JP2012220372A - Inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device facilitating development design and having high quality.SOLUTION: An inspection device comprises: at least one socket for mounting an object to be inspected; a plurality of circuit boards each including the at least one socket, for testing the object to be inspected; and a tester head connected electrically to the plurality of circuit boards, for supplying a signal to the object to be inspected. The plurality of circuit boards are electrically interconnected. Each circuit board includes a first circuit section which is an individual circuit for each object to be inspected, and a portion of a second circuit section which is a common circuit for the objects to be inspected. The portions of the second circuit sections in the plurality of circuit boards are electrically interconnected to function as one performance board.

Description

  The present invention relates to an apparatus for inspecting an electronic device such as a semiconductor device.

  An electronic device such as a semiconductor device is inspected for electrical characteristics using an inspection device (for example, see Patent Document 1).

  A test board device that is electrically connected to a test head of an IC tester described in Patent Document 1 is a performance board that is electrically connected to the test head and has a positioning pin at the center, and an outer edge of the performance board. The DUT board is electrically connected via the connector and electrically connected to the object to be tested. The DUT board is divided and positioned with a positioning pin for each division.

JP 2005-77357 A

  The following analysis is given from the perspective of the present invention.

  In an inspection apparatus for inspecting an object to be inspected (DUT: Device Under Test) such as an IC (Integrated Circuit) or LSI (Large Scale Integrated circuit), as in the test board apparatus described in Patent Document 1, A performance board, which is a circuit board common to the objects, and a DUT test board, which is an individual circuit board to be inspected, are provided separately. In this case, the performance board and the DUT test board need to be electrically connected by a cable or the like. Therefore, due to the wiring length between the performance board and the DUT test board, the loss or deterioration of the electrical signal between them occurs.

  Further, in the test board device described in Patent Document 1, since the performance board is not divided and remains large, development design requires time and labor, and processing accuracy decreases and warpage occurs during manufacturing. As a result, the quality of the inspection apparatus deteriorates.

  According to the first aspect of the present invention, at least one socket for mounting an object to be inspected, a plurality of circuit boards having a socket for testing the object to be inspected, and a plurality of circuit boards and electrical And a tester head for supplying a signal to an object to be inspected. The plurality of circuit boards are electrically connected to each other. Each circuit board has a first circuit portion that is an individual circuit for each object to be inspected and a part of a second circuit portion that is a circuit shared by the object to be inspected. A part of the second circuit part in the plurality of circuit boards functions as one performance board by being electrically connected to each other.

  According to the second aspect of the present invention, at least one socket for mounting an object to be inspected, a plurality of circuit boards for testing the object to be inspected, and a plurality of circuit boards are electrically connected, and There is provided an inspection apparatus including a tester head for supplying a signal to an inspection object. Some of the plurality of circuit boards have sockets, and the remaining circuit boards do not have sockets. The plurality of circuit boards are electrically connected to each other. A circuit board having a socket includes a first circuit portion that is an individual circuit for each object to be inspected, and a part of a second circuit portion that is a shared circuit for the object to be inspected. The circuit board that does not have the socket has a part of the second circuit portion that is a shared circuit to be inspected. A part of the second circuit part in the plurality of circuit boards functions as one performance board by being electrically connected to each other.

  The present invention has at least one of the following effects.

  In the present invention, the first circuit portion functioning as a test board and the second circuit portion functioning as a performance board are integrated on the circuit board. Thereby, the electrical wiring length between a tester head and a socket can be shortened, and the loss and deterioration of an electrical signal at the time of the test | inspection of a test object can be suppressed.

  Further, according to the present invention, the size of one circuit board can be reduced. As a result, the time and labor required for designing and developing the circuit board can be reduced. In addition, the processing accuracy of one circuit board can be increased, the degree of warpage occurring can be suppressed, the quality of the inspection apparatus can be improved, and the yield can be improved.

  Furthermore, in the present invention, since the second circuit portion is shared by a plurality of circuit boards, it is possible to prevent the apparatus from becoming large and complicated, and to reduce manufacturing costs and development costs.

1 is a schematic plan view of an inspection apparatus according to a first embodiment of the present invention. The schematic sectional drawing in the II-II line of FIG. The schematic plan view of the inspection apparatus which concerns on 2nd Embodiment of this invention. The schematic plan view of the inspection apparatus which concerns on 3rd Embodiment of this invention.

  Preferred forms of the first viewpoint and the second viewpoint will be described below as an outline of the embodiment.

  According to a preferred embodiment of the first aspect, the inspection apparatus includes a first circuit board and a second circuit board as the plurality of circuit boards. The circuit on the first circuit board and the circuit on the second circuit board are in a line-symmetric relationship.

  According to a preferred embodiment of the first aspect, the inspection apparatus includes a first circuit board and a second circuit board as the plurality of circuit boards. The circuit on the first circuit board and the circuit on the second circuit board have a point-symmetric relationship.

  According to the preferable form of the first aspect, in the plurality of circuit boards, the first circuit portion and a part of the second circuit portion are formed in different layers.

  According to the preferred form of the second aspect, the circuit board having the socket is configured to be replaceable for each object to be inspected.

  Hereinafter, first to third embodiments of the present invention will be described with reference to the drawings.

  An inspection apparatus according to a first embodiment of the present invention will be described. FIG. 1 shows a schematic plan view of an inspection apparatus according to the first embodiment of the present invention. FIG. 2 is a schematic sectional view taken along line II-II in FIG.

  The inspection apparatus 10 includes at least one socket 11 for mounting the inspection target, a plurality of circuit boards 12a and 12b having circuits (wirings) 14 for testing the inspection target, and signals to the inspection target. A tester head 13 for supplying. In the form shown in FIGS. 1 and 2, a first circuit board 12a and a second circuit board 12b are shown as a plurality of circuit boards. The socket 11 and the circuit boards 12a and 12b are electrically connected. The circuit boards 12a and 12b and the tester head 13 are electrically connected. The plurality of circuit boards 12 a and 12 b are electrically connected to each other via the cable 15. In the form shown in FIGS. 1 and 2, the plurality of circuit boards 12 a and 12 b are electrically connected via the cable 15, but are electrically connected to each other via the wiring in the tester head 13 without providing the cable 15. May be connected.

  The inspection apparatus 10 does not have a separate board corresponding to the performance board in addition to the circuit boards 12a and 12b. Instead, each of the circuit boards 12a and 12b includes a first circuit portion (not shown) that is an individual circuit for each object to be inspected and a part (not shown) of a second circuit portion that is a circuit shared by the object to be inspected. And). When the circuit board has two forms as shown in FIGS. 1 and 2, a part of the second circuit part of the first circuit board 12a and a part of the second circuit part of the second circuit board 12b are: By being electrically connected to each other, one second circuit unit is obtained. One virtual second circuit unit has a function corresponding to one performance board. That is, the second circuit portion of the first circuit board 12a has a part of the function of the performance board, and the second circuit portion of the second circuit board 12b has the remainder of the function of the performance board. By electrically connecting the board 12a and the second circuit board 12b, the first circuit board 12a and the second circuit board 12b have a circuit corresponding to a performance board. On the other hand, the first circuit portions of the circuit boards 12a and 12b each have a function corresponding to a test board. In one circuit board, the first circuit portion and the second circuit portion are preferably separated as different wiring layers so as not to have an electrical influence on each other.

  The first circuit board 12a and the second circuit board 12b are preferably configured to be exchangeable for each object to be inspected.

  A board corresponding to the performance board is not provided separately, and the test board and the performance board are incorporated into one circuit board, so that the wiring length between the tester head 13 and the socket 11, particularly between the first circuit part and the second circuit part can be reduced. It can be shortened, and loss or deterioration of electrical signals can be suppressed. Further, the inspection apparatus 10 can be downsized and the inspection apparatus can be simplified.

  When the number of circuit boards included in the inspection apparatus 10 is two, the circuit of the first circuit board 12a and the circuit of the second circuit board 12b are the first circuit board 12a on the planar projection as shown in FIG. And the second virtual circuit board 12b are preferably symmetrical with respect to the (virtual) line X (one is a mirror-inverted form of the other). The circuit (wiring) 14 shown in FIG. 1 is an example for showing the relationship between the circuit of the first circuit board 12a and the circuit of the second circuit board 12b. In this case, when the circuit board is designed as one circuit board without dividing the circuit board as in the present invention, and when the circuit board is divided, the circuit boards are arranged in parallel in the same direction. According to the present invention, it is only necessary to produce two identical circuits, that is, half the circuit design is sufficient, so that the development period and labor of the circuit board can be reduced. Moreover, since the size of one circuit board is also halved, the development period and labor can be further reduced. As another effect of halving the size of one circuit board, the processing accuracy of wiring can be increased, the degree of warping of the board can be suppressed, and the yield of products can be improved. . Furthermore, since the first circuit board 12a and the second circuit board 12b are the same circuit, occurrence of an electrical characteristic difference can be suppressed. Accordingly, the development cost and the manufacturing cost can be reduced by improving the yield of the circuit board, shortening the development period, and reducing the number of tests.

  Next, an inspection apparatus according to the second embodiment of the present invention will be described. FIG. 3 shows a schematic plan view of an inspection apparatus according to the second embodiment of the present invention. In FIG. 3, the same elements as those in FIGS. 1 and 2 are denoted by the same reference numerals. The schematic cross-sectional view is the same as FIG. In the first embodiment, the circuit of the first circuit board 12a and the circuit of the second circuit board 12b are line symmetric with respect to the (virtual) line X between the first circuit board 12a and the second circuit board 12b. However, in the inspection apparatus 20 according to the second embodiment, the circuit of the first circuit board 12a and the circuit of the second circuit board 22b are in the first circuit board 12a on the planar projection as shown in FIG. It is point-symmetric with respect to the (virtual) point Y between the first circuit board 22b and the second circuit board 22b (one is rotated 180 ° from the other). Also by this, the same effect as the first embodiment can be obtained.

  Other aspects of the second embodiment are the same as those of the first embodiment.

  Next, an inspection apparatus according to the third embodiment of the present invention will be described. FIG. 4 shows a schematic plan view of an inspection apparatus according to the third embodiment of the present invention. 4, the same elements as those in FIGS. 1 to 3 are denoted by the same reference numerals. The schematic cross-sectional view is the same as FIG. In the third embodiment, the first circuit unit is not formed on at least one of the plurality of circuit boards.

  As in the first embodiment, the inspection apparatus 30 includes at least one socket 11, a plurality of circuit boards 32 a and 12 b having a circuit (wiring) 14 for inspecting the inspection target, and signals to the inspection target. And a tester head 13 for supplying. In the form shown in FIG. 4, a first circuit board 32a and a second circuit board 12b are shown as a plurality of circuit boards.

  The inspection apparatus 30 is the same as the first embodiment in that it does not have a board corresponding to a performance board in addition to the circuit boards 32a and 22b. The difference from the first embodiment is that the first circuit board 32a does not have a socket and a first circuit unit. The first circuit board 32a has a part of the second circuit part, and the second circuit board 22b has a remaining part of the second circuit part. One performance board is formed in the same manner as in the first embodiment by electrically connecting a part of the second circuit part of the first circuit board 32a and the remaining part of the second circuit part of the second circuit board 22b. A second circuit unit having a function corresponding to the above is obtained.

  The second circuit board 12b having the socket 11 is preferably configured to be replaceable for each inspection target. In the inspection object 30, the first circuit board 32a not having the first circuit portion can be used regardless of the inspection object. When inspecting different types of objects to be inspected, only the second circuit board 12b having the first circuit portion needs to be replaced. As a result, a versatile inspection apparatus can be realized, and simplification of the apparatus can be realized.

  In addition, according to the present embodiment, a circuit board for an inspection target that has been developed and produced (for example, one corresponding to the first circuit board 12a in the first embodiment) is used as the first circuit board 32a in the present embodiment. (In this case, the first circuit board 32a has a socket and a first circuit portion that do not substantially function). Thereby, the manufacturing cost of the first circuit board 32a can be reduced, and the disposal cost can be reduced by reusing the circuit board.

  Other aspects of the third embodiment are the same as in the first embodiment.

  Although the inspection apparatus of the present invention has been described based on the above embodiment, the present invention is not limited to the above embodiment, but is within the scope of the present invention and based on the basic technical idea of the present invention. It cannot be overemphasized that various deformation | transformation, a change, and improvement with respect to a form can be included. Further, various combinations, substitutions, or selections of various disclosed elements are possible within the scope of the claims of the present invention.

  Further problems, objects, and developments of the present invention will become apparent from the entire disclosure of the present invention including the claims.

  The present invention can be applied to, for example, an apparatus for inspecting a semiconductor device as an object to be inspected.

10, 20, 30 Inspection device 11 Socket 12a, 32a First circuit board 12b, 22b Second circuit board 13 Tester head 14 Circuit (wiring)
15 Cable X Symmetry axis Y Symmetry point

Claims (6)

At least one socket for mounting the object to be inspected;
A plurality of circuit boards for testing the object to be inspected, including the socket;
A tester head that is electrically connected to the plurality of circuit boards and supplies a signal to an object to be inspected,
The plurality of circuit boards are electrically connected to each other,
Each of the circuit boards has a first circuit portion that is an individual circuit for each object to be inspected, and a part of a second circuit portion that is a shared circuit for the object to be inspected,
The inspection apparatus according to claim 1, wherein the part of the second circuit unit in the plurality of circuit boards functions as one performance board by being electrically connected to each other. As the plurality of circuit boards, a first circuit board and a second circuit board are provided,
The inspection apparatus according to claim 1, wherein the circuit of the first circuit board and the circuit of the second circuit board are in a line-symmetric relationship. As the plurality of circuit boards, a first circuit board and a second circuit board are provided,
The inspection apparatus according to claim 1, wherein the circuit of the first circuit board and the circuit of the second circuit board are in a point-symmetric relationship.   The inspection according to any one of claims 1 to 3, wherein in the plurality of circuit boards, the first circuit portion and a part of the second circuit portion are formed in different layers. apparatus. At least one socket for mounting the object to be inspected;
A plurality of circuit boards for testing the object to be inspected;
A tester head that is electrically connected to the plurality of circuit boards and supplies a signal to an object to be inspected,
Among the plurality of circuit boards, some circuit boards have the socket, and the remaining circuit boards do not have the socket.
The plurality of circuit boards are electrically connected to each other,
The circuit board having the socket has a first circuit portion that becomes an individual circuit for each object to be inspected, and a part of a second circuit portion that becomes a shared circuit for the object to be inspected,
The circuit board that does not have the socket has a part of a second circuit part that becomes a shared circuit to be inspected,
The inspection apparatus according to claim 1, wherein the part of the second circuit unit in the plurality of circuit boards functions as one performance board by being electrically connected to each other.   The inspection apparatus according to claim 5, wherein the circuit board having the socket is configured to be replaceable for each inspection target.

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