JP2012254552A - Method for manufacturing nozzle plate and method for manufacturing liquid ejection head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle plate which reduces interval of nozzles to enable high-density liquid droplet ejection, and suppresses variation in ejection direction of the liquid droplet ejected from the nozzles, to improve ejection quality of the liquid droplet, and to provide a method for manufacturing a liquid ejection head.SOLUTION: A nozzle plate 14 includes a plurality of nozzles 13 for ejecting liquid, and is joined to a channel member in which a channel communicating with the nozzles is formed. A punch 50 includes a plurality of punch members having tips 80 whose diameters are smaller than those of the holding parts on one-end sides of holding parts. A part of sides of the holding parts of the punch members are formed as planes, and the punch members are joined together by the planes. In the method of manufacturing the nozzle plate, the punch 50 is used to form the nozzles 13 by boring the nozzle plate 14 with the tips 80 thereof.

Description

  The present invention relates to a nozzle plate manufacturing method and a liquid jet head manufacturing method.

Conventionally, a liquid ejecting head that ejects liquid droplets from a nozzle by applying pressure to the liquid with a piezoelectric element that is deformed by applying a voltage is known. As a typical example, an ink droplet is ejected from a nozzle. Inkjet recording heads are known.

As such an ink jet recording head, one in which a plurality of nozzles are provided for one pressure generating chamber has been proposed in order to improve the resolution of printed matter. The plurality of nozzles of such an ink jet recording head is formed by using a punch in which a plurality of driving portions are formed at the tip of a columnar punch body, and penetrating the nozzles through a nozzle plate (for example, patents). Reference 1).

JP 2009-226814 A

If one nozzle is used to sequentially provide openings in the nozzle plate to form a plurality of nozzles, the nozzles are close to each other, so that fleshiness occurs. For this reason, the accuracy of the position of the nozzle is lowered, and since the nozzle is inclined with respect to the plane of the nozzle plate, the straightness of the ink is lowered, and the landing accuracy of the ink droplet is also lowered.

In addition, when a plurality of nozzles are provided on the nozzle plate at the same time using a surface in which the side surfaces of a plurality of punches are brought into close contact with each other, the nozzle interval depends on the diameter of the punch, so that adjacent nozzles cannot be formed. . Although it is possible to reduce the diameter of the punch and reduce the interval between the nozzles, in this case, the punch strength is reduced and the punch may break.

In the punch according to Patent Document 1, two punching portions are provided in one punch body.
In such a punch, in order to narrow the interval between the nozzles, it is necessary to narrow the interval between the driven portions, but it is difficult to narrow the interval between the driven portions.

Such a problem exists not only in the ink jet recording head but also in a liquid ejecting head that ejects liquid other than ink.

In view of such circumstances, the present invention can discharge high-density droplets by narrowing the interval between nozzles and suppress variation in the discharge direction of droplets discharged from each nozzle. It is an object to provide a method for manufacturing a nozzle plate and a method for manufacturing a liquid jet head with improved discharge quality.

An aspect of the present invention that solves the above-described problem is a method of manufacturing a nozzle plate that has a plurality of nozzles that discharge liquid and is joined to a flow path member that has a flow path communicating with the nozzles. A plurality of punch members each having a pointed portion having a diameter shorter than that of the gripping portion on one end side of the gripping portion, a part of the side surface of the gripping portion of each punch member being a flat surface, In the method of manufacturing a nozzle plate, the nozzle is formed in the nozzle plate at the pointed end portion of the punch using the punch formed by bonding with the nozzle.
In such an aspect, by providing a flat surface on a part of the side surface of the columnar gripping portion, the interval between the tip portions of the punch members is more than the interval between the tip portions when the punch members are joined without providing a plane. Is also narrow. By using such a punch, a plurality of nozzles can be simultaneously formed on the nozzle plate at narrower intervals, so that even if the nozzles are close to each other, the occurrence of fleshing can be suppressed. Thereby, it is prevented that the precision of the position of a nozzle falls, Furthermore, it is prevented that each nozzle inclines with respect to the plane of a nozzle plate.
Such a nozzle plate improves the straightness of the liquid, improves the landing accuracy of the droplets,
The discharge quality of the liquid jet head using this can be improved.

Here, the pointed portion includes a first tapered portion that is continuous with the gripping portion, a second tapered portion that is continuous with the first tapered portion, and has a narrower angle than the first tapered portion, and a second tapered portion. It is preferable that it is comprised from the continuous straight part. According to this, a pointed part can be suitably produced by cutting.

Moreover, it is preferable that the said punch was formed by joining each punch member which made a part of column-shaped said holding part a plane at the said planes. According to this, a punch can be comprised from the punch member which consists of a cylindrical holding part. Even if it is a column-shaped holding part, punch members can be joined more reliably by providing a plane part.

Moreover, it is preferable to make the base end surface of the punch member opposite to the pointed end portion flush with the surface. According to this, when a load is applied to the base end face of the punch, the load is equally applied to each punch member. Accordingly, the plurality of nozzles formed by punching can be more reliably made the same shape.

In addition, it is preferable that the punch is formed on the side surface of each punch member by the number of punch members to be bonded adjacent to the punch member, and the punch members are bonded to each other by the planes. According to this, a plurality of pointed portions are formed, for example, punches arranged in two directions, and nozzles arranged in two directions at a time can be formed.

According to another aspect of the present invention for solving the above-described problems, a nozzle plate having a nozzle for discharging a liquid, a flow path member in which a pressure generation chamber communicating with the nozzle is formed, and a pressure change is generated in the pressure generation chamber. A pressure-generating means for manufacturing a liquid jet head, comprising: a plurality of punch members each having a pointed portion having a diameter shorter than the grip portion on one end side of a columnar grip portion; A part of the side surface of the gripping portion is a flat surface, a punch in which the punch members are joined to each other on the flat surface is used, a nozzle is drilled in the nozzle plate at the pointed end portion of the punch, and the nozzle plate is connected to the flow path. The liquid jet head manufacturing method is characterized by joining to a member.
In this aspect, the nozzle interval can be narrowed to discharge a high-density droplet, and the droplet discharge quality is improved by suppressing variations in the discharge direction of the droplet discharged from each nozzle. A liquid jet head is provided.

1 is a perspective view illustrating a schematic configuration of a recording apparatus according to an embodiment. FIG. 3 is a cross-sectional view of a recording head according to an embodiment. It is a top view of the nozzle plate which concerns on one Embodiment. It is an image figure showing the relationship between a nozzle and the dot formed from the ink. It is the front view and bottom view of the punch member which concern on one Embodiment. It is the front view and bottom view of the punch member which concern on one Embodiment. It is the front view and bottom view of the punch member which concern on one Embodiment. It is the front view and bottom view of a punch concerning one embodiment. It is sectional drawing explaining the process of forming a nozzle in a nozzle plate. It is a bottom view of the punch which concerns on a modification. It is the front view and bottom view of a punch member concerning a modification, and the bottom view of a punch.

<Embodiment 1>
Hereinafter, the present invention will be described in detail based on embodiments. Hereinafter, the ink jet recording head is an example of a liquid ejecting head, and is also simply referred to as a head. An ink jet recording apparatus on which the head is mounted is an example of a liquid ejecting apparatus.

FIG. 1 is a schematic perspective view of an ink jet recording apparatus which is an example of a liquid ejecting apparatus on which the head of the present invention is mounted.

As shown in the drawing, an ink jet recording apparatus 1 that is a liquid ejecting apparatus according to this embodiment includes, for example, a plurality of different color inks such as black (B), cyan (C), magenta (M), and yellow (Y). The recording head 10 is equipped with an ink cartridge (liquid storage means) 2 having a storage chamber in which is stored. The recording head 10 is mounted on the carriage 3, and the carriage 3 on which the recording head 10 is mounted is a carriage shaft 5 attached to the apparatus main body 4.
It is provided so that it can move to an axial direction along. Then, the driving force of the driving motor 6 is transmitted to the carriage 3 through a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 is moved along the carriage shaft 5. On the other hand, the apparatus body 4 has a carriage shaft 5.
, And a recording sheet S such as paper fed by a paper feeding device (not shown) is conveyed on the platen 8.

FIG. 2 is a cross-sectional view of the recording head according to the present embodiment. As shown, the recording head 1
0 is a flow path forming substrate 12 which is an example of a flow path substrate having a plurality of pressure generating chambers 11, a nozzle plate 14 having a plurality of nozzles 13 communicating with each pressure generating chamber 11, and a flow path forming A flow path member 16 having a vibration plate 15 provided on the surface of the substrate 12 opposite to the nozzle plate 14 is provided. Furthermore, a piezoelectric element unit 18 having a piezoelectric element 17 provided in a region corresponding to each pressure generating chamber 11 on the vibration plate 15, and an accommodating portion 19 that is fixed on the vibration plate 15 and accommodates the piezoelectric element unit 18. The case head 20 is provided.

In the flow path forming substrate 12, a plurality of pressure generating chambers 11 are partitioned by a partition wall and arranged in parallel in the width direction on the surface layer portion on one side. A reservoir 22 to which ink is supplied via an ink introduction path (not shown) that is a liquid introduction path of the case head 20 is arranged outside the row of the pressure generation chambers 11 in the thickness direction. It is provided through. The reservoir 22 and each pressure generation chamber 11 communicate with each other via the ink supply path 23, and each pressure generation chamber 11 is connected.
Ink is supplied through an ink introduction path (not shown), a reservoir 22 and an ink supply path 23. Further, a nozzle communication hole 24 that penetrates the flow path forming substrate 12 is formed on the end side of the pressure generating chamber 11 opposite to the reservoir 22. In this embodiment, the flow path forming substrate 12 is made of a silicon single crystal substrate, and the pressure generating chamber 11 and the like provided in the flow path forming substrate 12 are formed by etching the flow path forming substrate 12. ing.

A nozzle plate 14 having nozzles 13 formed therein is joined to one side of the flow path forming substrate 12, and each nozzle 13 generates a pressure through a nozzle communication hole 24 provided in the flow path forming substrate 12. It communicates with the chamber 11.

In addition, a diaphragm 15 is joined to the other surface side of the flow path forming substrate 12, that is, the opening surface side of the pressure generation chamber 11, and each pressure generation chamber 11 is sealed by the vibration plate 15.

The vibration plate 15 is formed of a composite plate of, for example, an elastic film 25 made of an elastic member such as a resin film and a support plate 26 made of a metal such as SUS that supports the elastic film 25 and is elastic. The film 25 side is bonded to the flow path forming substrate 12.

In addition, an island portion 27 with which the tip end portion of the piezoelectric element 17 abuts is provided in a region of the vibration plate 15 facing each pressure generation chamber 11. The front end surface of the piezoelectric element 17 is bonded to the island portion 27 with an adhesive 30. That is, a thin portion 28 having a thickness smaller than that of the other regions is formed in a region of the vibration plate 15 facing the peripheral portion of each pressure generating chamber 11, and island portions 27 are provided inside the thin portion 28. ing. In this embodiment, the reservoir 22 of the diaphragm 15 is also used.
Similar to the thin-walled portion 28, a compliance portion 29 that is substantially formed only of an elastic film is provided by removing the support plate 26 by etching. The compliance portion 29 absorbs the pressure change by the deformation of the elastic film 25 of the compliance portion 29 when the pressure change in the reservoir 22 occurs, and always keeps the pressure in the reservoir 22 constant. Fulfill.

The piezoelectric element 17 is integrally formed in one piezoelectric element unit 18. That is, a piezoelectric element forming member 34 in which the piezoelectric material 31 and the electrode forming materials 32 and 33 are vertically sandwiched and laminated is formed to correspond to each pressure generating chamber 11. Each piezoelectric element 17 is formed by cutting into comb teeth. That is,
A plurality of piezoelectric elements 17 are integrally formed. The inactive region that does not contribute to the vibration of the piezoelectric element 17 (piezoelectric element forming member 34), that is, the base end side of the piezoelectric element 17 is fixed to the fixed substrate 35, and the piezoelectric element 17 is connected to the case via the fixed substrate 35. It is fixed to the head 20.

Further, in the vicinity of the base end portion of the piezoelectric element 17, each piezoelectric element 1 is placed on the surface opposite to the fixed substrate 35.
A flexible wiring board 37 that supplies a signal for driving 7 is connected, and the piezoelectric elements 17 (piezoelectric element forming member 34), the fixed board 35, and the flexible wiring board 37 constitute a piezoelectric element unit 18.

The case head 20 is provided with an accommodating portion 19 that penetrates in a thickness direction in a region facing the island portion 27. The entire piezoelectric element unit 18 is accommodated in the accommodating portion 19, and the piezoelectric element 1
7 is fixed in a state where it abuts on the island portion 27 of the diaphragm 15 as described above, and the fixed substrate 35 is fixed to the case head 20 with an adhesive 39.

A wiring board 41 provided with a plurality of conductive pads 40 to which the respective wirings 36 of the flexible wiring board 37 are connected is fixed on the case head 20.
The housing part 19 is substantially closed by the wiring board 41. In the wiring board 41,
A slit-shaped opening 42 is formed in a region of the case head 20 that faces the housing 19, and the flexible wiring board 37 is drawn out of the housing 19 from the opening 42 of the wiring board 41.

The flexible wiring board 37 is made of, for example, a chip on film (COF) on which a driving IC (not shown) for driving the piezoelectric element 17 is mounted. Each wiring 36 of the flexible wiring board 37 is connected to the electrode forming materials 32 and 33 constituting the piezoelectric element 17 by, for example, solder, anisotropic conductive material or the like on the base end side. On the other hand, on the tip side,
Each wiring 36 is bonded to each conductive pad 40 of the wiring board 41. Specifically, each wiring 36 is connected to the wiring board 41 in a state in which the distal end portion of the flexible wiring board 37 drawn from the opening 42 of the wiring board 41 to the outside of the housing part 19 is bent along the surface of the wiring board 41. It is joined to each conductive pad 40 of 41.

In such a recording head 10, when ejecting ink droplets, the piezoelectric element 17 and the diaphragm 1
The volume of each pressure generating chamber 11 is changed by the deformation of 5, and ink droplets are ejected from a predetermined nozzle 13. Specifically, when ink is supplied from the ink cartridge 2 (see FIG. 1) to the reservoir 22, the ink is distributed to each pressure generating chamber 11 via the ink supply path 23. Actually, the piezoelectric element 17 is contracted by applying a voltage to the piezoelectric element 17. As a result, the diaphragm 15 is deformed together with the piezoelectric element 17 to expand the volume of the pressure generating chamber 11, and ink is drawn into the pressure generating chamber 11. After the ink is filled up to the nozzle 13, the piezoelectric element 17 is driven in accordance with a recording signal supplied through the wiring board 41.
The voltage applied to the electrode forming materials 32 and 33 is released. As a result, the piezoelectric element 17 is expanded to return to the original state, and the diaphragm 15 is also displaced to return to the original state. As a result, the volume of the pressure generating chamber 11 contracts, the pressure in the pressure generating chamber 11 increases, and ink droplets are ejected from the nozzle 13.

FIG. 3 is a plan view of the nozzle plate. As shown in the figure, the nozzle plate 14 is formed by, for example, forming a nozzle 13 in a thin plate made of a metal such as stainless steel.
Two nozzles 13 are provided for one pressure generation chamber 11.

FIG. 4 is an image diagram showing the relationship between nozzles and dots formed by ink droplets ejected from each nozzle. In addition, the dashed-dotted line in a figure represents the center axis | shaft of the width direction of each pressure generation chamber 11. FIG. As shown in the figure, dots 1 are formed by ink droplets ejected from each nozzle 13.
00 is formed. Since ink droplets are ejected from two nozzles 13 provided in one pressure generation chamber 11, the plurality of dots 100 have a higher density than the pitch of the pressure generation chambers 11.
That is, the dots 100 can be formed at an interval narrower than the interval between the pressure generation chambers 11. Thereby, high-density printing can be performed, and the influence of crosstalk due to the interval between the pressure generation chambers 11 being too narrow can be suppressed.

Here, the punch used for manufacture of the nozzle plate mentioned above is demonstrated. FIG. 5 is a front view, a bottom view, and a front view of an essential part in which a pointed portion is enlarged, and FIGS. 6 to 7 are a front view and a bottom view of the punch member according to the present embodiment. FIG. 8 is a front view and a bottom view of the punch according to the present embodiment.

The punch 50 according to the present embodiment includes two punch members 60 (see FIG. 8).

As shown in FIG. 5, one punch member 60 includes a gripping portion 70 and a pointed end portion 80 provided on one end side of the gripping portion 70.

The punch member 60 is made of, for example, metal. The gripping portion 70 has a columnar shape, a pointed end portion 80 is provided on one end side, and a base end portion 71 wider than the width of the gripping portion 70 is provided on the other end side.

The pointed portion 80 includes a first tapered portion 81 that is continuous with the gripping portion 70, a second tapered portion 82 that is continuous with the first tapered portion 81, and a straight portion 83 that is continuous with the second tapered portion 82. . The first tapered portion 81 has a conical side surface whose width gradually decreases toward the tip of the grip portion 70. Further, the second taper portion 82 is formed in a conical shape whose width gradually decreases toward the tip of the grip portion 70. The straight portion 83 is formed in a cylindrical shape and is coaxial with the grip portion 70. The angle formed between the side surface of the second tapered portion 82 and the axis of the gripping portion 70 is smaller than the angle formed between the side surface of the first tapered portion 81 and the axis of the gripping portion 70. That is, the second tapered portion 82 is sharper than the first tapered portion 81. Further, the tip portion 80 has a diameter of the grip portion 7.
Shorter than 0 diameter.

As shown in FIGS. 6 and 7, the punch member 60 described above is provided with a flat portion 72 on a part of the side surface. The dotted line shown in FIG. 6 represents the position of the flat portion 72 provided on the punch member 60 shown in FIG. 5, and FIG. 7 shows the punch member 60 shown in FIG. 5 provided with the flat portion 72. Yes.

As shown in these drawings, the flat surface portion 72 has a first portion in the punch member 60 shown in FIG.
It passes through the tapered portion 81 and has a plane parallel to the axis of the gripping portion 70. In this embodiment,
The flat portions 72 of the two punch members 60 have the same shape.

As shown in FIG. 8, the punch 50 is formed by joining the punch members 60 provided with the flat portion 72 with the flat portion 72. In the present embodiment, the flat portions 72 of the punch members 60 are brought into contact with each other and fixed with other metal parts (not shown). It is also possible to join the punch member 60 with an adhesive or the like. However, since there is a possibility that the distance between the straight portions 83 may change due to variations in the thickness of the adhesive, it is preferable that the flat portions 72 are brought into contact with each other to form the punch 50. When fixing, the position of each punch member 60 is adjusted so that each pointed portion 80 (the top surface of the straight portion 83) of each punch member 60 comes into contact with the nozzle plate 14.

As described above, the punch 50 according to this embodiment includes the punch member 60 provided with the pointed portion 80 at one end of the cylindrical gripping portion 70 and the flat portion 72 on a part of the side surface of the gripping portion 70. It is constituted by joining at the plane part 72.

As shown in FIG. 8B, the straight portion 83 of the pointed portion 80 was coaxial with the axial center of the grip portion 70 that was originally cylindrical. By providing the flat surface portion 72 on a part of the side surface of the grip portion 70, the distance D between the straight portion 83 and the flat surface portion 72 is set so that the straight portion 83 and the grip portion 70.
The distance R from the side surface (circumferential surface) other than the flat surface portion 72 (the radius of the cylindrical gripping portion 70) can be made shorter. And since this punch part 60 is joined by this plane part 72, the space | interval of the straight parts 83 of each punch member 60 can be set to 2xD shorter than 2xR. When the punch members 60 are joined without being provided, the straight portion 8
The interval between 3 is 2 × R).

In other words, in the cross-sectional shape, the distance D between the straight portion 83 (pointed end portion 80) and the flat portion 72 is a side surface (circumferential surface) other than the straight portion 83 (pointed end portion 80) and the flat portion 72 of the gripping portion 70. The punch 50 is formed by joining the punch member 60 shorter than the distance R to the flat portion 72.

In the punch 50 having such a configuration, the gripping portion 70 itself does not need to be narrowed in accordance with the interval between the tip portions 80, so that the strength is maintained and the punch 50 is prevented from being broken. on the other hand,
The interval between the tip portions 80 (straight portions 83) can be 2 × D, which is narrower than 2 × R. Therefore, as will be described later, the nozzles 13 of the nozzle plate 14 are formed at the tip 80.
When drilling the nozzle 13, the interval between the nozzles 13 can be narrowed by the narrowly spaced tip 80.

Moreover, as shown to Fig.8 (a), as for the base end part 71 of each punch member 60, the base end surface 73 which followed the side surface is flush | level. Thereby, when a load is applied to the base end face 73 of the punch 50, the load is equally applied to each punch member 60. Therefore, 2 formed by the punch 50.
The two nozzles 13 can be more reliably made the same shape.

Here, a process of forming nozzles on the nozzle plate using the above-described punch 50 will be described. FIG. 9 is a cross-sectional view illustrating a process of forming a nozzle on a nozzle plate using a punch.

As shown in FIG. 9A, the top surface of the straight portion 83 of the pointed portion 80 of the punch 50 is brought into contact with the region where the nozzle 13 of the nozzle plate 14 is formed. This region is also a region facing one pressure generation chamber 11 (nozzle communication hole 24) of the flow path forming substrate 12.

As shown in FIG. 9B, the base end surface 73 (see FIG. 8) of the punch 50 is pressed, and the straight portion 83 is pierced into the nozzle plate 14. Further, as shown in FIG.
The base end face 73 is pressed, the straight plate 83 penetrates the nozzle plate 14, and the second tapered portion 82 is entered into the nozzle plate 14. Then, as shown in FIG. 9D, the two nozzles 13 are formed by pulling the punch 50 out of the nozzle plate 14. The shape of the nozzle 13 is a shape that matches the side surface of the straight portion 83 and the side surface of the second tapered portion 82.

Thereafter, although not particularly illustrated, the nozzle plate 14 is joined to the flow path member 16 illustrated in FIG. 2 so that the two nozzles 13 communicate with one pressure generation chamber 11. Then, the case head 20 is attached to the flow path member 16, the piezoelectric element unit 18 is accommodated in the accommodating portion 19, and the island portion 27 is accommodated.
The tip of the piezoelectric element 17 is bonded to the wiring board 41 and the case head 20 is attached to the recording head 10.

As described above, in the nozzle plate manufacturing method according to the present embodiment, the punch 50 is obtained by providing the flat surface portion 72 on a part of the side surface of the cylindrical gripping portion 70 and joining the punch members 60 to each other by the flat surface portion 72. Is used. The punch 50 has a distance D between the straight portion 83 and the flat surface portion 72.
It is shorter than the distance R between the straight portion 83 and the side surface (circumferential surface) other than the flat surface portion 72 of the grip portion 70. That is, in the punch 50, the interval between the pointed ends 80 (straight portions 83) of the punch members 60 is narrower than the interval between the pointed ends when the punch members 60 are joined without providing the plane portion 72. Become.

By using such a punch 50, the two nozzles 13 can be simultaneously formed on the nozzle plate 14 at a narrower interval. Therefore, even when the nozzles 13 are close to each other, the occurrence of leaning can be suppressed. it can. Thereby, it is prevented that the precision of the position of a nozzle falls, Furthermore, it is prevented that each nozzle 13 inclines with respect to the plane of the nozzle plate 14. Such a nozzle plate 14 has improved ink straightness and improved ink droplet landing accuracy, and can improve the print quality of the recording head 10 using the nozzle plate 14.

In addition, since it is not necessary to reduce the diameter of the entire gripping portion 70 in order to bring the apex portions 80 of the punch member 60 close to each other, the strength of the punch 50 is maintained and the punch 50 is prevented from being broken. .

Further, the pointed portion 80 includes a first tapered portion 81, a second tapered portion 82, and a straight portion 83.
It consists of and. Such a configuration is suitable when the pointed portion 80 and the gripping portion 70 are formed by cutting one end of a cylindrical member. That is, even if a horizontal force is applied during cutting, the first taper portion 81 has a relatively large diameter, and thus does not easily shake or deform in the horizontal direction. And since the 2nd taper part 82 and the straight part 83 with a smaller diameter can be made into short length by the part which provided the 1st taper part 81, it is suppressed that it shakes or deform | transforms with the force of a horizontal direction. . If one tapered portion is provided by cutting, the second tapered portion 8
Since the 2 and the straight portion 83 are elongated, there is a possibility that they may be shaken or deformed by a horizontal force.

The punch member 60 described above may be formed by cutting a part of the side surface of the cylindrical gripping portion 70, or the punch member 60 having the shape shown in FIG.

<Embodiment 2>
In the first embodiment, the punch 50 is composed of the two punch members 60, but the present invention is not limited to such a mode.

FIG. 10 is a bottom view of the punch 50A according to the present embodiment. In addition, the same code | symbol is attached | subjected to the same thing as Embodiment 1, and the overlapping description is abbreviate | omitted.

As shown in FIG. 10A, the punch 50A according to this embodiment includes four punch members 60.
It is composed of Two flat portions 72 are formed on each punch member 60. That is,
As indicated by the dotted line, two flat portions 72 that are parallel to the axis of the gripping portion 70 and pass through the first tapered portion 81 are formed. The two flat portions 72 of each punch member 60 are orthogonal to each other.

As shown in FIG. 10B, the punch members 60 are joined at the flat portions 72. In the present embodiment, one punch member 60 is joined to the other two punch members 60 by flat portions 72.

Also in the punch 50 </ b> A configured in this way, the distance D between the straight portion 83 and the flat portion 72 is shorter than the distance R between the straight portion 83 and the side surface (circumferential surface) other than the flat portion 72 of the gripping portion 70. can do. And since this punch part 60 is joined by this plane part 72, the space | interval of the straight parts 83 of each punch member 60 can be set to 2xD shorter than 2xR.

Moreover, since the two punch members 60 are joined to the one punch member 60, the pointed portions 80 are arranged in two directions. For example, in the example shown in the figure, two pointed portions 80 are arranged in a line in the vertical direction and the horizontal direction. By using such a punch member 60, the nozzles 13 arranged in two directions on the nozzle plate 14 can be simultaneously formed.

Thus, also when using the some punch member 60, the punch 50A which made the space | interval of each tip part 80 (straight part 83) narrower can be comprised.

<Embodiment 3>
In the first and second embodiments, the punch member 60 has a cylindrical shape, but is not limited thereto.

FIG. 11A is a front view of the punch member according to the present embodiment, FIG. 11B is a bottom view of the punch member, and FIG. 11C is a bottom view of the punch according to the present embodiment. Embodiment 1
The same reference numerals are given to the same components, and duplicate descriptions are omitted.

As shown in FIGS. 11A and 11B, the punch member 60 </ b> B includes a regular hexagonal columnar grip 70. The grip portion 70 is continuously provided with a pointed portion 80B.

The pointed portion 80B includes a first tapered portion 81B that is continuous with the gripping portion 70, and a first tapered portion 81.
The second taper portion 82B and the straight portion 83B are continuous to B. The first tapered portion 81 </ b> B has a regular hexagonal pyramid side surface with a width gradually decreasing toward the tip of the grip portion 70. Further, the second taper portion 82 </ b> B is formed in a regular hexagonal pyramid shape whose width gradually decreases toward the tip of the grip portion 70. The straight part 83 </ b> B is formed in a regular hexagonal column shape and is coaxial with the gripping part 70.

The angle formed between the side surface of the second tapered portion 82B and the axis of the gripping portion 70 is the first tapered portion 81B.
Is smaller than the angle formed by the side surface of the handle and the axis of the gripping portion 70. That is, the second tapered portion 82B has a sharper shape than the first tapered portion 81B.

The flat surface portion 72 is provided on a part of the side surface of the punch member 60B. That is, as shown by the dotted line in the figure, a flat surface portion 72 that passes through the first tapered portion 81B and has a plane parallel to the axis of the gripping portion 70 is formed.

And as shown in FIG.11 (c), the punch member 60 in which the plane part 72 mentioned above was provided.
Bs are joined together at the flat surface portion 72 to form a punch 50B.

The straight portion 83B of the pointed end portion 80B was coaxial with the axis of the gripping portion 70 that was originally a regular hexagonal column. By providing the flat surface portion 72 on a part of the side surface of the gripping portion 70, the distance D ₂ between the straight portion 83 </ _b > B and the flat surface portion 72 is set so that the straight portion 83 </ _b > B and the flat surface portion 7 of the gripping portion 70.
The distance D ₁ can be shorter than the distance D ₁ to the side surface other than 2. Since joining the punch member 60B to each other in this plane portion 72, the distance between the straight portion 83B of the respective punch members 60B, it is possible to ₂ × 2 × _D 2 less than _{D 1.}

In other words, in the cross-sectional shape, the distance _{D 2} of the straight portion 83B (the pointed end 80B) and the flat portion 72 is shorter than the distance _{D 1} of the straight portion 83B and the side surfaces other than the flat portion 72 of the grip portion 70 punch A member obtained by joining the members 60B at the plane portion 72 is a punch 50B.

Even in the punch 50B having such a configuration, as in the first embodiment, the gripping portion 70 itself is
Since it is not necessary to make it narrow according to the space | interval of the pointed end part 80B, intensity | strength is maintained and it is prevented that the punch 50B breaks. On the other hand, the interval between the tip portions 80B (straight portions 83B) can be 2 × D ₂ which is narrower than 2 × D ₁ . Therefore, when the nozzle 13 of the nozzle plate 14 is drilled by the tip portion 80B, the interval between the nozzles 13 can be narrowed by the narrow tip portion 80B.

As described above, the flat portion 72 is provided on the regular hexagonal cylinder punch member 60B, and each punch member 60B is provided.
Can be joined at the plane portion 72 to form the punch 50B. Similarly, the punch according to the present invention can be configured from a point-symmetric columnar punch member such as a regular polygonal column.

<Other embodiments>
As mentioned above, although each embodiment of this invention was described, the fundamental structure of this invention is not limited to what was mentioned above.

For example, one punch member is not limited to a mode in which one point is provided, and one punch member may be provided with a plurality of points. Further, the pointed portion has a first tapered portion and a second tapered portion.
It is not limited to the case where it comprises a taper part and a straight part, What is necessary is just a shape which can pierce a nozzle to the nozzle plate 14. FIG.

Further, in each of the above-described embodiments, as the pressure generating means for causing a pressure change in the flow path (pressure generating chamber), the piezoelectric material 31 and the electrode forming materials 32 and 33 are alternately stacked and vertically expanded and contracted in the axial direction. Although the vibration type piezoelectric element 17 is illustrated, the pressure generating means is not particularly limited to this, and the piezoelectric material 31 and the electrode forming materials 32 and 33 are alternately stacked to vibrate one end in the stacking direction. A lateral vibration type piezoelectric element that is brought into contact with the plate 15 may be used.

As the pressure generating means, for example, a lower electrode, a piezoelectric layer formed of a piezoelectric material, and an upper electrode may be formed and a thin film type piezoelectric element formed by a lithography method may be used.
A thick film type piezoelectric element formed by a method such as attaching a green sheet can also be used. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. In addition, it is possible to use a device in which a diaphragm is deformed by electrostatic force and droplets are ejected from a nozzle opening.

Further, in the ink jet recording apparatus 1 described above, the recording head 10 is mounted on the carriage 3 and moves in the main scanning direction. However, the present invention is not particularly limited thereto. For example, the recording head 10 is fixed, The present invention can also be applied to a so-called line type recording apparatus that performs printing only by moving a recording sheet S such as paper in the sub-scanning direction.

In each of the above embodiments, an ink jet recording head has been described as an example of a liquid ejecting head, and an ink jet recording apparatus has been described as an example of a liquid ejecting apparatus. The present invention is intended for the entire apparatus, and can of course be applied to a liquid ejecting head and a liquid ejecting apparatus that eject liquid other than ink. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bio-organic matter ejection head used for biochip production, and the like, and can also be applied to a liquid ejection apparatus including such a liquid ejection head.

DESCRIPTION OF SYMBOLS 1 Inkjet recording device (liquid ejecting apparatus), 10 Recording head (liquid ejecting head), 11 Pressure generating chamber, 13 Nozzle, 14 Nozzle plate, 15 Diaphragm, 17 Piezoelectric element, 50, 50A, 50B Punch, 60, 60B Punch members,
70 gripping part, 71 base end part, 72 plane part, 73 base end face, 80, 80B
Pointed portion, 81, 81B First tapered portion, 82, 82B Second tapered portion, 83
Straight part

Claims (6)

A method of manufacturing a nozzle plate having a plurality of nozzles for discharging liquid and bonded to a flow path substrate in which a flow path communicating with the nozzles is formed,
A plurality of punch members each having a pointed portion having a diameter shorter than that of the gripping portion are provided on one end side of the columnar gripping portion, a part of the side surface of the gripping portion of each punch member is a flat surface, and each punch member is a flat surface Using a punch formed by joining together,
A nozzle plate is formed in the nozzle plate at the tip of the punch. In the manufacturing method of the nozzle plate according to claim 1,
The pointed portion includes a first tapered portion that is continuous with the gripping portion, a second tapered portion that is continuous with the first tapered portion, and has a narrower angle than the first tapered portion, and a straight that is continuous with the second tapered portion. And a nozzle plate manufacturing method. In the manufacturing method of the nozzle plate according to claim 1 or 2,
The said punch was formed by joining each punch member which made a part of column-shaped said holding part a plane at the said planes. The manufacturing method of the nozzle plate characterized by the above-mentioned. In the manufacturing method of the nozzle plate as described in any one of Claims 1-3,
A method for producing a nozzle plate, characterized in that a base end surface of the punch member opposite to the pointed end portion is flushed. In the manufacturing method of the nozzle plate as described in any one of Claims 1-4,
The punch is formed on the side surface of each punch member by the number of punch members to be bonded adjacent to the punch member, and the punch members are bonded to each other by the planes. Method. A method of manufacturing a liquid ejecting head, comprising: a nozzle plate having a nozzle for discharging liquid; a flow path member in which a pressure generating chamber communicating with the nozzle is formed; and pressure generating means for causing a pressure change in the pressure generating chamber. Because
A plurality of punch members each having a pointed portion having a diameter shorter than that of the gripping portion are provided on one end side of the columnar gripping portion, and a part of the side surface of the gripping portion of each punch member is a flat surface, Using a punch that joins members together,
Drilling a nozzle in the nozzle plate at the tip of the punch,
The method of manufacturing a liquid ejecting head, wherein the nozzle plate is joined to the flow path member.

Images