JP2013021045A - Charged particle beam drawing device and charged particle beam drawing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress extension of drawing time due to a wait for data processing.SOLUTION: A charged particle beam drawing device 1 includes: a drawing data processing part 32 for dividing a drawing region defined by drawing data for drawing a pattern on a sample W into a plurality of stripe regions, dividing the stripe regions into a plurality of distribution processing regions or regarding them as one distribution processing region according to a first specified value of a data amount for each stripe region, and processing the drawing data for each distribution processing region in parallel; and a drawing part 2 for performing drawing with a charged particle beam with respect to the sample W for each stripe region or distribution processing region on the basis of the data for each distribution processing region generated by the drawing data processing part 32. The drawing data processing part 32 subdivides the stripe region in the beginning of the drawing or the stripe region in the end of the drawing among the plurality of stripe regions into a plurality of distribution processing regions in which a data amount is equal to or less than a second specified vale which is smaller than the first specified value.

Description

  The present invention relates to a charged particle beam writing apparatus and a charged particle beam writing method.

  With the recent high integration and large capacity of large scale integrated circuits (LSIs), circuit line widths required for semiconductor devices are becoming increasingly smaller. In order to form a desired circuit pattern on a semiconductor device, a lithography technique is used. In this lithography technique, pattern transfer using an original pattern called a mask (reticle) is performed. In order to manufacture a high-accuracy mask used for this pattern transfer, a charged particle beam drawing apparatus having an excellent resolution is used.

  As this charged particle beam drawing apparatus, for example, a chip area defined by drawing data or a virtual chip area (hereinafter referred to as a single chip) virtually merged with a plurality of chip areas under the same drawing conditions. The chip area and the virtual chip area are called “drawing areas”) into a plurality of stripe areas, which are further divided into a number of block areas, and a stage on which a sample such as a mask is placed is a stripe area. A charged particle beam drawing apparatus has been developed that draws a figure by deflecting a charged particle beam such as an electron beam to a predetermined position in a block region while moving it in the longitudinal direction.

  Such a charged particle beam drawing apparatus converts drawing data based on design data (layout data) into shot data when drawing. At this time, for example, the charged particle beam drawing apparatus assigns a CPU (central processing unit) to each of the block areas described above, and performs distributed processing for processing the drawing data in parallel to generate shot data. In order to increase the processing efficiency of the data at this time, a set of block areas (block area group) of a predetermined number is set as a distributed processing area, and a CPU is assigned to each distributed processing area to process the drawing data in parallel. A beam drawing apparatus has also been proposed (see, for example, Patent Document 1).

  In this charged particle beam drawing apparatus, even if there is a density difference in the pattern in the drawing region, the size of the distributed processing region is adjusted so that the data amount for each distributed processing region is substantially constant. Since the data processing time in the distributed processing area has a correlation with the data amount, when adjustment is performed so that the data amount per distributed processing area is reduced, the total number of distributed processing areas to be processed increases. For this reason, useless overhead at the start of data processing is conspicuous, and the entire data processing time is extended. On the other hand, when adjustment is performed so that the data amount of the distributed processing area increases, the total number of distributed processing areas decreases, but the data processing time for processing one distributed processing area increases, or the memory usage amount increases. As a result, the overall data processing time is extended.

  Therefore, it is desired to set an optimum data amount in the distributed processing area that shortens the entire data processing time. That is, one or a plurality of CPUs (or processor cores) in the order of distributed processing areas having higher drawing priority continuously execute data processing, so that the last distributed processing from the start of data processing in the first distributed processing area in the drawing area It is necessary to shorten the time until the data processing of the area is completed and to improve the data processing throughput. For example, in order to prevent a drawing delay phenomenon in which shot data is not provided downstream due to a data processing delay and the stage is stopped, a drawing data generation system having sufficient processing capability is constructed, The generation of shot data is completed prior to the stripe area by several stripe areas or more.

JP 2008-218857 A

  However, in the above-described technique, if the data processing time for the distributed processing area with the optimal amount of data is T seconds, even if there are an infinite number of CPUs or processor cores that can be used in the drawing data generation system, Since it takes at least T seconds as the data processing time from the acceptance to the completion of the generation of the shot data of the first stripe region to be drawn, a waiting time of T seconds or more occurs. Also, when drawing is started by moving the stage when data processing is completed for the first distributed processing area in the stripe area with the highest priority and shot data generated by the data processing is provided downstream However, a waiting time corresponding to the data processing time of the distributed processing area at the beginning of drawing, that is, T seconds occurs. Since the waiting time for such data processing is added to the drawing time, the entire drawing time is extended.

  This waiting for data processing may occur not only at the start of drawing, but also at the end of drawing (for example, a stripe area at the end of drawing or a distributed processing area at the end of drawing) or during the drawing. Explaining the data processing waiting in the middle of drawing, for example, when there are continuous stripe areas without data, a confirmation process is performed to check the presence or absence of data for those stripe areas, Since the shot data generation process is interrupted, the next shot data is not provided downstream from the previous shot data, and drawing may be interrupted. In this case, as described above, since it takes at least T seconds as the data processing time until the generation of the shot data of the stripe area at the start of drawing after the interruption is completed, a waiting time of T seconds or more occurs. It will be different. Since the waiting time for this data processing is added to the drawing time, the entire drawing time is extended.

  The problem to be solved by the present invention is to provide a charged particle beam drawing apparatus and a charged particle beam drawing method capable of suppressing the extension of the drawing time due to waiting for data processing.

  A first feature according to an embodiment of the present invention is that, in a charged particle beam drawing apparatus, a drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, A drawing data processing unit that divides the stripe area into a plurality of distributed processing areas according to the first specified value of the data amount or regards it as one distributed processing area, and processes drawing data in parallel for each distributed processing area, and drawing data A drawing unit that performs drawing with a charged particle beam on the sample for each stripe region or each dispersion processing region based on the data for each dispersion processing region generated by the processing unit, and the drawing data processing unit includes a plurality of stripes A stripe area at the start of drawing or a stripe area at the end of drawing within the area is a composite data whose data amount is equal to or less than a second specified value smaller than the first specified value. It is to subdivide the distributed processing region of.

  A second feature according to the embodiment of the present invention is that in a charged particle beam drawing apparatus, a drawing region defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe regions, and for each stripe region, A drawing data processing unit that divides the stripe area into a plurality of distributed processing areas according to the first specified value of the data amount or regards it as one distributed processing area, and processes drawing data in parallel for each distributed processing area, and drawing data A drawing unit that performs drawing with a charged particle beam on the sample for each stripe region or each dispersion processing region based on the data for each dispersion processing region generated by the processing unit, and the drawing data processing unit includes a plurality of stripes If there is a continuous stripe area with no data in the area, the data area is defined as the first specified stripe area that has data, It is to subdivide into a plurality of distributed processing area or less is smaller than the second predetermined value.

  Further, in the charged particle beam drawing apparatus according to the first feature or the second feature, the drawing data processing unit includes a plurality of calculation units that process drawing data in parallel, and division when performing subdivision It is desirable that the number be equal to or less than the number of arithmetic units.

  A third feature according to the embodiment of the present invention is that, in the charged particle beam drawing method, a drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, A step of dividing the stripe area into a plurality of distributed processing areas according to the first specified value of the data amount or considering it as one distributed processing area, processing the drawing data in parallel for each distributed processing area, and drawing data in parallel A step of performing drawing with a charged particle beam on a sample for each stripe region or each dispersion processing region based on data for each dispersion processing region generated by processing, and processing the drawing data in parallel In the second stripe area, the stripe area at the start of drawing or the stripe area at the end of drawing of the plurality of stripe areas is set to the second rule whose data amount is smaller than the first prescribed value. Is to subdivide into a plurality of distributed processing area is a value less.

  According to a fourth aspect of the present invention, in the charged particle beam drawing method, a drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, A step of dividing the stripe area into a plurality of distributed processing areas according to the first specified value of the data amount or considering it as one distributed processing area, processing the drawing data in parallel for each distributed processing area, and drawing data in parallel A step of performing drawing with a charged particle beam on a sample for each stripe region or each dispersion processing region based on data for each dispersion processing region generated by processing, and processing the drawing data in parallel In the case where there are continuous stripe areas with no data among the plurality of stripe areas, the stripe area at the beginning of the next drawing with data is changed to the data. The amount is to subdivide into a plurality of distributed processing region is less than the first predetermined value smaller than the second predetermined value.

  According to the present invention, it is possible to suppress the extension of the drawing time due to waiting for data processing.

1 is a diagram showing a schematic configuration of a charged particle beam drawing apparatus according to a first embodiment of the present invention. It is explanatory drawing for demonstrating the drawing data which the charged particle beam drawing apparatus shown in FIG. 1 uses. It is explanatory drawing for demonstrating the division | segmentation process which the drawing data process part with which the charged particle beam drawing apparatus shown in FIG. 1 is provided. It is explanatory drawing for demonstrating the division | segmentation process (The division | segmentation process which subdivides the stripe area | region of the drawing start) which the drawing data process part with which the charged particle beam drawing apparatus shown in FIG. 1 is provided. It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. FIG. 5 is an explanatory diagram for explaining a division process that does not subdivide a stripe region at the start of drawing as a comparative example of the division process shown in FIG. 4. It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. It is explanatory drawing for demonstrating the 1st example which is another example of the division | segmentation process shown in FIG. It is explanatory drawing for demonstrating the 2nd example which is another example of the division | segmentation process shown in FIG. It is explanatory drawing for demonstrating the 3rd example which is another example of the division | segmentation process shown in FIG. It is a graph which shows the relationship between the stripe area number (or distributed processing area number) in the drawing start area and the set data amount of the distributed processing area. Division processing performed by the drawing data processing unit included in the charged particle beam drawing apparatus according to the second embodiment of the present invention (dividing processing for subdividing the first stripe region after drawing is interrupted in addition to the first drawing stripe region) It is explanatory drawing for demonstrating. It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. FIG. 13 is an explanatory diagram for explaining a dividing process that does not subdivide a drawing start stripe area and a drawing start stripe area after drawing interruption as a comparative example of the dividing process illustrated in FIG. 12; It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. It is explanatory drawing for demonstrating the division | segmentation process (Division | segmentation process which subdivides the stripe area | region of drawing end) which the drawing data process part with which the charged particle beam drawing apparatus which concerns on the 3rd Embodiment of this invention is provided. It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. FIG. 17 is an explanatory diagram for explaining a division process that does not subdivide the drawing end distributed processing area in the drawing end stripe area as a comparative example of the division process shown in FIG. 16. It is explanatory drawing for demonstrating the dispersion | distribution process corresponding to the division | segmentation process shown in FIG. It is a graph which shows the relationship between the stripe area number (or distributed processing area number) in the drawing end area and the set data amount of the distributed processing area.

(First embodiment)
A first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the charged particle beam drawing apparatus 1 according to the first embodiment of the present invention includes a drawing unit 2 that performs drawing using a charged particle beam, and a control unit 3 that controls the drawing unit 2. ing. The charged particle beam drawing apparatus 1 is an example of a variable shaping type drawing apparatus using, for example, an electron beam as a charged particle beam. The charged particle beam is not limited to the electron beam, and may be another charged particle beam such as an ion beam.

  The drawing unit 2 includes a drawing chamber 2a that houses a sample W to be drawn, and an optical barrel 2b that communicates with the drawing chamber 2a. A stage 11 that supports the sample W is provided in the drawing chamber 2a. The stage 11 is formed so as to be movable in the X and Y directions perpendicular to each other in a horizontal plane, and a sample W such as a mask or a blank is placed on the placement surface of the stage 11. In the optical barrel 2b, an electron gun 21 that emits an electron beam B, an illumination lens 22 that collects the electron beam B, a first aperture 23 for beam shaping, and a projection lens for projection are provided. 24, a first deflector 25 for beam shaping, a second aperture 26 for beam shaping, an objective lens 27 for focusing the beam on the sample W, and a beam shot position for controlling the sample W A second deflector 28 is arranged.

  In the drawing unit 2, the electron beam B is emitted from the electron gun 21 and is irradiated onto the first aperture 23 by the illumination lens 22. The first aperture 23 has, for example, a rectangular opening. As a result, when the electron beam B passes through the first aperture 23, the cross-sectional shape of the electron beam is formed into a rectangular shape, and is projected onto the second aperture 26 by the projection lens 24. The projection position can be deflected by the first deflector 25, and the shape and size of the electron beam B can be controlled by changing the projection position. Thereafter, the electron beam B that has passed through the second aperture 26 is irradiated with the focus of the electron beam B being adjusted to the sample W on the stage 11 by the objective lens 27. At this time, the shot position of the electron beam B with respect to the sample W on the stage 11 is controlled by the second deflector 28.

  The control unit 3 includes a drawing data storage unit 31 that stores drawing data, a drawing data processing unit 32 that processes the drawing data to generate shot data, a shot data storage unit 33 that stores the generated shot data, And a drawing control unit 34 for controlling the drawing unit 2.

  The drawing data storage unit 31 is a storage unit that stores drawing data for drawing a pattern on the sample W. The drawing data is data obtained by allowing design data (layout data) created by a semiconductor integrated circuit designer or the like to be input to the charged particle beam drawing apparatus 1, that is, converted into a format for the charged particle beam drawing apparatus 1. Yes, it is input from the external device to the drawing data storage unit 31 and stored. As the drawing data storage unit 31, for example, a magnetic disk device or a semiconductor disk device (flash memory) can be used.

  The design data described above usually includes a large number of minute patterns, and the amount of data is considerably large. If this design data is converted into another format as it is, the data amount after conversion further increases. For this reason, in design data, drawing data, etc., the amount of data is reduced by methods such as data hierarchization and pattern array display.

  For example, as shown in FIG. 2, the drawing data includes the layer of the chip A1, the layer of the frame A2 lower than the layer of the chip A1, the layer of the block A3 lower than the layer of the frame A2, and the block It is hierarchized into a layer of cell A4 lower than the layer of A3, a layer of cluster A5 lower than the layer of cell A4, and a layer of graphic A6 lower than the layer of cluster A5. Each frame A2 is an area in which the area of the chip A1 is virtually divided into stripes (stripes), and each block A3 is an area in which the area of the frame A2 has a predetermined size in a matrix (matrix) Each cell A4 is an area including at least one figure (pattern) A6, and cluster A5 is an area formed by virtually dividing the area of cell A4. .

  Returning to FIG. 1, the drawing data processing unit 32 includes a division processing unit 32a that divides the drawing area of the chip A1, an assignment processing unit 32b that assigns data processing, and a plurality of computers 32c. Each computer 32c has a CPU (central processing unit) 41 having a plurality of processor cores 41a functioning as arithmetic units, and a memory 42 common to the respective processor cores 41a. The division processing unit 32a, the allocation processing unit 32b, and the like are configured by hardware, software, or both.

  As shown in FIG. 3, the division processing unit 32a divides the drawing area defined by the drawing data into a plurality of stripe-shaped stripe areas Sn (n is a natural number), and the stripe areas Sn are further divided into data. The distributed processing area Dn. Divide into m (m is a natural number). At this time, the division processing unit 32a performs the distributed processing area Dn. It is determined whether the data amount of m is equal to or smaller than the first specified value, and the stripe region Sn whose data amount is equal to or smaller than the first specified value is not divided and distributed processing region Dn. 1 is considered (for example, see stripe regions S2, S3, and S7 to Sn), and the stripe region Sn whose data amount is larger than the first specified value is divided (for example, see stripe regions S4 to S6).

  However, for the stripe region S1 at the start of drawing, it is determined whether or not the data amount exceeds a second specified value (lower limit value) smaller than the first specified value, and the data amount is set to the second specified value. If it is determined that it has exceeded, the stripe region S1 at the beginning of drawing is divided into distributed processing regions D1.1 to D1.3 whose data amount is equal to or smaller than the second specified value. The first specified value and the second specified value are preset in the division processing unit 32a, but can be changed by an operator's input operation on an input unit (not shown) such as a keyboard.

  Here, the above-described stripe region Sn is included in each distributed processing region Dn. However, the present invention is not limited to this, and may be divided into non-equal parts, such as when it is impossible to divide into equal parts. The width of the stripe region Sn in the Y direction (short direction), that is, the distributed processing region Dn. The width of m in the Y direction is set to be equal to or smaller than the width by which the second deflector 28 can deflect the electron beam B.

  Returning to FIG. 1, the allocation processing unit 32b distributes the distributed processing area Dn.1 to each processor core 41a of the CPU 41 for each computer 32c. Allocate data processing for each m. In response to this, each processor core 41a of the CPU 41 for each computer 32c performs data processing assigned to each other in parallel, generates shot data as a drawing unit, and sequentially transmits it to the shot data storage unit 33. As the CPU 41, a multi-core CPU having a plurality of processor cores 41a is used. However, the present invention is not limited to this, and for example, the same number of single-core CPUs as the processor cores 41a may be used. The memory 42 is a storage unit commonly used for data processing by each processor core 41a. The memory 42 is provided for each computer 32c, but is not limited thereto, and may be provided in common for each computer 32c, for example.

  The shot data storage unit 33 is a storage unit that receives and sequentially stores shot data generated by the drawing data processing unit 32. The shot data is read out and used by the drawing control unit 34 for each stripe area Sn (or for each distributed processing area Dn.m). As the shot data storage unit 33, for example, a magnetic disk device, a semiconductor disk device (flash memory), or the like can be used.

  The drawing controller 34 moves the stage 11 in the longitudinal direction (X direction) of the stripe region Sn and draws the electron beam B in the stripe region Sn by the second deflector 28 when drawing the drawing region. A figure A6 is drawn by shooting at a predetermined position in each block area A3. Thereafter, when the drawing of one stripe region S1 is completed, the stage 11 is moved stepwise in the Y direction, and then the next stripe region S2 is drawn. This is repeated and the entire drawing region of the sample W is irradiated with the electron beam B. Draw. Since the stage 11 continuously moves in one direction during drawing, the second deflector 28 blocks the block area A3 in the stripe area Sn so that the drawing origin follows the movement of the stage 11. The drawing origin is tracked.

  Thus, the irradiation position of the electron beam B is determined while following the stage 11 which is deflected by the second deflector 28 and continuously moves. The drawing time can be shortened by continuously moving the stage 11 in the X direction and making the shot position of the electron beam B follow the movement of the stage 11. However, in the embodiment of the present invention, the movement of the stage 11 in the X direction is continuously performed. However, the present invention is not limited to this. For example, one block area A3 is drawn with the stage 11 stopped. However, when moving to the next block area A3, a step-and-repeat drawing method in which drawing is not performed may be used.

  Next, shot data generation processing (dividing processing, allocation processing, and distributed processing) performed by the drawing data processing unit 32 described above will be described. First, the division processing unit 32a performs division processing to divide the drawing area, and then the allocation processing unit 32b performs allocation processing for allocating data processing to the processor core 41a for each CPU 41 according to distributed processing. Each processor core 41a performs distributed processing for processing drawing data in parallel.

  As shown in FIG. 4, the drawing area is divided into stripe areas Sn (indicated by S1 to S9 in FIG. 4) by the division processing unit 32a. In FIG. 4, the data amount of each stripe region S1 to S3, S7 to S9 is 400 MB, the data amount of each stripe region S4 and S6 is 700 MB, and the data amount of the stripe region S5 is 2400 MB. .

  The stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the stripe region S1 at the start of drawing has a second specified value of 50 MB, and is subdivided based on the second specified value (eight in FIG. 4). Note that the stripe region Sn whose data amount is equal to or less than the first specified value is not divided and distributed processing regions Dn. The stripe region Sn which is regarded as 1 and whose data amount is larger than the first specified value is divided equally. Here, the first specified value is an optimum data amount that shortens the entire data processing time, and the second specified value is that the waiting time until the drawing start of the stripe region S1 at the start of drawing is within an allowable range. The amount of data that fits. These specified values are preset in the division processing unit 32a as described above.

  First, since the stripe area S1 at the start of drawing is an area having a data amount of 400 MB and larger than the second specified value 50 MB, the stripe area S1 is divided into eight equal parts based on the second specified value 50 MB. It is divided into distributed processing areas D1.1 to D1.8 whose amount is 50 MB. Since the next stripe area S2 has a data amount of 400 MB and is the same as the first specified value, it is regarded as the distributed processing area D2.1 as it is. Similarly, the stripe area S3 has a data amount of 400 MB. Therefore, it is regarded as the distributed processing area D3.1 as it is.

  Since the next stripe area S4 is an area having a data amount of 700 MB and larger than the first specified value of 400 MB, the next stripe area S4 is divided into two equal parts based on 350 MB below the first specified value, and the data amount is 350 MB. It is divided into certain distributed processing areas D4.1 and D4.2. The stripe area S5 has a data amount of 2400 MB and is larger than the first specified value of 400 MB. Therefore, the stripe area S5 is divided into six equal parts based on the first specified value of 400 MB, and the data amount is 400 MB. Divided into D5.1 to D5.6. Further, since the data amount of the stripe region S6 is 700 MB and is larger than the first prescribed value of 400 MB, the distributed processing is divided into two equal parts based on 350 MB which is equal to or less than the first prescribed value, and the data amount is 350 MB. Divided into regions D6.1 and D6.2.

  Since the next stripe area S7 has a data amount of 400 MB and is the same as the first specified value, it is regarded as the distributed processing area D7.1 as it is. Similarly, the stripe area S8 has a data amount of 400 MB. Since it is the same as the first specified value, it is regarded as the distributed processing area D8.1 as it is, and the stripe area S9 also has the data amount of 400 MB and is the same as the first specified value. D9.1 is considered.

  Such division processing is executed for all the stripe areas Sn, and in accordance with the division processing, the distributed processing areas Dn. Data processing for each m is assigned to each processor core 41a of the CPU 41 for each computer 32c by the assignment processing unit 32b. As a result, the distributed processing area Dn. Data processing for each m is performed in parallel by each processor core 41a.

  Here, for example, as shown in FIG. 5, an assignment process when there are 12 processor cores 41 a as cores 1 to 12 will be described. In FIG. 5, the horizontal axis is the time axis, and the data processing flow (data processing time) is shown for each of the cores 1 to 12. In addition, the data processing capacity of each core 1-12 is equivalent.

  As shown in FIG. 5, according to the start of shot data generation, data processing in each of the distributed processing areas D1.1 to D1.8 is assigned to each of the cores 1 to 8, and further, distributed processing area D2.1. Is assigned to the core 9, the distributed processing area D3.1 is assigned to the core 10, the distributed processing area D4.1 is assigned to the core 11, and the distributed processing area D4.2 is assigned to the core 12.

  In response to this allocation, each of the cores 1 to 12 performs data processing of the allocated distributed processing areas D1.1 to D1.8, D2.1, D3.1, D4.1, and D4.2 in parallel. At this time, since the data amount of each of the distributed processing areas D1.1 to D1.8 is 50 MB (see FIG. 4), the data processing time is time T1. Therefore, after a lapse of time T1 from the start of shot data generation, the shot data in the stripe region S1 is ready and stored in the shot data storage unit 33. In response to this, the drawing control unit 34 reads the shot data and starts drawing by the drawing unit 2. Thus, after the time T1 has elapsed from the start of shot data generation, the shot data in the stripe region S1 is ready, so the waiting time until the start of drawing is only the time T1.

  Further, since the data amount of each of the distributed processing areas D2.1 and D3.1 is 400 MB, their data processing time is about eight times the time T1. Therefore, after the time about eight times the time T1 has elapsed since the start of shot data generation, the shot data of each stripe region S2, S3 is ready and stored in the shot data storage unit 33. Further, since the data amount of each of the distributed processing areas D4.1 and D4.2 is 350 MB, their data processing time is about seven times the time T1. Therefore, after about seven times the time T1 from the start of shot data generation, the shot data in the stripe region S4 is ready and stored in the shot data storage unit 33. Even during such shot data generation processing, the drawing control unit 34 sequentially reads the shot data stored in the shot data storage unit 33 in the order of the numbers of the stripe regions Sn, and continues drawing by the drawing unit 2 described above.

  Next, the data processing of the remaining distributed processing areas D5.1 to D5.6, D6.1, D6.2, D7.1, D8.1, and D9.1 is performed for each core 1 for which the above-described data processing has been completed. Are sequentially assigned to .about.12. That is, the data processing in each of the distributed processing areas D5.1 to D5.6, D6.1, and D6.2 is assigned to each of the cores 1 to 8, and the distributed processing area D7.1 is assigned to the core 11. The distributed processing area D8.1 is allocated to the core 12, and the distributed processing area D9.1 is allocated to the core 9.

  In response to this allocation, each of the cores 1 to 12 performs parallel data processing of the allocated distributed processing areas D5.1 to D5.6, D6.1, D6.2, D7.1, D8.1, and D9.1. To do. At this time, since the data amount of each of the distributed processing areas D5.1 to D5.6, D6.1, and D6.2 is 400 MB, their data processing time is about eight times the time T1. Accordingly, after the time about eight times the time T1 has elapsed since the shot data of the stripe region S1 is ready, the shot data of the stripe regions S5 and S6 is ready and stored in the shot data storage unit 33. .

  In addition, since the data amount of each of the distributed processing areas D7.1 and D8.1 is 400 MB, the data processing time is about eight times the time T1. Therefore, after the time about eight times the time T1 has elapsed since the shot data of the stripe region S4 is ready, the shot data of the stripe regions S7 and S8 is ready and stored in the shot data storage unit 33. . Further, since the data amount of each distributed processing area D9.1 is also 400 MB, the data processing time is about eight times the time T1. Therefore, after the time about eight times the time T1 has elapsed since the preparation of the shot data of the stripe regions S2 and S3, the preparation of the shot data of the stripe region S9 is completed and stored in the shot data storage unit 33. . Even during such shot data generation processing, the drawing control unit 34 sequentially reads the shot data stored in the shot data storage unit 33 in the order of the numbers of the stripe regions Sn, and continues drawing by the drawing unit 2 described above.

  Here, as the above-described comparative example, as shown in FIG. 6, a division process that does not subdivide the stripe area S1 at the start of drawing, that is, a division process that divides all stripe areas Sn based on the first specified value is performed. In this case, the stripe area S1 at the start of drawing is regarded as the distributed processing area D1.1 as it is because the data amount is 400 MB and is the same as the first specified value. The other stripe regions S2 to S9 are divided as described above.

  After this division processing, as shown in FIG. 7, according to the start of shot data generation, the data processing of the distributed processing area D1.1 is assigned to the core 1, and further, the distributed processing area D2.1 is assigned to the core 2. , Distributed processing area D3.1 is allocated to core 3, and so on. m is assigned to each of the cores 1 to 12 one by one.

  Since the data amount of the distributed processing area D1.1 is 400 MB, the data processing time is about time T2, that is, about eight times the time T1. For this reason, after the time T2 has elapsed since the start of shot data generation, the shot data in the stripe region S1 is ready and stored in the shot data storage unit 33. Therefore, after the time T2 elapses from the start of shot data generation, the shot data in the stripe region S1 is ready, but the waiting time until the start of drawing is the time T2, and this time T2 is eight times the time T1 described above. It will be long and remarkably long.

  As described above, according to the first embodiment of the present invention, the data amount in which the waiting time until the drawing start of the stripe region S1 at the start of drawing is within the allowable range is set in advance as the second specified value. When the data amount of the stripe region S1 at the start of drawing exceeds the second specified value, the stripe region S1 is subdivided. That is, by starting to draw the stripe area S1 that has begun to be drawn among the plurality of stripe areas Sn by subdividing the stripe area into a plurality of distributed processing areas D1.1 to D1.8 whose data amount is equal to or smaller than the second specified value. The stripe region S1 is divided into a plurality of distributed processing regions D1.1 to D1.8 having a data amount equal to or smaller than the second specified value, and data processing of these distributed processing regions D1.1 to D1.8 is performed in parallel. Executed. As a result, the data processing time of the stripe region S1 at the beginning of drawing is shortened, so that it is possible to suppress the extension of the drawing time due to waiting for data processing.

  Further, by making the number of divisions when performing the above-mentioned subdivision less than or equal to the number of processor cores 41a, each distributed processing region Dn. It is possible to reliably execute m data processing in parallel. As a result, the data processing time of the stripe region S1 at the start of drawing can be surely shortened, and as a result, the extension of the drawing time due to waiting for data processing can be reliably suppressed.

  Here, another example (first to third examples) of the dividing process for subdividing the stripe region S1 at the start of drawing will be described.

  First, in the first example, as shown in FIG. 8, the drawing area is divided into stripe areas Sn (indicated by S1 to S5 in FIG. 8) by the division processing unit 32a. In FIG. 8, the data amount of each of the stripe regions S1 to S3 is 400 MB, the data amount of the stripe region S4 is 700 MB, and the data amount of the stripe region S5 is 2400 MB.

  The stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the two specified stripe regions S2 and S3 from the stripe region S1 at the start of drawing have a second prescribed value of 50 MB and are subdivided based on the second prescribed value (eight in FIG. 8). .

  First, since the stripe area S1 at the start of drawing is an area having a data amount of 400 MB and larger than the second specified value 50 MB, the stripe area S1 is divided into eight equal parts based on the second specified value 50 MB. It is divided into distributed processing areas D1.1 to D1.8 whose amount is 50 MB. Since the next stripe region S2 and stripe region S3 are also regions having a data amount of 400 MB and larger than the second specified value of 50 MB, they are equally divided into eight based on the second specified value of 50 MB, The data amount is divided into distributed processing areas D2.1 to D2.8 and distributed processing areas D3.1 to D3.8 having a data amount of 50 MB.

  Since the next stripe area S4 is an area having a data amount of 700 MB and larger than the first specified value of 400 MB, the next stripe area S4 is divided into two equal parts based on 350 MB below the first specified value, and the data amount is 350 MB. It is divided into certain distributed processing areas D4.1 and D4.2. The stripe area S5 has a data amount of 2400 MB and is larger than the first specified value of 400 MB. Therefore, the stripe area S5 is divided into six equal parts based on the first specified value of 400 MB, and the data amount is 400 MB. Divided into D5.1 to D5.6.

  In this first example, since the second specified value is the same as 50 MB in each of the stripe regions S1 to S3, each distributed processing region D1.1 to D1.8, D2.1 to each stripe region S1 to S3. The data amount of D2.6 and D3.1 to D3.4 is 50 MB respectively. In this way, the distributed processing area Dn. From the stripe area S1 to a predetermined number of stripe areas (S3 in FIG. 8). Even in the method of dividing so that the data amount of m is equal to or less than the second specified value, it is possible to suppress the extension of the drawing time due to waiting for data processing.

  Next, in the second example, as shown in FIG. 9, the drawing area is divided into stripe areas Sn (indicated by S1 to S5 in FIG. 9) by the division processing unit 32a. In FIG. 9, as described above, the data amount of each of the stripe regions S1 to S3 is 400 MB, the data amount of the stripe region S4 is 700 MB, and the data amount of the stripe region S5 is 2400 MB.

  The stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the two stripe regions S2 and S3 from the first stripe region S1 to be drawn are subdivided based on a second specified value that gradually increases for each stripe region Sn. In FIG. 9, the second specified value increases to 50 MB, 100 MB, and 200 MB, and the stripe region S1 is subdivided into eight, the stripe region S2 into four, and the stripe region S3 into two.

  First, since the stripe area S1 at the start of drawing is an area having a data amount of 400 MB and larger than the second specified value 50 MB, the stripe area S1 is divided into eight equal parts based on the second specified value 50 MB. It is divided into distributed processing areas D1.1 to D1.8 whose amount is 50 MB. Since the next stripe area S2 is also an area having a data amount of 400 MB and larger than the second specified value of 100 MB, it is divided into four equal parts based on the second specified value of 100 MB, and the data amount is 100 MB. Are divided into distributed processing areas D2.1 to D2.4. Similarly, since the data amount of the stripe region S3 is 400 MB and larger than the second specified value of 200 MB, the stripe region S3 is divided into two equal parts based on the second specified value of 200 MB. It is divided into distributed processing areas D3.1 and D3.2 which are 200 MB. The subsequent division processing of the stripe regions S4 and S5 is the same as described above.

  In this second example, since the second specified value increases for each of the stripe areas S1 to S3, the data amount of each of the distributed processing areas D1.1 to D1.8 of the stripe area S1 is 50 MB, respectively, The data amount of each of the distributed processing regions D2.1 to D2.4 in the stripe region S2 is 100 MB, and the data amount of each of the distributed processing regions D3.1 and D3.2 in the next stripe region S3 is 200 MB. In this way, the distributed processing area Dn. Even with the method of gradually increasing the data amount of m, it is possible to suppress the extension of the drawing time due to waiting for data processing. The distributed processing area Dn. The data amount of m may be gradually decreased for each stripe region Sn, or may be increased or decreased for each stripe region Sn.

  In the third example, as shown in FIG. 10, the drawing area is divided into stripe areas Sn (indicated by S1 to S5 in FIG. 10) by the division processing unit 32a. In FIG. 10, as described above, the data amount of each of the stripe regions S1 to S3 is 400 MB, the data amount of the stripe region S4 is 700 MB, and the data amount of the stripe region S5 is 2400 MB.

  The stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the two stripe areas S2 and S3 from the stripe area S1 at the start of drawing are distributed to the distributed processing area Dn. It is subdivided based on a second specified value that gradually increases every m. In FIG. 10, the second specified value increases to 50 MB, 55 MB to 180 MB, and 220 MB, and the stripe region S1 is subdivided into six, the stripe region S2 into three, and the stripe region S3 into two.

  First, since the stripe area S1 at the start of drawing is an area larger than 50 MB, which is the first specified value of the area with a data amount of 400 MB, the first stripe area S1 increases to 50 MB, 55 MB, 60 MB, 65 MB, 75 MB, and 95 MB. Based on the prescribed value of 2, a distributed processing area D1.1 having a data amount of 50 MB, a distributed processing area D1.2 having a data amount of 55 MB, and a distributed processing area D1.3 having a data amount of 60 MB The data amount is divided into a distributed processing region D1.4 having a data amount of 65 MB, a distributed processing region D1.5 having a data amount of 75 MB, and a divided processing region D1.6 having a data amount of 95 MB. Since the next stripe area S2 is also an area larger than 110 MB, which is the first specified value of the area, and the data amount is 400 MB, the data is based on the second specified value increasing to 110 MB, 130 MB, and 160 MB. The data is divided into a distributed processing area D2.1 having an amount of 110 MB, a distributed processing area D2.2 having a data amount of 130 MB, and a distributed processing area D2.3 having a data amount of 160 MB. Similarly, since the data amount of the stripe area S3 is 400 MB and is an area larger than 180 MB, which is the second specified value at the beginning of the area, the data amount is determined based on the second specified value that increases to 180 MB and 220 MB. Is divided into a distributed processing area D3.1 having a data amount of 180 MB and a distributed processing area D3.2 having a data amount of 220 MB. The subsequent division processing of the stripe regions S4 and S5 is the same as described above.

  In the third example, since the second specified value increases for each of the distributed processing areas D1.1 to D3.2, the data amount of each of the distributed processing areas D1.1 to D1.6 in the stripe area S1 is from 50 MB. The amount of data in each of the distributed processing areas D2.1 to D2.3 in the next stripe area S2 has increased from 110 MB to 160 MB, and each of the distributed processing areas D3 in the next stripe area S3 has increased to 95 MB. .1, D3.2 data amount has also increased from 180 MB to 220 MB. In this way, the distributed processing area Dn. Even by a method of gradually increasing the amount of data every m, it is possible to suppress the extension of the drawing time due to waiting for data processing. The distributed processing area Dn. m has a data amount of the distributed processing area Dn. Conversely, it may be gradually reduced every m, or the distributed processing area Dn. It may be increased or decreased every m.

  In the second and third examples described above (see FIG. 9 and FIG. 10), the distributed processing region Dn. m data amount for each stripe area Sn or distributed processing area Dn. Although it is increased every m, the distributed processing area Dn. It is also possible to increase the data amount of m more finely according to the number of the stripe region Sn (or the number of the distributed processing region Dn.m).

  As a specific example, as shown in FIG. 11, a lower limit value is set to 50 MB, an upper limit value is set to 400 MB, a lower limit number is set to 3, a graph B1 in which the defining formula is linear, and a graph B2 in which the defining formula is a power are shown. Has been. Division processing is performed based on the graph B1 or the graph B2.

  In the graph B1, the distributed processing area Dn. The set data amount of m is the lower limit of 50 MB from the first stripe region S1 to the third stripe region S3, and then increases linearly from the fourth stripe region S3 to the seventeenth stripe region S17. The upper limit value is 400 MB from the 17th stripe region S17. When distributed processing is performed based on the graph B1, the distributed processing region Dn.1 from the first stripe region S1 to the third stripe region S3. The data amount of m is set to the lower limit value of 50 MB. Next, from the fourth stripe region S4, the distributed processing region Dn. The data amount of m is set to be increased based on the prescribed formula until the upper limit value of 400 MB is reached. Finally, in the stripe regions S17 to Sn after the seventeenth stripe region S17, the distributed processing region Dn. The data amount of m is set to the upper limit value of 400 MB. Even in the distributed processing based on such division processing, it is possible to suppress the extension of the drawing time due to waiting for data processing.

  In the graph B2, the distributed processing area Dn. The set data amount of m is the lower limit value of 50 MB from the first stripe region S1 to the third stripe region S3, and gradually increases from the fourth stripe region S3 to the twelfth stripe region S12. The upper limit value is 400 MB from the twelfth stripe region S12. When distributed processing is performed based on the graph B2, the distributed processing region Dn.1 from the first stripe region S1 to the third stripe region S3. The data amount of m is set to the lower limit value of 50 MB. Next, from the fourth stripe region S4, the distributed processing region Dn. The data amount of m is set to be increased based on the prescribed formula until the upper limit value of 400 MB is reached. Finally, in the stripe regions S12 to Sn after the twelfth stripe region S12, the distributed processing region Dn. The data amount of m is set to the upper limit value of 400 MB. Even in the distributed processing based on such division processing, it is possible to suppress the extension of the drawing time due to waiting for data processing.

  When this specific example (see FIG. 11) is generalized and used, the distributed processing from the a-th (1 ≦ a <b) stripe region Sa to N (0 ≦ N) stripe regions S (a + N). Region Dn. The set data amount of m is the lower limit value. Next, from the (a + N + 1) th stripe region S (a + N + 1), the distributed processing region Dn. The data amount of m is set so as to increase based on the prescribed formula until the upper limit value is reached. As this defining formula, for example, linearity, power, exponent, polynomial, or the like can be used. Finally, the distributed processing area Dn. Assuming that the stripe area where the data amount of m reaches the upper limit is the b-th stripe area Sb, in the stripe areas after the b-th stripe area Sb, the distributed processing area Dn. The data amount of m is set to the upper limit value. The lower limit value, the upper limit value, and the defining formula are preset in the division processing unit 32a, but can be changed by an operator's input operation on an input unit (not shown) such as a keyboard. In the first embodiment, since the subdivision process is started from the stripe region S1 at the start of drawing, the above-mentioned a is 1. However, the present invention is not limited to this, and the subdivision process is started from the intermediate stripe region. For this reason, the above-mentioned a is defined as 1 or more (see the second embodiment described later).

(Second Embodiment)
A second embodiment of the present invention will be described with reference to FIGS.

  The second embodiment of the present invention is basically the same as the first embodiment. In the second embodiment, differences from the first embodiment will be described, the same parts as those described in the first embodiment will be denoted by the same reference numerals, and the description thereof will also be omitted.

  In the second embodiment of the present invention, as shown in FIG. 12, the drawing area defined in the drawing data is divided into stripe areas Sn (indicated by S1 to S9 in FIG. 12) by the division processing unit 32a. . In FIG. 12, the data amount of each stripe region S1, S2, S8, S9 is 400 MB, the data amount of the stripe region S3 is 700 MB, and the data amount of each stripe region S4 to S7 is 0 MB. . Therefore, each of the stripe regions S4 to S7 is a null stripe region where there is no data.

  Here, when a predetermined number of null stripe regions (for example, 40 to 120, but four in FIG. 12) are continuous, a confirmation process for confirming the presence or absence of data for these null stripe regions is performed. Since the generation of shot data is interrupted during this period, the next shot data is not provided downstream from the previous shot data, and drawing may be interrupted.

  The above-described stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the stripe region S1 at the beginning of drawing has a second specified value of 50 MB, and is subdivided based on the second specified value (eight in FIG. 12), and further, stripe regions S4 to S4 having no data. When S7 is continuously present, the stripe region S8 at the start of the next drawing with data has a second specified value of 50 MB and is subdivided based on the second specified value (in FIG. 12, 8). As in the first embodiment, the stripe region Sn whose data amount is equal to or smaller than the first specified value is not divided and distributed processing regions Dn. The stripe region Sn which is regarded as 1 and whose data amount is larger than the first specified value is divided equally.

  First, the stripe region S1 at the beginning of drawing is a region having a data amount of 400 MB and larger than the second specified value of 50 MB, as in the first embodiment, and therefore the second specified value of 50 MB. Is divided into eight equal parts and divided into distributed processing areas D1.1 to D1.8 having a data amount of 50 MB. Since the next stripe area S2 has a data amount of 400 MB and is the same as the first specified value, it is regarded as the distributed processing area D2.1 as it is, and the stripe area S3 has a data amount of 700 MB and the first data amount. Therefore, it is divided into two equal parts based on 350 MB below the first specified value and divided into distributed processing areas D3.1 and D3.2 having a data amount of 350 MB.

  In the next stripe areas S4 to S7, the data amount is 0 MB, so the division process is not executed. At this time, data processing is not performed, but confirmation processing for confirming the presence or absence of data, that is, processing for determining whether there is data is performed over the stripe regions S4 to S7. If drawing of the stripe regions S1 to S3 is completed during this time, drawing is interrupted because there is no shot data of the next stripe region S8 that has data.

  Since the next stripe area S8 at the beginning of drawing is an area having a data amount of 400 MB and larger than the second specified value 50 MB, the data is divided into eight equal parts based on the second specified value 50 MB. It is divided into distributed processing areas D8.1 to D8.8 whose amount is 50 MB. The next stripe area S9 has a data amount of 400 MB and is the same as the first specified value, and therefore is regarded as the distributed processing area D9.1 as it is.

  Such division processing is executed for all the stripe areas Sn, and in accordance with the division processing, the distributed processing areas Dn. Data processing for each m is assigned to each processor core 41a of the CPU 41 for each computer 32c by the assignment processing unit 32b. As a result, the distributed processing area Dn. Data processing for each m is performed in parallel by each processor core 41a.

  Here, for example, as shown in FIG. 13, an assignment process when there are 12 processor cores 41 a as cores 1 to 12 will be described. In FIG. 13, the horizontal axis is a time axis, and a data processing flow (data processing time) is shown for each of the cores 1 to 12. The data processing capabilities of the cores 1 to 12 are the same.

  As shown in FIG. 13, according to the start of shot data generation, data processing in each of the distributed processing areas D1.1 to D1.8 is assigned to each of the cores 1 to 8 one by one, as in the first embodiment. Furthermore, the distributed processing area D2.1 is allocated to the core 9, the distributed processing area D3.1 is allocated to the core 10, and the distributed processing area D3.2 is allocated to the core 11.

  In response to this assignment, the cores 1 to 11 perform data processing of the assigned distributed processing areas D1.1 to D1.8, D2.1, D3.1, and D3.2 in parallel. At this time, since the data amount of each of the distributed processing areas D1.1 to D1.8 is 50 MB (see FIG. 12), their data processing time is time T1. Therefore, after a lapse of time T1 from the start of shot data generation, the shot data in the stripe region S1 is ready and stored in the shot data storage unit 33. In response to this, the drawing control unit 34 reads the shot data and starts drawing by the drawing unit 2. Thus, after the time T1 has elapsed from the start of shot data generation, the shot data in the stripe region S1 is ready, so the waiting time until the start of drawing is only the time T1.

  Further, since the data amount of the distributed processing area D2.1 is 400 MB, the data processing time is about eight times the time T1. Accordingly, after about eight times the time T1 has elapsed from the start of shot data generation, the shot data in the stripe region S2 is ready and stored in the shot data storage unit 33. Further, since the data amount of each of the distributed processing areas D3.1 and D3.2 is 350 MB, their data processing time is about seven times the time T1. Therefore, after about seven times the time T1 from the start of shot data generation, the shot data in the stripe region S3 is ready and stored in the shot data storage unit 33. Even during such shot data generation processing, the drawing control unit 34 sequentially reads the shot data stored in the shot data storage unit 33 in the order of the numbers of the stripe regions Sn, and continues drawing by the drawing unit 2 described above.

  Next, the data processing of the remaining distributed processing areas D4.1, D5.1, D6.1, and D7.1 is not assigned to each of the cores 1 to 12 because the data amount is zero. At this time, each of the cores 1 to 12 performs a confirmation process for confirming the presence or absence of the data amount for each of the distributed processing areas D4.1, D5.1, D6.1, and D7.1. If drawing of the stripe regions S1 to S3 is completed during this time, drawing is interrupted because there is no shot data of the next stripe region S8 that has data.

  After this confirmation processing, data processing in each of the distributed processing areas D8.1 to D8.8 is assigned to each of the cores 1 to 8, and further, the distributed processing area D9.1 is assigned to the core 9. In response to this assignment, each of the cores 1 to 9 performs data processing of the assigned distributed processing areas D8.1 to D8.8 and D9.1 in parallel. At this time, since the data amount of each of the distributed processing areas D8.1 to D8.8 is 50 MB (see FIG. 12), their data processing time is time T1. Therefore, after a lapse of time T1 from the start of shot data generation, the shot data in the stripe region S8 is ready and stored in the shot data storage unit 33. In response to this, the drawing control unit 34 reads the shot data and starts drawing by the drawing unit 2. Thus, after the time T1 has elapsed from the restart of the shot data generation, the shot data in the stripe region S8 is ready, so the waiting time until the start of drawing is only the time T1.

  Further, since the data amount of the distributed processing area D9.1 is 400 MB, the data processing time is about eight times the time T1. Accordingly, after about eight times the time T1 has elapsed since the start of shot data generation, the shot data in the stripe region S9 is ready and stored in the shot data storage unit 33. Even during such shot data generation processing, the drawing control unit 34 sequentially reads the shot data stored in the shot data storage unit 33 in the order of the numbers of the stripe regions Sn, and continues drawing by the drawing unit 2 described above.

  Here, as a comparative example described above, as shown in FIG. 14, a dividing process that does not subdivide the drawing start stripe region S1 and the drawing start stripe region S8 after drawing interruption, that is, all the stripe regions S1 are first processed. In the case of performing division processing based on the specified value, the stripe region S1 at the start of drawing is regarded as the distributed processing region D1.1 as it is because the data amount is 400 MB and is the same as the first specified value. It is. The stripe area S8 next to the null stripe area S7 is also regarded as the distributed processing area D8.1 as it is because the data amount is 400 MB and is the same as the first specified value. The other stripe regions S2 to S7 and S9 are divided as described above.

  After this division processing, as shown in FIG. 15, according to the start of shot data generation, the data processing of the distributed processing area D1.1 is assigned to the core 1, and further, the distributed processing area D2.1 is assigned to the core 2. The distributed processing area D3.1 is allocated to the core 3, and the distributed processing area D3.2 is allocated to the core 4. Further, after the confirmation processing as described above, the data processing of the distributed processing area D8.1 is assigned to the core 1, and the data processing of the distributed processing area D9.1 is assigned to the core 2.

  Since the data amount in each of the distributed processing areas D1.1, D2.1, D8.1, and D9.1 is 400 MB, each data processing time is about time T2, that is, about eight times the time T1. Therefore, after a lapse of time T2 from the start of shot data generation, the shot data of each stripe region S1, S2 is ready and stored in the shot data storage unit 33. In addition, after time T2 has elapsed from the confirmation processing, the shot data of each stripe region S8, S9 is ready and stored in the shot data storage unit 33. Accordingly, after time T2 has elapsed since the start of shot data generation or confirmation processing, the shot data of the stripe region S1 or stripe region S8 is ready, but the waiting time until drawing start or drawing restart is time T2, and this time T2 is about eight times longer than the above-described time T1, and becomes significantly longer.

  As described above, according to the second embodiment of the present invention, the same effects as those of the first embodiment can be obtained. Specifically, by subdividing at least the next stripe region S8 at the beginning of the null stripe regions S4 to S7 into a plurality of distributed processing regions D8.1 to D8.8 whose data amount is equal to or less than the second specified value. The stripe region S8 at the beginning of the next drawing is divided into a plurality of distributed processing regions D8.1 to D8.8 having a data amount equal to or smaller than the second specified value, and the distributed processing regions D8.1 to D8.8 are divided. Data processing is performed in parallel. As a result, the data processing time of the stripe region S8 at the beginning of the next drawing is shortened, so that the extension of the drawing time due to the waiting for data processing can be suppressed.

(Third embodiment)
A third embodiment of the present invention will be described with reference to FIGS.

  The third embodiment of the present invention is basically the same as the first embodiment. In the third embodiment, differences from the first embodiment will be described, and the same parts as those described in the first embodiment will be denoted by the same reference numerals, and the description thereof will also be omitted.

  In the third embodiment of the present invention, as shown in FIG. 16, the drawing area defined in the drawing data is shown by the division processing unit 32a as the stripe area Sn (in FIG. 16, S (n-8) to Sn). ). In FIG. 16, the data amount of each stripe region S (n-8), S (n-7), S (n-6) is 400 MB, and the data amount of the stripe region S (n-5) is The data amount of the stripe region S (n-4) is 800 MB, the data amount of the stripe region S (n-3) is 1200 MB, and the data amount of the stripe region S (n-2) is 1600 MB. Yes, the data amount of the stripe region S (n-1) is 2000 MB, and the data amount of the stripe region Sn is 2400 MB.

  The stripe region Sn is divided by the division processing unit 32a according to the data amount, for example, the first specified value is 400 MB, and is divided based on the first specified value. However, the distributed processing area Dn. At the end of drawing in the stripe area Sn at the end of drawing. 6, the second specified value is 50 MB, and is subdivided based on the second specified value (eight in FIG. 12). As in the first embodiment, the stripe region Sn whose data amount is equal to or smaller than the first specified value is not divided and distributed processing regions Dn. The stripe region Sn which is regarded as 1 and whose data amount is larger than the first specified value is divided equally.

  Since each stripe area S (n-8), S (n-7), S (n-6) has a data amount of 400 MB and is the same as the first specified value, the distributed processing area D ( n-8). 1, D (n-7). 1, D (n-6). 1 and the stripe area S (n−5) is an area having a data amount of 600 MB and larger than the first specified value of 400 MB. Therefore, the stripe area S (n−5) is based on 300 MB of the first specified value or less. Distributed processing area D (n-5)., Which is equally divided and has a data amount of 300 MB. 1, D (n-5). Divided into two. Since the stripe area S (n-4) is an area having a data amount of 800 MB and larger than the first specified value 400 MB, the stripe area S (n-4) is divided into two equal parts based on the first specified value 400 MB. Distributed processing area D (n-4). 1, D (n-4). Divided into two. Since the stripe area S (n-3) is an area having a data amount of 1200 MB and larger than the first specified value of 400 MB, the stripe area S (n-3) is divided into three equal parts based on the first specified value of 400 MB. Distributed processing area D (n-3). 1, D (n-3). 2, D (n-3). Divided into three.

  Since the next stripe area S (n−2) is an area having a data amount of 1600 MB and larger than the first specified value of 400 MB, it is divided into four equal parts based on the first specified value of 400 MB. , Distributed processing area D (n-2). 1, D (n-2). 2, D (n-2). 3, D (n-2). Divided into four. Since the stripe area S (n−1) is an area having a data amount of 2000 MB and larger than the first specified value of 400 MB, the stripe area S (n−1) is divided into five equal parts based on the first specified value of 400 MB. Distributed processing area D (n−1). 1, D (n-1). 2, D (n-1). 3, D (n-1). 4, D (n-1). Divided into five. The stripe region Sn is an area having a data amount of 2400 MB and larger than the first specified value of 400 MB. Therefore, the stripe region Sn is divided into six equal parts based on the first specified value of 400 MB, and the data amount is 400 MB. Distributed processing area Dn. 1, Dn. 2, Dn. 3, Dn. 4, Dn. 5, Dn. Divided into 6. Finally, the distributed processing area Dn. At the end of drawing in the stripe area Sn at the end of drawing. 6 is an area where the data amount is 400 MB and is larger than the second specified value of 50 MB. Therefore, the data is divided into eight equal parts based on the second specified value of 50 MB, and the data amount is 50 MB. Divided into distributed processing areas.

  Such division processing is executed for all the stripe areas Sn, and in accordance with the division processing, the distributed processing areas Dn. Data processing for each m is assigned to each processor core 41a of the CPU 41 for each computer 32c by the assignment processing unit 32b. As a result, the distributed processing area Dn. Data processing for each m is performed in parallel by each processor core 41a.

  Here, for example, as shown in FIG. 17, an assignment process when there are 12 processor cores 41 a as cores 1 to 12 will be described. In FIG. 17, the horizontal axis is a time axis, and a data processing flow (data processing time) is shown for each of the cores 1 to 12. In addition, the data processing capacity of each core 1-12 is equivalent.

  As shown in FIG. 17, each distributed processing area D (n-2). 3, D (n-2). 4, D (n-1). 1-D (n-1). 5, Dn. 1-Dn. Five data processes are assigned to each of the cores 1-12. In response to this assignment, each of the cores 1 to 12 is assigned to the distributed processing area D (n−2). 3, D (n-2). 4, D (n-1). 1-D (n-1). 5, Dn. 1-Dn. 5 data processing is performed in parallel. Each distributed processing area D (n-2). 3, D (n-2). 4 is another distributed processing area D (n-1). 1-D (n-1). 3 and the processing start time is slightly earlier than each distributed processing region D (n−1). 1-D (n-1). 3 is another distributed processing area D (n−1). 4, D (n-1). 5, Dn. 1-Dn. The processing start time is a little earlier than 5.

  Next, the distributed processing area Dn. Data processing of each distributed processing area (indicated by eight Dn. 6 in FIG. 17) into which 6 is divided is sequentially assigned to each of the cores 1 to 8 for which the above-described data processing has been completed. In response to this assignment, each of the cores 1 to 8 performs data processing of the assigned distributed processing area in parallel. At this time, since the data amount of each distributed processing area is 50 MB (see FIG. 16), the data processing time is time T1, but the processing start time is deviated. The total data processing time of 6 is time T3. Therefore, after the time T3 elapses after the shot data in the stripe region S (n-2) is ready, the shot data in the stripe region Sn is ready and stored in the shot data storage unit 33. In response to this, the drawing control unit 34 reads the shot data and performs drawing by the drawing unit 2. As described above, since the shot data of the stripe area Sn is ready after the time T3 has elapsed since the shot data of the stripe area S (n-2) is ready, until the drawing of the last stripe area Sn is started. It becomes possible to shorten the waiting time.

  Here, as a comparative example described above, as shown in FIG. 18, the distribution processing area Dn. At the end of drawing in the stripe area Sn at the end of drawing. 6 is divided, that is, when all the stripe regions S1 are divided based on the first specified value, the last distributed processing region Dn. 6 is not divided smaller than the first specified value, and the data amount is the same as the first specified value. The other stripe regions S (n-8) to S (n-1) are divided as described above.

  After this division processing, as shown in FIG. 19, D (n-2). 3, D (n-2). 4, D (n-1). 1-D (n-1). 5, Dn. 1-Dn. Five data processes are assigned to each of the cores 1-12. In response to this assignment, each of the cores 1 to 12 is assigned to the distributed processing area D (n-2). 3, D (n-2). 4, D (n-1). 1-D (n-1). 5, Dn. 1-Dn. 5 data processing is performed in parallel. Finally, the distributed processing area Dn. The data processing No. 6 is assigned to the core 1 for which the above data processing has been completed.

  In response to the assignment, the core 1 assigns the distributed processing area Dn. 6 data processing is performed. At this time, the distributed processing area Dn. Since the data amount of 6 is 400 MB, the data processing time is time T2. Therefore, after the time T2 has elapsed since the shot data in the stripe region S (n-2) is ready, the shot data in the stripe region Sn is ready and stored in the shot data storage unit 33. Therefore, after the time T2 has elapsed since the shot data of the stripe region S (n-2) is ready, the shot data of the stripe region Sn is ready, but until the drawing of the last stripe region Sn is started. The waiting time includes a time T2, and this time T2 is significantly longer than the time T3 described above.

  As described above, according to the third embodiment of the present invention, it is possible to obtain the same effects as those of the first embodiment described above. Specifically, at least the stripe region Sn at the end of drawing among the plurality of stripe regions Sn, that is, the distributed processing region Dn. 6 is subdivided into a plurality of distributed processing areas whose data amount is equal to or smaller than the second specified value, whereby the distributed processing area Dn. 6 is divided into a plurality of distributed processing areas having a data amount equal to or smaller than the second specified value, and data processing in these distributed processing areas is executed in parallel. As a result, the data processing time of the stripe region Sn at the end of drawing is shortened, so that the extension of the drawing time due to waiting for data processing can be suppressed.

  Here, as in the first embodiment described above, the distributed processing region Dn. Instead of increasing the data amount of m (see FIG. 11), the distributed processing region Dn. m data amount for each stripe area Sn or distributed processing area Dn. m can be decreased every m. For example, the distributed processing area Dn. It is also possible to reduce the data amount of m more finely according to the number of the stripe region Sn (or the number of the distributed processing region Dn.m).

  As a specific example, as shown in FIG. 20, a lower limit value is set to 50 MB, an upper limit value is set to 400 MB, a lower limit number is set to 3, a graph B3 in which the defining formula is linear, and a graph B4 in which the defining formula is a power are shown. ing. Division processing is performed based on the graph B3 or the graph B4.

  In the graph B3, the distributed processing area Dn. The set data amount of m is the upper limit of 400 MB up to the (n-16) th stripe region S (n-16), and then the (n-15) th stripe region S (n-15) to ( It decreases linearly to the n-2) stripe region S (n-2), and the lower limit value is 50 MB from the (n-2) th stripe region S (n-2) to the nth stripe region Sn. . When distributed processing is performed based on the graph B3, the distributed processing region Dn. Is up to the S (n-16) th stripe region S (n-16). The data amount of m is set to an upper limit value of 400 MB. Next, from the S (n-15) th stripe region S (n-15), the distributed processing region Dn. The data amount of m is set so as to decrease based on the prescribed formula until the lower limit value of 50 MB is reached. Finally, from the (n-2) th stripe region S (n-2) to the nth stripe region Sn, the distributed processing region Dn. The data amount of m is set to the lower limit value of 50 MB. Even in the distributed processing based on such division processing, it is possible to suppress the extension of the drawing time due to waiting for data processing.

  In the graph B4, the distributed processing area Dn. The set data amount of m is the upper limit of 400 MB up to the (n-11) th stripe region S (n-11), and then the (n-10) th stripe region S (n-10) to ( n-2) stripe area S (n-2) decreases to a power, and the lower limit value is 50 MB from the (n-2) th stripe area S (n-2) to the nth stripe area Sn. . When distributed processing is performed based on the graph B4, the distributed processing region Dn. Is up to the S (n-11) th stripe region S (n-11). The data amount of m is set to an upper limit value of 400 MB. Next, from the S (n-10) th stripe region S (n-10), the distributed processing region Dn. The data amount of m is set so as to decrease based on the prescribed formula until the lower limit value of 50 MB is reached. Finally, from the (n-2) th stripe region S (n-2) to the nth stripe region Sn, the distributed processing region Dn. The data amount of m is set to the lower limit value of 50 MB. Even in the distributed processing based on such division processing, it is possible to suppress the extension of the drawing time due to waiting for data processing.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Charged particle beam drawing apparatus 2 Drawing part 2a Drawing room 2b Optical barrel 3 Control part 11 Stage 21 Electron gun 22 Illumination lens 23 1st aperture 24 Projection lens 25 1st deflector 26 2nd aperture 27 Objective lens 28 Second deflector 31 Drawing data storage unit 32 Drawing data processing unit 32a Division processing unit 32b Allocation processing unit 32c Computer 33 Shot data storage unit 34 Drawing control unit 41 CPU
41a processor core 42 memory B electron beam W sample

Claims (5)

A drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, the stripe area is subjected to a plurality of dispersion processes according to a first specified value of the data amount. A drawing data processing unit that processes the drawing data in parallel for each distributed processing region, which is divided into regions or regarded as one distributed processing region,
A drawing unit that performs drawing with a charged particle beam on the sample for each of the stripe region or the dispersion processing region based on the data for each of the dispersion processing regions generated by the drawing data processing unit;
With
The drawing data processing unit has a plurality of distributions in which a data amount of a stripe region at the start of drawing or a stripe region at the end of drawing among the plurality of stripe regions is equal to or less than a second specified value smaller than the first specified value A charged particle beam drawing apparatus, which is subdivided into processing regions. A drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, the stripe area is subjected to a plurality of dispersion processes according to a first specified value of the data amount. A drawing data processing unit that processes the drawing data in parallel for each distributed processing region, which is divided into regions or regarded as one distributed processing region,
A drawing unit that performs drawing with a charged particle beam on the sample for each of the stripe region or the dispersion processing region based on the data for each of the dispersion processing regions generated by the drawing data processing unit;
With
The drawing data processing unit, when there is a continuous stripe area without data among the plurality of stripe areas, the next stripe area at the beginning of drawing with data has a data amount of the first specified value. A charged particle beam drawing apparatus characterized by subdividing into a plurality of distributed processing regions that are equal to or smaller than a small second specified value.   The drawing data processing unit includes a plurality of calculation units that process the drawing data in parallel, and the number of divisions when the subdivision is performed is equal to or less than the number of the calculation units. Or the charged particle beam drawing apparatus of 2. A drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, the stripe area is subjected to a plurality of dispersion processes according to a first specified value of the data amount. A process of dividing the drawing data into parallel or processing the drawing data in parallel for each of the distributed processing areas;
Based on the data for each of the distributed processing regions generated by processing the drawing data in parallel, drawing with a charged particle beam on the sample for each of the stripe regions or the distributed processing regions;
Have
In the step of processing the drawing data in parallel, a stripe area at the start of drawing or a stripe area at the end of drawing of the plurality of stripe areas is less than a second specified value that is smaller than the first specified value. A charged particle beam writing method characterized by subdividing into a plurality of distributed processing regions. A drawing area defined by drawing data for drawing a pattern on a sample is divided into a plurality of stripe areas, and for each stripe area, the stripe area is subjected to a plurality of dispersion processes according to a first specified value of the data amount. A process of dividing the drawing data into parallel or processing the drawing data in parallel for each of the distributed processing areas;
Based on the data for each of the distributed processing regions generated by processing the drawing data in parallel, drawing with a charged particle beam on the sample for each of the stripe regions or the distributed processing regions;
Have
In the process of processing the drawing data in parallel, when there are continuous stripe areas without data among the plurality of stripe areas, the data area of the first drawing start stripe area with data is the first amount. A charged particle beam writing method comprising: subdividing into a plurality of distributed processing regions that are equal to or smaller than a second prescribed value that is smaller than the prescribed value.

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