplying power after just beginning energising, and therefore, when occuring to postpone with respect to approaching of moving body and to the time that power supply begins to switch on element, function of supplying power might be unstable.Therefore, preferably can guarantee to a certain degree rising stabilizing take for power supply with element.
Summary of the invention
The present invention in view of the aforementioned technical background problem and propose, therefore, its problem is to provide a kind of base board operation device, it is with low cost, miniaturization and lightweight that can implement device, and possess the non-contact power section that guarantees higher power supplying efficiency and have stable function of supplying power compared with the past.
The substrate that the technical scheme 1 that addresses the above problem relates to carries out the regulation operation with in the apparatus for work opposite to each other by the operation head of a driving mechanism driving and the substrate behind the location, and wherein, described driving mechanism comprises: track limits mechanism, extends along moving direction; A plurality of non-contact power elements limit mechanism's spread configuration along described track; A plurality of selector switches switch with element energising and non-energising separately described a plurality of non-contact powers independently; Movable part keeps described operation head and is set up in described track in the mode that can move limiting mechanism; Drive unit makes described movable part limit mechanism along described track and moves; Noncontact is subjected to electricity to use element, is arranged at described movable part, and be separated with distance ground with a part of non-contact power in the element with element with described a plurality of non-contact powers and receive in opposite directions electric power, and at least to described operation head or the power supply of described drive unit; And power supply control section, control described a plurality of selector switch based on described movable part in the position that described track limits in the mechanism, so that only switched on element with a part of non-contact power that element approaches by electricity to described noncontact.
The invention that technical scheme 2 relates to, on the basis of technical scheme 1, described movable part has and detects described movable part and limit the position detection part of the position in the mechanism at described track, and described power supply control section receives the information by the detected position of described position detection part.
The invention that technical scheme 3 relates to, on the basis of technical scheme 1, at least one command value in the speed value of the speed when the storage expression of described power supply control section makes described movable part limit the position command value of the target location that mechanism moves and expression and move to described target location along described track, and to described drive unit output; And, infer described movable part based at least one command value in described position command value and the described speed value and limit position in the mechanism at described track.
The invention that technical scheme 4 relates to, in technical scheme 1～3 on each the basis, described power supply control section connects control to described selector switch, to begin to utilize described a plurality of non-contact power described noncontact to be subjected to element with a non-contact power in the element to switch on element to a described non-contact power before the electric position that powers with element so that arrive at described movable part.
The invention that technical scheme 5 relates to, on each the basis, described drive unit is linear motor in technical scheme 1～4, this linear motor comprises: a plurality of stators that limit mechanism's spread configuration along described track; With the movable piece that is arranged at described movable part and utilizes a part of electric power of received with element by electricity by described noncontact to drive.
The invention effect
, can be only a plurality of non-contact powers of limiting mechanism's spread configuration along track be subjected to electricly to power with element to the noncontact of movable part with the energising of the part in the element with in the invention of apparatus for work at substrate that technical scheme 1 relates to.Therefore, can non-contact power not switched on element with the remaining a plurality of non-contact powers in the element, and used patent documentation 2 and 3 exemplified single length and large power supply is compared with the structure of element, can guarantee higher power supplying efficiency.
In the invention that technical scheme 2 relates to, movable part has the position detection part that detects the position of this movable part in track restriction mechanism, and power supply control section receives the information by the detected position of position detection part.Therefore, do not need a plurality of position detecting mechanisms such as proximity transducer, can correspondingly reduce cost.In addition, different from proximity transducer in the past, do not need larger configuration space in fixation side, therefore, can not hinder substrate miniaturization and the lightweight of apparatus for work.
In the invention that technical scheme 3 relates to, power supply control section doubles as the drive control part of accessory drive, infers the position of movable part in track restriction mechanism based on position command value and at least one command value in the speed value to drive unit output.Therefore, do not need a plurality of position detecting mechanisms such as proximity transducer, can reduce its corresponding cost.In addition, owing to do not need position detecting mechanism, therefore can realize substrate miniaturization and the lightweight of apparatus for work.
In the invention that technical scheme 4 relates to, arrive at movable part and will begin to utilize a non-contact power with element noncontact to be subjected to this non-contact power to be switched on element before the position of electricity with the element power supply.Thus, a non-contact power is begun namely to be energized before the power supply from quilt with element, can guarantee the stabilizing take that rises, and function of supplying power is stable.
In the invention that technical scheme 5 relates to, drive unit is linear motor, and this linear motor comprises: a plurality of stators and the movable piece that is arranged at movable part and driven by the electric a part of electric power that receives with element by noncontact that limit mechanism's spread configuration along track.That is, except to the power supply of operation head, can also be used for to linear motor with element by electricity with element and noncontact identical non-contact power and power.In addition, according to controlling the position that relevant information is inferred movable part with the driving of linear motor, can remove position detecting mechanism.Thus, can help to cut down number of elements and realize that substrate is with cost decline, miniaturization and the lightweight of apparatus for work.
Description of drawings
Fig. 1 is the integrally-built stereogram of the element fixing apparatus (substrate apparatus for work) of expression the first execution mode.
Fig. 2 is the stereogram that describes X-Y spindle nose driving mechanism in detail.
Fig. 3 is the figure that the Y direction of the element fixing apparatus of explanation the first execution mode drives function and non-contact power function.
Fig. 4 is the flow chart of the handling process of the non-contact power control carried out of the switch Selecting operation section of explanation servo controller (power supply control section).
Fig. 5 is the flow chart of the handling process of the explanation non-contact power that switch Selecting operation section carries out in the second execution mode control.
Fig. 6 is the figure of non-contact power function of the element fixing apparatus of explanation existing structure.
Label declaration
1: element fixing apparatus (substrate apparatus for work)
11: base station 12: substrate transfer apparatus 13: component supplying apparatus
14: component moving and loading device 15: element camera 16: the control computer
17: mounting head (operation head) 18: suction nozzle 19: cover body
2:X-Y spindle nose driving mechanism
3:Y axis rail (track limits mechanism)
31,32: side surface part 33: bottom 34: Auxiliary Track
4,40: movable part
41:X axis rail 42,43 a: moving track
44: power supply rail 45: ball-screw 46:X axle servo motor
48: holding section 49: encoder section (position detection part)
4A:AC-DC transducer 4B: various control substrate 4C: Linear Control section
4D: linear controller 4E: power amplifier
5: linear motor 51: stator (permanent magnet) 52: movable piece (magnet exciting coil)
6,60,61～63: non-contact power element 6X: proximity transducer
7: noncontact is subjected to the electricity element
81～83: selector switch 88: AC power 89: the power switching device
9: servo controller (power supply control section) 91,92: switch Selecting operation section
Ye: encoder position information Vr: speed value Yr: position command value
Ynow: the current location Ynext of movable part: the anticipation position of movable part
Yi: non-contact power is used the position of element
Embodiment
Describe with the element fixing apparatus 1 of substrate of the present invention with the first suitable execution mode of apparatus for work with reference to 1～4 couple in figure.Fig. 1 is the integrally-built stereogram of the element fixing apparatus of expression the first execution mode.As shown in the figure, element fixing apparatus 1 is adjacent to configuration by the identical device of two covers and forms, below, a covering device is described.Element fixing apparatus 1 is assembled into substrate transfer apparatus 12, component supplying apparatus 13, component moving and loading device 14, element camera 15 and control computer 16 etc. on the base station 11 and consists of.Shown in the top-right XYZ coordinate axle of Fig. 1, the horizontal width direction of component mounter 1 (from the paper upper left side of Fig. 1 towards bottom-right direction) is made as X-direction, the horizontal length direction of component mounter 1 (from the paper upper right side of Fig. 1 towards the direction of lower left) is made as Y direction, the plumb height direction is made as Z-direction.
Component moving and loading device 14 is can be at the device of the mobile so-called XY mechanical hand type of X-direction and Y direction, is configured to the top of anterior component supplying apparatus 13 from the rear portion (right-hand inboard of Fig. 1) of the length direction of component mounter 1.Component moving and loading device 14 is by formations such as X-Y spindle nose driving mechanism 2 (major part is blocked in Fig. 1) and mounting heads 17.X-Y spindle nose driving mechanism 2 is drive installation 17 on X-direction and Y direction.
Mounting head 17 is suitable with the operation head of the present invention that is driven by X-Y spindle nose driving mechanism 2, has the negative-pressure adsorption utilized and picks up the also suction nozzle 18 of installation elements.Mounting head 17 also has on the vertical Z direction of principal axis carries out the Z-direction driving mechanism that lifting drives and the R axle rotary drive mechanism that suction nozzle 18 is rotated driving centered by Z axis to suction nozzle 18.Mounting head 17 has the generation of carrying out negative pressure and the various Denso spares of control, and, on Z-direction driving mechanism and R axle rotary drive mechanism, have respectively CD-ROM drive motor.In addition, mounting head 17 has the substrate camera (not shown) that the substrate K behind the location is taken.Utilize direct current power to drive various Denso spares, CD-ROM drive motor and substrate camera.
Fig. 2 is the stereogram that describes X-Y spindle nose driving mechanism 2 in detail, is the figure that cover body 19 with Fig. 1 unloads and observes from differing 90 ° direction roughly.The driving mechanism of the Y direction in the X-Y spindle nose driving mechanism 2 is suitable with of the present invention driving mechanism, for the driving mechanism of X-direction, can make driving mechanism in any way.X-Y spindle nose driving mechanism 2 by Y-axis guide rail 3, movable part 4, linear motor 5, a plurality of non-contact power with element 6, in Fig. 2, be blocked and the noncontact that is marked with label in Fig. 3 is consisted of with element 7, a plurality of selector switch 81～83 and servo controller 9 etc. by electricity.
It is suitable that Y-axis guide rail 3 and track of the present invention limit mechanism, opens towards ground, horizontal the place ahead from the rear side top of base station 11 and establish.Y-axis guide rail 3 extends in the Y direction as moving direction, is configured to the top of component supplying apparatus 13 by the top of substrate transfer apparatus 12 always.Two side surface part 31 of Y- axis guide rail 3,32 and bottom 33 form, section shape becomes " コ " word shape of opening of top.In Fig. 2, the part by rear side in the middle of the ratio of one of them side surface part 31 is omitted.Side in another side surface part 32 disposes Auxiliary Track 34 abreast.
In addition, movable part 4 keeps mounting head 17 via X-axis guide rail 41.X-axis guide rail 41 is to be assembled in movable part 4 and integratedly at the mobile parts of Y direction, and this X-axis guide rail 41 is in X-direction (among Fig. 2 right-hand) extension.In top and the bottom of X-axis guide rail 41, with X-direction open abreast be provided with next the group moving track 42,43.Adjacent with the moving track 42 of upside and open abreast and be provided with power supply rail 44.And, be provided with at X-axis guide rail 41: be rotated the ball-screw 45 that the earth's axis freely supports and the X-axis servo motor 46 that a wherein end of ball-screw 45 is rotated driving at its both ends.
On the other hand, mounting head 17 has the holding section 171,172 engaging with moving track 42,43 respectively in the mode that X-direction moves.In addition, be provided with the nut (being blocked among Fig. 2) that screws togather with ball-screw 45 in mounting head 17.The ball-screw feed mechanism is made of ball-screw 45 and the X-axis servo motor 46 of nut and X-axis guide rail 41 sides, and mounting head 17 is driven on X-direction.And mounting head 17 has along power supply rail 44 slides and the slip electrified terminal 173 of reception direct current power.In addition, in Fig. 2, suction nozzle 18 temporarily is removed.
On the other hand, the side in the holding section 48 of the bottom of movable part 4 is to be disposed with nine pairs of movable pieces 52 with stator 51 mode in opposite directions.Movable piece 52 is to carry out the magnet exciting coil that excitation produces magnetic field by electric power.The magnetic field that movable piece 52 forms changes according to location and time, by and the stabilizing magnetic field that forms of stator between effect, produce the motive force that movable part 4 is moved.The quantity of the size of stator 51, magnetic field intensity or disposition interval, movable piece 52 or electric property etc. can suitably design according to linear motor 5 desired motive forces.In addition, and permanent magnet is set at movable part 4 and compares in the situation of fixation side spread configuration magnet exciting coil, present embodiment has: can limit than the quantity of the magnet exciting coil of permanent magnet complexity and obtain easily the advantage etc. of larger motive force.
A plurality of non-contact powers upper surface of the bottom 33 of element 6 along the Y direction spread configuration in Y-axis guide rail 3.On the other hand, noncontact is subjected to electricity to be arranged at the bottom surface of the holding section 48 of movable part 4 down with element 7 (with reference to Fig. 3), and with arbitrary non-contact power with element 6 be separated with apart from opposite directions.Noncontact is not particularly limited with quantity or the size of element 7 by electricity.Non-contact power section is consisted of by electricity by non-contact power with element 7 with element 6 and noncontact, and can 4 power supplies from fixation side to movable part.The coupling process of non-contact power section can be any of magnetic Field Coupling and field coupled.Non-contact power is subjected to electricity to be made as respectively coil with element 7 in the situation of magnetic Field Coupling with element 6 and noncontact, is made as respectively electrode in the situation of field coupled.A plurality of non-contact powers constitute with element 6, switch independently separately energising and non-energising by a plurality of selector switches 81～83 (with reference to Fig. 3) in the power switching device in abridged among Fig. 2 89.
Fig. 3 is the figure that the Y direction of the element fixing apparatus 1 of explanation the first execution mode drives function and non-contact power function.Among Fig. 3 illustration spread configuration in a plurality of non-contact powers of Y direction with a part of non-contact power in the elements 6 with element, i.e. three non-contact power usefulness elements 61,62,63, the flow direction of electric power is represented that by the arrow of solid line the flow direction of information and control is represented by the arrow of dotted line.
At first, structure is elaborated.As shown in Figure 3, in power switching device 89, be provided with AC power 88 and a plurality of selector switch 81,82,83.AC power 88 outputs are subjected to electric alternating voltage with the efficient of element 7 power supplies good assigned frequency with element 61,62,63 to noncontact from non-contact power.Selector switch 81,82,83 is arranged to identical with element 61,62,63 quantity with non-contact power, and so that AC power 88 and each non-contact power are connected with carrying out the mode that break-make independently controls between the element 61,62,63.
On the other hand, be provided with AC-DC transducer 4A at movable part 4, be connected with noncontact at the input side of this AC-AC transducer and be subjected to electricity with element 7.AC-DC transducer 4A has the function that the alternating electromotive force that received with element 7 by electricity noncontact converts direct current power to.As shown in Figure 3, the direct current power of exporting from AC-DC transducer 4A is branched off into four systems and powers.In the first system, direct current power via power supply rail 44 to mounting head 17 power supply, thereby various Denso spares, CD-ROM drive motor and substrate camera in the drive installation 17.In second system, direct current power is to the various control substrate 4B power supply that is disposed on the movable part 4, thereby carries out the detection of position of X-direction of mounting head 17 and the driving of computing or X-axis servo motor 46 etc.
In the 3rd system, direct current power is to the 4C of the Linear Control section power supply that is made of linear controller 4D and power amplifier 4E.Linear controller 4D is from the 49 received code device positional information Ye of encoder section, and, at least one command value from servo controller 9 inbound pacing command value Vr and position command value Yr.Then, linear controller 4D generation is satisfied the control signal of instruction and is sent to power amplifier 4E.Power amplifier 4E converts direct current power to the electric power of the form of movable piece 52 (magnet exciting coil) supply to according to control signal, and to movable piece 52 outputs.In the Quaternary system system, supply with direct current power to encoder section 49.Encoder section 49 sends encoder position information Ye to linear controller 4D and servo controller 9.
Servo controller 9 is suitable with power supply control of the present invention section, consists of by the built-in miniature computer and by the electronic-controlled installation that software moves.Servo controller 9 has non-contact power control function, according to the position of movable part 4 on Y-axis guide rail 3, only to be subjected to electricity to control a plurality of selector switches 81～83 with a part of non-contact power that element 7 approaches with the mode of element energising to noncontact.In addition, servo controller 9 doubles as the drive control part of Y direction, and control linear motor 5 also drives movable part 4.
Then, the Y direction driving control function of servo controller 9 is elaborated.Servo controller 9 comes the translational speed of computing movable part 4 and at least one party in the position according to the encoder position information Ye that receives with from the instruction of controlling computer 16.Then, servo controller 9 at least one command value in linear controller 4D indication speed value Vr and the position command value Yr.
Herein, encoder position information Ye, speed value Vr and position command value Yr are the information that joins between movable part 4 and fixation side, in this first execution mode, carry out remote transmission by not shown wireless light communication machine.Communication mechanism is not limited to this, can use airwave communication, also can use wire communication.
Then, the non-contact power control function of servo controller 9 is elaborated.Servo controller 9 is built-in with switch Selecting operation section 91.Fig. 4 is the flow chart of the handling process of the non-contact power control carried out of the switch Selecting operation section 91 of servo controller 9.In step S1, switch Selecting operation section 91 reads each non-contact power of being kept at as data in advance in the memory with position (Y coordinate figure) Yi of element 6i (i=1～n).Herein, subscript i is the numbering that the non-contact power of expression spread configuration is used the order of element 6i, and n represents total number of elements.Then, in step S2, obtain encoder position information Ye, and the noncontact of obtaining accordingly movable part 4 is subjected to electricity with the current location Ynow of element 7.Encoder position information Ye still, is subjected to the electricity current location Ynow of element 7 if can accurately represent noncontact originally for driving the information of control usefulness, and then both equate (Ynow=Ye).In addition, even can not accurately represent, also can obtain exactly noncontact by the correction that encoder position information Ye is stipulated and be subjected to the electricity current location Ynow of element 7.
Then, in step S3, current location Ynow and each non-contact power are made comparisons with the interval between the position Yi of element 6i and predetermined distance D, ask the non-contact power of calculating below the predetermined distance D numbering i of element 6i.Predetermined distance D can suitably be set by electricity by non-contact power with the size of element 7 etc. with element 6i and noncontact.For example, as the center distance D0 of adjacent non-contact power with element 6i, when being made as predetermined distance D=(D0/2), roughly can asking all the time and calculate a non-contact power element 6i.In addition, if predetermined distance D=D0 roughly can ask all the time and calculate two non-contact power element 6i.And, also can not set predetermined distance D, be subjected to electricity with the nearest unique non-contact power element 6i of element 7 but ask to calculate apart from noncontact.
Then, in step S4, the selector switch 8i corresponding with the i numbering that satisfies condition connected control.In addition, if other selector switch is on-state, then disconnect control.Thus, the one-period of power supply control finishes, and returns step S2, carries out repetitive control based on new current location Ynow.
By this non-contact power control, in the example of Fig. 3, only a selector switch 82 is in on-state, and to the non-contact power of correspondence element 62 indirect currents stream, other selector switch 81,83 is in off-state.And the noncontact of movable part 4 is subjected to electricity just to be separated with distance ground in opposite directions with non-contact power with element 62 with element 7, carries out non-contact power shown in the white arrow S among the figure, thereby can be to movable part 4 power supplies.
Then, make comparisons with existing structure and the effect of the element fixing apparatus 1 of the first execution mode is described.Fig. 6 is the figure of non-contact power function of the element fixing apparatus of explanation existing structure.As shown in the figure, in existing structure, between a plurality of non-contact powers on the Y-axis guide rail 30 are with element 60, dispose respectively proximity transducer 6X (for simplicity, be marked with oblique line and represent) and the approaching of movable part 40 detected, and detection signal is sent to switch Selecting operation section 92.Switch Selecting operation section 92 carries out break-make control based on detection signal to a plurality of selector switches 80.In addition, drive the independent setting of partly turning up the soil of the drive unit of movable part 40 and non-contact power in Y direction.
With respect to this, in the element fixing apparatus 1 of the first execution mode, have encoder section 49 at movable part 4, power supply control section 9 is from the 49 received code device positional information Ye of encoder section.Therefore, do not need a plurality of proximity transducer 6X, can correspondingly reduce cost.In addition, fairly simple at the linear scale that the position probing of Y-axis guide rail 30 configurations is used, different from existing proximity transducer 6X, do not need larger configuration space, and low weight.And, except to dress 17 power supply, can also be used for to the movable piece 52 of linear motor 5 with element 7 by electricity with element 61～63 and noncontact identical non-contact power and power.In addition, according to the position that the encoder position information Ye relevant with the driving control of linear motor 5 infers movable part 4, can remove existing proximity transducer 6X.Thus, can help to cut down number of elements and realize that substrate is with cost decline, miniaturization and the lightweight of apparatus for work 1.
In addition, can only not switch on element to remaining a plurality of non-contact powers with the element energising with a part of non-contact power in the element 61～63 to a plurality of non-contact powers, the power supply large with using patent documentation 2 and 3 exemplified single length compared with the structure of element, can guarantee higher power supplying efficiency.
Then, about guaranteeing that non-contact power with the second execution mode of the rising stabilizing take of element, mainly illustrates the difference with the first execution mode.In the second execution mode, the structure of element fixing apparatus 1 is identical with the first execution mode shown in Fig. 1～3, and the handling process relevant from the non-contact power control of switch Selecting operation section 91 is different.In the second execution mode, this selector switch is connected control, to begin to utilize a non-contact power with element noncontact to be subjected to this non-contact power to be switched on element before the position of electricity with element 7 power supplies so that arrive at movable part 4.That is, shifted to an earlier date rising stabilizing take T1 ground than beginning to power non-contact power has been begun energising with element.Fig. 5 is the flow chart of the handling process of the explanation non-contact power that switch Selecting operation section 91 carries out in the second execution mode control.
In step S11, switch Selecting operation section 91 reads each non-contact power of being kept at as data in advance in the memory with position (Y coordinate figure) Yi of element 6i (i=1～n).Then, at step S12, obtain encoder position information Ye, and the noncontact of obtaining accordingly movable part 4 is subjected to electricity with the current location Ynow of element 7.And, in step S13, the noncontact of inferring movable part 4 be subjected to electricity with the anticipation position Ynext of element 7, be non-contact power with passing through of element 61～63 the anticipation position Ynext of the movable part 4 behind the rising stabilizing take T1.For example, when operating speed command value Vr in the driving of linear motor 5 is controlled, can ask by following formula and calculate anticipation position Ynext.
Anticipation position Ynext=Ynow+Vr * T1
Then, in step S14, current location Ynow and each non-contact power are made comparisons with the interval between the position Yi of element 6i and predetermined distance D, ask the non-contact power of calculating below the predetermined distance D numbering i of element 6i.And then, anticipation position Ynext and each non-contact power are made comparisons with the interval between the position Yi of element 6i and predetermined distance E, ask the non-contact power of calculating below the predetermined distance E numbering i of element 6i.Predetermined distance E can consider suitably to set with respect to the surplus of the deviation of rising stabilizing take T1 etc.Also can be inconsistent with the numbering i that two conditions are obtained.
Then, in step S15, to connecting control with the minimum value from the numbering i that satisfies condition to selector switch 8i corresponding to peaked scope.In addition, if other selector switch is in on-state, then disconnect control.The number that is carried out the selector switch 8i that connects control can increase relatively with the translational speed of movable part 4.For example, when movable part 4 roughly stopped, the selector switch 8i that the nearer non-contact power of distance current location Ynow is switched on element 6i was carried out connection control.When the translational speed of movable part 4 is that certain speed is when above, two selector switch 8i, 8 (i+1) are connected control, so that except when the non-contact power of front position Ynow is used beyond the element 6i, also the non-contact power of direction of advance side is switched on element 6 (i+1).And then, also can according to the relation of non-contact power with the maximum translational speed of the rising stabilizing take T1 of element 6i and movable part 4, connect control to three above selector switches.By step S15, the one-period of power supply control finishes, and returns step S12, carries out repetitive control according to new current location Ynow and new anticipation position Ynext.
By this non-contact power control, in brief, the non-contact power that only is in the scope from current location Ynow to anticipation position Ynext is energized with element 6i.Therefore, near the non-contact power of the anticipation Ynext of position namely is energized before the power supply from beginning with element, can guarantee the stabilizing take T1 that rises, and function of supplying power is stablized.
In addition, linear motor 5 or the encoder section 49 of first and second execution mode are optional, can replace to other parts.For example, the drive unit as driving movable part 4 can use the ball-screw feed mechanism.Particularly, dispose ball-screw along Y-axis guide rail 3 in the mode that can rotate, utilize the Y-axis servo motor that one end of ball-screw is rotated driving, the nut with the ball-screw engagement is set on movable part 4 regularly.At this moment, the position of substitution command value and speed value, servo controller 9 is to Y-axis servo motor output rotation amount command value and rotary speed command value.Therefore, the position of movable part 4 on guide rail 3 can be inferred according at least one command value in rotation amount command value and the rotary speed command value by switch Selecting operation section 91, no longer needs encoder section 49.
In addition, in first and second execution mode, implement the present invention and use prior art in X-direction in Y direction, its reason is: Y direction amount of movement, translational speed and acceleration are larger, and the effect of non-contact power is remarkable.Therefore, also can implement the present invention in X-direction, thus can be via dual non-contact power section to mounting head 17 power supplies.
In addition, the present invention also can be by the substrate except element fixing apparatus 1 with apparatus for work, implement such as base board checking device etc.The present invention also can carry out other various application or distortion.
Claims (5)
1. the substrate behind substrate apparatus for work, the operation head that is driven by a driving mechanism and location carries out the regulation operation opposite to each other, and described substrate is characterised in that with apparatus for work,
Described driving mechanism comprises:
Track limits mechanism, extends along moving direction;
A plurality of non-contact power elements limit mechanism's spread configuration along described track;
A plurality of selector switches switch with element energising and non-energising separately described a plurality of non-contact powers independently;
Movable part keeps described operation head and is set up in described track in the mode that can move limiting mechanism;
Drive unit makes described movable part limit mechanism along described track and moves;
Noncontact is subjected to electricity to use element, is arranged at described movable part, and be separated with distance ground with a part of non-contact power in the element with element with described a plurality of non-contact powers and receive in opposite directions electric power, and at least to described operation head or the power supply of described drive unit; And
Power supply control section controls described a plurality of selector switch based on described movable part in the position that described track limits in the mechanism, so that only switched on element with a part of non-contact power that element approaches by electricity to described noncontact.
2. substrate apparatus for work according to claim 1, wherein,
Described movable part has and detects described movable part and limit the position detection part of the position in the mechanism at described track, and described power supply control section receives the information by the detected position of described position detection part.
3. substrate apparatus for work according to claim 1, wherein,
At least one command value in the speed value of the speed when the storage expression of described power supply control section makes described movable part limit the position command value of the target location that mechanism moves and expression and move to described target location along described track, and to described drive unit output;
And, infer described movable part based at least one command value in described position command value and the described speed value and limit position in the mechanism at described track.
4. each described substrate apparatus for work according to claim 1～3, wherein,
Described power supply control section connects control to described selector switch, to begin to utilize described a plurality of non-contact power described noncontact to be subjected to element with a non-contact power in the element to switch on element to a described non-contact power before the electric position that powers with element so that arrive at described movable part.
5. each described substrate apparatus for work according to claim 1～4, wherein,
Described drive unit is linear motor, and this linear motor comprises: a plurality of stators that limit mechanism's spread configuration along described track; With the movable piece that is arranged at described movable part and utilizes a part of electric power of received with element by electricity by described noncontact to drive.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011180018A JP5836700B2 (en) | 2011-08-20 | 2011-08-20 | Substrate working device |
| JP2011-180018 | 2011-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102958344A true CN102958344A (en) | 2013-03-06 |
| CN102958344B CN102958344B (en) | 2016-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210295450.9A Active CN102958344B (en) | 2011-08-20 | 2012-08-17 | Substrate apparatus for work |
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| Country | Link |
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| JP (1) | JP5836700B2 (en) |
| CN (1) | CN102958344B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040258141A1 (en) * | 2003-06-11 | 2004-12-23 | The Boeing Company | Digital communication over 28VDC power line |
| JP2007322535A (en) * | 2006-05-30 | 2007-12-13 | Funai Electric Co Ltd | Projector |
| JP2010082711A (en) * | 2008-09-29 | 2010-04-15 | Juki Corp | Surface mounting device |
| CN101815429A (en) * | 2009-02-25 | 2010-08-25 | 株式会社日立高新技术仪器 | Management method in the management system of electronic component mounting apparatus |
| CN101998818A (en) * | 2009-08-24 | 2011-03-30 | Juki株式会社 | Part feeder for chip mounting device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH056321U (en) * | 1991-07-08 | 1993-01-29 | 株式会社小松製作所 | Sensor mounting structure |
| JPH07322535A (en) * | 1994-05-23 | 1995-12-08 | Yaskawa Electric Corp | Noncontact power supply for direct motion mechanism |
| JP3752731B2 (en) * | 1996-05-15 | 2006-03-08 | ソニー株式会社 | Component mounting device |
-
2011
- 2011-08-20 JP JP2011180018A patent/JP5836700B2/en active Active
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2012
- 2012-08-17 CN CN201210295450.9A patent/CN102958344B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040258141A1 (en) * | 2003-06-11 | 2004-12-23 | The Boeing Company | Digital communication over 28VDC power line |
| JP2007322535A (en) * | 2006-05-30 | 2007-12-13 | Funai Electric Co Ltd | Projector |
| JP2010082711A (en) * | 2008-09-29 | 2010-04-15 | Juki Corp | Surface mounting device |
| CN101815429A (en) * | 2009-02-25 | 2010-08-25 | 株式会社日立高新技术仪器 | Management method in the management system of electronic component mounting apparatus |
| CN101998818A (en) * | 2009-08-24 | 2011-03-30 | Juki株式会社 | Part feeder for chip mounting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5836700B2 (en) | 2015-12-24 |
| JP2013045777A (en) | 2013-03-04 |
| CN102958344B (en) | 2016-12-21 |
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