JP2013016704A - Pattern formation apparatus, painting development apparatus, substrate transfer method using the same, and method of manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pattern formation apparatus and a painting development apparatus, being advantageous in improvement of a transfer throughput of a substrate between the pattern formation apparatus and the painting development apparatus.SOLUTION: The pattern formation apparatus performs delivery of a substrate to/from an adjoining painting development apparatus. A first control part on the pattern formation apparatus side, when starting a pattern formation process on a substrate, transmits a first signal (S41-2) which predicts a new substrate delivery to a second control part on the painting development apparatus side at the time when operation of a first transfer hand 35 is started or thereafter, and which causes starting of operation of a second transfer hand 52 in advance. During operation of the second transfer hand 52, the first control part transmits a second signal (S41-4) requiring operation of the second transfer hand 52.

Description

  The present invention relates to a pattern forming apparatus, a coating and developing apparatus, a substrate conveying method using the same, and a device manufacturing method.

  In an exposure apparatus as a pattern forming apparatus, a photo resist (resist) is applied to a pattern of an original (reticle or mask) through a projection optical system in a lithography process which is a manufacturing process of a semiconductor device, a liquid crystal display device, or the like. An apparatus for transferring to a substrate such as a wafer. For example, in a lithography process related to a semiconductor device manufacturing process, as a pre-process of an exposure process by an exposure apparatus, there is a coating process in which a resist is applied onto the surface of the wafer, while a post-processed wafer is developed as a post-process. There is a development process to do. As an apparatus for performing the coating process and the development process, for example, a coater / developer having both a coating function such as a spin coater that can rotate a wafer at high speed to uniformly coat a resist on the surface of the wafer, and a developing function. There is a coating and developing apparatus.

  Wafer transfer between the exposure apparatus and the coating / development apparatus avoids the complexity of throwing in lots processed in each process, and improves the throughput while maintaining the chemical characteristics of the resist. This is automatically performed by a substrate transfer apparatus installed between the apparatuses. In addition, when connecting the exposure apparatus and the coating and developing apparatus in this way (in-line connection), a transfer section for transferring wafers between the apparatuses by the substrate transfer apparatus is installed in any apparatus or each apparatus. Is done. Here, in order to efficiently manufacture a semiconductor device with high throughput, it is required to efficiently carry the wafer at the transfer section.

  In general, the substrate transport apparatus sequentially carries unexposed wafers, for which the coating process has been completed by the coating and developing apparatus, to a first delivery section (carry-in section) installed inside the exposure apparatus. On the other hand, when the exposed wafer whose exposure process has been completed by the exposure apparatus is unloaded to the coating and developing apparatus, it is once sent to a second delivery section (unloading section) installed inside the exposure apparatus and waits. In other words, wafer transfer between the exposure apparatus and the coating / developing apparatus is mainly carried from the coating / developing apparatus to the exposure apparatus at the initial stage of lot processing. However, as the lot processing proceeds, loading and unloading are performed sequentially. Will be implemented in parallel.

  In such wafer transfer (delivery), the substrate transfer device receives communication commands such as “operation start request” and “operation completion notification” from each device, and sequentially performs operations corresponding to the communication commands in real time. We are carrying out. However, for example, when the exposure apparatus transitions to a state in which the wafer can be received and transmits an operation start request to the substrate transfer device on the coating and developing apparatus side, between the operation start request and the operation completion notification, All the operation times of the substrate transfer apparatus are included. That is, a waiting time occurs in the substrate transport apparatus on the exposure apparatus side until all of the single transport operation of the substrate transport apparatus on the coating and developing apparatus side is completed. Therefore, Patent Document 1 discloses a processing apparatus that transmits an operation start request in advance by a time set in the apparatus parameter and starts the operation of the transport hand on the coating and developing apparatus side regardless of the safety state of the exposure apparatus. doing. Further, Patent Document 2 discloses a processing device including a safety measure (interlock) for the advance of an operation start request as shown in Patent Document 1.

JP 2008-91508 A JP 2008-153474 A

  However, in Patent Document 1, the definition of the operation start request for the wafer carry-in operation transmitted from the exposure apparatus to the coating / developing apparatus is defined as “the transfer hand of the exposure apparatus completes the wafer acquisition operation from the carry-in unit” and “ The transport hand is not accessing the carry-in section. That is, in the processing apparatus shown in Patent Document 1, the transmission timing of the operation start request is random rather than the parameter setting, and the “operation start request for carry-in” = “interference between the conveyance hand of the exposure apparatus and the conveyance hand of the coating and developing apparatus” "No" relationship is not guaranteed. Therefore, in order to prevent interference between the transport hands, it is necessary to add an interlock function as shown in Patent Document 2 and to modify hardware for that purpose, but the cost of the apparatus becomes high. Further, in this case, since the operation by the operator is indispensable for the recovery from the emergency stop state (stop by the interlock), it is not preferable from the user's work surface.

  The present invention has been made in view of such circumstances, and provides a pattern forming apparatus and a coating and developing apparatus that are advantageous in improving the substrate transport throughput between the pattern forming apparatus and the coating and developing apparatus. Objective.

  In order to solve the above problems, a first aspect of the present invention is a pattern forming apparatus that transfers a substrate to and from an adjacent coating and developing apparatus, and is movable while holding the substrate. A first transfer device including at least one first transfer hand and at least one first transfer unit that waits at the time of transfer; and a first control unit that controls the operation of the first transfer device; The apparatus includes a second transfer device including at least one second transfer hand that can move while holding the substrate, and at least one second transfer unit that waits at the time of transfer, and the operation of the second transfer device. A second control unit that controls the first control unit, when starting the pattern forming process on the substrate, when starting the operation of the first transport hand, or thereafter, with respect to the second control unit And The first signal for notifying the transfer operation of the substrate is transmitted to start the operation of the second transport hand in advance, and the second signal for instructing the operation of the second transport hand is transmitted during the operation of the second transport hand. It is characterized by doing.

  According to a second aspect of the present invention, there is provided a coating and developing apparatus for transferring a substrate to and from a pattern forming apparatus provided adjacent thereto, and at least one second transport that is movable while holding the substrate. The pattern forming apparatus holds a substrate, comprising: a second transport device including at least one second delivery unit that waits during hand delivery and a substrate; and a second control unit that controls the operation of the second transport device. A first transport device including at least one first transport hand that can be moved and at least one first transfer unit that waits at the time of handing over, and a first control unit that controls the operation of the first transport device The second control unit starts a coating process or a development process on the substrate, starts the operation of the second transport hand, or thereafter, starts a new operation with respect to the first control unit. substrate A first signal for notifying the delivery operation is transmitted to start the operation of the first transport hand in advance, and a second signal for instructing the operation of the first transport hand is transmitted during the operation of the first transport hand. And

  ADVANTAGE OF THE INVENTION According to this invention, the pattern formation apparatus and coating / developing apparatus which are advantageous to the improvement of the conveyance throughput of a board | substrate between a pattern formation apparatus and a coating / developing apparatus can be provided.

1 is a schematic diagram showing a configuration of a lithography system according to the present invention. It is the schematic which shows the structure of the exposure apparatus main body which concerns on one Embodiment of this invention. It is a flowchart which shows the conventional wafer conveyance sequence. It is a flowchart which shows the conveyance sequence of the wafer which concerns on one Embodiment. It is a flowchart which shows the conveyance sequence of the wafer which concerns on one Embodiment.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

(Lithography system)
First, the configuration of a lithography system including a pattern forming apparatus and a coating and developing apparatus according to an embodiment of the present invention will be described. In particular, in the present embodiment, an exposure apparatus is adopted as the pattern forming apparatus. FIG. 1 is a schematic diagram showing the configuration of a lithography system 1 according to this embodiment. The lithography system 1 is employed, for example, in a lithography process in a semiconductor device manufacturing process, and is installed so that an exposure apparatus 2 and a coating / developing apparatus 3 are adjacent to each other in a clean room in a manufacturing factory. Yes. The exposure apparatus 2 is an apparatus that performs exposure processing (pattern formation processing) on a wafer, which is a substrate having a resist (photosensitive agent) layer formed on the surface, on a pattern formed on a reticle (original). In the coating and developing apparatus 3, the pattern is transferred as a pre-process (pre-process) for the exposure process by the exposure apparatus 2 as a pre-process (pre-process) for applying a resist on the wafer surface and as a post-process (post-process) for the exposure process. It is an apparatus that mainly performs development processing for developing a wafer.

(Exposure equipment)
Next, the configuration of the exposure apparatus 2 according to this embodiment will be described. The exposure apparatus 2 includes a chamber 4 that covers the entire apparatus, and an exposure unit 5 that accommodates a main body that performs an exposure process, and a substrate transfer apparatus (a substrate transfer apparatus that transfers a wafer between the coating and developing apparatus 3). (Hereinafter referred to as “first transfer device”) 6. FIG. 2 is a schematic diagram showing a configuration of the main body 20 installed inside the exposure unit 5. The main body 20 is a projection type exposure apparatus that employs a step-and-repeat method or a step-and-scan method to project and expose a pattern formed on the reticle 21 onto the wafer 22. In FIG. 2, the Z axis is taken in parallel to the optical axis of the projection optical system, the Y axis is taken in the scanning direction of the wafer 22 during scanning exposure in a plane perpendicular to the Z axis, and is orthogonal to the Y axis. An explanation will be given taking the X axis in the non-scanning direction. The main body 20 includes an illumination device 23, a reticle stage 24 that holds the reticle 21, a projection optical system 25, and a wafer stage 26 that holds the wafer 22.

  The illumination device 23 includes a light source (not shown) and an illumination optical system, and illuminates the reticle 21. For example, a pulse light source (laser) is used as the light source. Usable lasers include an ArF excimer laser having a wavelength of about 193 nm and an F2 excimer laser having a wavelength of about 153 nm. The type of laser is not limited to the excimer laser, and for example, a YAG laser may be used, and the number of lasers is not limited. When a laser is used as the light source, a light beam shaping optical system that shapes a parallel light beam from the laser light source into a desired beam shape or an incoherent optical system that makes a coherent laser incoherent may be used. preferable. Further, usable light sources are not limited to pulsed light sources, and continuous light sources such as one or a plurality of mercury lamps and xenon lamps can also be used. The illumination optical system includes a lens, a mirror, a light integrator, or a diaphragm. The reticle 21 is, for example, an original plate made of quartz glass, and a pattern (for example, a circuit pattern) to be transferred is formed. The reticle stage (original stage) 24 is movable in the XY directions while holding the reticle 21. The projection optical system 25 projects and exposes the pattern on the reticle 21 illuminated with the exposure light from the illumination device 23 onto the wafer 22 at a predetermined magnification (for example, 1/4 or 1/5). As the projection optical system 25, an optical system composed only of a plurality of refractive lens elements, or an optical system composed of a plurality of refractive lens elements and at least one concave mirror (catadioptric optical system) can be adopted. is there. Alternatively, as the projection optical system 25, an optical system composed of a plurality of refractive lens elements and at least one diffractive optical element such as a kinoform, an all-mirror optical system, or the like can be employed. The wafer 22 is a substrate to be processed made of, for example, single crystal silicon and having a resist coated on the surface. Further, the wafer stage 26 is movable in the XY directions while holding the wafer 22. For example, when the step-and-scan method is adopted, the reticle stage 24 and the wafer stage 26 are translated in synchronization with each other.

  The first transfer device 6 first includes a pre-alignment unit 30 that performs wafer positioning in advance and a supply hand 31 that supplies a wafer from the pre-alignment unit 30 to the wafer stage 26 in the main body 20 prior to the exposure process. Prepare. Further, the first transfer device 6 includes a carrier port 32 as a part on which the open cassette is placed when the wafer is directly loaded into the main body 20 using an open cassette that can store a plurality of wafers. The carrier port 32 may be configured to place a FOUP (Front Opening Unified Pod), which is a sealed carrier, instead of an open cassette. In addition, the first transport device 6 includes a first carry-in portion 33 and a first carry-out portion 34 as a first delivery portion when the wafer is delivered between the exposure device 2 and the coating and developing device 3. A transfer hand 35 for appropriately transferring a wafer to each part constituting the transfer device 6 is provided. The transport hand 35 is, for example, a horizontal articulated robot (scalar robot). The first carry-in unit 33 is a delivery unit for carrying an unexposed wafer from the coating / developing apparatus 3 to the exposure apparatus 2, but a process such as a pre-alignment processing unit such as the pre-alignment unit 30 or a temperature adjustment unit. You may have a processing part. On the other hand, the first carry-out unit 34 is a delivery unit when carrying out the exposed wafer from the exposure apparatus 2 to the coating and developing apparatus 3, but may also have a process processing unit such as a peripheral exposure processing unit.

  Further, the exposure apparatus 2 is configured by, for example, a computer, is connected to each component of the exposure apparatus 2 via a line, and can control each component according to a program or the like (hereinafter referred to as “first control”). 7). Note that the first control unit 7 may be configured integrally with the inside of the exposure apparatus 2 or may be installed at a place different from other parts of the exposure apparatus 2.

(Coating and developing device)
Next, the configuration of the coating and developing apparatus 3 according to this embodiment will be described. As shown in FIG. 1, the coating and developing apparatus 3 transports a wafer between the coating and developing processing unit 8 installed in the chamber 40 and the exposure apparatus 2 installed in the chamber 41. And a device (hereinafter referred to as “second transport device”) 9. The coating and developing processing unit 8 includes a coating unit 44, a heating unit 45, a developing unit 46, and a cooling unit 47 as a process processing unit for a wafer. The coating unit 44 employs, for example, a spin coater, and forms a uniform resist film by rotating the wafer while dropping the resist on the surface of the wafer placed horizontally. The heating unit 45 performs pre-baking (PreBake) on the unexposed wafer and pre-development baking (Post Exposure Bake) on the exposed wafer. Pre-baking is a heat treatment performed after applying a resist on the surface of a wafer, for evaporating the residual solvent in the resist film and for enhancing the adhesion between the resist film and the wafer surface. Since this pre-baking is performed on an unexposed wafer (before exposure), it is desirable that the pre-baking is performed at a temperature at which the polymer treatment is not polymerized and thermal decomposition of the additive does not occur. On the other hand, the pre-development bake is a heat treatment performed on the wafer after the exposure and before the development process in order to reduce the deformation of the resist pattern due to the standing wave effect when exposed to light of a single wavelength. Furthermore, the pre-development baking has the effect of promoting the catalytic reaction after exposure of the chemically amplified resist. Note that a resistance heating method, an infrared heating method, or the like can be employed as a method of baking in the heating unit 45. The developing unit 46 develops the exposed wafer. As a development processing method in the developing unit 46, a spin method, a spray method, or the like can be adopted. The cooling unit 47 employs a cooling plate that is cooled by circulating cooling water, for example, and cools the heated wafer. In addition, as another system of the cooling process in the cooling unit 47, there is electronic cooling by the Peltier effect. Further, the coating and developing processing unit 8 includes a carrier port 48 as a part on which a carrier such as an open cassette or a FOUP is placed, and a transfer hand 49 that appropriately transfers a wafer between the carrier and each process processing unit. The transport hand 49 is, for example, a scalar robot. Such an open cassette or FOUP can be transported in a clean room by a manual transport vehicle (PGV) and can be automatically loaded into and unloaded from the carrier port 48. On the other hand, an open cassette or FOUP may be mounted on the carrier port 48 from above in the clean room by OHT (Over Head Transfer).

  The second transport device 9 includes a second carry-in unit 50 and a second carry-out unit 51 as a second delivery unit when delivering a wafer between the exposure device 2 and the coating and developing device 3. Further, the second transfer device 9 appropriately transfers the wafer between the second carry-in unit 50 and the second carry-out unit 51 and the first carry-in unit 33 and the first carry-out unit 34 installed in the first transfer device 6. A transport hand 52 is provided. The transport hand 52 is, for example, a scalar robot. The second carry-in unit 50 is a delivery unit for carrying in an exposed wafer from the exposure apparatus 2 to the coating and developing unit 8, while the second carry-out unit 51 is transferred from the coating and developing unit 8 to the exposure apparatus 2. This is a delivery unit when unexposed wafers are unloaded.

  Furthermore, the coating and developing apparatus 3 is configured by, for example, a computer and is connected to each component of the coating and developing apparatus 3 via a line, and can control each component according to a program or the like (hereinafter referred to as “first”). 2 control section) 10. Note that the second control unit 10 may be configured integrally with the inside of the coating and developing apparatus 3 or may be installed at a place different from other parts of the coating and developing apparatus 3.

  Next, a processing operation in the lithography system 1 will be described. Hereinafter, it is assumed that 25 wafers, which are substrates to be processed, are stored in an open cassette as one lot and are transported to the carrier port 48 of the coating and developing processing unit 8 in the coating and developing apparatus 3. First, in the coating and developing processing unit 8, the transport hand 49 acquires a wafer from the open cassette placed on the carrier port 48 and transports it to the coating unit 44, and the coating unit 44 resists the loaded wafer. The application of is carried out. Next, the transport hand 49 unloads the resist-coated wafer from the coating unit 44 and transports it to the heating unit 45, and the heating unit 45 performs a pre-bake process on the wafer. Next, the transfer hand 49 unloads the wafer after the pre-bake processing from the heating unit 45 and transfers it to the cooling unit 47, and the cooling unit 47 performs the cooling process on the wafer. Here, it is desirable that the temperature of the wafer to be subsequently loaded into the exposure apparatus 2 is adjusted so as not to affect the inside of the chamber 4 of the exposure apparatus 2, that is, the temperature of the air conditioning system in the main body 20 as a target temperature. However, in the exposure apparatus 2 of the present embodiment, if the temperature adjustment unit is also installed in the first carry-in unit 33 in the first transfer device 6, the wafer carried from the coating and developing apparatus 3 is finally and finely defined. The temperature can be adjusted. Therefore, in the cooling unit 47, it is sufficient that the temperature of the wafer is close to the target temperature to some extent, and the temperature may be slightly higher than the final target temperature. Next, the transfer hand 49 unloads the wafer cooled to a desired target temperature from the cooling unit 47 and transfers it to the second unloading unit 51. The transfer hand 49 sequentially acquires the wafers stored in the open cassette in this way and transfers them to each process processing unit. Then, the transfer hand 52 in the second transfer device 9 transfers the wafer held by the second carry-out unit 51 to the first carry-in unit 33 in the first transfer device 6 in the exposure apparatus 2.

  Next, in the other first transfer device 6, the first carry-in unit 33 adjusts the temperature of the wafer to the predetermined temperature as described above by the internal temperature adjustment unit. Next, the transfer hand 35 carries out the wafer whose temperature has been adjusted from the first carry-in unit 33 and carries it to the pre-alignment unit 30. In the pre-alignment unit 30, the wafer is placed on an internal stage and rotated by a drive system (not shown). At this time, the edge portion of the wafer is detected by a detector such as a CCD sensor, and the control unit 7 calculates the notch direction, the wafer center, and the amount of eccentricity based on the output from the detector. Then, the pre-alignment unit 30 aligns the direction of the notch portion finally formed on the wafer with a predetermined direction. Next, the supply hand 31 unloads the wafer that has undergone the pre-alignment process from the pre-alignment unit 30 and supplies the wafer to the wafer stage 26 in the main body 20, and the main body 20 performs an exposure process on the wafer.

  After the exposure process is completed, the transfer hand 35 acquires the exposed wafer from the wafer stage 26 and transfers it to the first unloading unit 34. Next, the transport hand 52 in the second transport device 9 transports the wafer from the first carry-out unit 34 to the second carry-in unit 50, and the transport hand 49 in the coating and developing processing unit 8 continues to the second carry-in unit. The wafer is transferred from 50 to the heating unit 45. Next, the heating unit 45 performs pre-development baking on the loaded wafer. Next, the transfer hand 49 unloads the wafer that has undergone the pre-development baking process from the heating unit 45 and transfers it to the developing unit 46, where the wafer is developed. Then, the transport hand 49 unloads the wafer having undergone the development process from the developing unit 46 and loads it into a predetermined slot of the open cassette placed on the carrier port 48. The lithography system 1 sequentially performs such a series of processes on all the wafers in the open cassette. In other words, after the exposure processing for the first wafer of the lot is completed, each transfer hand 35, 49, 52 is subjected to the transfer operation of the exposed wafer from the exposure apparatus 2 to the coating and developing apparatus 3, and thus the unexposed wafer. And the transfer operation for the exposed wafer are performed in parallel.

(Substrate transport method)
Next, a wafer transfer method in the lithography system 1 will be described. First, a conventional conveying method will be described as a comparative example. FIG. 3 is a flowchart showing a wafer transfer sequence between a conventional exposure apparatus and a coating and developing apparatus. In particular, this transport sequence is a time chart that focuses on the operations of the transport hand of the first transport device in the exposure apparatus and the transport hand of the second transport device in the coating and developing apparatus. Hereinafter, for the purpose of explanation, the same reference numerals as those of the exposure apparatus 2 and the coating and developing apparatus 3 of the present embodiment are assigned to the constituent elements of the conventional exposure apparatus and the coating and developing apparatus.

  First, the transport operation of the transport hand 35 in the first transport device 6 of the exposure apparatus 2 will be described. The first control unit 7 of the exposure apparatus 2 moves the transport hand 35 to the first carry-in part 33 when carrying the wafer from the coating and developing apparatus 3 side to the exposure apparatus 2 side in order to start the exposure process (Move1: Step S31-1). Next, the first control unit 7 confirms that there is a wafer to be subjected to exposure processing in the first carry-in unit 33, and if there is a wafer, causes the transfer hand 35 to acquire the wafer from the first carry-in unit 33. (Wafer Get: Step S31-2). Next, the first control unit 7 causes the second transfer unit 9 in the coating and developing apparatus 3 to transfer the wafer to be processed next, the second control unit 10 of the coating and developing apparatus 3. An “import request” is sent to (step S31-3). Next, the first control unit 7 moves the transfer hand 35 to the pre-alignment unit 30 while holding the wafer acquired from the first carry-in unit 33 (Move2: Step S31-4). Then, the first control unit 7 introduces the transfer hand 35 into the pre-alignment unit 30 and loads (places) the wafer (Wafer Put: Step S31-5). The above transport sequence relates to the operation of the transport hand 35 before the exposure apparatus 2 starts the exposure process.

  Next, the transport operation of the transport hand 52 in the second transport device 9 of the coating and developing apparatus 3 corresponding to the transport operation of the transport hand 35 in the first transport device 6 will be described. First, the second control unit 10 of the coating and developing apparatus 3 moves the transport hand 52 to the second unloading unit 51 by receiving a “loading request” from the first control unit 7 in Step S31-3 (Move1). : Step S32-1). Next, the second control unit 10 causes the transfer hand 52 to acquire a wafer. (Wafer Get: Step S32-2). Next, the second control unit 10 moves the transfer hand 52 to the first carry-in unit 33 of the first transfer device 6 while holding the wafer acquired from the second carry-out unit 51 (Move2: Step S32-3). ). Next, the second control unit 10 reconfirms whether the “import request” received in step S31-3 is valid (step S32-4). This reconfirmation also has a meaning as a safety measure for preventing the transport hand 35 of the first transport device 6 and the transport hand 52 of the second transport device 9 from interfering at a certain position. Next, the second control unit 10 introduces the transfer hand 52 into the first carry-in unit 33, and loads (places) the wafer (Wafer Put: step S32-5). Then, the second control unit 10 transmits a “carry-in completion notification” to the first control unit 7 of the exposure apparatus 2 (step S32-6).

  Here, referring to the conventional transfer sequence shown in FIG. 3, the start timing of the operation of the transfer hand 52 with respect to a series of operations of the transfer hand 35 is a specific state, that is, step S31-2. Start after the end of. Therefore, it is understood that the waiting time occurs in the transport hand 35 until the series of operations of the transport hand 52 is completed and the “loading completion notification” in step S32-6 is received. The occurrence of this standby time affects the throughput related to wafer transfer between the exposure apparatus 2 and the coating and developing apparatus 3. Therefore, in this embodiment, the waiting time of the transport hand 35 is reduced by adding a “pre-input request” to the transport sequence.

  Next, the conveying method of this embodiment will be described. FIG. 4 is a flowchart showing a wafer transfer sequence between the exposure apparatus 2 and the coating and developing apparatus 3 of the present embodiment, corresponding to the conventional transfer sequence shown in FIG. In particular, in the present embodiment, the first control unit 7 executes, as Move1, Step S41-1 corresponding to Step S31-1 in FIG. (First signal) is transmitted (step S41-2). Note that this transmission timing is an example. For example, the transmission timing can be advanced (earlier) than the end timing of step S41-1, and may be simultaneously with the start of step S41-1. Further, when the operation time of the transfer hand (first transfer hand) 35 is longer than the operation time of the transfer hand (second transfer hand) 52, the operation completion timing of the transfer hand 52 is higher than the operation completion timing of the transfer hand 35. It is desirable to determine the transmission timing so that it comes before. Also in this case, the transmission timing of the “carry-in request” (second signal) (step S41-4) transmitted after the end of step S41-3 corresponding to step S31-2 in FIG. It is before the transmission timing of (confirmation of validity of import request). Hereinafter, steps S41-5 and S41-6 correspond to steps S31-4 and S31-5 of FIG. 3, respectively.

  On the other hand, after receiving the “request before carry-in” in step S41-2 from the first control unit 7, the second control unit 10 performs Step S43- corresponding to step S32-1 in FIG. 2 is executed. Next, the second control unit 10 executes Step S43-2 corresponding to Step S32-2 in FIG. 3 as a Wafer Get operation. Next, in the present embodiment, after receiving the “import request” from the first control unit 7, the second control unit 10 performs step S 42-corresponding to step S 32-3 in FIG. 3 as a Move 2 operation without delay. 3 is executed. Hereinafter, steps S42-4, S42-5, and S42-6 correspond to steps S32-4, S32-5, and S32-6 of FIG. 3, respectively. In the transport sequence of FIG. 4, when either the transport hand 35 or the transport hand 52 stops due to a power interruption or the like in the middle of the sequence, it can be normalized by restarting the synchronization process from the beginning.

  As described above, the first control unit 7 pre-loads a “pre-loading request” before transmitting a “loading request” to the second control unit 10 when the wafer is transferred from the coating and developing apparatus 3 to the exposure apparatus 2. Is transmitted, the operation start timing of the transport hand 52 of the second transport device 9 is advanced. As a result, as shown in FIG. 3, the first control unit 7 receives the “loading completion notification” from the second control unit 10 within the operation time of the transport hand 35 of the first transport device 6. 2 The operation of the transport hand 52 of the transport device 9 is completed. Accordingly, no waiting time occurs in the transport hand 35 of the first transport device 6.

  Next, a modified example of the transport method according to the present embodiment will be described. FIG. 5 is a flowchart showing a wafer transfer sequence corresponding to the transfer sequence of the present embodiment shown in FIG. 4 and showing the transfer sequence when an error occurs on the exposure apparatus 2 side. In FIG. 5, the same steps as those in FIG. Here, for example, in the first transport device 6 on the exposure apparatus 2 side, a suction error has occurred while the first control unit 7 is executing Step S41-3, that is, during the Wafer Get operation by the transport hand 35. Assume that When such a suction error occurs, first, the first control unit 7 executes a retry operation in step S41-3. At this time, the second control unit 10 performs the Move1 operation (step S42-3) up to the position immediately before entering the first carry-in unit 33 of the carry hand 52 based on the “request before carry-in” in step S41-2. continuing. Then, the second control unit 10 reconfirms whether or not the “carry-in request” is valid in step S42-4. In this case, the second control unit 10 determines that the “carry-in request” is invalid because it has not been received. The Move1 operation is temporarily stopped. During this time, the first control unit 7 normally ends the retry operation for the transport hand 35, and then transmits a “carry-in request” to the second control unit 10 as step S41-4. Next, the second control unit 10 reconfirms whether the received “carry-in request” is valid (step S42-3A), and if it is determined to be valid, the second control unit 10 proceeds to the following step S42-5. . In this way, even when an error occurs during the transport sequence, interference between the transport hand 35 and the transport hand 52 can be prevented, so that an interlock function is added to the exposure apparatus 2 or the coating and developing apparatus 3. There is no need for this, and high costs can be avoided. Furthermore, there is no recovery from the stop of the apparatus due to an interlock that requires an operation by an operator, which is advantageous from the user's work surface.

  The transfer sequence of the above embodiment relates to the transfer of the wafer from the coating / developing apparatus 3 to the exposure apparatus 2, but the present invention, on the contrary, is the wafer from the exposure apparatus 2 to the coating / developing apparatus 3. It is also applicable to the conveyance of Further, in the present embodiment, the first transport device 6 on the exposure apparatus 2 side and the second transport device 9 on the coating and developing apparatus 3 side each include two delivery sections, a carry-in section and a carry-out section. On the other hand, this invention is not limited to this, For example, the 1st conveying apparatus 6 and the 2nd conveying apparatus 9 can also have a structure provided with one carrying in / out part, respectively.

  As described above, according to the exposure apparatus and the coating and developing apparatus of the present embodiment, the waiting time of at least one of the substrate transport apparatuses can be reduced in the substrate transport between the exposure apparatus and the coating and developing apparatus. Therefore, it is advantageous for improving the conveyance throughput.

  In the above embodiment, the exposure apparatus is used as the pattern forming apparatus. However, the present invention is not limited to this. For example, an imprint apparatus that forms an uncured resin on a substrate with a mold (mold) and forms a resin pattern on the substrate may be employed as the pattern forming apparatus. Further, as a pattern forming apparatus, a drawing apparatus for drawing predetermined drawing data at a predetermined position on a substrate by deflecting a charged particle beam such as an electron beam and controlling ON / OFF of irradiation of the charged particle beam. It may be adopted. In these cases, the specifications of the coating and developing apparatus adjacent to the pattern forming apparatus are appropriately changed according to the pattern forming apparatus to be employed.

(Device manufacturing method)
Next, a method for manufacturing a device (semiconductor device, liquid crystal display device, etc.) according to an embodiment of the present invention will be described. A semiconductor device is manufactured through a pre-process for producing an integrated circuit on a wafer and a post-process for completing an integrated circuit chip on the wafer produced in the pre-process as a product. The pre-process includes a process of forming a pattern on the wafer coated with the photosensitive agent using the pattern forming apparatus described above, and a process of developing the wafer. The post-process includes an assembly process (dicing and bonding) and a packaging process (encapsulation). A liquid crystal display device is manufactured through a process of forming a transparent electrode. The step of forming a transparent electrode includes a step of applying a photosensitive agent to a glass substrate on which a transparent conductive film is deposited, a step of forming a pattern on a glass substrate on which a photosensitive agent is applied using the pattern forming apparatus described above, A step of developing the glass substrate. According to the device manufacturing method of the present embodiment, it is possible to manufacture a higher quality device than before.

  As mentioned above, although preferable embodiment of this invention was described, this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

DESCRIPTION OF SYMBOLS 2 Exposure apparatus 3 Coating / developing apparatus 6 1st conveying apparatus 9 2nd conveying apparatus 7 1st control part 10 2nd control part 35 Conveying hand 52 Conveying hand

Claims (10)

A pattern forming apparatus for transferring a substrate to and from an adjacent coating and developing apparatus,
A first transfer device including at least one first transfer hand that is movable while holding the substrate and at least one first transfer unit that waits during transfer of the substrate;
A first control unit that controls the operation of the first transport device,
The coating and developing apparatus includes: a second transport device including at least one second transport hand that can move while holding the substrate; and at least one second transfer unit that waits when the substrate is transferred; A second control unit that controls the operation of the transport device,
The first control unit starts the operation of the first transport hand when starting the pattern forming process on the substrate, or after that, the second control unit sends a new substrate to the substrate. A first signal for notifying the delivery operation is transmitted to start the operation of the second transport hand in advance, and a second signal requesting the operation of the second transport hand is transmitted during the operation of the second transport hand. A pattern forming apparatus. The timing at which the first control unit transmits the second signal is after the first transport hand acquires the substrate from the first delivery unit,
The timing at which the second control unit receives the second signal is before the second transport hand moves the new substrate to the first delivery unit.
The pattern forming apparatus according to claim 1.   The first control unit determines the timing of transmitting the first signal so that the operation completion timing of the second transport hand is before the operation completion timing of the first transport hand. The pattern forming apparatus according to claim 1 or 2.   The second control unit reconfirms whether or not the second signal has been received after moving the second transport hand to the first delivery unit, and determines that the second signal has not been received. The pattern forming apparatus according to claim 1, wherein the operation is temporarily stopped until the second signal is received. A coating and developing apparatus for transferring a substrate between adjacent pattern forming apparatuses,
A second transfer device including at least one second transfer hand that can move while holding the substrate and at least one second transfer unit that waits at the time of transfer;
A second control unit that controls the operation of the second transport device,
The pattern forming apparatus includes: a first transfer device including at least one first transfer hand that is movable while holding the substrate; and at least one first transfer unit that waits when the substrate is transferred; A first control unit that controls the operation of the transport device,
The second control unit starts the application process or the development process for the substrate, starts the operation of the second transport hand, or thereafter, the new control unit A first signal for notifying the substrate transfer operation is transmitted to start the operation of the first transport hand in advance, and a second signal for requesting the operation of the first transport hand is issued during the operation of the first transport hand. A coating and developing apparatus for transmitting. The timing at which the second control unit transmits the second signal is after the second transport hand acquires the substrate from the second delivery unit,
The timing at which the first control unit receives the second signal is before the first transport hand moves the new substrate to the second delivery unit.
The coating and developing apparatus according to claim 5.   The second control unit determines the timing of transmitting the first signal so that the operation completion timing of the first transport hand is before the operation completion timing of the second transport hand. The coating and developing apparatus according to claim 5 or 6.   The first control unit reconfirms whether or not the second signal has been received after moving the first transport hand to the second delivery unit, and determines that the second signal has not been received. The coating and developing apparatus according to claim 5, wherein the operation is temporarily stopped until the second signal is received. A substrate transfer method for transferring a substrate between a pattern forming apparatus and a coating and developing apparatus that are adjacent to each other,
The pattern forming apparatus includes: a first transfer device including at least one first transfer hand that is movable while holding the substrate; and at least one first transfer unit that waits when the substrate is transferred; A first control unit that controls the operation of the transport device,
The coating and developing apparatus includes: a second transport device including at least one second transport hand that can move while holding the substrate; and at least one second transfer unit that waits when the substrate is transferred; A second control unit that controls the operation of the transport device,
When the first control unit or the second control unit starts the operation of the first transport hand or the second transport hand included in either, or after that,
A first signal for notifying the delivery operation of the new substrate is transmitted to the other first control unit or the second control unit, and the operation of the other first transport hand or the second transport hand is performed in advance. Start,
A substrate transport method, comprising: transmitting a second signal requesting an operation of the first transport hand or the second transport hand during the operation of the other first transport hand or the second transport hand. Forming a pattern on a substrate using the pattern forming apparatus according to claim 1;
Developing the substrate on which the pattern is formed;
A device manufacturing method comprising:

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