JP2012192506A - Substrate conveyance robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate conveyance robot which is used in vacuum processing equipment, in which the joint portion of a robot arm includes a journaling hole formed at one arm member and vertically put through, a bearing mounted in the journaling hole, and a spindle fixed to the other arm and inserted into the bearing, and which can prevent contamination in the vacuum processing equipment caused by dust generated at the bearing.SOLUTION: A cover 7 covering a journaling hole 51 from below is detachably fixed to the lower surface of one arm member 31. A spindle 53 has an upper shaft 53a projected to the upper part of the other arm member 32, and when a cylindrical portion 54 mounted with an upper bearing 55 into which the upper shaft 53a is inserted is provided at one arm member 31, a flange 57a having a rising portion 57b at the outer periphery is formed at the lower end of a collar 57 interposed between the inner ring of the upper bearing 55 and the other arm member 32.

Description

  The present invention relates to a substrate transfer robot used for transferring a substrate in a vacuum processing apparatus.

  2. Description of the Related Art Conventionally, as this type of substrate transfer robot, one in which a hand for supporting a substrate is connected to the tip of an arm that can bend and stretch on a horizontal plane having a joint portion in the middle is known (for example, see Patent Document 1). The joint portion generally includes a shaft support hole having a vertical axis formed on one of the two arm members connected by the joint portion, a bearing attached to the shaft support hole, and the other And a support shaft having a vertical axis fixed to the arm member. The support shaft is inserted into the bearing from above, and one arm member and the other arm member can be freely rotated via the support shaft and the bearing. It is comprised so that it may connect.

  By the way, in order to prevent the play of the joint due to the wear of the bearing, it is necessary to replace the bearing periodically. Here, when the shaft support hole has a bag hole shape with the lower end closed, it becomes difficult to attach and detach the bearing. On the other hand, if the shaft support hole is formed so as to penetrate the one arm member in the up-down direction, the bearing can be easily attached and detached, and the maintainability is improved.

  However, this has been found to cause the following problems. That is, particles generated by dust generation from the bearing fall from the lower end of the shaft support hole due to gravity, and the inside of the vacuum processing apparatus is soiled.

JP 2009-18393 A

  In view of the above, an object of the present invention is to provide a substrate transfer robot capable of preventing contamination in a vacuum processing apparatus due to particles generated by dust generation at a bearing provided at a joint.

  In order to solve the above-mentioned problems, the present invention is used for transporting a substrate in a vacuum processing apparatus in which a hand for supporting a substrate is connected to the tip of an arm that can be bent and extended on a horizontal plane having a joint in the middle. The joint portion is mounted on the shaft support hole and the shaft support hole having the vertical axis formed on one arm member of the two arm members connected by the joint portion. A bearing and a support shaft having a vertical axis fixed to the other arm member; the support shaft is inserted into the bearing from above, and the one arm member and the other arm member are connected to the support shaft and the bearing; The shaft support hole is formed so as to penetrate through one arm member in the vertical direction, and the shaft support hole is formed on the lower surface of the one arm member from below. Cover is removable Characterized in that it is attached.

  According to the present invention, even if the shaft support hole is a through-hole in the vertical direction, the cover prevents the particles generated by dust generation from the bearing from falling from the lower end of the shaft support hole, and the particles in the vacuum processing apparatus It can prevent fouling. Further, since the cover is detachable from one arm member, the bearing can be easily attached to and detached from the shaft support hole by removing the cover, and maintenance is not impaired.

  By the way, the one arm member is provided with a cylinder portion facing above the shaft support hole with a gap for receiving the other arm member, and an upper bearing is mounted on the inner periphery of the cylinder portion, and the support shaft is provided. Has an upper shaft portion that protrudes above the other arm member and is inserted into the upper bearing, and the joint portion is configured to support both ends of the support shaft by the bearing mounted on the shaft support hole and the upper bearing. Sometimes. In this case, if the particles generated by the dust generation at the upper bearing fall from the cylindrical portion, the inside of the vacuum processing apparatus is soiled.

  Here, an upper collar interposed between the inner ring of the upper bearing and the other arm member is extrapolated to the upper shaft portion. In the present invention, a flange portion extending radially outward is formed at the lower end of the upper collar, and a rising portion that is bent upward and inserted into the cylindrical portion from below is formed on the outer periphery of the flange portion. It is desirable. According to this, particles generated by dust generation at the upper bearing can be captured by the flange portion. Therefore, it is possible to prevent the particles from falling from the cylindrical portion by using the upper collar, and a dedicated member for preventing the drop is unnecessary, which is rational.

The top view of a vacuum processing apparatus provided with the substrate conveyance robot of embodiment of this invention. The top view of the board | substrate conveyance robot of embodiment. The side view of the board | substrate conveyance robot of embodiment. The expanded sectional view cut | disconnected by the IV-IV line of FIG. The expanded sectional view cut | disconnected by the VV line | wire of FIG.

  FIG. 1 shows a vacuum processing apparatus that performs various processes on the substrate S. The vacuum processing apparatus includes a central transfer chamber A, a carry-in chamber B, a carry-out chamber C, and a plurality of process chambers D arranged around the transfer chamber A. In the transfer chamber A, the substrate transfer robot 1 according to the embodiment of the present invention is installed, and the robot 1 transfers the substrate S from the loading chamber B to the unloading chamber C via the plurality of processing chambers D. .

As shown in FIGS. 2 and 3, the substrate transfer robot 1 includes a rotary shaft 2 that is long in the vertical direction, a first and second pair of arms 3 ₁ and 3 _2, and a hand 4 that supports the substrate S. I have. The rotating shaft 2 includes an inner shaft 21 and a cylindrical outer shaft 22 that is extrapolated to the inner shaft 21. The inner shaft 21 and the outer shaft 22 are rotationally driven by different motors (not shown).

First and second ₂ each arm ₃ 1, ₃ of the drive arm member ₃₁ 1, 31 ₂ and the driven arm members ₃₂ 1, 32 ₂ and the joint portion ₃₃ 1, 33 ₂ in the swing in the vertical direction around the axis They are connected freely and bend and stretch on a horizontal plane. The first arm 3 _first driving arm member (hereinafter, a first of the driving arm member) 31 ₁ is connected to the inner shaft 21 at its proximal end, on the same axial line around the inner shaft 21 by the rotation of the inner shaft 21 oscillating Moved. The second arm 3 _second drive arm member 31 ₂ (hereinafter, referred to as a second drive arm member) is connected to the outer shaft 22 at its proximal end, the inner shaft 21 and coaxially around by the rotation of the outer shaft 22 Is swung.

The first arm _{3 first} driven arm member (hereinafter, a first of the driven arm member) 32 ₁ of the front end portion, the second arm _{3 2} driven arm member (hereinafter, referred to as a second follower arm member) 32 ₂ of the front end portion is ₁ and the first drive arm member 31 between the arms angle theta (more precisely between the second drive arm member _312, the inner shaft 21 and the first arm 3 ₁ of the joint portion (hereinafter, referred to as a first joint portion ) 33 ₁ and the line connecting the inner shaft 21 and the second arm 3 ₂ joints (hereinafter, isometric bisector of the angle) between the line connecting the ₂ second called joint) 33 ( The arm 4 is connected to the hand 4 symmetrically with respect to M).

  Here, when the inner shaft 21 and the outer shaft 22 are rotated in opposite directions, the arm-to-arm angle θ changes, and the hand 4 moves linearly along the arm center line M. Further, when the inner shaft 21 and the outer shaft 22 are synchronously rotated in the same direction, the hand 4 turns in the circumferential direction of the rotating shaft 2. Accordingly, by moving the hand 4 linearly toward the chambers B, C, D in a state where the hand 4 is turned to the circumferential position facing the chambers B, C, D, the chambers B, C, D The substrate S can be carried in and out.

Referring to FIG. 4, the first joint part ₃₃₁ is provided with a shaft supporting hole 51 having a vertical axis which is formed in the first distal end of the drive arm member 31 _1, and a bearing 52 mounted on the shaft supporting hole 51 , and a support shaft 53 having a vertical axis fixed to the first driven arm member 32 _1, from above the bearing 52 by inserting the support shaft 53, a first drive arm member 31 ₁ and the first driven arm member and it is configured to rotatably coupled to the 32 ₁ and through the support shaft 53 and the bearing 52.

The first joint portion 33 ₁ is further provided in the first distal end of the drive arm member 31 _1, the cylindrical portion 54 opposed to exist a gap for receiving the first follower arm member 32 ₁ above the shaft supporting hole 51 And an upper bearing 55 attached to the cylindrical portion 54. Shaft 53 has an upper shaft portion 53a to be inserted into the upper bearing 55 and projects into the first upper follower arm member 32 _1. Therefore, the support shaft 53 is supported at both ends by the bearing 52 and the upper bearing 55.

Here, the support shaft 53 is in a state of being inserted into through holes formed in the first base end portion of the follower arm member 32 ₁ is secured to the first driven arm member 32 ₁ by a set screw 53b. In addition, a snap ring 52 a that comes into contact with the upper end surface of the outer ring of the bearing 52 via a disc spring 52 b is attached to the shaft support hole 51, and the inner peripheral surface of the cylindrical portion 54 comes into contact with the lower end surface of the outer ring of the upper bearing 55. A snap ring 55a is attached. Further, the support shaft 53, lower collar 56 is extrapolated to be interposed between the inner ring and the ₁ first driven arm member 32 of the bearing 52, the upper shaft portion 53a, and the inner ring of the upper bearing 55 second upper collar 57 is extrapolated to be interposed between the first driven arm member 32 _1. Further, a stepped portion 53c is formed at the upper end of the upper shaft portion 53a so as to contact the upper end surface of the inner ring of the upper bearing 55. Then, the lower end of the support shaft 53, by screwing a fixing nut 58 that contacts the inner bottom surface of the bearing 52, sandwiching the first follower arm member 32 ₁ between the lower collar 56 and the upper collar 57, the One driven arm member 32 ₁ is pivotally supported in the up-down direction relative to the first drive arm member 31 ₁ .

Referring to FIG. 5, the second joint portion 33 ₂ has a shaft supporting hole 61 having a vertical axis which is formed on the second distal end of the drive arm member _312, a bearing 62 mounted on shaft supporting hole 61 , and a support shaft 63 having an axis in the vertical direction and fixed by screws 63a to the base end lower surface of the second driven arm member 32 _2, by inserting the support shaft 63 from above the bearing 62, the second drive arm member 31 ₂ and are configured to rotatably connected via the second driven arm member 32 ₂ and the support shaft 63 and the bearing 62.

The second drive arm member 31 _2, than the first drive arm member 31 ₁ is located below the second driven arm member 32 _{and second} height to match the first driven arm member 32 ₁ , the second drive arm member ₃₁₂ of the tip portion is formed in the thick portion swollen upward, to form a shaft supporting hole 61 in the thick portion. A pair of bearings 62 and 62 are mounted in the shaft support hole 61 so as to be separated from each other in the vertical direction so that the support rigidity of the support shaft 63 can be secured.

Here, a snap ring 62 a that contacts the upper end surface of the outer ring of the lower bearing 62 via a disc spring 62 b and a snap ring 62 c that contacts the lower end surface of the outer ring of the upper bearing 62 are attached to the shaft support hole 61. It has been. Further, a collar 64 interposed between the inner ring of the upper bearing 62 and the inner ring of the lower bearing 62 is extrapolated on the support shaft 63. Further, a stepped portion 63 b that abuts against the upper end surface of the inner ring of the upper bearing 62 is formed at the upper end portion of the support shaft 63. Then, the lower end of the support shaft 63, by screwing a fixing nut 65 that contacts the inner bottom surface of the lower bearing 62, the second driven arm member 32 ₂ is the vertical direction relative to the second drive arm member 31 ₂ It is supported so as to be fixed.

Here, the first and second respective joint portions ₃₃ 1, 33 ₂ of the shaft supporting hole 51 and 61, as the bearing 52 and 62 can be easily attached and detached, the first and second respective driving arm members 31 ₁ It is formed so as to penetrate the 31 ₂ in the vertical direction. However, in this state, particles generated by dust generation at the bearings 52 and 62 fall from the lower ends of the shaft support holes 51 and 61 due to gravity, and the inside of the vacuum processing apparatus is soiled.

Therefore, in this embodiment, the first and second respective driving arm members 31 _1, 31 ₂ of the tip lower surface, is attached detachably by screws 7a the cover 7 for covering the shaft supporting hole 51, 61 from below .

According to this, the cover 7 can prevent particles from falling from the lower ends of the shaft support holes 51 and 61. Since the substrate transfer robot 1 is placed in a vacuum atmosphere, no airflow is generated around the robot 1 and particles are not scattered on the airflow from the upper ends of the shaft support holes 51 and 61. Therefore, by preventing the particles from falling by the cover 7, the contamination in the vacuum processing apparatus can be prevented. Further, since the cover 7 is detachable from the drive arm member ₃₁ 1, 31 _2, by removing the cover 7, the bearing 52 and 62 can be easily attached to and detached from the shaft supporting hole 51 and 61, damaging the maintainability is Absent.

Incidentally, the first joint portion 33 _1, since an upper bearing 55 mounted on the cylindrical portion 54 provided above the shaft supporting hole 51, the particles produced by the dust on the upper bearing 55 from falling from the cylindrical portion 54 there is a possibility.

  Therefore, in this embodiment, as shown in FIG. 4, a flange portion 57 a that extends radially outward is formed at the lower end of the upper collar 57, bent upward at the outer periphery of the flange portion 57 a, and downward to the cylindrical portion 54. The rising portion 57b to be inserted is formed.

  According to this, particles generated by dust generation at the upper bearing 55 can be captured by the dish-shaped flange portion 57a having the rising portion 57b on the outer periphery. Therefore, it is possible to prevent the particles from falling from the cylindrical portion 54 by using the upper collar 57, and a dedicated member for preventing the drop is unnecessary, which is reasonable. The outer diameter of the rising portion 57b is slightly smaller than the inner diameter of the cylindrical portion 54, and a gap corresponding to the insertion clearance is generated between the outer peripheral surface of the rising portion 57b and the inner peripheral surface of the cylindrical portion 54. Particles rarely fall.

As mentioned above, although embodiment of this invention was described with reference to drawings, this invention is not limited to this. For example, in the above embodiment, the shaft support holes 51 and 61 of the first and _second joint portions 33 ₁ and 33 ₂ are formed in the first and second drive arm members 31 ₁ and 31 ₂ , respectively. the 52 and 63 first and second respective follower arm members ₃₂ 1, 32 ₂ have been fixed, the follower arm members ₃₂ 1, 32 ₂ shaft supporting hole is formed in each drive arm members ₃₁ 1, 31 ₂ It is also possible to fix the support shaft to the shaft. The substrate transfer robot 1 of the above embodiment is a double arm type robot having a pair of arms 3 ₁ and 3 ₂ , but the same applies to a single arm type robot having a single arm that can be bent and extended on a horizontal plane. The present invention can be applied to.

S ... Substrate, 1 ... Substrate transfer robot, 3 ₁ , 3 ₂ ... Arm, 31 ₁ , 31 ₂ ... Drive arm member (one arm member), 32 ₁ , 32 ₂ ... Driven arm member (the other arm member), 33 ₁ , 33 ₂ ... joint part, 4 ... hand, 51, 61 ... shaft support hole, 52, 62 ... bearing, 53, 63 ... support shaft, 53a ... upper shaft part, 54 ... cylindrical part, 55 ... upper bearing, 57 ... Upper collar, 57a ... Flange, 57b ... Rising part, 7 ... Cover.

Claims (2)

A substrate transfer robot used to transfer a substrate in a vacuum processing apparatus, wherein a hand supporting a substrate is connected to the tip of an arm that can be bent and extended on a horizontal plane having a joint portion in the middle,
The joint portion is fixed to the shaft support hole having the vertical axis formed in one of the two arm members connected by the joint portion, the bearing attached to the shaft support hole, and the other arm member. And a support shaft having a vertical axis, and the support shaft is inserted into the bearing from above, so that one arm member and the other arm member are rotatably connected via the support shaft and the bearing. In what is composed of
The shaft support hole is formed so as to penetrate one arm member in the vertical direction, and a cover that covers the shaft support hole from below is detachably attached to the lower surface of the one arm member. . 2. The substrate transfer robot according to claim 1, wherein the one arm member is provided with a cylindrical portion opposed to the first supporting member with a gap for receiving the other arm member above the shaft support hole. An upper bearing is mounted on the support shaft, and the support shaft has an upper shaft portion that protrudes above the other arm member and is inserted into the upper bearing. The upper shaft portion includes an inner ring of the upper bearing and the other arm member. In what extrapolates the upper collar interposed between
A flange portion that extends radially outward is formed at the lower end of the upper collar, and a rising portion that is bent upward and inserted into the cylindrical portion from below is formed on the outer periphery of the flange portion. Item 4. The substrate transfer robot according to Item 1.

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