JP2012191799A5 - 真空処理装置用の端子ユニット及びその製造方法 - Google Patents
真空処理装置用の端子ユニット及びその製造方法 Download PDFInfo
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- JP2012191799A5 JP2012191799A5 JP2011054466A JP2011054466A JP2012191799A5 JP 2012191799 A5 JP2012191799 A5 JP 2012191799A5 JP 2011054466 A JP2011054466 A JP 2011054466A JP 2011054466 A JP2011054466 A JP 2011054466A JP 2012191799 A5 JP2012191799 A5 JP 2012191799A5
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本発明は、真空チャンバの壁面や真空フランジ等の真空隔壁に設けられる真空処理装置用の端子ユニット及びその製造方法に関する。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011054466A JP5695943B2 (ja) | 2011-03-11 | 2011-03-11 | 真空処理装置用の端子ユニット及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011054466A JP5695943B2 (ja) | 2011-03-11 | 2011-03-11 | 真空処理装置用の端子ユニット及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012191799A JP2012191799A (ja) | 2012-10-04 |
| JP2012191799A5 true JP2012191799A5 (ja) | 2014-04-03 |
| JP5695943B2 JP5695943B2 (ja) | 2015-04-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011054466A Active JP5695943B2 (ja) | 2011-03-11 | 2011-03-11 | 真空処理装置用の端子ユニット及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5695943B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113957200A (zh) * | 2021-11-12 | 2022-01-21 | 河北智赛冶金科技有限公司 | 一种电渣炉的真空装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4423893C2 (de) * | 1994-07-07 | 1996-09-05 | Freudenberg Carl Fa | Flachdichtung mit flexibler Leiterplatte |
| JP2000245036A (ja) * | 1999-02-17 | 2000-09-08 | Ishikawajima Harima Heavy Ind Co Ltd | 電線貫通装置 |
| JP2004308761A (ja) * | 2003-04-07 | 2004-11-04 | Uchiyama Mfg Corp | 多機能ガスケット |
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2011
- 2011-03-11 JP JP2011054466A patent/JP5695943B2/ja active Active
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