JP2012243926A - 半導体製造装置及び半導体製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 230000002093 peripheral effect Effects 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 25
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 41
- 235000012431 wafers Nutrition 0.000 description 33
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000004809 Teflon Substances 0.000 description 5
- 229920006362 Teflon® Polymers 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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Abstract
【解決手段】ウェーハ支持部材15を所定の温度に加熱するための、一か所に間隙を有する環状のヒータエレメント19aと、このヒータエレメント19aの各端部に設けられる第1のヒータ電極部と第2のヒータ電極部とを有するヒータ18、19と、第1のヒータ電極部と第2のヒータ電極部とそれぞれ接続される第1の電極部品と第2の電極部品と、第1の電極部品が固定される第1の溝と、第2の電極部品が配置され、ヒータエレメント19aの円周方向において、第1の電極部品と第1の溝との第1の遊びより、第2の電極部品との第2の遊びが大きくなるように設けられる第2の溝とを有するベース28と、を備える。
【選択図】図1
Description
図1に本実施形態の半導体製造装置である成膜装置の断面図を示す。図1に示すように、例えばφ150mmのGaNウェーハwが成膜処理される反応室11には、必要に応じてその内壁を覆うように石英カバー11aが設けられている。
11a…石英カバー
12…プロセスガス供給機構
12a…ガス供給口
13…ガス排出機構
13a…ガス排出口
14…整流板
15…サセプタ
16…リング
17…回転駆動制御機構
18…インヒータ
19…アウトヒータ
20…リフレクタ
22、23…ブースバー
24…ヒータシャフト
25、26…電極ロッド
27…ボルト
28…ベース
28a、28b…溝
29a、29b…ナット
30…テフロン(登録商標)パイプ
31…肩部
図1に本実施形態の半導体製造装置である成膜装置の断面図を示す。例えばφ150mmのGaNウェーハwが成膜処理される反応室11には、必要に応じてその内壁を覆うように石英カバーが設けられる。
Claims (5)
- ウェーハが導入される反応室と、
前記反応室にプロセスガスを供給するためのガス供給機構と、
前記反応室よりガスを排出するためのガス排出機構と、
前記ウェーハを載置するウェーハ支持部材と、
前記ウェーハを回転させるための回転駆動制御機構と、
前記ウェーハ支持部材を所定の温度に加熱するための、一か所に間隙を有する環状のヒータエレメントと、このヒータエレメントの各端部に設けられる第1のヒータ電極部と第2のヒータ電極部とを有するヒータと、
前記第1のヒータ電極部と前記第2のヒータ電極部とそれぞれ接続される第1の電極部品と第2の電極部品と、
前記第1の電極部品が固定される第1の溝と、前記第2の電極部品が配置され、前記ヒータエレメントの円周方向において、前記第1の電極部品と前記第1の溝との第1の遊びより、前記第2の電極部品との第2の遊びが大きくなるように設けられる第2の溝とを有するベースと、
を備えることを特徴とする半導体製造装置。 - 前記第1の電極部品と前記第2の電極部品と、前記ウェーハの回転中心軸においてそれぞれ接続される第1の電極ロッドと第2の電極ロッドを有し、前記第2の電極ロッドが、前記ヒータの変形に追従して回転可能であることを特徴とする請求項1に記載の半導体製造装置。
- 前記第1の電極ロッドが固定されることを特徴とする請求項2に記載の半導体製造装置。
- 前記第2の電極部品の外周側端部における前記第2の遊びが、1.0〜2.5mmであることを特徴とする請求項1から請求項3のいずれか1項に記載の半導体製造装置。
- 反応室内にウェーハを導入して、ウェーハ支持部材上に載置し、
前記ウェーハ支持部材の下部に設けられ、一か所が分離された環状のヒータエレメントの各端部にそれぞれ設けられたヒータ電極部に電圧印加し、前記ヒータエレメントを発熱させることにより、前記ウェーハ支持部材を所定温度で加熱するとともに、いずれかの前記ヒータ電極部を前記ヒータエレメントの変形に追従させ、
前記ウェーハを回転させ、前記ウェーハ上にプロセスガスを供給することにより、前記ウェーハ上に成膜することを特徴とする半導体製造方法。
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JP2011112099A JP5802052B2 (ja) | 2011-05-19 | 2011-05-19 | 半導体製造装置及び半導体製造方法 |
US13/473,275 US9090990B2 (en) | 2011-05-19 | 2012-05-16 | Manufacturing apparatus and method for semiconductor device |
KR20120053094A KR101358063B1 (ko) | 2011-05-19 | 2012-05-18 | 반도체 제조 장치 및 반도체 제조 방법 |
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JP5443096B2 (ja) * | 2009-08-12 | 2014-03-19 | 株式会社ニューフレアテクノロジー | 半導体製造装置および半導体製造方法 |
US10109510B2 (en) * | 2014-12-18 | 2018-10-23 | Varian Semiconductor Equipment Associates, Inc. | Apparatus for improving temperature uniformity of a workpiece |
JP7012518B2 (ja) * | 2017-11-24 | 2022-01-28 | 昭和電工株式会社 | SiCエピタキシャル成長装置 |
US20240040672A1 (en) * | 2022-07-27 | 2024-02-01 | Applied Materials, Inc. | Transparent heaters for improved epitaxy reactor productivity |
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JP5443096B2 (ja) | 2009-08-12 | 2014-03-19 | 株式会社ニューフレアテクノロジー | 半導体製造装置および半導体製造方法 |
JP5341706B2 (ja) | 2009-10-16 | 2013-11-13 | 株式会社ニューフレアテクノロジー | 半導体製造装置および半導体製造方法 |
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Patent Citations (6)
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JP2004119521A (ja) * | 2002-09-24 | 2004-04-15 | Tokyo Electron Ltd | 基板処理装置 |
JP2007088324A (ja) * | 2005-09-26 | 2007-04-05 | Hitachi Kokusai Electric Inc | 発熱体の保持構造体、絶縁構造体、加熱装置および基板処理装置 |
JP2007288163A (ja) * | 2006-03-24 | 2007-11-01 | Nuflare Technology Inc | 半導体製造装置及びヒータ |
JP2010080909A (ja) * | 2008-08-26 | 2010-04-08 | Nuflare Technology Inc | ヒータ、半導体製造装置および半導体製造方法 |
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JP2010267765A (ja) * | 2009-05-14 | 2010-11-25 | Nuflare Technology Inc | 成膜装置 |
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KR101358063B1 (ko) | 2014-02-03 |
US20120291697A1 (en) | 2012-11-22 |
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