JP2012531614A - 干渉式の距離測定装置及び/又は回転測定装置 - Google Patents
干渉式の距離測定装置及び/又は回転測定装置 Download PDFInfo
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- JP2012531614A JP2012531614A JP2012518864A JP2012518864A JP2012531614A JP 2012531614 A JP2012531614 A JP 2012531614A JP 2012518864 A JP2012518864 A JP 2012518864A JP 2012518864 A JP2012518864 A JP 2012518864A JP 2012531614 A JP2012531614 A JP 2012531614A
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- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000005305 interferometry Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 15
- 238000011156 evaluation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
- G01D5/34723—Scale reading or illumination devices involving light-guides
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
- G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
従って本発明の課題は、干渉式の距離測定装置及び/又は回転測定装置を、普遍的な使用可能性に関して、特に、周囲の影響及び環境の影響に対する測定装置の感度に関して改善することである。
Claims (10)
- 格子手段(34;60)を備えた干渉式の距離測定装置及び/又は回転測定装置であって、
前記格子手段(34;60)はセンサユニット(14)を有しており、
該センサユニット(14)は、前記格子手段(34;60)の直線運動及び/又は回転運動を検出するために、光導体ユニット(12)から出射され前記格子手段(34;60)へと配向される二つの部分ビーム(20,22)が、受光ユニット(36)によって検出可能であり、且つ、前記格子手段(34;60)の直線運動又は回転運動及び/又は前記格子手段(34;60)の位置に依存する重畳信号を形成するように、前記光導体ユニット(12)並びに前記受光ユニット(36)と協働し、
前記光導体ユニット(12)には変調干渉計ユニット(10)が接続されている、干渉式の距離測定装置及び/又は回転測定装置において、
前記変調干渉計ユニット(10)は、前記二つの部分ビーム(20,22)にビームを分割する手段(18)と、前記二つの部分ビーム(20,22)の内の一方に対する第1の光学的な遅延手段(26)とを有しており、該第1の光学的な遅延手段(26)は、前記部分ビーム(20,22)の光学的なコヒーレンス長よりも長い光学的な遅延区間を生じさせるものであり、
前記変調干渉計ユニット(10)は、前記二つの部分ビーム(20,22)が共通して供給される光ファイバから成る光導体(12)を介して前記センサユニット(14)と接続されており、
前記受光ユニット(36)は前記センサユニット(14)に設けられていることを特徴とする、干渉式の距離測定装置及び/又は回転測定装置。 - 前記光導体ユニットは、前記二つの部分ビーム(20,22)が前記格子手段(34;60)において回折されるように構成されている、請求項1に記載の装置。
- 前記受光ユニット(36)は、前記部分ビーム(20,22)の出射部に対して一定の不変の間隔を置いて、前記格子手段(34;60)によって表される格子平面が前記出射部と前記受光ユニット(36)との間に延在するように配置されている、請求項1又は2に記載の装置。
- 前記変調干渉計ユニット(10)は、前記センサユニット(14)の運動、特に直線運動及び/又は回転運動による影響を受けることなく固定的に設けられている、請求項1乃至3のいずれか一項に記載の装置。
- 前記変調干渉計ユニット(10)は、前記部分ビーム(20,22)を相互に周波数シフトさせる手段(24)を有しており、特に、ヘテロダイン干渉法のための変調器(24)として構成されている、請求項1乃至4のいずれか一項に記載の装置。
- 前記光導体はモノモード光導体(12)として構成されており、前記二つの部分ビーム(20,22)が相互に重畳され、且つ相互に時間的に遅延された状態で入力されるように設計されている、請求項1乃至5のいずれか一項に記載の装置。
- 前記センサユニット(14)は光学的な遅延手段(32)を有しており、該光学的な遅延手段(32)は、前記光導体(12)から出力される前記二つの部分ビーム(20,22)について前記光学的な遅延区間の補償を行なうように構成されている、請求項1乃至6のいずれか一項に記載の装置。
- 前記光学的な遅延区間の長さは、前記コヒーレンス長の少なくとも2倍、有利には少なくとも5倍である、請求項1乃至7のいずれか一項に記載の装置。
- 前記第1の光学的な遅延手段及び/又は前記第2の光学的な遅延手段はプリズム装置を有している、請求項1乃至8のいずれか一項に記載の装置。
- 回転運動を検出するために構成されている前記格子手段(60)は回転軸(62)を中心として放射状、特に星形に構成されており、
前記部分ビーム(20,22)の二つのペアが、特に前記回転軸の両側において、前記格子手段と協働するように、前記センサユニット(14)にビーム分割手段が接続されている、請求項1乃至9のいずれか一項に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009027266.6 | 2009-06-18 | ||
DE102009027266A DE102009027266A1 (de) | 2009-06-29 | 2009-06-29 | Interferometrische Weg- und/oder Drehmessvorrichtung |
PCT/EP2010/058597 WO2011000715A1 (de) | 2009-06-29 | 2010-06-18 | Interferometrische weg- und/oder drehmessvorrichtung |
Publications (2)
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JP2012531614A true JP2012531614A (ja) | 2012-12-10 |
JP5355790B2 JP5355790B2 (ja) | 2013-11-27 |
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JP2012518864A Expired - Fee Related JP5355790B2 (ja) | 2009-06-29 | 2010-06-18 | 干渉式の距離測定装置及び/又は回転測定装置 |
Country Status (5)
Country | Link |
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US (1) | US8830482B2 (ja) |
EP (1) | EP2449347B1 (ja) |
JP (1) | JP5355790B2 (ja) |
DE (1) | DE102009027266A1 (ja) |
WO (1) | WO2011000715A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102011082156A1 (de) | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
US20140353477A1 (en) * | 2013-05-29 | 2014-12-04 | The Cleveland Electric Laboratories Company | Optical encoder |
EP3530175A1 (en) * | 2018-02-26 | 2019-08-28 | Nokia Technologies Oy | Apparatus for optical coherence tomography |
Citations (5)
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JPH03505374A (ja) * | 1988-06-22 | 1991-11-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 変位及び角度の測定方法 |
JP2001525938A (ja) * | 1997-05-19 | 2001-12-11 | センサーネット リミテッド | 分散検知システム |
JP2002515595A (ja) * | 1998-05-20 | 2002-05-28 | ブッカム・テクノロジー・ピーエルシー | 光アドレス式感知システム |
JP2004514124A (ja) * | 2000-11-20 | 2004-05-13 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 干渉測定装置 |
JP2006194855A (ja) * | 2004-12-13 | 2006-07-27 | Sony Corp | 変位検出装置及び変位計測装置並びに定点検出装置 |
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DE2127483A1 (de) * | 1971-06-03 | 1972-12-14 | Leitz Ernst Gmbh | Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten |
US4551017A (en) * | 1981-03-02 | 1985-11-05 | General Electric Co. | Laser doppler velocimeter for measuring torsional vibration |
US4627731A (en) * | 1985-09-03 | 1986-12-09 | United Technologies Corporation | Common optical path interferometric gauge |
DE3930554A1 (de) * | 1989-09-13 | 1991-03-21 | Bosch Gmbh Robert | Vorrichtung zur absoluten zweidimensionalen positions-messung |
DE19650703A1 (de) * | 1996-12-06 | 1998-06-10 | Bosch Gmbh Robert | Verfahren zum interferometrischen Messen von Positionen, Positionsänderungen und daraus abgeleiteter physikalischer Größen |
DE19707109C1 (de) * | 1997-02-22 | 1998-06-25 | Bosch Gmbh Robert | Optisches Vibrometer |
US20060145066A1 (en) | 2004-12-13 | 2006-07-06 | Hideaki Tamiya | Displacement detection apparatus, displacement gauging apparatus and fixed point detection apparatus |
DE102006014766A1 (de) | 2006-03-30 | 2007-10-04 | Robert Bosch Gmbh | Interferometrische Messvorrichtung |
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2009
- 2009-06-29 DE DE102009027266A patent/DE102009027266A1/de not_active Withdrawn
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- 2010-06-18 JP JP2012518864A patent/JP5355790B2/ja not_active Expired - Fee Related
- 2010-06-18 WO PCT/EP2010/058597 patent/WO2011000715A1/de active Application Filing
- 2010-06-18 US US13/379,483 patent/US8830482B2/en not_active Expired - Fee Related
- 2010-06-18 EP EP10722722.5A patent/EP2449347B1/de not_active Not-in-force
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03505374A (ja) * | 1988-06-22 | 1991-11-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 変位及び角度の測定方法 |
JP2001525938A (ja) * | 1997-05-19 | 2001-12-11 | センサーネット リミテッド | 分散検知システム |
JP2002515595A (ja) * | 1998-05-20 | 2002-05-28 | ブッカム・テクノロジー・ピーエルシー | 光アドレス式感知システム |
JP2004514124A (ja) * | 2000-11-20 | 2004-05-13 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 干渉測定装置 |
JP2006194855A (ja) * | 2004-12-13 | 2006-07-27 | Sony Corp | 変位検出装置及び変位計測装置並びに定点検出装置 |
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Publication number | Publication date |
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EP2449347A1 (de) | 2012-05-09 |
DE102009027266A1 (de) | 2010-12-30 |
JP5355790B2 (ja) | 2013-11-27 |
WO2011000715A1 (de) | 2011-01-06 |
US8830482B2 (en) | 2014-09-09 |
US20120162658A1 (en) | 2012-06-28 |
EP2449347B1 (de) | 2014-12-17 |
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