JP2012229462A - Multipoint evaporation source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reliably block the intrusion of an evaporant into other crucible and prevent mutual contamination of crucibles by providing a mobile blocking body-lifting unit so that the evaporant does not intrude into other crucible when evaporating a material to be evaporated.SOLUTION: A multipoint evaporation source device includes: a turntable 2 provided with a plurality of crucibles in which the evaporant 3 is stored and rotating around a rotary shaft as a center; an electron gun 1 for evaporating the evaporant 3 in the crucible 7 by irradiating one crucible 7 positioned at the irradiation location of an electron beam with the electron beam; and a cover 6 which is located on the upper aspect of the turntable 2, covers a plurality of crucibles 7 and has all opened irradiation regions of the electron beam facing the gun 1. The device also comprises: a groove 24 formed on the upper face of the table 2 so as to partition the crucibles 7; a blocking body 20 fitting into the groove 24, partitioning each crucible and rotating together with the table 2; and a blocking body-lifting unit elevating the blocking body 20 and narrowing the interval of the blocking body 20 and the cover 6 when each of the crucibles come at the beam irradiation position.

Description

  The present invention relates to a technique for sequentially moving a plurality of crucibles one by one with respect to an electron beam irradiation position set in a vacuum vapor deposition tank, and evaporating an evaporation material in the crucible to adhere to a film formation target. In particular, the present invention relates to a multipoint evaporation source apparatus that handles a large number of crucibles.

The structure of the evaporation source of the conventional multipoint evaporation source apparatus is shown in FIG. In the figure, 100 is an evaporation source, 1 is an electron gun that emits an electron beam, and the emitted electron beam is deflected by a deflecting device (not shown) arranged inside the evaporation source 100 to the heating position of the evaporation material. Directed.
Reference numeral 2 denotes a disk-shaped crucible rotary table in which four crucibles (7a, 7b, 7c, 7d) are arranged at equal intervals on the circumference, and the evaporation material 3 is contained in each crucible. Are arranged so that the electron beam from the electron gun 1 reaches one crucible (the crucible 7a in this figure).
Reference numeral 4 denotes a rotary shaft fixed at the center of the lower surface of the crucible rotary table 2, and reference numeral 5 denotes a rotary shaft driving device for rotating the rotary shaft 4.
Reference numeral 6 denotes a crucible cover disposed above the crucible turntable 2 and is disposed so as to cover the three crucibles (7b, 7c, 7d). 8 is formed, and the notch 8 is provided with a lower edge 9 that extends to the upper surface side of the crucible.
In the evaporation source having such a configuration, when the rotary shaft driving device 5 is driven and the rotary shaft 4 rotates, the crucible rotary table 2 rotates in the direction of arrow A as shown in FIG. Then, when the desired crucible 7a comes to the facing position of the electron gun 1, the rotation of the crucible turntable 2 is stopped.
Then, the electron beam EB is deflected by the deflecting device (not shown) from the electron gun 1 and irradiated onto the evaporation material 3 in the crucible 7a.
The evaporation material 3 is heated and melted by the irradiation of the electron beam EB. The evaporating flow of the evaporated evaporating material 3 proceeds linearly from the evaporation source 100 to the upper substrate (not shown) without colliding, and covers the surface of the substrate. By repeating such an operation, a desired multilayer film is formed on the substrate.

U.S. Pat. No. 4,748,935

However, there is a problem that a defect occurs in the film formed by the evaporation source as described above.
This occurs because the evaporated material from the crucible is mixed into another crucible when the evaporation material is evaporated.
As a countermeasure, the crucible cover is arranged so as to cover the crucible not irradiated with the electron beam as described above. However, even if such a countermeasure is taken, evaporates from the gap between the crucible cover and the crucible. Since it is unavoidable to enter the crucible and it is difficult to completely prevent the evaporate from entering other crucibles, contamination between the crucibles occurs.
Further, if the distance between the upper end surface of each crucible and the lower end surface of the crucible cover is made as small as possible, it is possible to reliably prevent the intrusion of the evaporate into other crucibles. There is concern about inhibiting rotation.
The present invention has been made to solve such a problem, and an object thereof is to provide a novel multi-point evaporation source apparatus.

  The multi-point evaporation source apparatus of the present invention irradiates an electron beam onto a rotary table having a plurality of crucibles containing evaporation materials and rotating around a rotating shaft, and one crucible located at an electron beam irradiation position. A multi-point evaporation source comprising: an electron gun that evaporates the evaporation material of the crucible; and a cover that covers a plurality of crucibles on the upper side of the rotary table and that is open in the entire electron beam irradiation region facing the electron gun. In the apparatus, a groove formed on the upper surface of the rotary table so as to partition the crucible, a shield that fits into the groove and partitions each crucible, and rotates with the rotation of the rotary table; Shielding means raising and lowering means for raising the shielding body and narrowing the distance between the shielding body and the cover when the electron beam irradiation position is reached is provided.

In the multipoint evaporation source apparatus of the present invention, when the evaporation material is evaporated, a movable shield lifting / lowering means is provided so that the evaporated material does not enter the other crucible, so that the evaporated material enters the other crucible. Can be reliably shut off and contamination between crucibles can be prevented.

It is the external view which looked at the conventional evaporation source from diagonally upward. It is a figure when the conventional evaporation source is seen from upper direction. It is a figure when the evaporation source which concerns on this invention is seen from upper direction. It is the external view seen from diagonally upward which shows a part of evaporation source which concerns on this invention. It is a schematic sectional drawing which shows a part of evaporation source which concerns on this invention. It is a schematic sectional drawing which shows a part of evaporation source which concerns on this invention. It is a figure which shows the modification of the shape of the groove | channel of the upper surface of the turntable which concerns on this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 3 is a configuration diagram of the evaporation source according to the present invention as viewed from above. FIG. 4 is a view of a part of the evaporation source according to the present invention when viewed obliquely from above. 3 and 4, the same reference numerals as those used in FIGS. 1 and 2 denote the same components.
The basic configuration of this embodiment is the same as that of the conventional example described with reference to FIGS. 1 and 2, and the crucible cover 6 is provided on the rotary table 2 provided with the crucibles 7a to 7d. An electron beam EB is irradiated from the electron gun 1 to the crucible located in the section 8. This embodiment is different from the conventional example in that a shielding member and a fixed guide rail for moving the shielding member up and down are provided.
That is, in FIG. 4, 20 is a shielding member formed so as to partition the crucible from the crucible. For example, when four crucibles are provided at equal intervals on the upper surface of the crucible rotary table 2, a cross-shaped member is provided. It becomes. A projection 21 is formed at the central portion of the lower surface of the shielding member 20, and the projection 21 is supported by a hole at the center of the crucible turntable 2, and together with the crucible turntable 2 around the protrusion 21. It has a structure that can be rotated. Supports (23a, 23b, 23c, 23d) are fixed to the respective ends of the shielding member 20, and rollers (22a, 22b, 22c, 22d) are provided to the other ends of the support, respectively. It has been.
Reference numeral 24 denotes a groove formed in a concave shape so that the shielding member 20 can be accommodated on the upper surface of the crucible turntable 2, and 25 is provided along the outer periphery of the side surface of the crucible turntable 2 and fixed to the inner wall of the evaporation source 100. The upper surface of the fixed guide rail has a flat surface that rotates while contacting with the roller, and convex portions (26a, 26b, 26c, 26d) having gentle slopes are equidistant at predetermined positions on this surface. Are formed at four locations. The crucible turntable 2 has a structure that can rotate without contacting the fixed guide rail 25.
The operation of the evaporation source having such a configuration will be described. When the rotary shaft driving device 5 is driven to rotate the rotary shaft 4, the crucible rotary table 2 rotates in the direction of arrow A. As the crucible turntable 2 rotates, the shielding member 20 also rotates around the protrusion 21 together.
FIG. 5 shows the state in which the crucible turntable 2 is rotating, and the shielding member 20 is housed in the groove 24 on the upper surface of the crucible turntable 2 so that the roller 22a at the tip of the shielding member 20 is fixed guide rail. 25 shows a state of rolling on the upper surface.
FIG. 6 shows a state in which one crucible of the crucible turntable 2 comes to the opposite side of the electron gun 1, and the shielding member 20 has rollers (22a, 22b, 22c, 22d) on the upper surface of the fixed guide rail 25. Each of the convex portions (26a, 26b, 26c, 26d) rides on the convex portions at the same time, rises from the groove 24 of the crucible rotary table 2, and the shielding member 20 approaches the back surface of the crucible cover 6. The state is stopped at the apex, and the shielding member 20 is in contact with the crucible cover 6.
At this time, when the evaporating material 3 in the crucible is irradiated with the electron beam EB from the electron gun 1 to melt and evaporate the evaporating material 3, the evaporant is the lower end of the crucible rotary table 2 and the lower end of the crucible cover 6. Even if it enters the gap with the part, it is shielded by the shielding member 20.
Next, when irradiation of the crucible with the electron beam is completed, the rotary shaft driving device 5 is driven again, and the crucible rotary table 2 is rotated, whereby each roller (22a, 22b, 22c, 22d) simultaneously descends from the apex of the convex portions (26a, 26b, 26c, 26d), and the shielding member 20 is completely contained in the groove 24 of the crucible turntable 2. Repeating such operations, the vertical movement of the shielding member 20 is automatically performed.
Thus, by providing the movable shield lifting / lowering means so that the evaporated material does not enter the other crucible when the evaporation material evaporates, the intrusion of the evaporated material into the other crucible can be surely blocked, and the crucible Mutual contamination can be prevented.

In addition, although the said Example gave and demonstrated the crucible rotation table provided with four crucibles, it does not limit the number of crucibles of a crucible rotation table. In this case, the crucible rotary table is formed with grooves so as to partition each crucible according to the number of crucibles arranged, and the shield is formed so as to fit into the grooves.
In addition, a central portion is connected to the upper surface of the crucible rotary table 2 to form a continuous groove up to the outer peripheral edge of the table 2, and the shielding member is formed so as to be fitted into the groove. is there.

The shield lifting / lowering means includes a rail disposed along an outer periphery of the rotary table, and the shield extends from a center direction to the outside of the rotary table so that the rail and a tip end are in contact with each other. When the crucible comes to an electron beam irradiation position as the table is rotated, the tip of the branch portion rides on the convex portion formed on the rail upper surface. Has been described with reference to an example of rising from the groove of the rotary table and approaching the cover, although not shown, when each crucible 7 comes to the irradiation position of the electron beam as the rotary table 2 rotates Further, there may be provided push-up means for pushing up the central portion of the shielding member 20 upward and narrowing or contacting the gap between the shielding member 20 and the crucible cover 6.
FIG. 7 shows a modification of the groove shape when four crucibles are arranged at equal intervals on the upper surface of the crucible rotary table 2. The groove shown in FIG. 7 (A) is connected at the center of the turntable 2 and surrounds each crucible, and is continuously formed from the center to the outer peripheral edge. The groove shown in FIG. 7 (B) surrounds each crucible. The crucibles are connected to each other and formed continuously from the central direction to the outer peripheral edge, and the grooves shown in FIG. 7 (c) surround each crucible independently and continue to the outer peripheral edge in different directions. Is formed. In the present invention, such a groove shape may be used, and in this case, each shielding member 20 is formed into a shape that fits into the groove.
The shape of such a groove is not limited to the groove shape of the modified example as shown in FIG. 7, and various groove shapes can be applied.

DESCRIPTION OF SYMBOLS 1 ... Electron gun 2 ... Crucible rotary table 3 ... Evaporation material 4 ... Rotating shaft 5 ... Rotating shaft drive 6 ... Crucible cover 7 ... Crucible 8 ... Notch Part 9 ... Lower end edge part 20 ... Shielding member 21 ... Projection 22 ... Roller 23 ... Support part 24 ... Groove 25 ... Fixed guide rail 26 ... Convex part 100 ... Evaporation source

Claims (4)

A rotary table having a plurality of crucibles containing evaporation materials and rotating around a rotation shaft, and an electron gun for evaporating the evaporation material in the crucible by irradiating one crucible located at the electron beam irradiation position And a cover that covers a plurality of crucibles on the upper side of the rotary table and that is open to all of the irradiation region of the electron beam facing the electron gun, on the upper surface of the rotary table, A groove formed so as to partition the crucible, a shape that fits into the groove and partitions each crucible, and rotates with the rotation of the rotary table; and when each crucible comes to the irradiation position of the electron beam, A multi-point evaporation source device comprising: a shield lifting / lowering means that raises the shield and narrows the distance between the shield and the cover. The rail disposed along the outer periphery of the rotary table and the shield are formed with branch portions extending from the center direction to the outside of the rotary table so that the rail and the tip end are in contact with each other. When the crucibles come to the irradiation position of the electron beam with the rotation of the shield, the tip of the branch portion rides on the convex portion formed on the rail upper surface, so that the shield rises from the groove of the rotary table. The multipoint evaporation source device according to claim 1, wherein the multipoint evaporation source device approaches the cover. 3. The multi-point evaporation source device according to claim 1, wherein the groove is formed of branch portions that are connected at the center and extend radially. The shield lifting / lowering means pushes up the central part of the shield upward from the rotary table when each of the crucibles has reached the electron beam irradiation position, and pushes up the gap between the shield and the cover. 3. A multipoint evaporation source apparatus according to claim 1 or 2, further comprising means.

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