JP2012195918A - 圧電デバイス - Google Patents
圧電デバイス Download PDFInfo
- Publication number
- JP2012195918A JP2012195918A JP2011060406A JP2011060406A JP2012195918A JP 2012195918 A JP2012195918 A JP 2012195918A JP 2011060406 A JP2011060406 A JP 2011060406A JP 2011060406 A JP2011060406 A JP 2011060406A JP 2012195918 A JP2012195918 A JP 2012195918A
- Authority
- JP
- Japan
- Prior art keywords
- frame
- piezoelectric
- crystal
- end surface
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims abstract description 79
- 230000005284 excitation Effects 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims description 66
- 239000002184 metal Substances 0.000 claims description 66
- 230000005496 eutectics Effects 0.000 claims description 47
- 239000011521 glass Substances 0.000 claims description 43
- 238000002844 melting Methods 0.000 claims description 32
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000009719 polyimide resin Substances 0.000 claims description 5
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 160
- 230000008018 melting Effects 0.000 description 23
- 239000010453 quartz Substances 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000011651 chromium Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 229910052720 vanadium Inorganic materials 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 2
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 150000003681 vanadium Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060406A JP2012195918A (ja) | 2011-03-18 | 2011-03-18 | 圧電デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060406A JP2012195918A (ja) | 2011-03-18 | 2011-03-18 | 圧電デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012195918A true JP2012195918A (ja) | 2012-10-11 |
| JP2012195918A5 JP2012195918A5 (enrdf_load_stackoverflow) | 2014-04-17 |
Family
ID=47087392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011060406A Pending JP2012195918A (ja) | 2011-03-18 | 2011-03-18 | 圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012195918A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016201624A (ja) * | 2015-04-08 | 2016-12-01 | 日本電波工業株式会社 | 圧電デバイス |
| JP2020005281A (ja) * | 2019-08-21 | 2020-01-09 | リバーエレテック株式会社 | 水晶振動子 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006254210A (ja) * | 2005-03-11 | 2006-09-21 | Seiko Epson Corp | 圧電デバイス |
| JP2009060479A (ja) * | 2007-09-03 | 2009-03-19 | Nippon Dempa Kogyo Co Ltd | 水晶デバイス及び水晶デバイスの製造方法 |
| JP2009118223A (ja) * | 2007-11-07 | 2009-05-28 | Epson Toyocom Corp | 圧電デバイス |
-
2011
- 2011-03-18 JP JP2011060406A patent/JP2012195918A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006254210A (ja) * | 2005-03-11 | 2006-09-21 | Seiko Epson Corp | 圧電デバイス |
| JP2009060479A (ja) * | 2007-09-03 | 2009-03-19 | Nippon Dempa Kogyo Co Ltd | 水晶デバイス及び水晶デバイスの製造方法 |
| JP2009118223A (ja) * | 2007-11-07 | 2009-05-28 | Epson Toyocom Corp | 圧電デバイス |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016201624A (ja) * | 2015-04-08 | 2016-12-01 | 日本電波工業株式会社 | 圧電デバイス |
| JP2020005281A (ja) * | 2019-08-21 | 2020-01-09 | リバーエレテック株式会社 | 水晶振動子 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140303 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140303 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141208 |
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| A02 | Decision of refusal |
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