JP2012210053A5 - - Google Patents

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Publication number
JP2012210053A5
JP2012210053A5 JP2011073560A JP2011073560A JP2012210053A5 JP 2012210053 A5 JP2012210053 A5 JP 2012210053A5 JP 2011073560 A JP2011073560 A JP 2011073560A JP 2011073560 A JP2011073560 A JP 2011073560A JP 2012210053 A5 JP2012210053 A5 JP 2012210053A5
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
length
actuator according
protrusion
imaginary line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2011073560A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012210053A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011073560A priority Critical patent/JP2012210053A/ja
Priority claimed from JP2011073560A external-priority patent/JP2012210053A/ja
Publication of JP2012210053A publication Critical patent/JP2012210053A/ja
Publication of JP2012210053A5 publication Critical patent/JP2012210053A5/ja
Withdrawn legal-status Critical Current

Links

JP2011073560A 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド Withdrawn JP2012210053A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011073560A JP2012210053A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011073560A JP2012210053A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Publications (2)

Publication Number Publication Date
JP2012210053A JP2012210053A (ja) 2012-10-25
JP2012210053A5 true JP2012210053A5 (cg-RX-API-DMAC10.html) 2014-04-03

Family

ID=47189360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011073560A Withdrawn JP2012210053A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Country Status (1)

Country Link
JP (1) JP2012210053A (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5978907B2 (ja) * 2012-10-12 2016-08-24 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
KR102177156B1 (ko) 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
JP6269222B2 (ja) * 2014-03-20 2018-01-31 セイコーエプソン株式会社 圧電モーター
JP7314713B2 (ja) 2019-08-21 2023-07-26 セイコーエプソン株式会社 圧電駆動装置およびロボット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001286167A (ja) * 2000-03-30 2001-10-12 Seiko Epson Corp 圧電アクチュエータの調整方法および圧電アクチュエータ
JP2005237102A (ja) * 2004-02-19 2005-09-02 Seiko Epson Corp 圧電アクチュエータ、時計及び電子機器
JP4218666B2 (ja) * 2005-07-21 2009-02-04 セイコーエプソン株式会社 圧電アクチュエータ、および電子機器

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