WO2011078025A1

WO2011078025A1 - Light-assisted magnetic head

Info

Publication number: WO2011078025A1
Application number: PCT/JP2010/072533
Authority: WO
Inventors: 秀樹田中; 俊之小嶋
Original assignee: コニカミノルタオプト株式会社
Priority date: 2009-12-24
Filing date: 2010-12-15
Publication date: 2011-06-30

Abstract

Provided is a light-assisted magnetic head which is compact, is hardly affected by the heat generated from the light source for a magnetic recording/reproducing unit, and can be easily assembled. A light-assisted magnetic head is provided with: a slider which has an optical wave guide, is suspended above a disc-shaped recording medium, and moves relative to said recoding medium in accordance with the rotation thereof; a light source which is attached to the side surface of the slider; and an optical element which has a deflected surface which deflects the light beam from the light source towards the optical waveguide disposed on the slider. The light beam emitted from the light source enters the optical waveguide via the deflected surface of the optical element, and exits towards the recording medium from the light-exiting edge of the optical waveguide, which faces the recording medium.

Description

Optically assisted magnetic head

The present invention relates to an optically assisted magnetic head suitable for use in a thermally assisted magnetic recording system.

In a magnetic recording system used for a general HDD (hard disk drive), when an attempt is made to increase the recording density, the interval between magnetic bits becomes narrow, and the polarity becomes unstable due to a superparamagnetic effect or the like. For this reason, a recording medium having a high coercive force is required. However, when such a recording medium is used, the magnetic field required for recording increases. However, the upper limit of the magnetic field generated by the recording head is determined by the saturation magnetic flux density, but the value is approaching the material limit, and there is a fact that a dramatic increase cannot be expected. Therefore, the recording is performed by locally heating during recording to cause magnetic softening and recording in a state where the coercive force is small, and thereafter, heating is stopped and natural cooling is performed to guarantee the stability of the recorded magnetic bit. Recording methods have been proposed. This recording method is called a heat-assisted magnetic recording method.

In the heat-assisted magnetic recording method, it is desirable to instantaneously heat the recording medium. Further, the heating mechanism and the recording medium rotating at high speed are not allowed to come into contact with each other. For this reason, heating is generally performed by irradiating a recording medium with a minute spot of laser light. Therefore, this method using light for heating is called an optically assisted magnetic recording method. When ultra-high-density recording is performed by the optical assist method, the required spot diameter is about 20 nm. However, since a normal optical system has a diffraction limit, the light cannot be condensed to that extent.

For this reason, an optical head using near-field light (sometimes referred to as near-field light) generated from an optical aperture having a size equal to or smaller than the incident light wavelength is used (see Patent Document 1). This optical head includes a light source unit and a slider that receives light from the light source unit to generate near-field light and heats a disk area smaller than the diffraction limit of the light. In such an optical head, near-field light is generated by a near-field light generator provided on the slider, a disk area smaller than the diffraction limit of light is heated, and only the heated disk area is magnetically recorded. It has become so.

On the other hand, Patent Document 2 discloses an optically assisted magnetic head in which a semiconductor laser as a light source is disposed on a side surface of a slider. In this optically assisted magnetic head, the light emitted from the semiconductor laser toward the recording medium irradiates a light absorbing film having a minute opening formed on the recording medium facing surface of the head portion to generate near-field light, The recording medium is heated by the near-field light. In the optically assisted magnetic head disclosed in Patent Document 2, the shape of the opening is devised to improve the generation efficiency of near-field light, and the light output of the semiconductor laser is reduced, thereby generating heat during light emission of the semiconductor laser. This reduces thermal damage and deterioration of a device including a magnetic element disposed close to the semiconductor laser.

JP 2009-266365 A JP 2001-216603 A

According to the optically assisted magnetic head of Patent Document 1, since the light source unit is attached to the surface of the slider opposite to the recording medium, the overall height of the optically assisted magnetic head is increased, and the recording apparatus in which the recording media are stacked is large. For example, there is a problem that it becomes difficult to mount on a notebook type PC or the like having no space in the thickness direction. Further, although the optically assisted magnetic head of Patent Document 1 has a minute structure, since the light source unit is individually joined to the slider, there is a problem that it takes time to assemble.

Further, in the optically assisted magnetic head disclosed in Patent Document 2, in order to make the aperture and the recording magnetic pole close to each other, it is necessary to dispose the active layer of the semiconductor laser toward the magnetic recording / reproducing unit side. Even if the optical output is suppressed to several tens of mW, heat is generated in the active layer, so that the thermal influence on the magnetic recording / reproducing portion cannot be completely eliminated. In particular, since the rotation control of the disk is constant in angular velocity, the HDD has a higher linear velocity on the outer peripheral side than on the inner peripheral side, and requires more light output for recording. Therefore, even if the optical output is suppressed to several tens of mW on the inner peripheral side, 1.5 to twice as much optical output is required on the outer peripheral side, and the influence of heat generation of the light source cannot be ignored.

The present invention has been made in view of such problems of the prior art, and is an optically assisted magnetic head that is compact, has an extremely small influence of light source heat generation on the magnetic recording / reproducing unit, and can ensure ease of assembly. The purpose is to provide.

The optically assisted magnetic head according to claim 1 comprises:
A slider that includes an optical waveguide and floats and moves relative to the recording medium according to the rotation of the disk-shaped recording medium;
A light source attached to a side surface of the slider;
An optical element having a deflecting surface for deflecting a light beam from the light source toward an optical waveguide provided in the slider;
The light beam emitted from the light source is incident on the optical waveguide via the deflection surface of the optical element, and is emitted from the emission end of the optical waveguide facing the recording medium toward the recording medium. To do.

According to the present invention, since the light source is attached to the side surface of the slider, the overall height of the optically assisted magnetic head can be lowered and mounted on a notebook PC or the like having no space in the thickness direction. It is suitable as an optically assisted magnetic head used in a recording apparatus. The “side surface” means a surface extending in a direction intersecting with a surface facing the recording medium among the surfaces of the slider. For example, referring to FIG. 2, the surfaces are 32w, 32x, 32y, and 32z. A more preferable side surface is an end surface that extends in a direction intersecting with a direction in which the suspension arm that holds the slider extends among the above-mentioned side surfaces. For example, referring to FIG. 2, the surfaces are 32w and 32y. By utilizing such a side surface, the light source can be attached to a long member of the slider, which will be described later, at the time of manufacturing the slider, so that the manufacturability of the optically assisted magnetic head, which is a minute component, can be improved.

According to a second aspect of the present invention, in the optically assisted magnetic head according to the first aspect of the invention, the light source is emitted from the light source in a direction having a component opposite to the incident direction of the light beam incident on the recording medium. Thus, even when the light source is attached to the side surface of the slider, the light beam emitted from the light source can be incident on the optical waveguide using an effective space. The “direction having a component opposite to the incident direction of the light beam” refers to a direction that is parallel to or intersects the direction opposite to the incident direction of the light beam at an angle of less than 90 degrees. Preferably, the crossing direction is 45 degrees or less. More preferably, the crossing direction is 15 degrees or less.

The optically assisted magnetic head according to a third aspect is characterized in that, in the invention according to the first or second aspect, the optical element has a condensing means on at least one surface. Thereby, the light beam emitted from the light source can be efficiently coupled to the optical waveguide.

The optically assisted magnetic head according to claim 4 is characterized in that, in the invention according to any one of claims 1 to 3, the optical element has a diffraction grating formed on at least one surface. The light beam emitted from the light source can be efficiently coupled to the optical waveguide by the light collecting action and wavelength compensation function of the diffraction grating.

The optically assisted magnetic head according to claim 5 is characterized in that, in the invention according to claim 4, the pitch of the diffraction grating is narrowed from the center toward the periphery. Even when it has a straight groove shape and is formed on a flat surface, the light collecting function can be exhibited. In particular, when the deflecting surface on which the diffraction grating is provided has a cylindrical shape and the groove of the diffraction grating extends so as to be orthogonal to the axis of the cylindrical shape, the reflected light beam is condensed at one point (for example, the end of the optical waveguide). You can also.

The optically assisted magnetic head according to a sixth aspect is characterized in that, in the invention according to the fourth aspect, the pitches of the diffraction gratings are equal, so that the light guide when the wavelength of the incident light beam fluctuates is used. It has a function (wavelength compensation function) for correcting a decrease in the coupling efficiency to the waveguide. When a semiconductor laser is used as the light source, the wavelength fluctuation of the emitted light beam may occur due to the mode hop phenomenon, etc., but even if such wavelength fluctuation occurs, the decrease in coupling efficiency is corrected using the diffraction function of the diffraction grating. can do.

A light-assisted magnetic head according to a seventh aspect of the present invention is the optically assisted magnetic head according to any one of the first to sixth aspects, wherein the light beam emitted from the light source is reflected twice by the optical element and then reflected on the optical waveguide. Since it is incident, even when the incident end of the optical waveguide is oriented in the same direction as the exit of the light source, it can be incident perpendicularly to the optical waveguide. Furthermore, the light source and the optical waveguide can be arranged apart from each other by the distance between the first reflection surface and the second reflection surface, and the influence of heat generation of the light source on the magnetic recording / reproducing unit can be extremely reduced.

An optically assisted magnetic head according to an eighth aspect of the present invention is the optical head according to any one of the first to seventh aspects, wherein the slider has a magnetic head portion adjacent to the optical waveguide, and the light source passes through a heat insulating layer. Since it is attached to the magnetic head part, it is possible to suppress the heat generated from the light source from being transmitted to the magnetic head part, and to prevent thermal damage and deterioration of the magnetic head part.

The optically assisted magnetic head according to claim 9 is characterized in that, in the invention according to any one of claims 1 to 8, the optical element is made of plastic. If the material is plastic, it can be accurately formed by injection molding or nanoprinting.

The optically assisted magnetic head according to claim 10 is characterized in that, in the invention according to any one of claims 1 to 8, the optical element is made of glass. If the material is glass, it is possible to obtain characteristics excellent in environmental resistance as compared with the case of plastic.

An optically assisted magnetic head according to an eleventh aspect is characterized in that, in the invention according to any one of the first to eighth aspects, the optical element is a hybrid of glass and plastic. This allows you to take advantage of both materials.

The optically assisted magnetic head according to a twelfth aspect is the optical head according to any one of the first to eleventh aspects, wherein a member including a plurality of the sliders and a member including a plurality of the optical elements are joined and then divided. Thus, the slider and the optical element are integrally formed. Since the member including the plurality of sliders and the member including the plurality of optical elements are joined and then divided, the slider and the optical elements are integrally formed. The ease of assembly of the magnetic head can be improved.

A light-assisted magnetic head according to a thirteenth aspect of the present invention is the optical head according to any one of the first to eleventh aspects, comprising a plurality of members including the light source, a plurality of members including the slider, and a plurality of the optical elements. Since the slider, the optical element, and the light source are integrally formed by dividing after joining to the member, the ease of assembling the optically assisted magnetic head is further improved. Can do.

According to the present invention, it is possible to provide an optically assisted magnetic head that is compact, has a very small influence of heat generation of the light source on the magnetic recording / reproducing unit, and can ensure ease of assembly.

1 is a perspective view showing a schematic configuration of an optically assisted magnetic recording apparatus. 1 is an exploded perspective view of an optically assisted magnetic head and a head support according to a first embodiment of the present invention. FIG. 3 is a diagram showing a view of the optically assisted magnetic head 3 of FIG. 2 cut along a plane including a line III-III and viewed in the arrow direction. It is a perspective view of rod-shaped member IM2. It is a figure for demonstrating the process of forming elongate member IM1. It is a figure for demonstrating the process of forming elongate member IM1. It is a figure for demonstrating the process of joining and dividing long member IM1, IM2. FIG. 6 is a diagram for explaining another process of forming the optically assisted magnetic head 3. It is the perspective view and sectional drawing of 3 A of optically assisted magnetic heads concerning a modification. It is a perspective view of the optically assisted magnetic head 3B concerning a modification. It is a perspective view of 3 C of optically assisted magnetic heads concerning a modification. It is the perspective view and sectional drawing of optically assisted magnetic head 3D concerning a modification. It is sectional drawing of the optically assisted magnetic head 3E concerning a modification. It is sectional drawing of the optically assisted magnetic head 3F concerning a modification. It is sectional drawing of the optically assisted magnetic head 3G concerning a modification. It is sectional drawing of the optically assisted magnetic head 3H concerning a modification. It is sectional drawing of the optically assisted magnetic head 3I concerning a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic configuration of an optically assisted magnetic recording device (for example, a hard disk device) equipped with an optically assisted magnetic recording head. The optically assisted magnetic recording apparatus 1 includes a plurality of recording disks (magnetic recording media) 2, a head support 4, a tracking actuator 6, an optically assisted magnetic head 3, and a drive device (not shown). In the housing 1A. The head support portion 4 is provided to be rotatable in the direction of arrow A (tracking direction) with the support shaft 5 as a fulcrum. The tracking actuator 6 is attached to the head support portion 4. The optically assisted magnetic head 3 is attached to the tip of the head support 4. A drive device (not shown) rotates the disk 2 in the direction of arrow B. The optically assisted magnetic recording apparatus 1 is configured such that the optically assisted magnetic head 3 can move relative to the upper surface (or lower surface) of the disk 2 while floating.

FIG. 2 shows an exploded perspective view of the optically assisted magnetic head 3 and the head support 4. FIG. 3 shows a view of the optically assisted magnetic head 3 of FIG. 2 cut along a plane including the line III-III and viewed in the direction of the arrow. The optically assisted magnetic head 3 is an optical head that uses light for information recording on the disk 2, and includes an optical element 31, a slider 32, and a light source 33. In FIG. 2, the head support portion 4 includes a suspension arm 41 having one end attached to the support shaft 5 and a flexure (plate spring) 44. The suspension arm 41 and the flexure 44 are fixed by welding or the like.

A rectangular opening 42 is formed at the tip of the suspension arm 41. A pivot (protruding portion) 43 that protrudes toward the inside of the opening 42 is provided on one side of the opening 42. On the other hand, a rectangular opening 45 is formed at the tip of the flexure 44. A tongue piece 46 having a flat surface protrudes from one side of the opening 45 so as to protrude into the inside.

In FIG. 2, a light source 33, which is a semiconductor laser, is fixed to the front side surface 32 y (end surface) of the slider 32 of the optically assisted magnetic head 3, and the optical element 31 is bonded so as to straddle the slider 32 and the upper surface of the light source 33. Has been. The “upper surface” refers to the surface of the slider 32 opposite to the surface facing the disk 2. In the present embodiment, the lower surface of the tongue piece portion 46 of the flexure 44 is bonded to the upper surface of the slider 32, and the optically assisted magnetic head 3 is fixed to the tip of the suspension arm 41. Not limited to.

The optical element 31 is made of a transparent material such as plastic or glass. As will be described later, the optical element 31 is manufactured by injection molding, imprinting, glass molding, or the like. Examples of the resin for injection molding include polycarbonate (for example, AD5503, Teijin Chemicals Limited) and ZEONEX 480R (Nippon Zeon Corporation), which are thermoplastic resins. Examples of the resin for imprint manufacturing include PAK-02 (Toyo Gosei Co., Ltd.), which is a photocurable resin.

The optical element 31 has an overall prism shape, and includes a planar lower surface 31a, a first reflecting surface 31b, and a spherical or aspherical condensing reflecting surface (deflecting surface) formed on the first reflecting surface 31b. ) 31d and a planar second reflecting surface (deflection surface) 31c. A reflective film M is formed on the surfaces of the first reflective surface 31b, the condensing reflective surface 31d, and the second reflective surface 31c. The condensing reflection surface 31d constitutes a condensing means. In addition, since reflection of the light in the condensing reflective surface 31d and the 2nd reflective surface 31c becomes internal surface reflection of the optical element 31, total reflection may be used. In this case, the reflective film M may be omitted.

The light source 33 is disposed so that the emission port 33a of the active layer 33b from which the laser beam is emitted faces upward in FIG. 3 and faces the lower surface 31a of the optical element 31. The wavelength of light emitted from the light source 33 ranges from visible light to near-infrared wavelengths (the wavelength band is about 0.6 μm to 2 μm, and specific wavelengths include 650 nm, 830 nm, 1310 nm, 1550 nm, and the like. Are preferred).

The surface of the slider 32 facing the disk 2 (the lower surface in FIG. 3) is an air bearing surface (ABS: Air Bearing Surface) for improving the floating characteristics, and a groove for capturing the floating air (see FIG. 6B). The slider 32 has an optical waveguide 32a having a rectangular cross-section penetrating vertically, facing the lower surface 31a of the optical element, and a magnetic recording portion in the vicinity of the optical waveguide 32a. A magnetic head part 32b comprising a magnetic reproducing part is provided, and a near-field generating part 34 is formed at the end of the optical waveguide 32a, with respect to the near-field generating part and the magnetic head part 32b comprising a metal thin film. For example, it is described in Japanese Patent Application Laid-Open No. 2003-4504, etc. A heat insulating layer 32c made of alumina or the like is formed between the magnetic head portion 32b and the light source 33. In the embodiment, since the light is reflected twice by the condensing reflection surface 31d and the second reflection surface 31c of the optical element 31, the distance between the light source 33 and the optical waveguide 32a is widened, and the light source 33 is provided between the light source 33 and the magnetic head portion 32b. It is possible to provide a heat insulating layer 32c having a sufficient thickness to block the heat generated by the light source 33. When the distance between the light source 33 and the magnetic head portion 32b is sufficiently thermally separated, the heat insulating layer 32c is laminated with a non-heat insulating member May be.

At the time of recording / reproduction, the flying of the slider 32 needs to be stabilized in the state of being close to the disk 2, and it is necessary to appropriately apply a pressure for suppressing the flying force to the slider 32. For this reason, the head support 4 fixed on the slider 32 has a function of appropriately applying a force for suppressing the flying force of the slider 32 in addition to the function of tracking the optically assisted magnetic head 3. By applying pressure to the optically assisted magnetic head 3 by the spring effect of the pivot 43 and the flexure 44 formed on the suspension arm 41, air received by an air bearing surface (not shown) provided on the surface of the slider 32 facing the disk 2 is received. Therefore, the slider 32 and the disk 2 can maintain a flying height of several tens of nanometers. Thus, since the distance between the slider 32 and the disk 2 is very narrow, the disk 2 can be heated even with near-field light that exists only on the surface.

The slider 32 moves relative to the disk 2 which is a magnetic recording medium while flying, but there is a possibility of contact with the disk 2 if there is dust or a defect on the medium. In order to reduce the friction generated in that case, it is desirable to use a hard material having high friction resistance as the material of the slider 32. For example, a ceramic material containing Al ₂ O ₃ , AlTiC, zirconia, TiN, or the like may be used. Further, as the friction preventing treatment, a surface treatment may be performed on the surface of the slider 32 on the disk 2 side in order to increase the friction resistance. For example, when a DLC (Diamond Like Carbon) film is used, the transmittance of near-infrared light is high, and a hardness of Hv = 3000 or higher after diamond is obtained.

The operation of the optically assisted magnetic head 3 having the above configuration will be described with reference to FIG. The divergent light emitted from the light source 33 in the direction opposite to the direction of incidence on the disk 2 is incident on the lower surface 31a of the optical element 31 as indicated by the dotted line and is reflected by the light when reflected by the light collecting / reflecting surface 31d. The light is converted into convergent light by the optical power of the surface 31d, further reflected by the second reflecting surface 31c, then emitted from the lower surface 31a, and condensed at the entrance of the optical waveguide 32a of the slider 32.

When the condensed light is guided through the optical waveguide 32 a of the slider 32 toward the disk 2 and irradiates the near-field generating unit 34 (plasmon probe) provided on the bottom surface of the slider 32, the near-field generating unit 34. The near-field light generated by the light propagates toward the disk 2. The optical axis of the light beam incident on the optical waveguide 32a is preferably perpendicular to the incident end face of the optical waveguide 32a from the viewpoint of optical coupling efficiency. When the light emitted from the optically assisted magnetic head 3 is irradiated onto the disk 2 as a minute light spot, the temperature of the irradiated area of the disk 2 temporarily rises and the coercive force of the disk 2 decreases. When the area where the coercive force is reduced reaches the magnetic head part 32b, information is recorded in the area where the coercive force is reduced by a magnetic field generated by a coil (not shown) installed in the magnetic head part 32b. When a region having a reduced coercive force passes through the magnetic head portion 32b, the region is naturally cooled, and the magnetization of the recorded magnetic bit is stably retained. The magnetic head unit 32b can reproduce information by detecting the recorded magnetization direction.

Next, a method for manufacturing the optically assisted magnetic head 3 will be described. First, a rod-like member IM2 as shown in FIG. 4 is molded with a mold by glass or plastic or a hybrid structure of glass and plastic. The rod-shaped member IM2 has a shape such that the optical elements 31 are arranged in series.

In FIG. 4, a generally elongated substantially triangular columnar rod-like member IM2 has a first surface IM2a, a second surface IM2b, and a third surface IM2c. On the third surface IM2c, a condensing / reflecting surface IM2d having a spherical or aspherical shape is simultaneously transferred and molded by a mold. Further, convex alignment marks IM2e are simultaneously transferred and molded on both ends of the rod-like member IM2. The alignment mark IM2e is not limited to a round cylindrical hole, and may be a cross shape (×), a cross shape (+), or the like, may not be a convex shape, may be a concave shape, and may be other than the opposite ends of the rod-like member IM2. You may install in the place.

Here, the total length of the rod-shaped member IM2 is L, the width of the slider is w, and the condition of L ≧ 3w is satisfied. Since the general femto slider width is about 0.7 mm, it can be set to at least L ≧ 2.1 mm. Therefore, the width is sufficiently large to handle the rod-shaped member IM2. It is desirable that L ≦ 30w. This is because if the full length of the rod-like member IM2 is too long, there is a risk of breaking during handling. In the case of w = 0.7 mm, L ≦ 21 mm. For example, the mechanical pencil core has a length of 60 mm and can be suppressed to about ３, so that it can be prevented from being accidentally broken during handling.

In the rod-like member IM2 formed by molding, a reflective film is formed on the first surface IM2a, the third surface IM2c, and the condensing reflection surface IM2d, and an antireflection film is formed on the second surface IM2b by vapor deposition or the like. Thus, the step of forming the rod-shaped member IM2 is completed.

Next, manufacturing of the slider 32 will be described. FIG. 5 shows a part of the manufacturing process of the slider 32. As shown in FIG. 5, a disk-shaped substrate W19 (material: AlTiC or the like) is formed on a magnetic head portion 32b including an optical waveguide 32a portion, a magnetic recording portion, and a magnetic reproducing portion in a semiconductor process including a photolithography process, and further heat insulation. The layer 32c, electrodes, and the like are stacked to form a stacked portion W40. Thus, the step of forming the wafer W composed of the substrate W19 and the stacked portion W40 is completed.

Next, the wafer W is cut into a rectangular plate shape by a processing method such as dicing or milling at a position indicated by a dotted line in FIG. Then, the long member IM1 shown in FIG. 6A is obtained. The long member IM1 has six optical waveguides 32a arranged at equal intervals at a distance w (see FIG. 6C).

Next, in the long member IM1, as shown in FIG. 6B, a pentagonal shallow groove 32d is formed by machining on the front side surface (becomes the ABS of the slider). Thereafter, as shown in FIG. 6C with the ABS as the bottom surface, on the surface facing the surface on which the grooves 32d are formed, the optical waveguide 32a is used as a reference at a predetermined position on both sides in the arrangement direction. The alignment mark WAM is formed mechanically or chemically. The alignment mark WAM is not limited to a round cylindrical hole, and may be a cross shape (×), a cross shape (+), or the like, and may be a concave shape instead of a convex shape. You may install in the place of. When the alignment mark WAM is provided at both ends of the long member IM1, it is desirable that the long member IM1 is longer than the rod member IM2 so as to be exposed when the rod member IM2 is joined. This completes the step of forming the long member IM1.

Next, a light source member IM3 in which a plurality of light sources 33 are separately arranged in series is prepared. Further, in FIG. 7A, an adhesive is applied to the front side surface IM1a of the long member IM1, and the light source member IM3 is positioned and fixed with the alignment mark WAM as a reference. Next, an adhesive is applied to the upper surface IM1b of the long member IM1 and the upper surface IM3a of the light source member IM3, and the rod-shaped member IM2 is positioned so that the alignment mark IM2e of the rod-shaped member IM2 is at a predetermined position with respect to the alignment mark WAM. Then, the second surface IM2b of the rod-like member IM2 is fixed so as to be in close contact. In FIG. 7, the boundary between the optical waveguide 32a and the substrate W19 formed on the long member IM1 and the laminated portion W40 is omitted.

Thereafter, at a position indicated by a dotted line in FIG. 7B, a step of dividing the long member IM1, the rod-like member IM2, and the light source member IM3 at a time in the short direction is performed, so that six lights having a width w are obtained. The assist magnetic head 3 can be manufactured efficiently. Thereby, the light emitted from each light source 33 is condensed with high accuracy on the upper end of the optical waveguide 32 a of the slider 32 via the deflection surface of the optical element 31 facing the light source 33. According to the above head manufacturing method, the light source 33 and the optical element 31 can be assembled on the basis of the end face of the optical waveguide, and high assembly accuracy can be ensured.

However, as shown in FIG. 8, after laminating a laminated portion W40 including an optical waveguide, a magnetic head portion, a heat insulating layer, an electrode and the like necessary as a slider on a wafer-like substrate W19, an adhesive BD is further applied. Thus, the optically assisted magnetic head 3 including the slider 32 and the light source 33 can be formed at one time by positioning and fixing the substrate W50 on which the light sources 33 are formed in a matrix, and then cutting the substrate W50 as indicated by dotted lines. Alternatively, the matrix light source 33 may be directly stacked on the stacked portion W40.

As described above, according to the present embodiment, since the light source 33 is attached to the side surface of the slider 32, the overall height of the optically assisted magnetic head 3 can be lowered, and there is no space in the thickness direction. It is suitable as an optically assisted magnetic head for use in a recording device mounted on the like. Further, the distance between the light source 33 and the magnetic head portion 32 b is widened by reflecting twice by the optical element 31, so that a heat insulating layer 32 c can be formed between the light source 33 and the magnetic head portion 32 b, and the light source 33 emits light. Thermal damage and deterioration of the magnetic head portion 32b due to heat can be avoided. Furthermore, since the elongated member IM1 including a plurality of sliders 32 and the rod-shaped member IM2 including a plurality of optical elements 31 are joined and then divided, the slider 32 and the optical element 31 are integrally formed. The ease of assembly of the optically assisted magnetic head 3 which is a minute component can be improved.

FIG. 9 is a perspective view (a) of the optically assisted magnetic head 3A according to the modification and a cross-sectional view (b) similar to FIG. The optically assisted magnetic head 3A shown in FIG. 9 has a condensing reflection surface 31d made of a spherical surface or an aspherical surface of the optical element 31 as a diffractive lens 31e formed on the first reflection surface 31b in the embodiment of FIG. Only the point is different. About another structure, it is the same as that of the above-mentioned embodiment. The diffractive lens 31e is formed from a circular or substantially elliptical grating whose pitch decreases from the center toward the periphery, and a reflective film is formed on the surface thereof.

FIG. 10 is a perspective view of an optically assisted magnetic head 3B according to another modification. In the optically assisted magnetic head 3B shown in FIG. 10, the first reflecting surface 31b of the optical element 31 has a cylindrical shape, and a one-dimensional diffractive lens 31f is provided on the cylindrical first reflecting surface 31b. Only the points provided are different. About another structure, it is the same as that of the above-mentioned embodiment. The one-dimensional diffractive lens 31f extends so that the grooves of the diffraction grating are orthogonal to the cylindrical axis, and the pitch decreases from the center toward the periphery along the cylindrical axis. It has a light collecting function only in the axial direction. A reflective film is formed on the surface of the one-dimensional diffractive lens 31f. The cylindrical first reflecting surface 31b and the one-dimensional diffractive lens 31f allow the light beam reflected from this surface to be condensed at one point.

FIG. 11 is a perspective view of an optically assisted magnetic head 3C according to another modification. The optically assisted magnetic head 3C shown in FIG. 11 differs from the embodiment shown in FIG. 3 only in that the condensing / reflecting surface 31d is eliminated and the first reflecting surface 31b of the optical element 31 is formed in a cylindrical shape. About another structure, it is the same as that of the above-mentioned embodiment. When the light source 33 is an edge emitting semiconductor laser, the intensity distribution of the emitted laser light is an ellipse, and the lamination direction of the active layer 33b is a major axis. Accordingly, even if only this direction is condensed by the cylindrical first reflecting surface 31b, the waveguide coupling efficiency necessary for recording can be obtained. In the case of an optical element having a shape only in the one-dimensional direction as shown in the present embodiment, its manufacture becomes easy.

FIG. 12 is a perspective view (a) and a cross-sectional view (b) similar to FIG. 3 of an optically assisted magnetic head 3D according to a modification. The optically assisted magnetic head 3D shown in FIG. 12 differs from the embodiment of FIG. 11 only in that the first reflecting surface 31b is planar and a one-dimensional diffractive lens 31g is provided on the first reflecting surface 31b. About another structure, it is the same as that of the above-mentioned embodiment. The one-dimensional diffractive lens 31g is formed of a linear grating in which a grating groove extends along the longitudinal direction of the rod-shaped member IM2, and the pitch becomes narrower from the center toward the periphery along the direction orthogonal to the groove. A reflective film is formed on the surface. The optical element 31 of the optically assisted magnetic head 3D has the same optical function as the optical element 31 of the optically assisted magnetic head 3C.

FIG. 13 is a cross-sectional view similar to FIG. 3 of an optically assisted magnetic head 3E according to another modification. The optically assisted magnetic head 3E shown in FIG. 13 differs from the embodiment of FIG. 3 only in that the condensing reflection surface 31d of the optical element 31 is eliminated and only the planar first reflection surface 31b is used. About another structure, it is the same as that of the above-mentioned embodiment.

FIG. 14 is a cross-sectional view similar to FIG. 3 of an optically assisted magnetic head 3F according to another modification. The optically assisted magnetic head 3F shown in FIG. 14 has a shape in which the light source 33 is fixed to the side surface on the opposite side of the slider 32 and the optical element 31 covers substantially the entire upper surface of the slider 32 in the embodiment of FIG. And the only difference is that a spherical or aspherical second condensing reflection surface 31h is formed on the planar second reflection surface 31c. The divergent light emitted from the light source 33 is reflected by the second condensing / reflecting surface 31h to become substantially parallel light, and then reflected and collected by the condensing / reflecting surface 31d, and then enters the optical waveguide 32a of the slider 32. About another structure, it is the same as that of the above-mentioned embodiment. In the optically assisted magnetic head 3F, since the light source 33 is disposed on the opposite side via the magnetic head portion 32b and the slider 32, the heat generated by the light source 33 is not transmitted to the magnetic head portion 32b, and further thermally It has an advantageous configuration. The heat insulating layer 32c functions as a protective layer for the magnetic head portion 32b, and may be a non-heat insulating member.

FIG. 15 is a cross-sectional view similar to FIG. 3 of an optically assisted magnetic head 3G according to another modification. The optically assisted magnetic head 3G shown in FIG. 15 eliminates the condensing / reflecting surface 31d of the optical element 31 from the embodiment shown in FIG. 14, only the planar first reflecting surface 31b, and the second condensing / reflecting surface 31h. The only difference is that the optical power is increased. About another structure, it is the same as that of the above-mentioned embodiment. The divergent light emitted from the light source 33 is reflected by the second condensing / reflecting surface 31 h to become weakly convergent light, and then reflected by the first reflecting surface 31 b and then enters the optical waveguide 32 a of the slider 32.

FIG. 16 is a cross-sectional view similar to FIG. 3 of an optically assisted magnetic head 3H according to another modification. The optically assisted magnetic head 3H shown in FIG. 16 differs from the embodiment shown in FIG. 14 only in that the second condensing / reflecting surface 31h is eliminated and a diffractive lens 31i is formed on the planar second reflecting surface 31c. About another structure, it is the same as that of the above-mentioned embodiment.

As described above, the present invention has been described with reference to the embodiment. However, the present invention should not be construed as being limited to the above-described embodiment, and can be appropriately changed or improved. For example, as shown in FIG. 17, a grating coupler GC is provided in the vicinity of the entrance of the optical waveguide 32a, and the light beam emitted from the light source 33 and reflected by the reflecting surface 31j is directly applied to the grating coupler GC via the cladding portion 35. By making it enter, it can also couple | bond with the optical waveguide 32a of the slider 32. FIG. Grooves of a lattice extend along the longitudinal direction of the rod-shaped member IM2 on the reflective surface 31j, and are formed from a linear lattice with equal intervals, and a reflective film is formed on the surface thereof. In the grating coupler GC, the incident angle at which the coupling efficiency is maximized varies depending on the wavelength. The optical element 31 has a function of correcting the angle of incidence on the grating coupler GC with respect to wavelength fluctuations by means of an equally spaced diffraction grating.

DESCRIPTION OF SYMBOLS 1 Optical assist type magnetic recording apparatus 2 Disc 3 Optical assist magnetic head 3A-3E Optical assist magnetic head 4 Head support part 5 Support shaft 6 Tracking actuator 31 Optical element 31a Lower surface 31b First reflective surface 31c Second reflective surface 31d Condensing light Reflective surface 31e,

31i Diffractive lens

31f, 31g One-dimensional diffractive lens 31h Second condensing reflective surface 31j Reflective surface 32 Slider 32a Optical waveguide 32b Magnetic head part 32d Groove 33 Light source 33a Exit port 34 Near field generating part 35 Cladding part 41 Suspension Arm 42 Opening portion 43 Pivot 44 Flexure 45 Opening portion 46 Tongue piece BD Adhesive GC Grating coupler IM1 Long member IM2 Rod member IM2a First surface IM2b Second surface IM2c Third surface IM2d Condensing / reflecting surface IM3 Light source member M Reflective film W19 Substrate W40 Laminate part W50 Substrate WAM Alignment mark

Claims

A slider that includes an optical waveguide and floats and moves relative to the recording medium according to the rotation of the disk-shaped recording medium;
A light source attached to a side surface of the slider;
An optical element having a deflecting surface for deflecting a light beam from the light source toward an optical waveguide provided in the slider;
The light beam emitted from the light source is incident on the optical waveguide via the deflection surface of the optical element, and is emitted from the emission end of the optical waveguide facing the recording medium toward the recording medium. An optically assisted magnetic head.
2. The optically assisted magnetic head according to claim 1, wherein a light beam is emitted from the light source in a direction having a component opposite to the incident direction of the light beam incident on the recording medium.
3. The optically assisted magnetic head according to claim 1, wherein the optical element has a condensing means on at least one surface.
The optically assisted magnetic head according to any one of claims 1 to 3, wherein a diffraction grating is formed on at least one surface of the optical element.
5. The optically assisted magnetic head according to claim 4, wherein the pitch of the diffraction grating becomes narrower from the center toward the periphery.
5. The optically assisted magnetic head according to claim 4, wherein the pitches of the diffraction gratings are equally spaced.
The light-assisted magnetic head according to claim 1, wherein the light beam emitted from the light source is reflected twice by the optical element and then enters the optical waveguide.
8. The optical assist according to claim 1, wherein the slider has a magnetic head portion adjacent to the optical waveguide, and the light source is attached to the magnetic head portion via a heat insulating layer. Magnetic head.
9. The optically assisted magnetic head according to claim 1, wherein the optical element is made of plastic.
9. The optically assisted magnetic head according to claim 1, wherein the optical element is made of glass.
The optically assisted magnetic head according to any one of claims 1 to 8, wherein the optical element is a hybrid of glass and plastic.
The slider and the optical element are integrally formed by joining a member including a plurality of the sliders and a member including the plurality of the optical elements and then dividing the member. The optically assisted magnetic head according to any one of 11.
The member including the plurality of light sources is joined to the member including the plurality of sliders and the member including the plurality of optical elements, and then divided, whereby the slider, the optical element, and the light source are integrated. 13. The optically assisted magnetic head according to claim 1, wherein the optically assisted magnetic head is formed.