JP2013004160A - Optical assist magnetic head and optical coupling structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical assist magnetic head for easily handling and positioning a small deflection mirror, and an optical coupling structure.SOLUTION: The optical assist magnetic head includes: a magnetic head part having a slider provided with one surface and an end surface provided at one end of the one surface in a predetermined direction to float and relatively move with respect to a recording medium in accordance with the rotation of a disk-like recording medium, a light source fixed to the one surface to emit light in a predetermined direction, a lateral surface opposite to a joint surface to the end surface, and an optical waveguide for guiding light made incident from a light incident surface; and a deflection mirror having a concave type reflection surface confronting both the light source and the light incident surface to have a predetermined curvature, and a flange part extending in a predetermined direction with respect to the reflection surface and brought into contact with a reference surface formed with one of the lateral surface and the one surface to reflect and converge light from the light source toward/on the light incident surface by the reflection surface.

Description

  The present invention relates to a technology of an optically assisted magnetic head and an optical coupling structure, and more particularly, to a light having a configuration related to a technology of deflecting light from a light source by a mirror and guiding it to an optical waveguide in a minute size structure that is difficult to handle. The present invention relates to an assist magnetic head and an optical coupling structure.

  In a magnetic recording system used for a hard disk drive (HDD), when an attempt is made to increase the recording density, the interval between magnetic bits becomes narrow, and the polarity becomes unstable due to a superparamagnetic effect or the like. For this reason, a recording medium having a high coercive force is required. However, when such a recording medium is used, a magnetic field required for recording also increases. However, although the upper limit of the magnetic field generated by the recording head is determined by the saturation magnetic flux density, the value approaches the material limit and there is a fact that a dramatic increase cannot be expected. Therefore, the recording is performed by locally heating during recording to cause magnetic softening and recording with a reduced coercive force. Thereafter, heating is stopped and natural cooling is performed to ensure the stability of the recorded magnetic bit. A recording method has been proposed. This recording method is called a heat-assisted magnetic recording method.

  In the heat-assisted magnetic recording method, it is desirable that the recording medium is instantaneously heated. Further, the heating mechanism and the recording medium rotating at high speed are not allowed to come into contact with each other. For this reason, heating is generally performed by irradiating a recording medium with a minute spot of laser light, and this method is called an optically assisted magnetic recording method. When ultra-high density recording is performed by the optically assisted magnetic recording method, the required spot diameter is about 20 nm. However, a normal optical system has a diffraction limit, so that light cannot be condensed to that extent. Therefore, an optically assisted magnetic head using near-field light (sometimes referred to as “near-field light”) generated from an optical aperture having a size equal to or smaller than the incident light wavelength may be used. In general, the optically assisted magnetic head is provided so as to move on the recording medium in parallel with the surface thereof, and the size of the magnetic head of the optically assisted magnetic recording system is small. For this reason, optical components constituting the magnetic head are also required to have a small size, and actually, a size of several tens to several hundreds of μm is used.

  An example of an optically assisted magnetic head is disclosed in Patent Document 1.

  In the optically assisted magnetic head described in Patent Document 1, light emitted from a semiconductor laser (LD: Laser Diode) is deflected by 90 ° by a surface reflection type deflection mirror, and is irradiated to the optical waveguide. By using such a surface reflection mirror, the LD can be placed horizontally on the slider, and the head can be made thinner.

JP 2011-60408 A

  As described above, when an optical component is provided on the slider, the optical component is very small and is difficult to handle. Therefore, the problem is how to handle and position the optical component and attach it to the slider.

  That is, an object of the present invention is to provide an optically assisted magnetic head and an optical coupling structure in which a minute deflection mirror can be easily handled and positioned.

The invention according to claim 1 includes one surface and an end surface provided at one end of the one surface in a predetermined direction, and floats with respect to the recording medium according to the rotation of the disk-shaped recording medium. The relative moving slider, the light source fixed to the one surface and emitting light in the predetermined direction, the side surface opposite to the joint surface with the end surface, and the light incident from the light incident surface. A magnetic head having a guiding optical waveguide; a concave reflecting surface having a predetermined curvature facing both the light source and the light incident surface; and extending in a predetermined direction with respect to the reflecting surface; and A deflection mirror having a flange portion in contact with a reference surface including any one of a side surface and the one surface, and reflecting and condensing light from the light source toward the light incident surface by the reflection surface; And an optically assisted magnetic head.
A second aspect of the present invention is the optically assisted magnetic head according to the first aspect, wherein the reference surface is the side surface, and the flange portion has a plate-like shape extending along the side surface. there are, said the plate surface on the side where the reflective surface is facing out of the pair of plate surfaces of the flange portion and butted and the side, and wherein the deflecting mirror is indirectly secured to the slider To do.
A third aspect of the present invention is the optically assisted magnetic head according to the second aspect, wherein the deflecting mirror extends the fixing range of the deflecting mirror along the side surface. A part of the light incident surface side is cut out.
The invention according to claim 4 is the optically assisted magnetic head according to claim 2 or 3, wherein the flange portion has a mark on at least one of the pair of plate surfaces, The reflecting surface is held at the predetermined position by fixing the deflecting mirror so that a predetermined position in a reference surface and the mark have a predetermined positional relationship. To do.
The invention according to claim 5 is the optically assisted magnetic head according to claim 1, wherein the reference surface is the one surface, and the flange portion has an optical path from the light source to the reflection surface. A pair of plate-like shapes provided along the one surface in a direction from the end surface toward the opposite end surface, and the reflective surface of the pair of plate surfaces of the flange portion The deflecting mirror is directly fixed to the slider by attaching the plate surface on the facing side and the one surface together.
A sixth aspect of the present invention is the optically assisted magnetic head according to the fifth aspect, wherein the deflecting mirror expands the fixing range of the deflecting mirror along the one surface. A part on the light source side is cut out.
The invention according to claim 7 is the optically assisted magnetic head according to claim 5 or 6, wherein the flange portion has a mark on at least one of the pair of plate surfaces, The reflecting surface is held at the predetermined position by fixing the deflecting mirror so that a predetermined position in a reference surface and the mark have a predetermined positional relationship. To do.
According to an eighth aspect of the present invention, there is provided a substrate including one surface and an end surface provided at one end of the one surface in a predetermined direction, fixed to the one surface, and configured to emit light in the predetermined direction. a light source for emitting a side opposite to the junction surface between said end surface, and an optical waveguide for guiding the light incident from the light incident surface, a head portion having the faces to both the light source and the light incident surface A concave reflection surface having a predetermined curvature, and a flange portion that extends in a predetermined direction with respect to the reflection surface and is in contact with a reference surface that is one of the side surface and the one surface. And a deflecting mirror for reflecting and condensing the light from the light source toward the light incident surface by the reflecting surface.

  The deflecting mirror provided in the optically assisted magnetic head and the optical coupling structure according to the present invention includes a flange portion, and holds the reflecting surface in a predetermined position by bringing the flange portion into contact with the reference surface. Thereby, it becomes possible to ensure the handling property of a micro deflection | deviation mirror by using a flange part as a handle.

It is a perspective view which shows schematic structure of an information recording device. 1 is a schematic cross-sectional view showing an example of an optically assisted magnetic head according to a first embodiment. FIG. 3 is an enlarged cross-sectional view around the one-dimensional focusing optical element of the optically assisted magnetic head according to the first embodiment. It is a perspective view of the one-dimensional condensing optical element which concerns on 1st Embodiment. It is the front view which looked at the one-dimensional condensing optical element which concerns on 1st Embodiment from the x direction. It is the top view which looked at the one-dimensional condensing optical element which concerns on 1st Embodiment from the z direction. It is the side view which looked at the one-dimensional condensing optical element which concerns on 1st Embodiment from the y direction. It is a figure for demonstrating the optical path of the light from a light source part at the time of using the one-dimensional condensing optical element which concerns on 1st Embodiment. It is a figure for demonstrating the alignment method of the one-dimensional condensing optical element which concerns on 1st Embodiment. It is a figure for demonstrating the alignment method of the one-dimensional condensing optical element which concerns on 1st Embodiment. It is the table | surface which put together the simulation result of the Example. It is the graph which showed the simulation result of the Example. It is the perspective view which showed the one aspect | mode of the one-dimensional condensing optical element which concerns on 1st Embodiment. It is the schematic sectional drawing which showed an example of the optically assisted magnetic head which concerns on 2nd Embodiment. It is an expanded sectional view of the periphery of the one-dimensional focusing optical element of the optically assisted magnetic head according to the second embodiment. It is a perspective view of the one-dimensional condensing optical element which concerns on 2nd Embodiment. It is the front view which looked at the one-dimensional condensing optical element which concerns on 2nd Embodiment from the x direction. It is the top view which looked at the one-dimensional condensing optical element which concerns on 2nd Embodiment from the z direction. It is the side view which looked at the one-dimensional condensing optical element which concerns on 2nd Embodiment from the y direction. It is a figure for demonstrating the optical path of the light from a light source part at the time of using the one-dimensional condensing optical element which concerns on 2nd Embodiment. It is a figure for demonstrating the alignment method of the one-dimensional condensing optical element which concerns on 2nd Embodiment. It is a figure for demonstrating the alignment method of the one-dimensional condensing optical element which concerns on 2nd Embodiment. It is the perspective view which showed the one aspect | mode of the one-dimensional condensing optical element which concerns on 2nd Embodiment.

(First embodiment)
FIG. 1 shows a schematic configuration of an optically assisted magnetic recording apparatus (for example, a hard disk apparatus, hereinafter also referred to as “information recording apparatus”) equipped with an optically assisted magnetic recording head. The information recording apparatus 1 includes, for example, a plurality of rotatable disks (magnetic recording media) 3 for recording, a head support portion 5, a tracking actuator 7, an optically assisted magnetic head 4, a driving device (not shown), Is provided in the housing 2. The disk 3 may be one. The head support portion 5 is provided to be rotatable in the direction of arrow A (tracking direction) with the support shaft 6 as a fulcrum. The tracking actuator 7 is attached to the head support portion 5. The optically assisted magnetic head 4 is attached to the tip of the head support portion 5. A drive device (not shown) rotates the disk 3 in the direction of arrow B. The information recording apparatus 1 is configured such that the optically assisted magnetic head 4 can move relatively while flying over the disk 3.

(Optical assist magnetic head 4)
FIG. 2A is a sectional view showing a schematic configuration example of the optically assisted magnetic head 4. The optically assisted magnetic head 4 is a minute optical recording head that uses light for information recording on the disk 3. The optically assisted magnetic head 4 includes a light source unit 20, a slider 10, and a one-dimensional condensing optical element 30. The information recording apparatus 1 is configured such that the disk 3 is moved in the direction of arrow C, and the optically assisted magnetic head 4 can move relatively while flying over the disk 3. In FIG. 2A, the rotation direction (arrow C direction) of the disk 3 is the y direction, the thickness direction of the optically assisted magnetic head 4 is the z direction, and the direction orthogonal to both the y direction and the z direction is the x direction.

  The slider 10 has a plate shape, and has a lower surface 10b facing the disk 3 and an upper surface 10a located on the opposite side of the lower surface 10b in the z direction. The slider 10 has an end face 10c at the end in the y direction. The slider 10 corresponds to a “substrate”. The upper surface 10a corresponds to “one surface”, and the end surface 10c corresponds to “an end surface provided at one end of the one surface in a predetermined direction”.

  The light source unit 20 includes a semiconductor laser (hereinafter simply referred to as “LD”). The wavelength of light emitted from the LD constituting the light source unit 20 is a wavelength from visible light to near infrared (the wavelength band is about 0.6 μm to 2 μm, and the specific wavelength is 650 nm, 780 nm, 830 nm, 1310 nm, 1550 nm, etc.). As shown in FIG. 2B, the light source unit 20 has a light emitting surface 20a and a bottom surface 20b. The light source unit 20 is disposed on the upper surface 10 a of the slider 10. At this time, the bottom surface 20b and the top surface 10a face each other. The light source unit 20 emits light from the light emitting surface 20 a toward the reflecting surface 31 of the one-dimensional condensing optical element 30. The light emitted from the light source unit 20 reaches the reflection surface 31 of the one-dimensional condensing optical element 30.

  The one-dimensional condensing optical element 30 is a surface reflection type condensing mirror that deflects (reflects) light from the light source unit 20 and guides it to the optical waveguide incident surface 14 a of the optical waveguide 14. As illustrated in FIG. 2B, the one-dimensional condensing optical element 30 includes a concave reflecting surface 31 having a curvature on the yz plane and a flange portion 32. The one-dimensional condensing optical element 30 receives the light from the light source unit 20 by the reflection surface 31, reflects the light by the reflection surface 31, deflects it by 90 °, and guides it to the optical waveguide incident surface 14 a. At this time, the light from the light source unit 20 is condensed on the optical waveguide incident surface 14 a by the curvature of the reflection surface 31. A specific configuration of the one-dimensional condensing optical element 30 will be described later. In the present embodiment, the one-dimensional condensing optical element 30 corresponds to a “deflection mirror”. The optical waveguide incident surface 14a corresponds to a “light incident surface”.

  The slider 10 has a magnetic head portion 13 on the end face 10c. The magnetic head portion 13 is formed to have a predetermined thickness in the y direction, and has an end surface 13a, an end surface 13b, and a side surface 13c. The end surface 13a is provided in the vicinity of the end of the end surface 10c on the upper surface 10a side so as to rise from the end surface 10c in the y direction. The end surface 13b is formed on the opposite side of the end surface 13a in the z direction. Further, the side surface 13c is provided on the side opposite to the side surface joined to the end surface 10c. The magnetic head unit 13 includes an optical waveguide 14, a magnetic recording unit (not shown), and a magnetic information reproducing unit (not shown). The magnetic head unit 13 corresponds to a “head unit”.

The optical waveguide 14 guides the light guided by the one-dimensional condensing optical element 30 and emits it toward the disk 3. Optical waveguide 14, although not shown, the lower cladding layer, a core layer, an upper cladding layer, along the thickness direction (y-direction) in which light orthogonal to the direction of propagation, in which were stacked in this order. The core layer is formed of a material (for example, Ta ₂ O ₅ ) having a higher refractive index than each cladding layer (for example, formed of SiO ₂ ). Thereby, the light guided to the optical waveguide 14 propagates toward the disk 3 while being totally reflected between the core layer and each cladding layer.

  As shown in FIG. 2B, the optical waveguide 14 has an optical waveguide incident surface 14a on the end surface 13a of the magnetic head portion 13, and the optical waveguide exits on the end surface 13b (surface facing the disk 3) opposite to the end surface 13a. It has surface 14b. A plasmon probe 15 as a near-field light generating element is provided on the optical waveguide exit surface 14 b of the optical waveguide 14. The light deflected by the one-dimensional condensing optical element 30 enters from the optical waveguide incident surface 14a and travels through the optical waveguide 14 toward the optical waveguide exit surface 14b. The plasmon probe 15 provided on the optical waveguide exit surface 14 b converts the light guided by the one-dimensional condensing optical element 30 into near-field light and emits it toward the disk 3. A magnetic recording unit (not shown) writes magnetic information to the recording portion of the disk 3. A magnetic information reproducing unit (not shown) reads magnetic information recorded on the disk 3.

(One-dimensional condensing optical element 30)
Next, a specific configuration of the one-dimensional condensing optical element 30 will be described with reference to FIGS. 2B, 3 and 4A to 4C. FIG. 3 is a perspective view showing an example of the one-dimensional condensing optical element 30. FIG. 4A is a front view of the one-dimensional condensing optical element 30 as viewed from the x direction. FIG. 4B is a plan view of the one-dimensional condensing optical element 30 as viewed from the z direction. FIG. 4C is a side view of the one-dimensional condensing optical element 30 as viewed from the y direction.

  The one-dimensional condensing optical element 30 is a deflecting mirror that deflects incident light by a cylindrical reflecting surface 31 having a concave surface. As shown in FIG. 3, the one-dimensional condensing optical element 30 has a reflecting surface 31 and a flange portion 32. The reflecting surface 31 is formed in a cylindrical shape on one ridge line of the rectangular parallelepiped by cutting a part of the rod-shaped rectangular parallelepiped into a cylindrical shape. A specific configuration of the reflecting surface 31 will be described later. Moreover, the plate-shaped flange part 32 is provided so that it may extend | stretch in the perpendicular direction of the side surface from any one of the side surfaces continuous with the reflective surface 31 among the side surfaces of the rectangular parallelepiped mentioned above. Moreover, the notch part 33 is provided by notching the edge part by which the flange part 32 was provided among the edge parts of the reflective surface 31. FIG. In other words, as shown in FIG. 2B, when the one-dimensional focusing optical element 30 is fixed to the magnetic head 13, a portion facing the end surface 13 a is cut out of the side surface on the side where the flange portion 32 is provided. Thus, the notch 33 is provided. Details of the notch 33 will be described later.

  As shown in FIG. 3, the flange portion 32 is provided so as to extend in the z direction (downward) from the surface facing the z direction among the side surfaces continuous with the reflecting surface 31.

  Reference is now made to FIGS. The flange portion 32 has a plate surface 32a on the side facing the reflection surface 31, and a plate surface 32b on the opposite side of the plate surface 32a. The plate surface 32a is joined after being abutted against the side surface 13c. Accordingly, the one-dimensional condensing optical element 30 is fixed to the magnetic head unit 13 (that is, indirectly fixed to the slider 10). In other words, the plate surface 32 a is provided along the side surface 13 c when the one-dimensional condensing optical element 30 is fixed to the magnetic head unit 13. At this time, the reflecting surface 31 is supported at a predetermined position so as to face both the light emitting surface 20a and the optical waveguide incident surface 14a (see FIG. 2B). At this time, the notch 33 faces the end surface 13a of the magnetic head 13 (see FIG. 2B). By providing the flange portion 32, even when the reflecting surface 31 is very small, handling can be ensured by using the flange portion 32 as a handle, and the assembly of the optically assisted magnetic head 4 is also possible. It becomes easy. Further, the flange portion 32 can also be used as an adhesion location for fixing the one-dimensional condensing optical element 30 to the magnetic head portion 13. Thereby, even if the reflective surface 31 is very small, it becomes possible to ensure a wide bonding location.

  The reflecting surface 31 is formed as a concave circumferential surface that is approximately a quarter of a cylinder having a cylinder axis in the x direction. In other words, the reflecting surface 31 is formed as a concave surface having a predetermined curvature on the yz plane. When the one-dimensional condensing optical element 30 is fixed to the magnetic head unit 13, the reflecting surface 31 is supported so as to face both the light emitting surface 20a and the optical waveguide incident surface 14a. As described above, since the reflecting surface 31 is formed as a concave surface, the light incident on the reflecting surface 31 can be reflected and collected by the curvature of the reflecting surface 31.

  The reflecting surface 31 is exposed and functions as a surface reflecting mirror. On the reflection surface 31, a metal film such as gold (Au) or aluminum (Al) or a reflection film of a dielectric multilayer film is formed. Thereby, the reflecting surface 31 functions as a surface reflecting mirror. Since it is a surface reflection mirror, there is no incident surface and no light exit surface, and no surface reflection occurs on these surfaces, so that it is possible to reduce light quantity loss. Further, when the reflectance can be obtained without forming the reflective film, the reflective surface may be used as it is without forming the reflective film.

  Here, an example of a method for determining the holding position of the reflecting surface 31 and the curvature of the reflecting surface 31 in an ideal state will be described in detail with reference to FIG. 2B. A radius L1 in FIG. 2B indicates the radius of curvature of the reflecting surface 31 (hereinafter referred to as “curvature radius L1”). As shown in FIG. 2B, the position where the reflecting surface 31 is held so that the light emitted from the light source unit 20 in the y direction is deflected by 90 ° in the z direction and enters the optical waveguide incident surface 14a. It is determined. At this time, the normal line of the reflecting surface 31 extended from a point on the reflecting surface 31 where the light traveling in the y direction from the light source unit 20 is incident and the surface obtained by extending the optical waveguide incident surface 14a in the direction of the light source unit 20 intersect. The reflective surface 31 is formed so that the base point P1 of the radius of curvature L1 is located at the position where it is to be. In other words, the reflecting surface 31 is provided so as to have a curvature with a radius of curvature L1 on the yz plane with a point P1 provided on a surface obtained by extending the optical waveguide incident surface 14a in the direction of the light source unit 20 as a base point. Yes. The method for determining the curvature of the reflecting surface 31 described above is an example, and is not limited to the above determination method. Depending on the design of the optical system, that is, the positional relationship between the light source unit 20 and the optical waveguide 14, the position of the base point P <b> 1 is not limited to a surface obtained by extending the optical waveguide incident surface 14 a in the direction of the light source unit 20.

  Thus, since the reflecting surface 31 is a concave cylindrical surface, it has a condensing function (that is, a one-dimensional condensing function) which condenses light only in a direction having a curvature. Reference is now made to FIG. FIG. 5A shows an optical path of light from the light source unit 20 when the one-dimensional condensing optical element 30 according to the present embodiment is used. As shown in FIG. 5A, the reflecting surface 31 receives light emitted from the light source unit 20 in the y direction and reflects this light in the z direction. Thereby, the light emitted from the light source unit 20 in the y direction is deflected by 90 ° in the z direction and guided to the optical waveguide incident surface 14a. At this time, the reflection surface 31 condenses the light reflected and traveling in the z direction in the y direction. Thus, since the condensing function of the reflective surface 31 is one-dimensional, the condensed light becomes linear.

  As shown in FIG. 5A, when the slider 10, the magnetic head unit 13, and the light source unit 20 are assembled according to the designed dimensions, the one-dimensional condensing optical element 30 transmits light from the light source unit 20 to the optical waveguide. It is designed to be guided to the incident surface 14a. However, when the slider 10 and the light source unit 20 are joined, an error occurs in the z direction with respect to the position of the optical axis of the light from the light source unit 20 due to variations in the thickness direction of solder or the like used for joining. There is a case. Hereinafter, a characteristic structure for correcting the error in the z direction and an alignment method will be described.

  First, refer to FIG. 5A. As shown in FIG. 5A, the end portion of the reflecting surface 31 on the side where the flange portion 32 is provided (the optical waveguide incident surface 14a side when the one-dimensional condensing optical element 30 is fixed) is cut off. The notch 33 is provided by notching. The notch 33 is provided so as to face the end surface 13a. In the following, when the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a is L0, the z direction between the notch 33 and the end surface 13a is Let the distance be L2. By providing the notch 33, the range in the z direction in which the one-dimensional condensing optical element 30 can be fixed widens by the distance L2. Note that the range in the z direction in which the one-dimensional condensing optical element 30 can be fixed corresponds to the “fixable range” in the present embodiment, and this fixable range is widened by the notch 33 by the distance L2. A specific effect by providing the notch 33 will be described later together with the alignment method when the one-dimensional condensing optical element 30 is used. Instead of providing the notch 33, the end surface 13a may be notched in the z direction.

(Alignment method)
Next, an alignment method using the one-dimensional condensing optical element 30 will be described with reference to FIGS. 5A to 5C. FIG. 5B is a diagram for explaining the alignment method, and shows a state before alignment. FIG. 5C is a diagram for explaining the alignment method, and shows a state after alignment.

  For example, FIG. 5B shows a state where an error in the z direction occurs at the position of the light source 20. At this time, the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a is L0a (L0a> L0). Thus, when the light source unit 20 is displaced in the z direction, the optical axis of the emitted light is shifted. Thereby, since the light emitted from the light source unit 20 is reflected on the reflection surface 31 at a position different from that in the case of FIG. 5A, the position where the reflected light is condensed is an optical waveguide as shown in FIG. 5B. It shifts in the y direction from the incident surface 14a. In the optically assisted magnetic head 4 according to the present embodiment, when the one-dimensional condensing optical element 30 is fixed, the light from the light source unit 20 is incident by sliding the one-dimensional condensing optical element 30 in the z direction. The position on the reflecting surface 31 is adjusted. The alignment method will be specifically described below.

  First, the light source unit 20, the slider 10, and the magnetic head unit 13 are assembled. The positional relationship among the light source unit 20, the slider 10, and the magnetic head unit 13 at this time is as shown in FIG. 5B. That is, the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a is L0a, and the one-dimensional condensing optical element 30 is a predetermined position specified at the time of design (FIG. 5A). The position where the reflected light is collected is shifted from the light guide incident surface 14a to the side opposite to the light source unit 20 along the y direction.

  Next, an adhesive is applied to the plate surface 32a of the flange portion 32, the plate surface 32a is abutted against the side surface 13c, and the plate surface 32a and the side surface 13c are temporarily joined. Accordingly, the one-dimensional condensing optical element 30 is temporarily held at a predetermined position specified at the time of design. In this state, the one-dimensional condensing optical element 30 is slidably held in the z direction without curing the adhesive. For example, an adhesive that is cured by heat or ultraviolet rays may be used as the adhesive.

  Next, the one-dimensional condensing optical element 30 is placed in a state where the plate surface 32a is abutted against the side surface 13c while irradiating light from the light source unit 20 and measuring the amount of light emitted from the optical waveguide exit surface 14b. Slide in the z direction. Since the reflecting surface 31 is a concave cylindrical surface having a curvature on the yz plane, the reflected light is collected at different positions along the y direction on the light guide incident surface 14a and the end surface 13a depending on the position where the light is incident. To do. Therefore, by sliding the one-dimensional condensing optical element 30 in the z direction, the position on the reflecting surface 31 where the light from the light source unit 20 is incident is changed, and the position where the reflected light is condensed is shifted in the y direction. Is possible. FIG. 5C shows the position where the reflected light is collected in the y direction by sliding the one-dimensional condensing optical element 30 so that the reflecting surface 31 moves away from the end face 13a along the z direction from the state of FIG. 5B. The state which shifted in the direction which approaches the light source part 20 along is shown. At this time, the distance in the z direction between the notch 33 and the end face 13a is L2a (L2a> L2). As shown in FIG. 5C, even if an error occurs in the positional relationship between the light source unit 20 and the slider 10 by shifting the position where the reflected light is collected in the y direction, the light from the light source unit 20 is guided. It becomes possible to guide to the waveguide incident surface 14a.

  When the position where the reflected light is collected is shifted in the direction away from the light source unit 20 along the y direction, the one-dimensional condensing optical element is arranged so that the reflecting surface 31 approaches the end surface 13a along the z direction. Slide 30. At this time, the range in which the one-dimensional condensing optical element 30 can be slid is determined by the position where the notch 33 is provided. Therefore, an error range is estimated in advance with respect to the positional relationship between the light source unit 20 and the slider 10 at the time of assembly, and a position where the notch portion 33 is provided is determined within a range in which the estimated value can include the distance L2.

  As described above, in the optically assisted magnetic head 4 according to the present embodiment, the plate surface 32a and the side surface 13c are abutted to determine the position in the y direction where the reflecting surface 31 is held. Further, the condensing position of the reflected light is adjusted by sliding the one-dimensional condensing optical element 30 in the z direction in a state where the plate surface 32a and the side surface 13c are in contact with each other. At this time, the side surface 13c serves as a guide for sliding the one-dimensional condensing optical element 30 in the z direction. Further, when the one-dimensional condensing optical element 30 is slid in the z direction, it is possible to ensure handling by gripping the flange portion 32, and the assembly of the optically assisted magnetic head 4 is facilitated.

  Next, when the position where the reflected light is collected is shifted from the incident surface of the optical waveguide, the sliding amount of the one-dimensional condensing optical element 30 along the side surface 13c for correcting the condensing position is corrected. The relationship with the coupling efficiency at the condensing position will be described as an example with a specific example. In this embodiment, the wavelength λ of the light emitted from the light source unit 20 is 830 nm, the divergence angle θx = 10 ° in the x direction, and the divergence angle θy = 20 ° in the y direction. The radius of curvature L1 of the reflecting surface 31 is 25 μm, the mode field diameter MFDx in the x direction of the optical waveguide 14 is 6 μm, and the mode field diameter MFDy in the y direction is 2 μm.

  In this embodiment, based on this condition, the one-dimensional condensing optical element 30 is supported at a predetermined position, and the condensing position of the reflected light is not shifted in the y direction from the optical waveguide entrance surface 14a (see FIG. 5A) as a reference, the amount of movement of the condensing position of the reflected light with respect to the sliding amount of the one-dimensional condensing optical element 30 and the coupling efficiency when the light at the condensing position is guided to the optical waveguide 14 Calculated. The calculation results are summarized in the table shown in FIG. 6A. In FIG. 6A, the “condensing position deviation amount” is the y-direction between the condensing position of the reflected light and the optical waveguide incident surface 14a when the one-dimensional condensing optical element 30 is held at a predetermined position. The amount of deviation is shown. That is, by sliding the one-dimensional condensing optical element 30, the condensing position of the reflected light is moved in the y direction by this amount of deviation. “Mirror vertical shift amount” is a distance by which the one-dimensional condensing optical element 30 is slid in the z direction in order to move the condensing position of the reflected light by the amount of deviation indicated by “condensing position deviation amount”. Show. “Coupling efficiency” refers to the coupling when the one-dimensional condensing optical element 30 is slid in the z direction by the distance indicated by “the vertical shift amount of the mirror” and the reflected light is condensed on the optical waveguide incident surface 14a. The calculated efficiency is shown. FIG. 6B is a graph created based on the calculated values shown in FIG. 6A.

  6A and 6B, when there is no positional deviation between the condensing position of the reflected light and the optical waveguide incident surface 14a, that is, the “mirror vertical shift amount” is 0 μm and the “condensing position deviation amount” is 0 μm. Is a state in which the one-dimensional condensing optical element 30 is held at a predetermined position specified at the time of design. As shown in FIGS. 6A and 6B, when the one-dimensional condensing optical element 30 is held at a predetermined position specified at the time of design, the reflected light is condensed on the optical waveguide incident surface 14a. In addition, the coupling efficiency is maximized.

  Here, the relative coupling efficiency in each of the “mirror vertical shift amounts” on the basis of the case where the “mirror vertical shift amount” is 0 μm is defined as the relative coupling efficiency. As shown in FIGS. 6A and 6B, in this embodiment, the relative coupling efficiency of about 50% or more can be ensured when the “condensing position deviation amount” is in the range of ± 2 μm. Therefore, as shown in FIG. 6A, when the vertical shift amount of the mirror is Δz, the one-dimensional condensing optical element 30 is slid in the range of −1.3 μm ≦ Δz ≦ 1.9 μm, thereby approximately 50 It can be seen that a relative coupling efficiency of at least% can be ensured. That is, the one-dimensional condensing optical element 30 may be slidable within the range of the vertical shift amount Δz of the mirror. Based on this result, the distance L2 in the z direction between the notch 33 and the end face 13a is determined. Find it. In the case of the present embodiment, it can be seen from the result of the vertical shift amount Δz of the mirror that L2 ≧ 1.3 μm.

  An alignment mark 32 c may be provided on the plate surface 32 b of the flange portion 32. For example, FIG. 7 is a perspective view showing an aspect of the one-dimensional condensing optical element 30 when the alignment mark 32c is provided. In such a case, when positioning the one-dimensional condensing optical element 30 with respect to the magnetic head unit 13, the alignment mark 32c is aligned with a predetermined position on the side surface 13c of the magnetic head unit 13. In the positioning, it is only necessary that the predetermined positions on the alignment mark 32c and the side surface 13c can be visually confirmed. For example, if a transparent material is used for the flange portion 32, both positions may be visually confirmed. Further, even when a material having no transparency is used for the flange portion 32, the predetermined positions on the alignment mark 32c and the side surface 13c may be confirmed by another means such as infrared rays. Thereby, for example, the one-dimensional condensing optical element 30 can be positioned at a predetermined position (see FIG. 5A) specified at the time of design. An alignment mark may also be provided on the side surface 13c. Further, an alignment mark 32c may be provided on the plate surface 32a.

  The optical coupling structure including the slider 10, the light source unit 20, the magnetic head unit 13, the optical waveguide 14, and the one-dimensional condensing optical element 30 is configured to deflect and irradiate light from the light source unit 20. If so, the present invention can be applied to other than the optically assisted magnetic head 4. For example, this optical coupling structure can be applied to a flexible printed board using an optical waveguide for wiring. In this case, an optical coupling structure is provided on the flexible printed circuit board, and light irradiated from the light source unit 20 along the board surface of the circuit board can be deflected and guided to the optical waveguide in the circuit board. Thereby, since the light source part 20 can be arrange | positioned sideways on a board | substrate, it becomes possible to comprise the thickness of a board | substrate thinly.

  As described above, the one-dimensional condensing optical element 30 according to the present embodiment is provided with the flange portion 32, and the plate surface 32a of the flange portion 32 and the side surface 13c of the magnetic head portion 13 are abutted and joined. The reflecting surface 31 is held at a predetermined position. Furthermore, even if the one-dimensional condensing optical element 30 is a very small mirror, handling can be ensured by using the flange portion 32 as a handle, and the optically assisted magnetic head 4 can be easily assembled. Become. Further, the flange portion 32 is used as a bonding portion for fixing the one-dimensional condensing optical element 30 to the magnetic head portion 13. Thereby, even if it is a very small mirror, it becomes possible to ensure a wide adhesion | attachment location.

(Second Embodiment)
Next, the optically assisted magnetic head 4 according to the second embodiment will be described with reference to FIG. 8A. FIG. 8A is a schematic cross-sectional view showing an example of the optically assisted magnetic head 4 according to the present embodiment. As shown in FIG. 8A, the optically assisted magnetic head 4 according to this embodiment uses a one-dimensional condensing optical element 40 instead of the one-dimensional condensing optical element 30. Hereinafter, the configuration of the one-dimensional condensing optical element 40 will be described with reference to FIGS. 8A, 8B, 9, and 10A to 10C. FIG. 8B is an enlarged cross-sectional view around the one-dimensional focusing optical element 40 of the optically assisted magnetic head 4 according to this embodiment. FIG. 9 is a perspective view of the one-dimensional condensing optical element 40. FIG. 10A is a front view of the one-dimensional condensing optical element 40 as viewed from the x direction. FIG. 10B is a plan view of the one-dimensional condensing optical element 40 as viewed from the z direction. FIG. 10C is a side view of the one-dimensional condensing optical element 40 as viewed from the y direction.

(One-dimensional condensing optical element 40)
The one-dimensional condensing optical element 40 is a deflecting mirror that deflects incident light by a cylindrical reflecting surface 41 having a concave surface. As shown in FIG. 9, the one-dimensional condensing optical element 30 has a reflecting surface 41 and a flange portion 42. The reflecting surface 41, similar to the reflective surface 31 of the one-dimensional optical condensing element 30, a portion of the rectangular rod-shaped it rather notches into a cylindrical shape, is formed in a cylindrical shape with one edge line of the rectangular parallelepiped. A specific configuration of the reflecting surface 41 will be described later. Also, among the sides of a rectangular parallelepiped as described above, from any one side the reflective surface 41 is provided, sandwiching the space in which the reflective surface 41 faces the perpendicular direction, and so as to extend in the perpendicular direction of the side surface A pair of plate-like flange portions 42 are provided. When the one-dimensional condensing optical element 40 is fixed to the slider 10, the light source unit 20 is accommodated in this space. That is, a space having a width in which the light source unit 20 can be accommodated is provided between the pair of flange portions 42. Moreover, the notch part 43 is provided by notching the edge part by which the flange part 42 was provided among the edge parts of the reflective surface 41. FIG. In other words, as shown in FIG 8B, when the one-dimensional optical condensing element 40 is fixed to the slider 10, is ,, light-emitting surface 20a facing the portion of the side surface of the side where the flange portion 42 is provided Details of the notch 33 provided with the notch 43 will be described later. In the present embodiment, the one-dimensional condensing optical element 40 corresponds to a “deflection mirror”.

  As shown in FIG. 9, the pair of flange portions 42 are provided so as to extend in the −y direction (leftward) from the surface facing the y direction among the side surfaces provided with the reflecting surfaces 41. Yes.

  Reference is now made to FIGS. The flange portion 42 has a plate surface 42a on the side facing the reflective surface 41 and a plate surface 42b on the opposite side of the plate surface 42a. The plate surface 42a is joined to the upper surface 10a of the slider 10 after being abutted. Thereby, the one-dimensional condensing optical element 40 is directly fixed to the slider 10. In other words, the plate surface 42 a is provided along the upper surface 10 a when the one-dimensional condensing optical element 40 is fixed to the slider 10. At this time, the reflecting surface 41 is supported at a predetermined position so as to face both the light emitting surface 20a and the optical waveguide incident surface 14a (see FIG. 8B). At this time, the notch 43 faces the light emitting surface 20a of the light source 20 (see FIG. 8B). By providing the flange portion 42, even when the reflecting surface 41 is very small, handling can be ensured by using the flange portion 42 as a handle, and the assembly of the optically assisted magnetic head 4 is also possible. It becomes easy. Further, the flange portion 42 may be used as an adhesive location for fixing the one-dimensional condensing optical element 40 to the slider 10. Thereby, even if the reflective surface 41 is very small, it becomes possible to ensure a wide bonding location.

  The reflection surface 41 is formed as a concave circumferential surface that is approximately a quarter of a cylinder having a cylinder axis in the x direction. In other words, the reflecting surface 41 is formed as a concave surface having a predetermined curvature on the yz plane. The reflective surface 41 is supported so as to face both the light emitting surface 20a and the optical waveguide incident surface 14a when the one-dimensional condensing optical element 40 is fixed to the slider 10. As described above, since the reflecting surface 41 is formed as a concave surface, the light incident on the reflecting surface 41 can be reflected and collected by the curvature of the reflecting surface 41.

  The reflection surface 41 is exposed and functions as a surface reflection mirror. On the reflection surface 41, a metal film such as gold (Au) or aluminum (Al) or a reflection film of a dielectric multilayer film is formed. Thereby, the reflecting surface 41 functions as a surface reflecting mirror. Since it is a surface reflection mirror, there is no incident surface and no light exit surface, and no surface reflection occurs on these surfaces, so that it is possible to reduce light quantity loss. Further, when the reflectance can be obtained without forming the reflective film, the reflective surface may be used as it is without forming the reflective film.

  Here, with reference to FIG. 8B, a method for determining the holding position of the reflection surface 41 and the curvature of the reflection surface 41 in an ideal state will be specifically described. The radius L1 in FIG. 8B indicates the radius of curvature of the reflecting surface 41 (hereinafter referred to as “curvature radius L1”). As shown in FIG. 8B, the position where the reflecting surface 41 is held so that the light emitted from the light source unit 20 in the y direction is deflected by 90 ° in the z direction and enters the optical waveguide incident surface 14a. It is determined. At this time, the normal of the reflecting surface 41 extended from a point on the reflecting surface 41 where light traveling in the y direction from the light source unit 20 is incident and the surface extending from the light guide incident surface 14a in the direction of the light source unit 20 intersect. The reflecting surface 41 is formed so that the base point P1 of the radius of curvature L1 is located at the position where it is to be. In other words, the reflecting surface 41 is provided so as to have a curvature with a radius of curvature L1 on the yz plane with a point P1 provided on a surface obtained by extending the optical waveguide incident surface 14a in the direction of the light source unit 20 as a base point. Yes. The method for determining the curvature of the reflecting surface 41 described above is an example, and is not limited to the above determination method. Depending on the design of the optical system, that is, the positional relationship between the light source unit 20 and the optical waveguide 14, the position of the base point P <b> 1 is not limited to a surface obtained by extending the optical waveguide incident surface 14 a in the direction of the light source unit 20.

  Thus, since the reflecting surface 41 is a concave cylindrical surface, it has a condensing function (that is, a one-dimensional condensing function) that condenses light only in a direction having a curvature. Reference is now made to FIG. 11A. FIG. 11A shows an optical path of light from the light source unit 20 when the one-dimensional condensing optical element 40 according to this embodiment is used. As shown in FIG. 11A, the reflection surface 41 receives light emitted from the light source unit 20 in the y direction and reflects this light in the z direction. Thereby, the light emitted from the light source unit 20 in the y direction is deflected by 90 ° in the z direction and guided to the optical waveguide incident surface 14a. At this time, the reflection surface 41 condenses the light reflected and traveling in the z direction in the y direction. Thus, since the condensing function of the reflective surface 41 is one-dimensional, the condensed light becomes linear.

  When the slider 10, the magnetic head unit 13, and the light source unit 20 are assembled to the designed dimensions, the one-dimensional condensing optical element 40 allows light from the light source unit 20 to pass through the optical waveguide as shown in FIG. 11A. It is designed to be guided to the incident surface 14a. However, when the slider 10 and the light source unit 20 are joined, an error occurs in the z direction with respect to the position of the optical axis of the light from the light source unit 20 due to variations in the thickness direction of solder or the like used for joining. There is a case. Hereinafter, a characteristic structure for correcting the error in the z direction and an alignment method will be described.

  First, refer to FIG. 11A. As shown in FIG. 11A, the end of the reflective surface 41 is cut out at the end on the side where the flange portion 42 is provided (the light exit surface 20a side when the one-dimensional condensing optical element 40 is fixed). Thus, a notch 43 is provided. The notch 43 is provided so as to face the light emitting surface 20a. Hereinafter, when the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a is L0, the y between the notch 43 and the light emitting surface 20a. The distance in the direction is L3. By providing the notch 43, the range in the y direction in which the one-dimensional condensing optical element 40 can be fixed widens by the distance L3. Note that the range in the y direction in which the one-dimensional condensing optical element 40 can be fixed corresponds to the “fixable range” in the present embodiment, and this fixable range is widened by the notch 43 by a distance L3. A specific effect by providing the notch 43 will be described later together with the alignment method when the one-dimensional condensing optical element 40 is used.

(Alignment method)
Next, an alignment method using the one-dimensional condensing optical element 40 will be described with reference to FIGS. 11A to 11C. FIG. 11B is a diagram for explaining the alignment method, and shows a state before alignment. Moreover, FIG. 11C is a figure for demonstrating the alignment method, and has shown the state after alignment.

  For example, FIG. 11B shows a state where an error in the z direction occurs at the position of the light source 20. At this time, the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a is L0a (L0a> L0). Thus, when the light source unit 20 is displaced in the z direction, the optical axis of the emitted light is shifted. Accordingly, the light emitted from the light source unit 20 is reflected on the reflection surface 41 at a position different from that in the case of FIG. 11A, so that the position where the reflected light is collected is an optical waveguide as shown in FIG. 11B. It shifts in the y direction from the incident surface 14a. In the optically assisted magnetic head 4 according to the present embodiment, when the one-dimensional condensing optical element 40 is fixed, the light reflected by the reflecting surface 41 is slid by sliding the one-dimensional condensing optical element 40 in the y direction. The position along the y direction on the optical waveguide incident surface 14a and the end surface 13a to be condensed is adjusted. The alignment method will be specifically described below.

  First, the light source unit 20, the slider 10, and the magnetic head unit 13 are assembled. The positional relationship among the light source unit 20, the slider 10, and the magnetic head unit 13 at this time is as shown in FIG. 11B. That is, the distance in the z direction between the optical axis of the light emitted from the light source unit 20 in the y direction and the upper surface 10a becomes L0a, and the one-dimensional condensing optical element 30 is determined at a predetermined position (FIG. 11A) specified at the time of design. The position where the reflected light is collected is shifted from the light guide incident surface 14a to the side opposite to the light source unit 20 along the y direction.

  Next, an adhesive is applied to the plate surface 42a of the flange portion 42, the plate surface 42a is abutted against the upper surface 10a, and the plate surface 42a and the upper surface 10a are temporarily joined. Accordingly, the one-dimensional condensing optical element 40 is temporarily held at a predetermined position specified at the time of design. In this state, the one-dimensional condensing optical element 40 is slidably held in the y direction without curing the adhesive. For example, an adhesive that is cured by heat or ultraviolet rays may be used as the adhesive.

  Next, while irradiating light from the light source unit 20 and measuring the light emitted from the optical waveguide exit surface 14b, the one-dimensional condensing optical element 40 is moved in the y direction with the plate surface 42a abutted against the upper surface 10a. Slide to. Thereby, since the reflecting surface 41 slides in the y direction, different positions along the y direction on the optical waveguide incident surface 14a and the end surface 13a where the reflected light is condensed also move in accordance with this sliding. In this way, by sliding the one-dimensional condensing optical element 40 in the y direction, the position where the reflected light is condensed can be shifted in the y direction. FIG. 11C shows the position where the reflected light is condensed by sliding the one-dimensional condensing optical element 40 so that the reflecting surface 41 approaches the light emitting surface 20a along the y direction from the state of FIG. 11B. The state which shifted to the direction which approaches the light source part 20 along the direction is shown. At this time, the distance in the y direction between the notch 43 and the light emitting surface 20a is L3a (L3a <L3). Even if an error occurs in the positional relationship between the light source unit 20 and the slider 10 by shifting the position where the reflected light is collected in the y direction as shown in FIG. 11C, the light from the light source unit 20 is guided. It becomes possible to guide to the waveguide incident surface 14a.

  When the position where the reflected light is collected is moved away from the light source unit 20 along the y direction, the one-dimensional focusing optical element 40 is moved so that the reflecting surface 41 is moved away from the light emitting surface 20a along the y direction. Slide. At this time, the range in which the one-dimensional condensing optical element 40 can be slid is determined by the position where the notch 43 is provided. Therefore, an error range is estimated in advance with respect to the positional relationship between the light source unit 20 and the slider 10 at the time of assembly, and a position where the notch portion 43 is provided is determined within a range in which the estimated value can include the distance L3.

  Thus, in the optically assisted magnetic head 4 according to this embodiment, the position in the z direction where the reflecting surface 41 is held is determined by the plate surface 42a and the upper surface 10a being abutted. Further, the condensing position of the reflected light is adjusted by sliding the one-dimensional condensing optical element 40 in the y direction in a state where the plate surface 42a and the upper surface 10a are in contact with each other. At this time, the upper surface 10a serves as a guide for sliding the one-dimensional condensing optical element 40 in the y direction. Further, when the one-dimensional condensing optical element 40 is slid in the y direction, the handleability can be secured by gripping the flange portion 42, and the assembly of the optically assisted magnetic head 4 is facilitated.

  An alignment mark 42 c may be provided on the plate surface 42 b of the flange portion 42. For example, FIG. 12 is a perspective view showing an aspect of the one-dimensional condensing optical element 40 when the alignment mark 42c is provided. In such a case, when positioning the one-dimensional focusing optical element 40 with respect to the slider 10, the alignment mark 42c is aligned with a predetermined position on the upper surface 10a of the slider 10. In the positioning, it is only necessary to visually confirm the predetermined positions on the alignment mark 42c and the upper surface 10a. For example, if a transparent material is used for the flange portion 42, both positions may be visually confirmed. Even when a material having no transparency is used for the flange portion 42, the predetermined positions on the alignment mark 42c and the upper surface 10a may be confirmed by another means such as infrared rays. Thereby, for example, the one-dimensional condensing optical element 40 can be positioned at a predetermined position (see FIG. 11A) specified at the time of design. An alignment mark may also be provided on the upper surface 10a. An alignment mark 42c may be provided on the plate surface 42a.

  As described above, the one-dimensional condensing optical element 40 according to the present embodiment is provided with the flange portion 42, and reflects by joining the plate surface 42 a of the flange portion 42 and the upper surface 10 a of the slider 10. The surface 41 is held at a predetermined position. Thereby, even if the one-dimensional condensing optical element 40 is a very small mirror, handling can be ensured by using the flange portion 42 as a handle, and the assembly of the optically assisted magnetic head 4 is easy. It becomes. Further, the flange portion 42 is used as a bonding portion for fixing the one-dimensional condensing optical element 40 to the slider 10. Thereby, even if it is a very small mirror, it becomes possible to ensure a wide adhesion | attachment location.

DESCRIPTION OF SYMBOLS 1 Information recording device 2 Housing | casing 3 Disk 4 Optical assist magnetic head 5 Head support part 6 Support axis 7 Tracking actuator 10 Slider 10a Upper surface 10b Lower surface 10c End surface 13 Magnetic head part 13a End surface 13b End surface 14 Optical waveguide 14a Optical waveguide entrance surface 14b Optical waveguide exit surface 14c Optical waveguide side surface 15 Plasmon probe 20 Light source portion 20a Light exit surface 30 One-dimensional condensing optical element 31 Reflecting surface 32 Flange portion 32a Joint surface 32b Rear surface 32c Alignment mark 33 Notch 40 One-dimensional condensing optical element 41 Reflecting surface 42 Flange portion 42a Joint surface 42b Upper surface 42c Alignment mark 43 Notch

Claims (8)

A slider that includes one surface and an end surface provided at one end of the one surface in a predetermined direction, and that floats relative to the recording medium in response to rotation of the disk-shaped recording medium;
A light source fixed to the one surface and emitting light in the predetermined direction;
A head portion having a side surface opposite to the bonding surface with the end surface, and an optical waveguide for guiding light incident from the light incident surface;
A concave reflecting surface that faces both the light source and the light incident surface and has a predetermined curvature, and a reference that extends in a predetermined direction with respect to the reflecting surface, and includes either the side surface or the one surface. A deflecting mirror that reflects and collects light from the light source toward the light incident surface by the reflective surface,
An optically assisted magnetic head comprising: The reference surface is the side surface;
The flange portion has a plate shape extending along the side surface,
The deflection mirror is indirectly fixed to the slider by associating the side surface of the pair of plate surfaces of the flange portion that faces the reflection surface with the side surface. 2. The optically assisted magnetic head according to 1. The deflection mirror is
3. The optically assisted magnetic head according to claim 2, wherein a part of the reflection surface on the light incident surface side is cut out so as to widen a fixing range of the deflection mirror along the side surface. . The flange portion has a mark on at least one of the pair of plate surfaces,
The reflecting surface is held at the predetermined position by fixing the deflection mirror so that a predetermined position in the reference surface and the mark have a predetermined positional relationship. The optically assisted magnetic head according to claim 2 or 3. The reference surface is the one surface,
The flange portion is provided so as to sandwich an optical path from the light source to the reflection surface, and has a pair of plate-like shapes extending along the one surface in a direction from the end surface toward the opposite end surface. ,
The deflection mirror is directly fixed to the slider by associating the one surface of the pair of plate surfaces of the flange portion with the surface facing the reflecting surface. The optically assisted magnetic head according to claim 1. The deflection mirror is
6. The optically assisted magnetic head according to claim 5, wherein a part of the reflecting surface on the light source side is cut out so as to widen a fixing range of the deflecting mirror along the one surface. . The flange portion has a mark on at least one of the pair of plate surfaces,
The reflecting surface is held at the predetermined position by fixing the deflection mirror so that a predetermined position in the reference surface and the mark have a predetermined positional relationship. The optically assisted magnetic head according to claim 5 or 6. A substrate provided with one surface and an end surface provided at one end of the one surface in a predetermined direction;
A light source fixed to the one surface and emitting light in the predetermined direction;
A head portion having a side surface opposite to the bonding surface with the end surface, and an optical waveguide for guiding light incident from the light incident surface;
A concave reflecting surface that faces both the light source and the light incident surface and has a predetermined curvature, and a reference that extends in a predetermined direction with respect to the reflecting surface, and includes either the side surface or the one surface. A deflecting mirror that reflects and collects light from the light source toward the light incident surface by the reflective surface,
An optical coupling structure comprising:

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