JP2012237793A - Optical scanner and image forming apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner that operates an optical reflection surface with high quality.SOLUTION: An optical scanner comprises: movable parts 8 for supporting an optical reflection surface 9a; movable beams 10 whose one ends are connected to the movable parts 8 and extending in parallel with the optical reflection surface 9a; displacement parts 5 connected to the other ends of the movable beams 10; permanent magnets 7 fixed to the displacement parts 5; drive parts 11 that are arranged to be separated from the displacement parts 5 in extension directions of the movable beams 10 and drive the displacement parts 5; drive beams 6 connected to the displacement parts 5 and supporting the displacement parts 5 by being orthogonal to the movable beams 10; fixed parts 3 connected with the drive beams 6; bases 2 fixed with the fixed parts 3; and connection parts 4 for fixing the fixed parts 3 on the bases 2. The fixed parts 3 have first holes 3a. The bases 2 have second holes 2a. The connection parts 4 have head parts 4a that are bigger than the first holes 3a and body parts 4b that pass through the first holes 3a. The body parts 4b penetrate through the first holes 3a and are inserted into the second holes 2a, and other ends of the body parts 4b are fixed to the bases 2 via adhesive 4c. The fixed parts 3 are arranged to be sandwiched between the head parts 4a and the bases 2.

Description

  The present invention relates to an optical scanner and an image forming apparatus, and more particularly to the structure of an optical scanner.

  As an optical scanner for performing drawing by optical scanning with a laser printer or the like, Patent Document 1 discloses an optical scanner configured by a torsional vibrator and using an actuator. According to this, the actuator has an insulating substrate provided with a pair of permanent magnets, and a scanner body supported by the insulating substrate so as to be positioned between the pair of permanent magnets. The scanner body includes a frame-shaped support portion, a frame-shaped outer movable plate provided inside the support portion, and an inner movable plate (mirror) provided inside the outer movable plate. . The outer movable plate is connected to the support part via a pair of first torsion bars extending in the X direction, and the inner movable plate is connected via a second torsion bar extending in the Y direction orthogonal to the X direction. Connected to the outer movable plate. The outer movable plate and the inner movable plate are each provided with a coil.

  In the actuator having such a configuration, a magnetic field generated from each coil by energization and a magnetic field generated between a pair of permanent magnets are applied. Thus, the outer movable plate rotates together with the inner movable plate about the first torsion bar as the central axis, and the inner movable plate rotates about the second torsion bar as the central axis.

JP 2005-181395 A

  The torsion bar was supported by a support substrate, and the support substrate was supported by a frame-shaped side member. The side member is fixed to the bottom member. By changing the side member supporting the torsion bar from a frame shape to a plurality of pillars and connecting each side member with a beam, the volume of the support member can be reduced and the optical scanner can be downsized. At this time, a method of fixing a plurality of side members to the bottom member using an adhesive is used. In the process of solidifying the adhesive, the side member and the bottom member may move or tilt relatively. And an internal stress is formed in the beam which connects each side member, and the beam which supports a mirror. Then, the operation of the beam as a torsion bar is different from the design operation. Therefore, an optical scanner that reduces the internal stress of the beam and operates the mirror with high quality has been desired.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
An optical scanner according to this application example, a light reflecting member having a light reflecting surface, a movable portion that supports the light reflecting member and is rotatable about a rotation center axis, and one end of the movable portion. A plurality of movable beams connected and extending substantially parallel to the light reflecting surface, a displacement portion connected to the other end of the movable beam, a permanent magnet fixed to the displacement portion, and an extension of the movable beam A drive unit that is disposed in a direction away from the displacement unit and that drives the displacement unit in cooperation with the permanent magnet; and one end connected to the displacement unit and substantially orthogonal to the movable beam and the light reflecting surface A driving beam extending substantially in parallel and supporting the displacement portion, a fixing portion to which the other end of the driving beam is connected, a base to which the fixing portion is fixed, and the fixing portion to the base A connecting portion to be fixed, wherein the fixing portion has a first hole portion that penetrates, and the base is a second portion. The connecting portion includes a head portion having a size that does not pass through the first hole portion, and a main body portion having one end connected to the head portion and passing through the first hole portion, and the main body portion. Is inserted into the second hole through the first hole, the other end of the main body is fixed to the base via an adhesive, and the fixing part is attached to the head and the base. It is characterized by being placed between.

  According to this application example, the driving beam is connected to the fixed portion fixed to the base, and the displacement portion is connected to the driving beam. A permanent magnet is fixed to the displacement portion, and a drive portion is disposed at a location separated from the permanent magnet. And a displacement part is displaced when a drive part drives a permanent magnet. A movable beam is connected to the displacement portion, and the movable portion is connected to one end of the movable beam. The movable part supports the light reflecting member. Therefore, the light reflecting member can be rotated and vibrated by driving the displacement portion by the driving portion.

  The main body portion of the connecting portion is installed through the first hole portion of the fixing portion, and the main body portion is inserted into the second hole portion of the base. And the main-body part and the base are fixed through the adhesive agent. Since the fixed part is sandwiched between the head of the connecting part and the base, the fixed part is fixed to the base by the connecting part. When bonding the fixed part and the base via an adhesive, the fixed part and the base may move relative to each other while the adhesive dries and solidifies, or the fixed part may tilt with respect to the base There is. At this time, since the distance between the plurality of fixed portions changes, internal stress is generated in the drive beam and the movable beam arranged between the fixed portions. In comparison, when the fixing portion is fixed at the connecting portion, the fixing portion can be fixed to the base without changing the distance between the plurality of fixing portions in the process of solidifying the adhesive. As a result, since the internal stress of the driving beam and the movable beam can be reduced, it is possible to provide an optical scanner capable of operating the light reflecting surface with high quality.

[Application Example 2]
In the optical scanner according to the application example, the second hole portion is a through hole, the main body portion passes through the second hole portion, and is located on the opposite side of the base on which the fixing portion is located. The adhesive is disposed on the main body and the base.

  According to this application example, the main body portion passes through the second hole portion. And the main-body part located in the opposite side to the side in which the fixing | fixed part of a base is located is adhere | attached with the base. Therefore, it is possible to prevent the adhesive from adhering to the fixed portion. Therefore, it is possible to prevent the fixed part from moving due to the influence of the adhesive solidifying.

[Application Example 3]
In the optical scanner according to the application example described above, the head is located in a place where it does not contact the driving beam.

  According to this application example, since the head does not contact the driving beam, it is possible to prevent the head from directly acting on the driving beam and generating stress.

[Application Example 4]
In the optical scanner according to the application example described above, at a place where the fixing portion and the base come into contact, at least one surface of the fixing portion and the base is subjected to a surface treatment that increases a friction coefficient. It is characterized by that.

  According to this application example, at least one surface of the fixing portion and the base is subjected to a surface treatment so that the friction coefficient is increased. Therefore, the fixed portion and the base are relatively difficult to move. Therefore, the distance between the plurality of fixed portions can be prevented from changing.

[Application Example 5]
An image forming apparatus according to this application example, comprising: a light source; and an optical scanner that controls a traveling direction of light emitted from the light source, wherein the optical scanner is the optical scanner described above. To do.

  According to this application example, the image forming apparatus includes the light source and the optical scanner, and the optical scanner controls the traveling direction of the light emitted from the light source. As a result, the image forming apparatus can draw an image. The optical scanner has less internal stress on the beam and can operate the light reflecting surface with high quality. Therefore, the image forming apparatus can be an image forming apparatus including an optical scanner that operates with high quality.

FIG. 2 is a schematic plan view showing a configuration of an optical scanner according to the first embodiment. FIG. 3 is a schematic side cross-sectional view illustrating a configuration of an optical scanner. The flowchart which shows the manufacturing method of an optical scanner. FIG. 4 is a schematic diagram for explaining a method for manufacturing an optical scanner. FIG. 4 is a schematic diagram for explaining a method for manufacturing an optical scanner. FIG. 4 is a schematic diagram for explaining a method for manufacturing an optical scanner. FIG. 2 is a schematic perspective view illustrating a configuration of a projector.

  In this embodiment, a characteristic example of the optical scanner will be described with reference to FIGS. Hereinafter, embodiments will be described with reference to the drawings. In addition, each member in each drawing is illustrated with a different scale for each member in order to make the size recognizable on each drawing.

(First embodiment)
The structure of the optical scanner according to the first embodiment will be described with reference to FIGS. FIG. 1 is a schematic plan view showing the configuration of the optical scanner. FIG. 2 is a schematic side sectional view showing the configuration of the optical scanner. 2A is a cross-sectional view taken along the line AA ′ of the optical scanner of FIG. 1, and FIG. 2B is a cross-sectional view taken along the line BB ′ of the optical scanner of FIG. is there.

  As shown in FIGS. 1 and 2, the optical scanner 1 includes a rectangular plate-like base 2, and four fixing portions 3 are erected at four corners on the base 2. The base 2 and the fixed portion 3 are connected by a connecting portion 4. A first hole 3 a that penetrates the fixing part 3 is installed, and a second hole 2 a that penetrates the base 2 is also installed. The connecting portion 4 includes a head 4a having a size that does not pass through the first hole 3a, and a columnar main body 4b having one end connected to the head 4a. And the main-body part 4b penetrates the 1st hole 3a, and is inserted in the 2nd hole 2a.

  The other end of the main body 4b is fixed to the base 2 via the adhesive 4c, and the fixing portion 3 is disposed between the head 4a and the base 2. The surface of the base 2 on which the fixing portion 3 stands is the first surface 2b, and the surface opposite to the first surface 2b is the second surface 2c. A spot facing process is performed at a location facing the fixed portion 3 of the second surface 2c to form a recess 2d. And the main-body part 4b protrudes and arrange | positions at the recessed part 2d side. The adhesive 4c is arranged so as to be hung on the main body 4b and the base 2 in the recess 2d. Accordingly, the adhesive 4 c does not adhere to the fixing portion 3.

  On the first surface 2 b of the base 2, fine irregularities are formed at a place where the first surface 2 b comes into contact with the fixed portion 3, and a surface treatment is performed to increase the frictional resistance. The treatment for increasing the frictional resistance is not particularly limited as long as fine irregularities are formed. For example, a method of corroding the surface using an etching solution or a method of mechanically forming irregularities using a grindstone or sandpaper can be used. Furthermore, irregularities may be formed by attaching a predetermined material by sputtering or the like. Further, in the fixing portion 3, a surface that contacts the base 2 may be formed with fine irregularities to increase the frictional resistance. The surface treatment for increasing the frictional resistance may be either one of the base 2 and the fixed portion 3 or may be performed on both members. The base 2 and the fixed part 3 can be made relatively hard to move. Note that the surface treatment may be omitted when the base 2 and the fixed portion 3 do not move relatively without performing the surface treatment for increasing the frictional resistance. By omitting the surface treatment, the optical scanner 1 can be manufactured with high productivity.

  The base 2 may be made of any material that is rigid and easy to process, and is not particularly limited. For example, the base 2 may be made of glass such as Pyrex (registered trademark) or Tempax, or a metal such as silicon or aluminum. it can. In this embodiment, for example, aluminum is used. The material of the fixing portion 3 is not particularly limited as long as it is elastic and easy to process, and for example, metal, glass, silicon, or the like can be used. In this embodiment, for example, silicon is used. The connecting part 4 can be made of the same material as the base 2 and the fixed part 3. In this embodiment, for example, silicon is used. The adhesive 4c for fixing the connecting portion 4 and the base 2 is not particularly limited as long as two members can be fixed. When the material of the connecting portion 4 and the base 2 is different, an adhesive that cures without applying a temperature change such as heating or cooling is preferable. For example, an epoxy adhesive, an acrylic adhesive, an acrylic anaerobic adhesive (ultraviolet curable resin), a synthetic rubber resin, a moisture curable resin, or an epoxy ultraviolet curable resin can be used as the adhesive 4c.

  The directions in which two orthogonal sides of the base 2 extend are defined as an X direction and a Y direction. And the direction where the fixing | fixed part 3 to stand is extended is set to Z direction. Displacement portions 5 are installed between a pair of fixed portions 3 located at both ends of one side of the base 2. The displacement portion 5 and the fixed portion 3 are connected by a driving beam 6. Therefore, between the pair of fixed portions 3, the fixed portion 3, the drive beam 6, the displacement portion 5, the drive beam 6, and the fixed portion 3 are arranged in this order.

  The head 4 a of the connecting portion 4 located on the fixed portion 3 is installed in a place where it does not contact the driving beam 6. Thereby, even when the head 4a presses the fixed portion 3 during the manufacturing process, the head 4a does not press the drive beam 6. Accordingly, it is difficult for internal stress to be formed on the drive beam 6.

  A rectangular parallelepiped permanent magnet 7 is fixed to the displacement portion 5, and the permanent magnet 7 extends in the Z direction. And the permanent magnet 7 is arrange | positioned so that it may protrude from the displacement part 5 in Z direction and -Z direction. The displacement part 5 and the permanent magnet 7 are rotatable about the drive beam 6 as a rotation axis. The material of the drive beam 6 is the same as that of the fixed portion 3 and is elastic silicon, and the drive beam 6 functions as a torsion bar.

  The material of the permanent magnet 7 is not particularly limited, and for example, a material magnetized with a hard magnetic material such as a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, or a bonded magnet can be suitably used.

  Displacement portions 5 and drive beams 6 are installed at locations corresponding to the four sides of the base 2 among the four fixed portions 3. Therefore, the displacement part 5 is installed in four places. A plate-like movable portion 8 is installed at the center of the four displacement portions 5, and a light reflecting member 9 that reflects light is fixed on the movable portion 8 via a support member 9b. The movable portion 8 is connected to the four displacement portions 5 by the movable beam 10. Therefore, between the pair of displacement parts 5 positioned in the X direction, the displacement part 5, the movable beam 10, the movable part 8, the movable beam 10, and the displacement part 5 are arranged in this order. A similar arrangement is also provided between the pair of displacement portions 5 located in the Y direction. The movable beam 10 extending in the X direction and the movable beam 10 extending in the Y direction are orthogonal to each other with the movable portion 8 as an intersection. In the present embodiment, the light reflecting member 9 is fixed to the movable portion 8 via the support member 9b, but the light reflecting member 9 may be directly fixed to the movable portion 8.

  A bending portion 10 a is installed in the movable beam 10 in the middle between the displacement portion 5 and the movable portion 8. The bent portion 10a has a structure that is easily bent, and when a bending stress acts on the movable beam 10, the movable beam 10 is bent at the bent portion 10a.

  The light reflecting member 9 has a flat plate shape, and a light reflecting surface 9a having light reflectivity is formed on the surface facing the direction opposite to the base 2 side. The light reflecting surface 9a is mirror-finished and is provided with a metal film formed by vapor deposition of metal such as gold, silver, and aluminum.

  In the displacement part 5 installed in four places, the drive part 11 is arrange | positioned in the extension direction of the movable beam 10 on the opposite side to the light reflection member 9, and spaced apart from the displacement part 5. FIG. The drive unit 11 includes an electromagnet, and drives the displacement unit 5 in cooperation with the permanent magnet 7. The drive unit 11 is installed at four places like the displacement unit 5, and the displacement unit 5 and the drive unit 11 that drives the displacement unit 5 are paired. The drive unit 11 is connected to the control unit 12 by wiring.

  The control unit 12 outputs a current signal to the drive unit 11, and the drive unit 11 rotates the displacement unit 5 according to the current signal. Thereby, the movable beam 10 is bent in the Z direction or the −Z direction. The light reflecting surface 9a is directed in a predetermined direction. The control unit 12 can control the current signals output to the four drive units 11 to tilt the light reflecting surface 9a at a desired angle in the X direction and the Y direction. In other words, the light reflecting surface 9a is rotatable around a rotation center axis having the X direction as an axis and around a rotation center axis having the Y direction as an axis.

(Optical scanner manufacturing method)
Next, a method for manufacturing the above-described optical scanner 1 will be described with reference to FIGS. FIG. 3 is a flowchart showing a manufacturing method of the optical scanner, and FIGS. 4 to 6 are schematic diagrams for explaining the manufacturing method of the optical scanner.

  In the flowchart of FIG. 3, step S <b> 1 corresponds to a fixing portion installation step, and is a step of installing the fixing portion on the base. Next, the process proceeds to step S2. Step S2 corresponds to a connecting portion installation step, and is a step of installing the connecting portion substrate through the base and the fixing portion. Next, the process proceeds to step S3. Step S3 corresponds to an adhering step, and is a step of adhering the base and the main body of the connecting portion substrate. Next, the process proceeds to step S4. Step S4 corresponds to a connecting portion cutting step, and is a step of cutting and removing unnecessary portions of the connecting portion substrate. Next, the process proceeds to step S5. Step S5 corresponds to a drive unit installation step, and is a step of installing a drive unit made of an electromagnet or the like. The optical scanner is completed through the above manufacturing process.

  Next, the manufacturing method will be described in detail with reference to FIGS. 4 to 6 in association with the steps shown in FIG. FIG. 4A is a diagram corresponding to the fixing portion installation step of step S1. As shown in FIG. 4A, a base 2 and a fixing portion 3 are prepared. The base 2 has a second hole 2a and a recess 2d. The second hole 2a can be formed by drilling using a drill or laser light, and the recess 2d can be formed by cutting.

  A driving beam 6, a displacement portion 5, a movable beam 10, a bent portion 10 a, and a movable portion 8 are formed on the fixed portion 3. The fixed part 3 and the member formed to be connected to the fixed part 3 can be formed by using a known method such as photolithography and etching, and detailed description thereof is omitted. As an outline description, first, a material to be a mask is applied to a substrate to be a material of the fixing portion 3 and solidified to form a film. Next, after exposure to a predetermined shape, etching is performed to form a mask. Next, after the substrate is formed into a predetermined shape by etching, the mask is removed. As described above, patterning and etching are repeated to form the fixed portion 3 and the member formed to be connected to the fixed portion 3. A first hole 3 a is formed in the fixed part 3. A light reflecting member 9 is bonded to the movable portion 8, and a permanent magnet 7 is bonded and fixed to the displacement portion 5.

  The second surface 2c is installed on a work table (not shown), and the fixing unit 3 is installed on the first surface 2b. At this time, the fixing portion 3 is arranged so that the second hole portion 2a and the first hole portion 3a overlap.

  FIGS. 4B and 4C are diagrams corresponding to the connecting portion installation step of step S2. As shown in FIG. 4B and FIG. 4C, a connecting portion substrate 13 is prepared. The connecting portion substrate 13 has a shape in which four connecting portions 4 are connected by connecting beams 13a. The connection part substrate 13 can be formed by using a known method such as photolithography and etching in the same manner as the fixing part 3, and the description of the manufacturing method is omitted.

  Next, the main body portion 4b of the connecting portion 4 is inserted into the first hole portion 3a and the second hole portion 2a. And the front-end | tip of the main-body part 4b is protruded from the recessed part 2d by making the main-body part 4b penetrate the 1st hole 3a and the 2nd hole 2a. A chamfer may be formed at the tip of the main body 4b. The main body 4b can be easily inserted into the first hole 3a and the second hole 2a. Since the head portion 4 a of the connecting portion 4 is formed in such a size that it cannot pass through the first hole portion 3 a, the head portion 4 a is placed on the fixed portion 3.

  FIG. 5A is a diagram corresponding to the bonding step of step S3. As shown in FIG. 5A, the base 2 on which the fixed portion 3 and the connecting portion substrate 13 are stacked is mounted on the mounting table 14. At this time, it mounts so that the recessed part 2d of the base 2 may be exposed. Then, the pressing plate 15 is installed on the fixed portion 3. A spring 15 a is installed on the pressing plate 15, and the pressing plate 15 urges the connecting portion substrate 13. Thereby, the connection part board | substrate 13 can be stuck to the fixing | fixed part 3. FIG.

  Next, the adhesive 4 c is applied to the place where the concave portion 2 d of the base 2 and the main body portion 4 b are joined using the syringe 16. The operator moves the syringe 16 to apply the adhesive 4c around the main body 4b. The connection part 4 is installed in four places, and the adhesive agent 4c is apply | coated to all the connection parts 4. FIG. The adhesive 4c is preferably applied with high positional accuracy using a robot or a coating device. Next, the adhesive 4c is solidified by being left for a predetermined time. It is preferable to solidify the adhesive 4c in an environment where there is no temperature change at room temperature. When the temperature changes during solidification, if the temperature coefficient of the fixed part 3 and the connecting part 4 are different, a gap is formed due to the difference in expansion and contraction between the fixed part 3 and the connecting part 4, so that the fixed part 3 There is a possibility that the base 2 is not fixed.

  When the adhesive 4c is photocurable, it may be solidified by irradiation with light such as ultraviolet rays. When the adhesive 4c has moisture-curing characteristics, it may be humidified to promote solidification. Since it can be solidified in a short time, it can be solidified with high productivity.

FIG. 5B and FIG. 6A are diagrams corresponding to the connecting portion cutting step of step S4. As shown in FIG. 5B, the laser beam 18 is emitted from the laser scribing device 17 to the connecting portion substrate 13. In the place where the laser beam 18 is irradiated, a modified region is formed inside the connecting portion substrate 13. For example, as disclosed in Japanese Patent Application Laid-Open No. 2002-192371, a laser beam having a pulse width of 1 μs or less is emitted, condensed inside the substrate with a condensing lens, and the peak power density in the condensing unit is 1 ×. 108 (W / cm ² ) or more. Thereby, a modified region by multiphoton absorption can be formed inside the connecting portion substrate 13.

  The laser scribing device 17 irradiates the connecting part substrate 13 with a laser beam 18 along the outline of the connecting part 4 to be formed. As a result, the modified region becomes brittle and can be easily divided with a small stress. As a result, the connecting beam 13a is removed from the head portion 4a, and the head portion 4a and the main body portion 4b remain in the connecting portion 4 as shown in FIG.

  FIG. 6B is a diagram corresponding to the drive unit installation step of step S5. As shown in FIG. 6B, the drive unit 11 is installed via a support member (not shown) at a location facing the four permanent magnets 7. The process of manufacturing the optical scanner 1 is completed by the above process.

As described above, this embodiment has the following effects.
(1) According to this embodiment, the main body portion 4b is installed through the first hole portion 3a of the fixing portion 3, and the main body portion 4b is inserted into the second hole portion 2a of the base 2. . And the main-body part 4b and the base 2 are adhere | attached through the adhesive agent 4c. Since the fixing portion 3 is sandwiched between the head 4 a of the connecting portion 4 and the base 2, the fixing portion 3 is fixed to the base 2 by the connecting portion 4. When the fixing portion 3 and the base 2 are bonded via the adhesive 4c, the fixing portion 3 and the base 2 move relatively while the adhesive 4c is dried and solidified, or the base 2 There is a possibility that the fixing portion 3 is inclined with respect to the position. At this time, since the distance between the plurality of fixed portions 3 changes, internal stress is generated in the driving beam 6 and the movable beam 10 arranged between the fixed portions 3. In comparison, when fixing the fixing portion 3 with the connecting portion 4, the fixing portion 3 is fixed to the base 2 without changing the distance between the plurality of fixing portions 3 in the process of solidifying the adhesive 4 c. Can do. As a result, since the internal stress of the driving beam 6 and the movable beam 10 is reduced, it is possible to provide the optical scanner 1 in which the light reflecting surface 9a operates with high quality.

(2) According to this embodiment, the main body portion 4b of the connecting portion 4 protrudes through the second hole portion 2a. And the main-body part 4b and the base 2 which are located in the opposite side to the side in which the fixing | fixed part 3 of the base 2 is located are adhere | attached. Accordingly, it is possible to prevent the adhesive 4c from adhering to the fixing portion 3. Therefore, it is possible to prevent the fixed portion 3 from moving under the influence of the adhesive 4c solidifying.
(3) According to the present embodiment, the head 4 a of the connecting portion 4 is disposed so as not to contact the drive beam 6. Therefore, it is possible to prevent the head 4a from directly acting on the drive beam 6 to generate stress.
(4) According to this embodiment, at least one surface of the fixing portion 3 and the base 2 is subjected to surface treatment so that the friction coefficient is increased. Therefore, the fixed part 3 and the base 2 are relatively difficult to move. Therefore, the distance between the plurality of fixing portions 3 can be made difficult to change.

(Second Embodiment)
Next, a projector according to a second embodiment will be described with reference to a schematic perspective view showing the configuration of the projector in FIG. The projector includes the optical scanner of the first embodiment. Such an optical scanner has a configuration similar to that of the first embodiment. Note that description of the same points as in the first embodiment is omitted.

  The optical scanner 1 described above can be suitably applied to an image forming apparatus such as a projector, a laser printer, an imaging display, a barcode reader, and a scanning confocal microscope. In this embodiment, a case where the optical scanner 1 is applied to a projector as an example of an image forming apparatus will be described.

  As shown in FIG. 7, the projector 21 as an image forming apparatus includes a red light source device 22 that emits red light, a blue light source device 23 that emits blue light, and a green light source device 24 that emits green light. And a light source device 25 as a light source.

  Dichroic mirrors 26 are respectively installed on the optical axes of the light beams emitted from the red light source device 22, the blue light source device 23, and the green light source device 24, and each dichroic mirror 26 is irradiated with the light beams. The light beams of the respective colors irradiated on the dichroic mirror 26 irradiate the light reflecting surface 9a of the optical scanner 1 through the same optical path. The light beams of each color are reflected by the light reflecting surface 9a and irradiate the fixed mirror 27. Further, the light beams of the respective colors reflected by the fixed mirror 27 exit from the optical scanner 1 and irradiate the screen 28.

  The projector 21 includes a control device 29, and the control device 29 includes an interface. And the control apparatus 29 inputs a video signal from the outside, and controls the output of the light source device 25 and the angle of the light reflection surface 9a according to the video signal. As a result, the control device 29 controls the light intensity of the light beam of each color and the trajectory 30 of the light beam that irradiates the screen 28. Therefore, the projector 21 can draw an image corresponding to the input video signal on the screen 28.

As described above, this embodiment has the following effects.
(1) According to the present embodiment, the projector 21 includes the optical scanner 1. The optical scanner 1 has less internal stress on the driving beam 6 and the movable beam 10, and can operate the light reflecting surface 9a with high quality. Therefore, the projector 21 can be a projector 21 including the optical scanner 1 that operates with high quality.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. And the deformation | transformation in the range which can solve at least one part of the said subject, improvement, etc. are contained in said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

(Modification 1)
In the first embodiment, all of the four fixing portions 3 are fixed to the base 2 using the connecting portions 4. The place where the fixing portion 3 is fixed to the base 2 is not limited to four places, and may be two places or three places. In any case, it is sufficient that the light reflecting member 9 can be driven stably. The optical scanner 1 can be manufactured with high productivity when the number of places where the fixing unit 3 is fixed to the base 2 is small.

(Modification 2)
In the first embodiment, the main body portion 4b, the first hole portion 3a, and the second hole portion 2a of the connecting portion 4 are cylindrical. However, the shape is not limited to this, and may be a prismatic shape or an elliptical cylindrical shape. . The head 4a is rectangular, but may be polygonal, circular or elliptical. You may employ | adopt the shape which is easy to manufacture. By making it easy to manufacture, the optical scanner 1 can be manufactured with high productivity.

(Modification 3)
In the said 1st Embodiment, the fixing | fixed part 3 was installed in four places. The number of fixing portions 3 is not limited to four, and may be two or three. In any case, it is sufficient that the light reflecting member 9 can be driven stably. The optical scanner 1 can be manufactured with high productivity when the number of the fixing portions 3 is small.

(Modification 4)
In the first embodiment, the concave portion 2d is formed in the base 2, and the main body portion 4b of the connecting portion 4 is installed so as to protrude from the concave portion 2d. You may install so that the main-body part 4b of the connection part 4 may not protrude from the recessed part 2d, without forming the recessed part 2d in the base 2. FIG. And the base 2 and the main-body part 4b may be adhere | attached in this state. By omitting the processing of the recess 2d, the optical scanner 1 can be manufactured with high productivity.

(Modification 5)
In the first embodiment, the second hole 2a is a through hole, but it may be a blind hole. And you may adhere | attach the base 2 and the main-body part 4b in a hole. It is possible to prevent the connecting portion 4 from receiving stress from the second surface 2 c side and the main body portion 4 b of the connecting portion 4 from coming off the base 2.

(Modification 6)
In the first embodiment, the fixing portion 3 is fixed to the base 2 using the connecting portion 4. In FIG. 2B, the upper side and the lower side of the fixed portion 3 in the drawing may be formed separately from each other. And you may form so that the lower side from the drive beam 6 of the fixing | fixed part 3 may be united with the base 2. FIG. Then, the upper side of the driving beam 6 of the fixed portion 3 and the lower side of the driving beam 6 of the fixed portion 3 may be joined using the connecting portion 4. Also at this time, the upper side of the driving beam 6 of the fixing unit 3 is below the driving beam 6 of the fixing unit 3 so that the upper side of the driving beam 6 of the fixing unit 3 and the lower side of the driving beam 6 of the fixing unit 3 do not tilt. Can be fixed to the side. Therefore, the internal stress of the driving beam 6 and the movable beam 10 can be reduced.

  DESCRIPTION OF SYMBOLS 1 ... Optical scanner, 2 ... Base, 2a ... 2nd hole part, 3 ... Fixing part, 3a ... 1st hole part, 4 ... Connection part, 4a ... Head part, 4b ... Main part, 4c ... Adhesive agent, 5 DESCRIPTION OF SYMBOLS ... Displacement part, 6 ... Drive beam, 7 ... Permanent magnet, 8 ... Movable part, 9 ... Light reflection member, 9a ... Light reflection surface, 10 ... Movable beam, 25 ... Light source device as a light source.

Claims (5)

A light reflecting member having a light reflecting surface;
A movable part that supports the light reflecting member and is rotatable about a rotation center axis;
A plurality of movable beams having one end connected to the movable part and extending substantially parallel to the light reflecting surface;
A displacement part connected to the other end of the movable beam;
A permanent magnet fixed to the displacement part;
A drive unit that is arranged in the extending direction of the movable beam and spaced from the displacement unit, and that drives the displacement unit in cooperation with the permanent magnet;
One end connected to the displacement part, substantially perpendicular to the movable beam and extending substantially parallel to the light reflecting surface, and a driving beam supporting the displacement part,
A fixed portion to which the other end of the drive beam is connected;
A base on which the fixing portion is fixed;
A fixing part for fixing the fixing part to the base,
The fixing portion has a first hole portion that penetrates, the base has a second hole portion, and the connection portion has a head and a one end that do not pass through the first hole portion. And a main body portion that is connected and passes through the first hole portion, the main body portion passes through the first hole portion and is inserted into the second hole portion, and the other end of the main body portion is connected to the base. An optical scanner, which is fixed through an adhesive, and the fixing portion is disposed between the head and the base. The optical scanner according to claim 1,
The second hole portion is a through hole, the main body portion penetrates the second hole portion, and the main body portion and the base stand on the opposite side of the base on the side where the fixing portion is located. An optical scanner, wherein the adhesive is disposed. The optical scanner according to claim 1 or 2,
The optical scanner according to claim 1, wherein the head is located in a place where it does not contact the driving beam.   4. The optical scanner according to claim 1, wherein a friction coefficient is provided on at least one surface of the fixing portion and the base at a place where the fixing portion and the base are in contact with each other. An optical scanner characterized by surface treatment for increasing the height. A light source, and an optical scanner that controls a traveling direction of light emitted from the light source,
The image forming apparatus according to claim 1, wherein the optical scanner is an optical scanner according to claim 1.

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