JP2012505393A5 - - Google Patents

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Publication number
JP2012505393A5
JP2012505393A5 JP2011530501A JP2011530501A JP2012505393A5 JP 2012505393 A5 JP2012505393 A5 JP 2012505393A5 JP 2011530501 A JP2011530501 A JP 2011530501A JP 2011530501 A JP2011530501 A JP 2011530501A JP 2012505393 A5 JP2012505393 A5 JP 2012505393A5
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JP
Japan
Prior art keywords
est
calculating
interferences
spectrum
resonator
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JP2011530501A
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English (en)
Japanese (ja)
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JP2012505393A (ja
JP5538406B2 (ja
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Priority claimed from EP08166344A external-priority patent/EP2175228A1/en
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Publication of JP2012505393A publication Critical patent/JP2012505393A/ja
Publication of JP2012505393A5 publication Critical patent/JP2012505393A5/ja
Application granted granted Critical
Publication of JP5538406B2 publication Critical patent/JP5538406B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011530501A 2008-10-10 2009-10-09 共振器長の測定法 Expired - Fee Related JP5538406B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08166344A EP2175228A1 (en) 2008-10-10 2008-10-10 Resonator length measurement
EP08166344.5 2008-10-10
PCT/EP2009/063208 WO2010040838A1 (en) 2008-10-10 2009-10-09 Resonator length measurement

Publications (3)

Publication Number Publication Date
JP2012505393A JP2012505393A (ja) 2012-03-01
JP2012505393A5 true JP2012505393A5 (enExample) 2012-11-22
JP5538406B2 JP5538406B2 (ja) 2014-07-02

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ID=40301781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011530501A Expired - Fee Related JP5538406B2 (ja) 2008-10-10 2009-10-09 共振器長の測定法

Country Status (5)

Country Link
US (1) US8134714B2 (enExample)
EP (2) EP2175228A1 (enExample)
JP (1) JP5538406B2 (enExample)
CN (1) CN102177409B (enExample)
WO (1) WO2010040838A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288103B (zh) * 2011-06-27 2013-07-03 清华大学 基于折叠式法布里-珀罗腔的腔长测量方法及装置
DE102015009595A1 (de) * 2015-07-24 2017-01-26 Universität Heidelberg Verfahren und Vorrichtung zur Kalibration eines optischen Resonators, Verwendung der Vorrichtung, Verwendung eines optischen Modulators und Computerprogrammprodukt
NL2017595A (en) * 2015-11-10 2017-05-26 Asml Netherlands Bv Proximity sensor, lithographic apparatus and device manufacturing method
DE102016103109B4 (de) 2016-02-23 2018-07-26 Björn Habrich Vermessung einer kavität mittels interferenzspektroskopie
CN106898942A (zh) * 2017-02-28 2017-06-27 中国科学院光电研究院 多束脉冲光同步的调节方法
CN107961986A (zh) * 2017-11-22 2018-04-27 铜陵日兴电子有限公司 一种无动力高协调性谐振器厚度分类筛选装置
CN111122610B (zh) * 2019-11-22 2021-09-03 上海大学 一种基于半整数阶谐振模式的有源传感器

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
US5555089A (en) * 1994-11-30 1996-09-10 Anvik Corporation Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source
DE19528676C2 (de) 1995-08-04 1997-05-22 Zeiss Carl Jena Gmbh Interferometeranordnung zur absoluten Distanzmessung
JPH1183457A (ja) * 1997-09-12 1999-03-26 Yazaki Corp スペクトル干渉顕微鏡及び該顕微鏡を用いた表面形状測定方法
US6078706A (en) 1998-09-22 2000-06-20 The United States Of America As Represented By The Secretary Of The Navy Quasi-static fiber pressure sensor
US7057732B2 (en) * 1999-01-25 2006-06-06 Amnis Corporation Imaging platform for nanoparticle detection applied to SPR biomolecular interaction analysis
US6449048B1 (en) * 2000-05-11 2002-09-10 Veeco Instruments, Inc. Lateral-scanning interferometer with tilted optical axis
US6510256B1 (en) * 2000-06-29 2003-01-21 Proximion Fiber Optics Ab Method and arrangement in connection with optical bragg-reflectors
CN1137369C (zh) * 2001-08-23 2004-02-04 四川大学 大尺寸零件无导轨测量装置及其测试方法
US7099015B2 (en) 2003-08-25 2006-08-29 Ivan Melnyk Fiber optic sensing device for measuring a physical parameter
US7483598B2 (en) * 2004-03-15 2009-01-27 Queen's University At Kingston Phase shift optical loop spectroscopy
EP1586854A3 (en) * 2004-04-15 2006-02-08 Davidson Instruments Interferometric signal conditioner for measurement of the absolute length of gaps in a fiber optic Fabry-Pérot interferometer
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
JP4027352B2 (ja) * 2004-09-17 2007-12-26 アンリツ株式会社 光ファイバプローブ装置
TWI278682B (en) * 2004-11-23 2007-04-11 Ind Tech Res Inst Fiber optic interferometric position sensor and measuring method thereof
EP1744119A1 (en) * 2005-07-15 2007-01-17 Proximion Fiber Systems AB Swept-source optical coherence tomography
US7289220B2 (en) * 2005-10-14 2007-10-30 Board Of Regents, The University Of Texas System Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure
DE502006002379D1 (de) * 2006-04-27 2009-01-29 3R Syst Int Ab Spannvorrichtung mit Einrichtung zur Messung der Distanz zwischen einem Spannfutter und einem Werkzeug- oder Werkstückhalter
CN101126629A (zh) * 2007-09-25 2008-02-20 北京交通大学 利用光纤光栅的合成波干涉台阶高度在线测量系统

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