JP2012220887A - Method of heating and cooling laminated base material and method of manufacturing color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of heating and cooling a laminated base material which can prevent the laminated base material from warping.SOLUTION: In the method of heating and cooling a laminated base material, first, a laminated base material 2 is wound around a winding core 29a with a second base material 12 inside to form a wound body 29. Then, the wound body 29 is heated. Thereafter, the heated wound body 29 is cooled.

Description

  The present invention heats a laminated base material having a belt-like first base material and a belt-like second base material laminated on the first base material and having a heat shrinkage rate smaller than that of the first base material. The present invention relates to a cooling method and a method for producing a color filter including this method, and more particularly, to a method for heating and cooling a laminated substrate and a method for producing a color filter that can suppress warping of the laminated substrate.

  As a substrate for a color filter used in a liquid crystal display, electronic paper, etc., a sheet-like glass plate is generally used, and a plurality of colors of pixels are formed in a pattern on the glass plate. A filter has been made.

  By the way, recent advances in glass production technology have produced ultra-thin glass with a thickness of about 100 μm. Such an ultrathin glass has flexibility and can be wound in a roll shape. When using this ultra-thin glass as a substrate for a color filter, the ultra-thin glass can be drawn out from a roll around which the ultra-thin glass is wound to continuously produce a color filter, and when using a sheet-like glass plate Compared with this, production efficiency can be improved. However, since the ultrathin glass is thin, there is a problem that impact resistance is lowered.

  As a countermeasure against such a problem, a laminated base material in which a plastic film is laminated on an ultrathin glass in order to protect the ultrathin glass is known (see, for example, Patent Documents 1 to 3).

JP 2010-228166 A JP 2008-273211 A JP 2008-218419 A

  By the way, when a plurality of color pixels for a color filter are formed on an ultrathin glass by photolithography, a laminated base material on which pixels are formed is used, for example, for the purpose of removing solvents and moisture and promoting thermal crosslinking. In general, cooling is performed by heat treatment (post-baking) at a temperature of ℃ or higher. In this case, the plastic film constituting the laminated substrate is heated at a temperature equal to or higher than the glass transition point and then cooled, but the plastic film contracts during cooling. On the other hand, since the ultrathin glass has a small thickness, it does not have rigidity that can resist the shrinkage force of the plastic film. For this reason, there existed a problem that the laminated base material (pattern formation body) in which the pixel was formed curved as a whole by the shrinkage force of a plastic film. Note that this problem is not limited to the laminated base material of ultrathin glass and plastic film. For example, the laminated base material of two plastic films having different thermal shrinkage rates, and 2 different from each other in thermal shrinkage rate. It can also occur in two ultra-thin glass laminates.

  The present invention has been made in consideration of such points, and an object of the present invention is to provide a method for heating and cooling a laminated base material and a method for producing a color filter that can suppress the warping of the laminated base material. And

  The present invention provides a laminated base material having a belt-like first base material and a belt-like second base material laminated on the first base material and having a heat shrinkage rate smaller than that of the first base material. In the heating and cooling method, the step of winding the laminated base material around a winding core with the second base material on the inside to form a winding body, the step of heating the winding body, and the heated winding A method of heating and cooling a laminated base material, comprising: a step of cooling the body.

  In the heating and cooling method for a laminated base material described above, in the step of heating the winding body, the first base material is made of plastic and the second base material is made of glass. The temperature for heating the body is preferably higher than the glass transition point of the first base material and lower than the thermal decomposition temperature of the first base material.

  Moreover, in the heating and cooling method for the laminated base material described above, in the step of cooling the winding body, it is preferable that the temperature for cooling the winding body is equal to or lower than the glass transition point of the first base material.

  Moreover, in the heating and cooling method for the laminated base material described above, the first base material and the second base material are formed of plastic, and in the step of heating the winder, the temperature for heating the winder is: , Higher than the lower glass transition point of the glass transition point of the first substrate and the glass transition point of the second substrate, and out of the melting point of the first substrate and the melting point of the second substrate. The melting point is preferably lower than the higher melting point.

  In the heating and cooling method for the laminated base material described above, in the step of cooling the winding body, the temperature for cooling the winding body is the glass transition point of the first base material and the glass of the second base material. It is preferable that it is below the glass transition point of the lower one among transition points.

  The present invention provides a laminated base material having a belt-like first base material and a belt-like second base material laminated on the first base material and having a heat shrinkage rate smaller than that of the first base material. A step of forming a pixel resin layer patterned so as to constitute a pixel for a color filter on the second substrate of the laminate substrate, and any of the laminate substrates described above And a step of heating and cooling the laminated base material on which the pixel resin layer is formed by the heating and cooling method.

  According to the present invention, the laminated base material is wound around the winding core with the second base material having a small heat shrinkage rate on the inside, and the first base material having a large heat shrinkage rate on the outside to form a wound body, This winding body is heated and cooled. Among these, by heating, the stress in the first base material generated by being wound on the outside can be removed, and by cooling, the first base material is caused to generate a larger shrinkage stress than the second base material. Can do. For this reason, when the laminated base material is cooled and taken out from the winding body, the second base material that has been deformed so as to be concave toward the core by winding is flattened by the contraction stress generated in the first base material. Can be. As a result, it can suppress that a laminated base material warps.

  Moreover, according to this invention, it can suppress that the color filter in which the resin layer for pixels patterned so that the pixel for color filters was comprised on the 2nd base material was formed curved. Thereby, the accuracy of the display image of the color filter can be improved.

FIG. 1 is a diagram illustrating an example of a cross-sectional configuration of a color filter in an embodiment of the present invention. FIG. 2 is a diagram showing a cross-sectional configuration of the pattern forming body in the embodiment of the present invention. FIG. 3 shows a pattern forming body manufacturing apparatus and a manufacturing method thereof in the embodiment of the present invention. FIG. 4 is a diagram showing a cross-sectional configuration of the winding body in the embodiment of the present invention. FIG. 5 is a diagram showing a flowchart of a method for manufacturing a pattern forming body in the embodiment of the present invention. FIG. 6 is a diagram showing a method for measuring the amount of warpage of the pattern forming body in the embodiment of the present invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  First, the cross-sectional configuration of the color filter 1 obtained by the color filter manufacturing method including the heating and cooling method of the laminated base material according to the present embodiment will be described with reference to FIG.

  As shown in FIG. 1, a color filter 1 obtained by the method for producing a color filter in the present embodiment is formed on a laminated base material 2 described later and the laminated base material 2, and has a predetermined shape, for example, a matrix shape. And a black matrix 3 patterned. Among these, the black matrix 3 is composed of a photosensitive material layer 3a patterned with a predetermined photosensitive material.

  Usually, pixels of a plurality of colors are formed in each opening of the black matrix 3 on the glass film 12. That is, the red pixel 4 and the green pixel 5 are formed in each opening of the black matrix 3 by the photosensitive material for red (R) pixel, the photosensitive material for green (G) pixel, and the photosensitive material for blue (B) pixel. , And the blue pixel 6 are formed. The arrangement of the pixels 4, 5, 6 is not shown, but may be a known arrangement such as a stripe arrangement, a delta arrangement (triangle arrangement), a square arrangement (four pixel arrangement), or the like. Thus, one display pixel on the screen is formed by three adjacent pixels having different colors. Further, yellow pixels (not shown) or the like may be added to form four or more color pixels.

  As shown in FIG. 1, these pixels 4, 5, 6 are covered with a protective layer 7. A transparent electrode film 8 made of indium tin oxide (ITO) is formed on the protective layer 7.

  Such a color filter 1 is combined with, for example, a liquid crystal element including a switching element such as a TFT and a liquid crystal layer arranged corresponding to each of the pixels 4, 5, and 6, and a surface light source, so that a liquid crystal display (LCD ) Or electronic paper. In this configuration, the liquid crystal is controlled by the switching element to function as a shutter, and emits light from the surface light source only through pixels of a desired color. In this way, a color image is displayed on the screen.

  Then, the pattern formation body 1a is demonstrated using FIG. Here, the pattern forming body 1a is obtained by heating and cooling the laminated base material 2 on which the patterned resin layer is formed on the glass film 12, using the method for heating and cooling the laminated base material according to the present embodiment. Is. The pattern forming body 1a includes a laminated base material 2, and a photosensitive material layer (resin layer) 3a formed on the laminated base material 2 and patterned. Among these, the laminated substrate 2 is a plastic film (first substrate) 11 and a glass film (second substrate) which is laminated on the plastic film 11 and has a thermal shrinkage smaller than that of the plastic film 11. The patterned photosensitive material layer 3 a is formed on the glass film 12. An adhesive layer 13 is interposed between the plastic film 11 and the glass film 12, and the plastic film 11 and the glass film 12 are bonded together by the adhesive layer 13.

  Next, the material of each component of the color filter 1 will be described.

  As a material used for the plastic film 11, polyethylene terephthalate (PET) or polyethylene naphthalate (PEN) is preferable because of mass production and low cost. Moreover, it is preferable that the thickness of the plastic film 11 is 10-200 micrometers. By this, while being able to wind around the 1st supply part 21 of the manufacturing apparatus 20 (refer FIG. 3) of the pattern formation body mentioned later, in the winding part 28, it can wind with the glass film 12 to the core 29a, The strength necessary for reinforcing the glass film 12 can be ensured.

  The glass film 12 is preferably an ultrathin glass having a thickness of 20 to 300 μm. Thus, the glass film 12 can be made flexible and can be wound around the second supply unit 22 of the pattern forming apparatus manufacturing apparatus 20, and at the winding unit 28, the plastic film can be applied to the core 29 a. 11 can be wound together.

  As the photosensitive material for forming the photosensitive material layer 3a, it is preferable to use a pigment-dispersed photosensitive resin composition containing a black pigment having a light shielding property, a solvent, and a bonding resin (binder). Similarly, it is preferable to use a photosensitive resin composition in which a pigment of each color is dispersed as the photosensitive material for each color pixel.

  Next, a pattern forming body manufacturing apparatus 20 for manufacturing the pattern forming body 1a in the present embodiment using the photolithography method will be described with reference to FIG.

  As shown in FIG. 3, the pattern forming body manufacturing apparatus 20 includes a first supply unit 21 wound with a continuous belt-shaped plastic film 11 and a second supply unit 22 wound with a continuous belt-shaped glass film 12. And have. Among these, an adhesive layer 13 (see FIG. 2) is provided on the plastic film 11 wound around the first supply unit 21, and a release paper (not shown) is affixed to the adhesive layer 13 so as to be peelable. ing.

  On the downstream side in the traveling direction of the first supply unit 21 and the second supply unit 22, the plastic film 11 that has been fed from the first supply unit 21 and the release paper has been peeled off, and the glass film 12 that has been fed from the second supply unit 22. Are laminated and bonded together. In this laminator 23, the plastic film 11 and the glass film 12 are bonded together via the adhesive layer 13 on the plastic film 11 to form the laminated base material 2.

  On the downstream side of the laminator 23, a coating unit 24 that applies a photosensitive material in a film shape on the glass film 12 of the laminated base material 2 is provided. The coating unit 24 is configured to apply a photosensitive material on the glass film 12 by a coating method such as microgravure, gravure coater, die coater, and the like to form the photosensitive material layer 3a.

  A prebake processing unit 25 for drying the photosensitive material layer 3 a is provided on the downstream side of the coating unit 24. The pre-baking processing unit 25 is configured to dry the photosensitive material layer 3a at a temperature of about 50 to 120 ° C. for about 1 to 5 minutes depending on the material of the plastic film 11 to be used. For example, when the plastic film 11 is made of polyethylene terephthalate, it is preferable to dry at a temperature of 50 ° C. for 3 minutes.

  An exposure processing unit 26 that exposes the photosensitive material layer 3a in a predetermined pattern is provided on the downstream side of the pre-baking processing unit 25. Here, exposure is performed using a black mask 3 having a predetermined shape and a photomask 26a for forming alignment marks (not shown).

  On the downstream side of the exposure processing unit 26, a development processing unit 27 for developing and patterning the exposed photosensitive material layer 3a is provided. The development processing unit 27 develops the photosensitive material layer 3a using, for example, a 0.05 to 10% solution of potassium hydroxide (KOH) as a developer. In this way, the photosensitive material layer 3a is patterned in a matrix shape, for example, to obtain a pattern forming body 1a.

  On the downstream side of the development processing unit 27, the laminated base material 2 on which the photosensitive material layer 3a is patterned, that is, the pattern forming body 1a is wound around a cylindrical core 29a to form a winding body 29. Is provided. In this winding part 28, as shown in FIG. 4, the pattern forming body 1a is wound up with the plastic film 11 on the outside and the glass film 12 on the inside. The core 29a is preferably made of metal and configured to prevent deformation due to heating. Moreover, it is preferable that the diameter of the winding core 29a is 5-20 cm. Thus, the glass film 12 can be wound around the core 29a without being deformed or damaged, and the pattern forming body 1a fed out from the winding body 29 after cooling can be prevented from warping. The body 1a can have a bending radius. In FIG. 4, in order to simplify the drawing, a single pattern forming body 1a is wound around the core 29a, but multiple windings may be used. Further, a plurality of guide rolls 30 for guiding the laminated base material 2 are provided at appropriate positions between the supply units 21 and 22 and the winding unit 28.

  The pattern forming body manufacturing apparatus 20 further includes a heating oven 31 that heats (post-bake) the winding body 29 formed by the winding section 28. In the heating oven 31, the photosensitive material layer 3a formed on the glass film 12 is heated and thermally crosslinked. The temperature for heating the winding body 29 is preferably higher than the glass transition point of the plastic film 11 and lower than the thermal decomposition temperature of the plastic film 11. This is because when the plastic film 11 is heated at a temperature lower than the glass transition point, the problem of warping due to the shrinkage of the plastic film 11 during subsequent cooling hardly occurs in the first place. In addition, when heating at a temperature equal to or higher than the thermal decomposition temperature of the plastic film 11, it does not return to the original molecular structure even after cooling. That is, the bonds between the molecules are broken and the low molecules are volatilized, resulting in a molecular structure different from the original molecular structure upon cooling. Specific examples of the phenomenon in which the molecular structure is changed include a change in optical properties such as yellowing and haze, and a decrease in mechanical strength such as fragility.

  For example, when the plastic film 11 is formed of polyethylene terephthalate, the glass transition point of the plastic film 11 is 70 ° C. and the thermal decomposition temperature is 400 ° C. Accordingly, the temperature for heating the wound body 29 is preferably at least 70 ° C. and 400 ° C., and more preferably 200 ° C. and above. As an example, it is preferable to heat the winding body 29 at a temperature of 210 ° C. for about 30 minutes. This makes it possible to thermally crosslink the photosensitive material layer 3a and remove stress in the plastic film 11 during post-baking.

  Next, the operation of the present embodiment having such a configuration, that is, the pattern forming body manufacturing method and the color filter manufacturing method including the heating and cooling method of the laminated base material according to the present embodiment will be described with reference to FIGS. Will be described.

  First, the lamination base material 2 which has the strip | belt-shaped plastic film 11 and the strip | belt-shaped glass film 12 laminated | stacked on the plastic film 11 is prepared (step S1).

  In this case, first, the first supply unit 21 around which the belt-like continuous plastic film 11 is wound is prepared, and the second supply unit 22 around which the belt-like continuous glass film 12 is wound is prepared. Among these, the plastic film 11 provided with the adhesive layer 13 (see FIG. 2) and release paper is wound around the first supply unit 21. Subsequently, the plastic film 11 is fed out from the first supply unit 21, and the release paper is peeled off from the adhesive layer 13. Further, the glass film 12 is fed out from the second supply unit 22. Thereafter, in the laminator 23, the plastic film 11 and the glass film 12 are laminated to form the laminated base material 2. In this case, the plastic film 11 and the glass film 12 are bonded together via the adhesive layer 13 on the plastic film 11.

  Next, the patterned photosensitive material layer 3a is formed on the glass film 12 of the laminated substrate 2 (step S2).

  In this case, first, a photosensitive material is applied in the form of a film on the glass film 12 by the coating unit 24 to form the film-shaped photosensitive material layer 3a (step S2a). Subsequently, the photosensitive material layer 3a is dried (pre-baked) by the pre-baking processing unit 25 (step S2b). When polyethylene terephthalate is used for the plastic film 11, the photosensitive material layer 3a is dried at a temperature of 50 ° C. for about 3 minutes, for example. As a result, the solvent contained in the photosensitive material layer 3a evaporates, and the adhesion of the photosensitive material layer 3a to the glass film 12 can be improved. Next, in the exposure processing unit 26, the photosensitive material layer 3a is exposed in a predetermined pattern (step S2c). In this case, exposure is performed using a black matrix 3 having a predetermined shape and a photomask 26a for forming alignment marks. The exposed photosensitive material layer 3a is developed in the development processing unit 27 (step S2d). As a result, the photosensitive material layer 3a is patterned into a matrix shape, and the patterned photosensitive material layer 3a (black matrix 3) is formed on the glass film 12, whereby the pattern forming body 1a is obtained.

  Subsequently, the pattern forming body 1a is wound around the winding core 29a to form the winding body 29 (step S3). In this case, as shown in FIG. 4, in the winding part 28, the pattern forming body 1a is wound around the winding core 29a with the plastic film 11 facing outside and the glass film 12 facing inside.

  Thereafter, the wound body 29 is post-baked (step S4). In this case, when the wound body 29 is put into the heating oven 31 and polyethylene terephthalate is used for the plastic film 11, it is post-baked at a temperature of 210 ° C. for about 30 minutes, for example. As a result, the photosensitive material layer 3a can be thermally cross-linked.

  Subsequently, the post-baked winding body 29 is cooled (step S5). In this case, the post-baked winding body 29 is taken out from the heating oven 31 and cooled. The temperature for cooling the winding body 29 is preferably equal to or lower than the glass transition point of the plastic film 11. For example, the winding body 29 is preferably cooled in the atmosphere. In this case, the winding body 29 can be easily cooled without using cooling equipment or the like.

  Thereafter, on the glass film 12, the photosensitive material layers (pixel resin layers) 4a, 5a, and 6a for pixels of a plurality of colors patterned so as to constitute pixels of a plurality of colors are formed. That is, by repeating Steps S2 to S5 described above, the photosensitive material for red pixel, the photosensitive material for green pixel, and the photosensitive material for blue pixel are respectively applied on the glass film 12, and the glass film 12 is coated. A red pixel 4, a green pixel 5, and a blue pixel 6 are formed in each opening of the black matrix 3, respectively. In this case, in step S2a, the photosensitive material for red pixel, the photosensitive material for green pixel, and the photosensitive material for blue pixel containing the pigment of each color are applied on the glass film 12, and in step S2c, Exposure is performed using a photomask 26 a corresponding to the arrangement of the pixels 4, 5, 6. Thus, the photosensitive material layer 4a for red pixels patterned so as to constitute the plurality of red pixels 4, the photosensitive material layer 5a for green pixels patterned so as to constitute the plurality of green pixels 5, and the plurality The blue pixel photosensitive material layer 6 a patterned to constitute the blue pixel 6 is formed. Thereafter, the protective layer 7 and the transparent electrode film 8 are formed, and the color filter 1 shown in FIG. 1 is obtained.

  As described above, according to the present embodiment, after the patterned photosensitive material layer 3a is formed on the glass film 12 of the laminated substrate 2, the glass film 12 having a small heat shrinkage rate is set inside, and the heat shrinkage rate is obtained. The laminated base material 2 is wound around the winding core 29a with the large plastic film 11 facing outside to form a wound body 29. The wound body 29 is heated and cooled. Among them, the stress in the plastic film 11 that has been generated by being wound outside can be removed by heating, and the shrinkage stress larger than that of the glass film 12 can be generated in the plastic film 11 by cooling. For this reason, when the laminated base material 2 on which the patterned photosensitive material layer 3a is formed, that is, the pattern forming body 1a is drawn out from the winding body 29 after cooling, it is formed into a concave shape on the winding core 29a side by winding. The glass film 12 that has been deformed into a flat shape can be flattened by the shrinkage stress generated in the plastic film 11. As a result, the pattern forming body 1a can be prevented from warping.

  Further, according to the present embodiment, the photosensitive material layers 4a, 5a, and 6a for a plurality of pixels patterned so as to constitute the pixels 4, 5, and 6 for the plurality of colors are formed on the glass film 12. Further, the warpage of the color filter 1 can be suppressed. Thereby, the accuracy of the display image of the color filter 1 can be improved.

  As mentioned above, although embodiment by this invention has been described, naturally, various deformation | transformation are also possible within the range of the summary of this invention. Hereinafter, typical modifications will be described.

  As a method of forming the patterned resin layer on the glass film 12, an ink jet method can be adopted instead of the photolithography method. In this case, an ink jet printing section (not shown) for applying ink on the glass film 12 is provided on the downstream side of the laminator 23, and an ink layer (patterned by applying ink in a pattern on the glass film 12 ( (Resin layer) may be formed. Here, as a material used for the ink, it is preferable to use an ink containing a pigment or a dye and suitable for the ink jet method. Alternatively, as another method for forming the patterned resin layer, a transfer method can be adopted. That is, a patterned resin layer (not shown) may be transferred onto the glass film 12.

  Further, without forming the black matrix 3 on the glass film 12, a red pixel photosensitive material, a green pixel photosensitive material, and a blue pixel photosensitive material are applied to form a plurality of red pixels. The photosensitive material layer 4a for red pixels patterned to the above, the photosensitive material layer 5a for green pixels patterned to constitute a plurality of green pixels, and the blue pixel patterned to constitute a plurality of blue pixels The color filter 1 may be obtained by forming the photosensitive material layer 6a. Even in this case, the color filter 1 can be prevented from warping, and the accuracy of the display image of the color filter 1 can be improved.

  Further, in the present embodiment, the example in which the red pixel 4, the green pixel 5, and the blue pixel 6 are formed as the pixels of each color of the color filter 1 has been described. However, the present invention is not limited to this, and yellow (Y) pixels, magenta (M) pixels, and cyan (C) pixels may be formed as pixels of each color of the color filter 1. That is, a yellow pixel photosensitive material, a magenta pixel photosensitive material, and a cyan pixel photosensitive material are coated on the glass film 12 and patterned to form a plurality of yellow pixels. Forming a photosensitive material layer, a magenta pixel photosensitive material layer patterned so as to constitute a plurality of magenta pixels, and a cyan pixel photosensitive material layer patterned so as to constitute a plurality of cyan pixels. The filter 1 may be obtained.

  Moreover, in this Embodiment, the 1st base material of the laminated base material 2 was the plastic film 11, and the example whose 2nd base material is the glass film 12 was demonstrated. However, the present invention is not limited to this, and the first substrate and the second substrate may be plastic films having different thermal shrinkage rates. In this case, the temperature at which the wound body 29 on which the pattern forming body 1a is wound in the heating oven 31 is heated (post-baked) is lower among the glass transition point of the first substrate and the glass transition point of the second substrate. It is preferable that it is higher than the glass transition point of the first and lower than the higher melting point of the melting point of the first substrate and the melting point of the second substrate. When heating at a temperature below the lower glass transition point of the glass transition point of the first substrate and the glass transition point of the second substrate, the problem of warping due to the shrinkage of the plastic film during the subsequent cooling occurs in the first place. This is because it is difficult. In addition, when heating at a temperature equal to or higher than the melting point of the first substrate and the melting point of the second substrate, the substrate having the supporting function (the substrate having the higher melting point) is melted, This is because the base material cannot be supported. Moreover, it is preferable that the temperature which cools the post-baked winding body 29 is below the glass transition point of the lower one among the glass transition point of a 1st base material, and the glass transition point of a 2nd base material. For example, the winding body 29 is preferably cooled in the atmosphere in the same manner as in the above-described embodiment. As an example, polyethylene terephthalate can be used for the first substrate and polyethylene naphthalate can be used for the second substrate.

  Further, the first base material and the second base material may be glass films having different heat shrinkage rates. In this case, the temperature at which the winding body 29 is heated in the heating oven 31 is higher than the lower one of the strain point of the first substrate and the strain point of the second substrate, and the first substrate is softened. It is preferable that it is lower than the higher one of the point and the softening point of the second substrate. When heating at a temperature equal to or lower than the lower one of the strain point of the first substrate and the strain point of the second substrate, the problem of warpage due to the shrinkage of the glass film during subsequent cooling is unlikely to occur in the first place. is there. In addition, when heating at a temperature equal to or higher than the softening point of the first base material and the softening point of the second base material, a base material having a supporting function (a base material having a higher softening point) is used. It is because it becomes soft and cannot support the other base material. Moreover, it is preferable that the temperature which cools the post-baked winding body 29 is below the lower strain point of the strain point of a 1st base material and the strain point of a 2nd base material. For example, the winding body 29 is preferably cooled in the atmosphere in the same manner as in the above-described embodiment. As an example, soda lime glass can be used for the first substrate, and alkali-free glass can be used for the second substrate.

  Further, in the present embodiment, for the purpose of manufacturing the color filter 1, as a patterned resin layer on the glass film 12, a matrix-like black matrix 3, a patterned red pixel 4, a green color The example in which the pixel 5 and the blue pixel 6 are formed has been described. However, the present invention is not limited to the color filter 1, and when a resin layer patterned into an arbitrary shape (including a solid state) is formed on the glass film 12 of the laminated substrate 2, a material other than resin is further used. In the case where a patterned layer is formed by, for example, the present invention can be applied to a case where a patterned metal layer for a TFT array is formed.

  Furthermore, in this Embodiment, the laminated base material 2 in which the patterned resin layer was formed was wound around the core 29a, and the example heated and cooled was demonstrated. However, the present invention is not limited to this, and the present invention is also applied to the case where the laminated base material 2 on which the resin layer patterned on the laminated base material 2 is not formed is wound around the core 29a and heated and cooled. Even in this case, it is possible to obtain the effect of the present invention that suppresses the warp of the laminated base material.

  The amount of warpage of the pattern forming body 1a formed by using the heating and cooling method for the laminated base material according to the embodiment of the present invention was measured.

  As the plastic film 11, a PET film having a thickness of 50 μm, a width of 270 mm, and a length of 10 m (manufactured by Lintec Corporation, Fuji Clear 50) was prepared. In addition, the adhesion layer 13 is provided on this PET film film, and the release paper is affixed on the adhesion layer 13 so that peeling is possible. Further, as the glass film 12, a glass film (OA-10G manufactured by Nippon Electric Glass Co., Ltd.) having a thickness of 100 μm, a width of 270 mm, and a length of 10 m was prepared.

  Subsequently, the release paper of the PET film 11 was peeled off, and the PET film 11 and the glass film 12 were bonded using the laminator 23 through the adhesive layer 13 to produce the laminated substrate 2.

  Next, BM photoresist which is negative resin was apply | coated to the obtained laminated base material 2 on the glass film 12 using the micro gravure, and it dried for 3 minutes at 50 degreeC.

  Subsequently, exposure was performed using a photomask 26a and alkali development was performed to obtain a pattern forming body 1a on which a matrix-shaped black matrix 3 was formed.

  The pattern forming body 1a was wound around a metal core 29a having a diameter of 8.7 cm with the glass film 12 on the inside and the PET film 11 on the outside to form a winding body 29.

  The wound body 29 was put into a heating oven 31 and heated at 210 ° C. for 30 minutes for post baking.

  Thereafter, the wound body 29 was taken out from the heating oven 31, cooled in the atmosphere, and the laminated base material 2 on which the black matrix 3 was formed, that is, the pattern forming body 1a was fed out from the winding core 29a and cut at intervals of 270 mm.

  As shown in FIG. 6, the cut pattern forming body 1a was placed on a flat plate 32, and the amount of warpage of the pattern forming body 1a was measured. The amount of warpage was measured using a ruler as a distance x between the center of the pattern forming body 1a and the upper surface of the flat plate 32. In the pattern formed body 1a obtained by this example, the warpage amount was 1 mm or less.

  In the same procedure as described above, the red pixel 4, the green pixel 5, and the blue pixel 6 are applied, dried, exposed, developed, post-baked and cooled in this order, and then the patterned pixels 4, 5, 6 Formed. After the cooling of the blue pixel 6 was finished, the pattern forming body 1a was cut into a single sheet and the amount of warpage was measured. The amount of warpage was 1 mm or less.

(Comparative example)
As a comparative example, the black matrix 3 is formed on the glass film 12 of the laminated substrate 2 to form the wound body 29 in the same manner as in the above-described embodiment, and then the laminated base is continuously formed from the wound body 29. The material 2 was fed out and conveyed to the heating oven 31 to be post-baked, cooled, and wound up again. Thereafter, the pattern forming body 1a was drawn out again and cut, and the amount of warpage was measured in the same manner as in the above-described example. As a result, the amount of warpage was 27 mm. Attempts were made to apply a red pixel resist constituting the red pixel 4 to the pattern forming body 1a. However, since the amount of warpage is large, it cannot be applied uniformly on the glass film 12, and when exposure is performed. In the exposure region, the interval between the laminated substrate 2 and the photomask could not be made uniform.

  Thus, after development, the pattern forming body 1a is wound up to form the winding body 29. As a form of the winding body 29, post-baking and cooling are performed, and thus the warping amount of the pattern forming body 1a obtained is reduced. It was confirmed that it was suppressed.

DESCRIPTION OF SYMBOLS 1 Color filter 1a Pattern formation body 2 Laminate base material 3 Black matrix 3a Photosensitive material layer 4 Red pixel 4a Red pixel photosensitive material layer 5 Green pixel 5a Green pixel photosensitive material layer 6 Blue pixel 6a Blue pixel photosensitive property Material layer 7 Protective layer 8 Transparent electrode film 11 Plastic film 12 Glass film 13 Adhesive layer 20 Pattern forming body manufacturing apparatus 21 First supply unit 22 Second supply unit 23 Laminator 24 Coating unit 25 Prebaking processing unit 26 Exposure processing unit 26a Photomask 27 Development processing unit 28 Winding unit 29 Winding body 29a Winding core 30 Guide roll 31 Heating oven 32 Flat plate

Claims (6)

A method for heating and cooling a laminated base material, comprising: a belt-like first base material; and a belt-like second base material laminated on the first base material and having a heat shrinkage rate smaller than that of the first base material. In
Winding the laminated base material around a core with the second base material inside, and forming a wound body;
Heating the winding body;
And a step of cooling the heated winding body. A method for heating and cooling a laminated base material, comprising: The first substrate is made of plastic, and the second substrate is made of glass;
In the step of heating the winding body, the temperature for heating the winding body is higher than the glass transition point of the first base material and lower than the thermal decomposition temperature of the first base material. The method for heating and cooling the laminated substrate according to claim 1.   The method for heating and cooling a laminated base material according to claim 2, wherein, in the step of cooling the wound body, a temperature for cooling the wound body is equal to or lower than a glass transition point of the first base material. . The first substrate and the second substrate are formed of plastic,
In the step of heating the winding body, the temperature for heating the winding body is higher than the lower glass transition point of the glass transition point of the first substrate and the glass transition point of the second substrate, And the heating and cooling method of the laminated base material according to claim 1, wherein the melting point of the first base material and the melting point of the second base material are lower than the higher melting point.   In the step of cooling the winding body, the temperature for cooling the winding body is equal to or lower than the lower glass transition point of the glass transition point of the first substrate and the glass transition point of the second substrate. The method for heating and cooling a laminated base material according to claim 4. A step of preparing a laminated base material having a belt-like first base material and a belt-like second base material laminated on the first base material and having a heat shrinkage rate smaller than that of the first base material. When,
Forming a pixel resin layer patterned on the second base material of the laminated base material so as to constitute a color filter pixel;
A method comprising: heating and cooling the laminated base material on which the pixel resin layer is formed by the method for heating and cooling a laminated base material according to any one of claims 1 to 5. The manufacturing method of the filter.

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