JP2012210049A5 - - Google Patents

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Publication number
JP2012210049A5
JP2012210049A5 JP2011073556A JP2011073556A JP2012210049A5 JP 2012210049 A5 JP2012210049 A5 JP 2012210049A5 JP 2011073556 A JP2011073556 A JP 2011073556A JP 2011073556 A JP2011073556 A JP 2011073556A JP 2012210049 A5 JP2012210049 A5 JP 2012210049A5
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JP
Japan
Prior art keywords
piezoelectric actuator
actuator according
piezoelectric
plan
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2011073556A
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English (en)
Japanese (ja)
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JP2012210049A (ja
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Publication date
Application filed filed Critical
Priority to JP2011073556A priority Critical patent/JP2012210049A/ja
Priority claimed from JP2011073556A external-priority patent/JP2012210049A/ja
Publication of JP2012210049A publication Critical patent/JP2012210049A/ja
Publication of JP2012210049A5 publication Critical patent/JP2012210049A5/ja
Withdrawn legal-status Critical Current

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JP2011073556A 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド Withdrawn JP2012210049A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011073556A JP2012210049A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011073556A JP2012210049A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Publications (2)

Publication Number Publication Date
JP2012210049A JP2012210049A (ja) 2012-10-25
JP2012210049A5 true JP2012210049A5 (enExample) 2014-04-03

Family

ID=47189357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011073556A Withdrawn JP2012210049A (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

Country Status (1)

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JP (1) JP2012210049A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102177156B1 (ko) 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
JP2015211604A (ja) * 2014-04-30 2015-11-24 セイコーエプソン株式会社 圧電アクチュエーター
CN106877733B (zh) 2015-12-03 2020-12-04 精工爱普生株式会社 压电驱动装置、马达、机器人、以及泵
JP2017139831A (ja) * 2016-02-01 2017-08-10 セイコーエプソン株式会社 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド、及び送液ポンプ
JP2018019529A (ja) 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09285155A (ja) * 1996-04-12 1997-10-31 Nikon Corp 振動アクチュエータ
JP2006223078A (ja) * 2005-02-14 2006-08-24 Denso Corp 回転電機
JP5041143B2 (ja) * 2007-07-06 2012-10-03 セイコーエプソン株式会社 超音波モータおよび電子機器
JP2009136939A (ja) * 2007-12-04 2009-06-25 Toyota Industries Corp ロボットハンド
JP2009232622A (ja) * 2008-03-24 2009-10-08 Nikon Corp 振動アクチュエータ、レンズ鏡筒、カメラ
JP4814286B2 (ja) * 2008-06-30 2011-11-16 ゲイツ・ユニッタ・アジア株式会社 寿命予知可能なタイミングベルト及びその製造方法
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計

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