JP2012217866A - Washing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decide whether a predetermined amount of a liquid agent is accurately supplied into a washing tank.SOLUTION: The washing tank 3 stores a liquid to immerse an object 2 to be washed and a vacuum means 7 sucks and discharges the air in the washing tank 3 to the outside to reduce the pressure in the washing tank 3. A liquid agent supply means 5 is constituted by connecting a liquid agent tank 17 to the washing tank 3 through a liquid agent supply passage 18 and a liquid agent supply valve 19 is provided to the liquid agent supply passage 18. The difference pressure between the inside and outside of the washing tank 3 is utilized by opening the liquid agent supply valve 19 in a state that the pressure in the washing tank 3 is reduced by the vacuum means 7 to supply the liquid agent from the liquid agent tank 17 into the washing tank 3. A flow sensor 20 for detecting the flow of the liquid agent is provided to the liquid agent supply passage 18. The supply abnormality of the liquid agent into the washing tank 3 is decided on the basis of the operating output signal to the liquid agent supply valve 19 and the detection signal of the flow sensor 20.

Description

  The present invention relates to a cleaning apparatus that cleans an object to be cleaned including a step of storing a liquid in a cleaning tank, immersing the object to be cleaned, and depressurizing the inside of the cleaning tank.

  As disclosed in Patent Document 1 below, the applicant previously stored the liquid in the cleaning tank, immersed the object to be cleaned, heated the stored liquid to the set temperature, and then reduced the pressure in the cleaning tank. In the state where the stored liquid is boiled, a cleaning apparatus has been proposed in which the outside liquid is introduced into the liquid phase portion in the cleaning tank so that the stored liquid is bumped and the object to be cleaned is cleaned.

JP 2011-5480 A

  In this type of cleaning apparatus, it is necessary that a predetermined amount of a liquid agent such as a cleaning agent is correctly supplied into the cleaning tank. Therefore, the problem to be solved by the present invention is to provide a cleaning device capable of determining whether or not a predetermined amount of liquid has been correctly supplied into the cleaning tank.

  The present invention has been made to solve the above problems, and the invention according to claim 1 is a cleaning tank for storing a liquid and immersing an object to be cleaned, and a gas in the cleaning tank is sucked to the outside. A liquid agent tank is connected to the cleaning tank through a liquid supply passage provided with a liquid supply valve provided with a pressure reducing means for discharging and depressurizing the inside of the cleaning tank, and the pressure inside the cleaning tank is reduced by the pressure reducing means. In this state, the liquid agent supply valve is provided in the liquid agent supply path, and a liquid agent supply means for supplying the liquid agent from the liquid agent tank into the cleaning tank by utilizing the differential pressure inside and outside the cleaning tank. Based on the flow detection means for detecting the flow of the liquid agent, the output signal for operation to the liquid agent supply valve, and the detection signal of the flow detection means, the abnormal supply of the liquid agent into the cleaning tank is determined. And a cleaning device comprising a control means. That.

  According to the first aspect of the present invention, it is possible to determine an abnormal supply of the liquid agent into the cleaning tank from the correspondence between the open / close state of the liquid supply valve and the presence or absence of the flow of the liquid agent into the cleaning tank. .

  Invention of Claim 2 is provided with the pressure sensor which detects the pressure in the said washing tank, The said control means, The operation output signal to the said liquid supply valve, The detection signal of the said flow detection means, The cleaning apparatus according to claim 1, wherein an abnormality in supply of the liquid agent into the cleaning tank is determined based on a detection signal of a pressure sensor.

  According to the second aspect of the present invention, from the correspondence relationship between the open / closed state of the liquid supply valve, the presence / absence of the flow of the liquid agent into the cleaning tank, and the presence / absence of a pressure increase in the cleaning tank above a predetermined level, It is possible to determine the supply abnormality of the liquid.

  According to a third aspect of the present invention, the liquid supply valve is composed of a three-way valve, and the three-way valve communicates the liquid supply path from the liquid agent tank to the three-way valve with the cleaning tank, Switching the liquid agent supply path from the liquid agent tank to the three-way valve to a second position communicating with the atmosphere, the control means that the liquid agent has flowed with the three-way valve in the first position. If the flow detection means detects that the liquid agent has flown in a state where the detection means does not detect or the three-way valve is in the second position, it is determined that the liquid agent is abnormally supplied into the cleaning tank. The cleaning apparatus according to claim 1 or 2.

  According to the invention described in claim 3, by using a three-way valve as the liquid supply valve, it is possible to prevent biting of foreign substances and to reduce the abnormal opening and closing of the liquid supply valve as compared with the case where a two-way valve is used. be able to. Further, it is possible to determine an abnormality in the supply of the liquid agent into the cleaning tank from the correspondence between the open / closed state of the three-way valve and the presence or absence of the flow of the liquid agent into the cleaning tank.

  The invention according to claim 4 includes a pressure sensor for detecting the pressure in the cleaning tank, and the liquid supply valve is constituted by a three-way valve, and the three-way valve is a liquid agent from the liquid agent tank to the three-way valve. The control means switches between a first position that communicates the supply path with the cleaning tank and a second position that communicates the liquid agent supply path from the liquid agent tank to the three-way valve with the atmosphere, and the control means switches the three-way valve to the first position. The flow detection means detects that the liquid has flowed in the position, but the pressure sensor detects a pressure increase in the cleaning tank above a predetermined level, or the three-way valve is set to the second position. In the state, the flow detection means does not detect that the liquid agent has flowed, but if the pressure sensor detects a pressure increase in the cleaning tank that is equal to or higher than a predetermined level, it is determined that the supply of liquid liquid to the cleaning tank is abnormal. Any of claims 1 to 3 characterized in that Or a cleaning apparatus according to item 1.

  According to the fourth aspect of the present invention, by using a three-way valve as the liquid supply valve, it is possible to prevent the entry of foreign substances and to reduce the abnormal opening and closing of the liquid supply valve as compared with the case where a two-way valve is used. be able to. Also, the abnormal supply of the liquid agent into the cleaning tank is determined from the correspondence between the open / closed state of the three-way valve, the presence or absence of the flow of the liquid agent in the cleaning tank, and the presence or absence of a pressure increase in the cleaning tank. be able to.

  The invention according to claim 5 includes a liquid level detector that detects a liquid level of the liquid agent in the liquid agent tank, and the control means uses the liquid level detector to lower the liquid level in the liquid agent tank than set. When this is detected, the operation start is disabled, and the cleaning device according to any one of claims 1 to 4.

  According to the fifth aspect of the present invention, in consideration of the liquid level in the liquid agent tank, when the liquid level is lower than the set value, the operation start is disabled, thereby preventing the cleaning failure.

  Furthermore, the invention according to claim 6 includes a pressure sensor that detects a pressure in the cleaning tank, and a liquid level detector that detects a liquid level of the liquid agent in the liquid agent tank, and the control unit includes the control unit, Based on the output signal for operation to the liquid supply valve, the detection signal of the flow detection means, the detection signal of the pressure sensor, and the detection signal of the liquid level detector, the liquid supply valve, the flow detection means, 6. The cleaning apparatus according to claim 1, wherein abnormality of the liquid level detector is determined.

  According to the sixth aspect of the present invention, it is possible to determine the abnormality of the liquid supply valve, the flow detecting means, and the liquid level detector, and it is possible to indicate the maintenance location.

  According to the present invention, it is possible to determine whether or not a predetermined amount of liquid has been correctly supplied into the cleaning tank.

BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic which shows one Example of the washing | cleaning apparatus of this invention, and shows a part in cross section. It is a figure which shows the supply method of the liquid agent in a washing tank, and the determination method of failure of a liquid level detector, a liquid agent supply valve, and a flow sensor. It is a figure which shows the modification of the washing | cleaning apparatus of FIG. 1, and has abbreviate | omitted and shown structures other than a washing tank and a liquid supply means.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view showing an embodiment of the cleaning apparatus 1 of the present invention, and a part thereof is shown in cross section.

  The cleaning apparatus 1 of the present embodiment includes a cleaning tank 3 in which a liquid is stored and an object to be cleaned 2 is immersed, a water supply means 4 into the cleaning tank 3, a liquid supply means 5 into the cleaning tank 3, A heating means 6 for heating the stored liquid in the cleaning tank 3, a decompression means 7 for sucking and discharging the gas in the cleaning tank 3 to the outside, and depressurizing the inside of the cleaning tank 3; Liquid phase air supply means 8 for introducing outside air into the liquid phase portion, gas phase air supply means 9 for introducing outside air into the gas phase portion in the depressurized cleaning tank 3, and control for controlling these means 4-9. Means (not shown).

  The article to be cleaned 2 is an article to be cleaned, and is, for example, a medical instrument, an electronic component, or a mechanical component. The term “cleaning” includes not only literal cleaning but also rinsing and decontamination.

  The cleaning tank 3 is a hollow container that can withstand the decompression of the internal space. The cleaning tank 3 includes a cleaning tank body 10 that opens upward and has a hollow portion, and a door 11 that opens and closes the opening of the cleaning tank body 10. When the door 11 is closed, the gap between the cleaning tank body 10 and the door 11 is sealed with the packing 12.

  The cleaning tank 3 is provided with a pressure sensor 13 and a temperature sensor 14. The pressure sensor 13 detects the pressure of the gas phase part in the cleaning tank 3, and the temperature sensor 14 detects the temperature of the liquid phase part in the cleaning tank 3.

  The cleaning tank 3 is supplied with liquid and stored. The type of the liquid is not particularly limited, but is made by mixing the liquid agent supplied by the liquid agent supply unit 5 into the water supplied by the water supply unit 4 (may be pure water or soft water). The liquid agent is not particularly limited, and is, for example, a cleaning agent, an anticorrosive agent, a rust inhibitor, or a neutralizer.

  The water supply means 4 supplies water into the cleaning tank 3. The water supply means 4 of the present embodiment is configured by connecting a water supply path 15 from a water supply source (not shown) to the cleaning tank 3. A water supply valve 16 is provided in the water supply path 15, and a water supply pump is appropriately installed on the upstream side of the water supply valve 16 according to the water pressure from the water supply source. In that case, the presence or absence of the operation of the water supply pump may be interlocked with the opening and closing of the water supply valve 16. In any case, when the water supply valve 16 is opened, water is supplied into the cleaning tank 3, and when a desired amount of water is stored in the cleaning tank 3, the water supply valve 16 is closed.

  The liquid supply means 5 supplies the liquid agent into the cleaning tank 3. The liquid agent supply means 5 of the present embodiment is configured by connecting a liquid agent tank 17 to the cleaning tank 3 via a liquid agent supply path 18. A liquid agent supply valve 19 is provided in the liquid agent supply path 18. When the liquid agent supply valve 19 is opened in a state where the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7, the pressure difference inside and outside the cleaning tank 3 is utilized, The liquid agent in the liquid agent tank 17 can be supplied into the cleaning tank 3. The liquid agent supply path 18 is connected to the cleaning tank 3, and the liquid agent is finally mixed into the liquid phase portion in the cleaning tank 3. Note that the inside of the liquid agent tank 17 is open to the atmospheric pressure.

  The liquid agent supply means 5 will be described more specifically. In the present embodiment, the liquid agent supply path 18 is provided with a flow detection means (flow sensor 20), an orifice 21 and a liquid agent supply valve 19 in order from the liquid agent tank 17 side. It has been. By providing the orifice 21, the flow rate at the time of supplying the liquid agent into the cleaning tank 3 can be stabilized, and consequently the injection amount of the liquid agent into the cleaning tank 3 is adjusted by the opening time of the liquid agent supply valve 19. be able to.

  The flow detection means is means for detecting whether or not the liquid agent has flowed above a predetermined flow rate, and may be a flow meter, but in this embodiment, the flow sensor 20 is used. The liquid agent supply valve 19 is configured by a three-way valve that opens and closes so as to switch between the liquid agent supply path 18 from the liquid agent tank 17 and communication with the cleaning tank 3 or opening to the atmosphere. That is, the three-way valve (19) includes a first position where the liquid agent supply path 18 from the liquid agent tank 17 to the three-way valve (19) communicates with the cleaning tank 3 and the atmosphere opening side is closed, and The liquid supply path 18 to the valve (19) is communicated with the atmosphere to switch to the second position where the cleaning tank 3 side is closed.

  The base end portion of the liquid agent supply path 18 is inserted into the liquid agent tank 17 and opens near the bottom of the liquid agent tank 17. Further, a check valve 23 is provided in the liquid supply path 18 upstream of the flow sensor 20 (on the liquid agent tank 17 side). This check valve 23 prevents the backflow of the liquid from the cleaning tank 3 side to the liquid agent tank 17 side.

  The liquid tank 17 is provided with a liquid level detector 24, which can detect that the liquid tank 17 is at a low liquid level over a predetermined level. As the liquid level detector 24, for example, a float type sensor is used. However, the sensor is not limited thereto, and may be a sensor using electrical conductivity or optics, for example. And the remaining amount of the liquid agent in the liquid agent tank 17 is larger than the amount necessary for the operation of one batch of the cleaning device 1 that performs the batch operation as will be described later. It is good to detect. Thereby, the batch operation once started can be operated to the end without being interrupted by the lack of the liquid agent.

  The heating means 6 warms the stored liquid in the cleaning tank 3. The heating means 6 is not particularly limited in its configuration, and may be, for example, a steam heater, but is an electric heater 25 in this embodiment. The electric heater 25 is disposed at the bottom of the cleaning tank 3.

  The decompression means 7 sucks and discharges the gas in the cleaning tank 3 to the outside to decompress the inside of the cleaning tank 3. Specifically, the decompression unit 7 includes a vacuum generator 26, and the vacuum generator 26 is connected to a gas phase portion in the cleaning tank 3 through an exhaust path 27. The specific structure of the vacuum generator 26 is not particularly limited. Typically, the vacuum generator 26 includes a water-sealed vacuum pump, and a heat exchanger that condenses vapor contained in the gas to be sucked upstream of the vacuum pump. May be further provided.

  The liquid phase air supply means 8 introduces outside air into the liquid phase portion in the cleaning tank 3 whose pressure has been reduced through the liquid phase air supply path 28. In the liquid phase air supply path 28, a filter 29 and a liquid phase air supply valve 30 are provided in order toward the cleaning tank 3. Therefore, when the liquid-phase air supply valve 30 is opened in a state where the inside of the cleaning tank 3 is depressurized, air passing through the filter 29 is stored in the stored liquid in the cleaning tank 3 using the pressure difference inside and outside the cleaning tank 3. Can be introduced.

  By the way, the air from the liquid phase air supply path 28 is introduced into the stored liquid in the cleaning tank 3 through the liquid phase air supply nozzle 31 provided at the bottom of the cleaning tank 3. The liquid-phase air supply nozzle 31 is a pipe disposed laterally at the bottom of the cleaning tank 3. The liquid-phase air supply nozzle 31 is a bottom portion in the cleaning tank 3 but is separated from the bottom surface and is held horizontally. And the liquid phase air supply nozzle 31 is formed with nozzle holes 32, 32,... Opened downward on the peripheral side wall of the pipe at set intervals along the extending direction of the pipe.

  The gas-phase air supply means 9 introduces outside air to the gas-phase portion in the cleaning tank 3 whose pressure has been reduced through the gas-phase air supply path 33. A filter 34 and a gas phase air supply valve 35 are provided in the gas phase air supply path 33 in order toward the cleaning tank 3. Therefore, when the gas-phase air supply valve 35 is opened in a state where the pressure in the cleaning tank 3 is reduced, air through the filter 34 is introduced into the cleaning tank 3 due to the pressure difference inside and outside the cleaning tank 3, and the cleaning tank 3 The pressure inside 3 can be restored. If the gas-phase supply valve 35 is composed of an electromagnetic valve, the pressure in the cleaning tank 3 can be instantaneously restored. If the gas-phase supply valve 35 is composed of an electric valve, the pressure in the cleaning tank 3 is gradually restored. be able to.

  The control means (not shown) is a controller that controls the means 4 to 9 based on the detection signals of the sensors 13, 14, 20, and 24. Specifically, in addition to the water supply valve 16, the liquid agent supply valve 19, the electric heater 25, the vacuum generator 26, the liquid phase air supply valve 30, and the gas phase air supply valve 35, the pressure sensor 13, the temperature sensor 14, and the flow sensor 20. The liquid level detector 24 is connected to a controller. Then, as described below, the controller cleans the article 2 to be cleaned in the cleaning tank 3 according to a predetermined procedure (program). Further, the controller determines whether or not the liquid agent is abnormally introduced into the cleaning tank 3 and determines whether the liquid agent supply valve 19, the flow sensor 20 and the liquid level detector 24 are out of order.

Next, an example of the operation method of the cleaning apparatus 1 of the present embodiment will be described.
First, the article to be cleaned 2 placed in a basket or the like is placed in the cleaning tank 3 and the door 11 of the cleaning tank 3 is closed in an airtight manner. At this time, the water supply valve 16, the liquid phase supply valve 30, and the gas phase supply valve 35 are closed, and the liquid supply valve 19 is in the second position (non-energized state).

  Further, the liquid level detector 24 checks the liquid level in the liquid agent tank 17. When the liquid level detector 24 detects a low liquid level, the controller notifies that fact and requests addition of the liquid agent to the liquid agent tank 17 or replacement of the liquid agent tank 17. Further, as long as the liquid level detector 24 detects the low liquid level, the controller does not accept the start of operation of the cleaning device 1.

  When the liquid level detector 24 does not detect the low liquid level, first, the water supply means 4 supplies water into the cleaning tank 3 up to a predetermined height so that the article to be cleaned 2 is immersed. When a desired amount of water is stored in the cleaning tank 3, the water supply by the water supply means 4 is stopped. In the present embodiment, the pressure reducing means 7 is operated in the water supply to the cleaning tank 3 by the water supply means 4 so that the pressure in the cleaning tank 3 is reduced.

  Even after the water supply is completed, the operation of the pressure reducing means 7 is continued, and when the pressure in the cleaning tank 3 becomes equal to or lower than the liquid injection pressure, the liquid supply valve 19 is opened (the three-way valve is set to the first position). Thereby, the liquid agent in the liquid agent tank 17 is supplied into the cleaning tank 3. The supply amount of the liquid agent can be adjusted by the time for opening the liquid agent supply valve 19 according to the pressure in the cleaning tank 3.

  When supplying the liquid agent into the cleaning tank 3, the controller determines an abnormal supply of the liquid agent into the cleaning tank 3 based on the operation output signal to the liquid agent supply valve 19 and the detection signal of the flow sensor 20. .

  That is, if the flow sensor 20 detects the flow of the liquid agent in a state where the liquid agent supply valve 19 is in the first position, the liquid agent is normally supplied, but the liquid agent supply valve 19 is in the state of the first position. If the flow sensor 20 does not detect the flow of the liquid agent, the controller determines that there is an abnormality and notifies that fact. For example, an alarm is sounded to stop the operation of the cleaning device 1.

  In addition, it is normal if the liquid agent supply valve 19 is in the second position and the flow sensor 20 does not detect the flow of the liquid agent, but the liquid agent supply valve 19 is in the second position and the flow of the liquid agent is in the flow sensor 20. If detected, the controller determines that there is an abnormality and notifies that fact. For example, an alarm is sounded to stop the operation of the cleaning device 1.

  Furthermore, the controller monitors the pressure in the cleaning tank 3 with the pressure sensor 13 during the supply of the liquid agent into the cleaning tank 3, and if the pressure rises above a predetermined level, the liquid agent is supplied into the cleaning tank 3. It is determined that there is an abnormality and a notification to that effect is given. That is, when the liquid agent in the liquid agent tank 17 is emptied, air is supplied into the cleaning tank 3, so even if the opening time of the liquid agent supply valve 19 is the same, the pressure increase in the cleaning tank 3 becomes large. By detecting this, it can be determined that the liquid supply into the cleaning tank 3 is abnormal.

  FIG. 2 is a diagram showing a determination method for abnormal supply of the liquid agent into the cleaning tank 3 and failure of the liquid level detector 24, the liquid supply valve 19, and the flow sensor 20. Here, the liquid level detector 24 is assumed to be ON when there is a liquid agent and OFF when there is no liquid agent. In addition, the flow sensor 20 is turned on when the liquid agent flows over a predetermined amount.

  The controller includes a detection signal from the liquid level detector 24, an output signal for operation to the liquid agent supply valve 19, a detection signal from the flow sensor 20, and a detection signal from the pressure sensor 13 (cleaning while the liquid agent supply valve 19 is open). In addition to determining whether or not the liquid agent is supplied into the cleaning tank 3, the liquid level detector 24, the liquid agent supply valve 19, and the flow sensor 20 are also determined based on whether or not the pressure in the tank 3 exceeds a predetermined level). . And when it determines with it being abnormal, a controller should just alert | report that and should just require the maintenance of the location which notifies abnormality based on a determination result.

  As shown to (a), when outputting so that the liquid supply valve 19 exists in a 1st position, the flow sensor 20 detects ON, and the pressure sensor 13 detects the pressure rise more than the predetermined in the washing tank 3 Suppose that In this case, the liquid agent in the liquid agent tank 17 is exhausted, and outside air is introduced from the liquid agent tank 17 into the cleaning tank 3. Further, it can be determined that both the liquid level detector 24 and the flow sensor 20 are out of order.

  As shown in (b), when output is made so that the liquid supply valve 19 is in the first position, the flow sensor 20 detects ON, and the pressure sensor 13 detects a pressure increase in the cleaning tank 3 that exceeds a predetermined level. Suppose you didn't. In this case, the liquid agent has been normally charged, and any sensor failure is not recognized.

  As shown in (c), when output is made so that the liquid supply valve 19 is in the first position, the flow sensor 20 detects OFF, and the pressure sensor 13 detects a pressure increase in the cleaning tank 3 that exceeds a predetermined level. Suppose that In this case, the liquid agent in the liquid agent tank 17 is exhausted, and outside air is introduced from the liquid agent tank 17 into the cleaning tank 3. Further, it can be determined that the liquid level detector 24 is out of order.

  As shown in (d), when the liquid supply valve 19 is output so that it is in the first position, the flow sensor 20 detects OFF, and the pressure sensor 13 detects a pressure increase in the cleaning tank 3 that exceeds a predetermined level. Suppose you didn't. In this case, the liquid agent has been normally charged, but the flow sensor 20 is malfunctioning, or the flow sensor 20 is normal but the liquid agent supply valve 19 is abnormal and cannot be opened. Either.

  As shown in (e), when the liquid supply valve 19 is in the second position, it is assumed that the flow sensor 20 detects ON and the pressure sensor 13 detects a pressure increase in the cleaning tank 3 that exceeds a predetermined level. In this case, the liquid supply valve 19 is abnormal and leaks, and outside air is introduced from the liquid agent tank 17 into the cleaning tank 3. Further, it can be determined that the liquid level detector 24 has failed and the flow sensor 20 has also failed.

  As shown in (f), when the liquid supply valve 19 is in the second position, the flow sensor 20 detects ON, and the pressure sensor 13 does not detect a pressure increase in the cleaning tank 3 beyond a predetermined level. . In this case, the liquid supply valve 19 is abnormal and leaks, and since the liquid agent is supplied from the liquid agent tank 17 into the cleaning tank 3, the liquid agent is in an excessive supply state. Further, it can be determined that the flow sensor 20 is out of order.

  As shown in (g), when the liquid supply valve 19 is in the second position, it is assumed that the flow sensor 20 detects OFF and the pressure sensor 13 detects a pressure increase in the cleaning tank 3 that exceeds a predetermined level. In this case, the liquid supply valve 19 is abnormal and leaks, and outside air is introduced from the liquid agent tank 17 into the cleaning tank 3. Further, it can be determined that the liquid level detector 24 is out of order.

  As shown in (h), when the liquid supply valve 19 is in the second position, it is assumed that the flow sensor 20 detects OFF and the pressure sensor 13 does not detect a pressure increase in the cleaning tank 3 beyond a predetermined level. . In this case, the liquid agent is not supplied into the cleaning tank 3 and is normal.

  As shown in (i), as described above, if the liquid level detector 24 detects OFF, the driving operation is not accepted.

  When it is determined that the liquid agent is normally supplied into the cleaning tank 3, the controller then cleans the article 2 to be cleaned. Although the specific method in particular is not ask | required, for example, it is made as follows.

  That is, first, after the liquid agent is charged, the operation of depressurizing the inside of the washing tank 3 to a predetermined pressure and then opening the liquid-phase air supply valve 30 to return the pressure is repeated, whereby the liquid agent is stirred into the stored water in the washing tank 3. It is preferable to aim at. At this time, each pressure reduction is sufficient at a pressure that does not boil the liquid stored in the cleaning tank 3, and each return pressure need not be returned to the atmospheric pressure, and may be a pressure lower than the atmospheric pressure.

  After that, the warming means 6 warms the stored liquid in the cleaning tank 3 to a set temperature, and the decompression means 7 decompresses the cleaning tank 3 to boil the stored liquid. With the evacuation continued, the liquid phase air supply means 8 introduces the outside air into the liquid phase portion in the cleaning tank 3 by utilizing the pressure difference inside and outside the cleaning tank 3. As a result, the stored liquid can be bumped, and the stored liquid can be greatly swung by the explosive ejection of the stored liquid and the subsequent drop, and the object to be cleaned 2 can be effectively cleaned. Thereafter, the stored liquid in the cleaning tank 3 is again heated to the set temperature, and it is preferable to repeat introduction of outside air to the liquid phase part in the cleaning tank 3 after the pressure in the cleaning tank 3 is reduced (liquid phase air supply pulse). control).

  Alternatively, after the stored liquid in the washing tank 3 is heated to the set temperature by the heating means 6, the decompression means 7 continues to exhaust from the washing tank 3 until the predetermined end condition is satisfied, In the process of lowering the pressure, during the boiling of the stored liquid due to this reduced pressure, the gas-phase air supply means 9 may repeatedly return the pressure in the cleaning tank 3 instantaneously until the boiling of the stored liquid stops. Phase air supply pulse control).

  Alternatively, the above-described gas-phase air supply pulse control and liquid-phase air supply pulse control are executed in a desired order, and the decompression and return pressure in the cleaning tank 3 and bubbling (air supply to the liquid-phase part) are appropriately combined. Thus, the object to be cleaned 2 may be cleaned.

The cleaning device 1 of the present invention is not limited to the configuration of the above embodiment, and can be changed as appropriate.
In the case where the cleaning apparatus 1 is configured to rinse the article to be cleaned 2 after cleaning, the cleaning apparatus 1 is provided with two or more liquid supply means 5, one of which supplies a cleaning agent, and the other is a rinsing agent (anticorrosive). Alternatively, it may be used as a means for supplying a liquid agent other than the anticorrosive agent, and may be properly used according to washing or rinsing or other processes. Specifically, FIG. 3 is a view showing a modified example of the liquid supply means 5 in the embodiment, and the configuration other than the liquid supply means 5 is omitted. In the case of this figure, the cleaning device 1 includes a first liquid supply unit 5A and a second liquid supply unit 5B. The configuration of each of the liquid supply means 5A and 5B is the same as that of the above-described embodiment. The cleaning agent is put in the liquid agent tank 17A of the first liquid supply means 5A, and the liquid agent tank 17B of the second liquid supply means 5B is rinsed. The agent is put. Accordingly, when supplying the cleaning agent into the cleaning tank 3, the liquid supply valve 19A of the first liquid supply unit 5A may be set to the first position, and in order to supply the rinse agent into the cleaning tank 3, The liquid supply valve 19B of the second liquid supply means 5B may be set to the first position. The other configuration is as described in the above embodiment.

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Object to be cleaned 3 Cleaning tank 4 Water supply means 5 Liquid supply means 6 Heating means 7 Depressurization means 8 Liquid phase supply means 9 Gas phase supply means 13 Pressure sensor 14 Temperature sensor 17 Liquid agent tank 18 Liquid supply path 19 Liquid supply valve (3-way valve)
20 Flow sensor (flow detection means)
24 Liquid level detector 26 Vacuum generator

Claims (6)

A cleaning tank for storing liquid and immersing an object to be cleaned;
Vacuuming means for sucking and discharging the gas in the cleaning tank to the outside, and reducing the pressure in the cleaning tank;
The liquid tank is connected to the cleaning tank through a liquid supply path provided with a liquid supply valve, and the cleaning tank is opened by opening the liquid supply valve in a state where the pressure in the cleaning tank is reduced by the pressure reducing means. A liquid supply means for supplying the liquid agent from the liquid agent tank into the cleaning tank using a pressure difference inside and outside
A flow detection means provided in the liquid supply path for detecting the flow of the liquid;
A cleaning apparatus comprising: a control unit that determines an abnormal supply of the liquid agent into the cleaning tank based on an operation output signal to the liquid agent supply valve and a detection signal of the flow detection unit. A pressure sensor for detecting the pressure in the cleaning tank;
The control means determines an abnormal supply of the liquid agent into the cleaning tank based on an operation output signal to the liquid agent supply valve, a detection signal of the flow detection means, and a detection signal of the pressure sensor. The cleaning apparatus according to claim 1. The liquid supply valve is composed of a three-way valve,
The three-way valve has a first position where the liquid agent supply path from the liquid agent tank to the three-way valve communicates with the cleaning tank, and a second position where the liquid agent supply path from the liquid agent tank to the three-way valve communicates with the atmosphere. Switch
In the state where the three-way valve is in the first position, the control means does not detect the flow of the liquid agent, or the liquid agent flows in the state where the three-way valve is in the second position. 3. The cleaning apparatus according to claim 1, wherein when the flow detection unit detects this, it is determined that the supply of liquid agent into the cleaning tank is abnormal. A pressure sensor for detecting the pressure in the cleaning tank;
The liquid supply valve is composed of a three-way valve,
The three-way valve has a first position where the liquid agent supply path from the liquid agent tank to the three-way valve communicates with the cleaning tank, and a second position where the liquid agent supply path from the liquid agent tank to the three-way valve communicates with the atmosphere. Switch
The control means detects that the liquid agent has flowed with the three-way valve in the first position, but the pressure sensor detects an increase in pressure in the cleaning tank above a predetermined level. In the state where the three-way valve is in the second position, the flow detection means does not detect that the liquid has flowed, but if the pressure sensor detects an increase in pressure within the cleaning tank, the cleaning is performed. It determines with the supply abnormality of the liquid agent in a tank. The washing | cleaning apparatus of any one of Claims 1-3 characterized by the above-mentioned. A liquid level detector for detecting the liquid level of the liquid agent in the liquid agent tank;
The said control means makes an operation start impossible, if it detects that the liquid level in the said liquid agent tank is lower than setting by the said liquid level detector. Cleaning equipment. A pressure sensor for detecting the pressure in the cleaning tank;
A liquid level detector for detecting the liquid level of the liquid agent in the liquid agent tank,
The control means is based on the operation output signal to the liquid supply valve, the detection signal of the flow detection means, the detection signal of the pressure sensor, and the detection signal of the liquid level detector. An abnormality in the flow detection means and the liquid level detector is determined. The cleaning apparatus according to any one of claims 1 to 5.

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