JP2012191300A5 - - Google Patents

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JP2012191300A5
JP2012191300A5 JP2011051312A JP2011051312A JP2012191300A5 JP 2012191300 A5 JP2012191300 A5 JP 2012191300A5 JP 2011051312 A JP2011051312 A JP 2011051312A JP 2011051312 A JP2011051312 A JP 2011051312A JP 2012191300 A5 JP2012191300 A5 JP 2012191300A5
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axis
piezoelectric
corners
vibration element
element according
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JP2011051312A
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JP2012191300A (en
JP5772082B2 (en
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Priority claimed from JP2011051312A external-priority patent/JP5772082B2/en
Priority to JP2011051312A priority Critical patent/JP5772082B2/en
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Priority to CN201210058926.7A priority patent/CN102684636B/en
Priority to CN2012200836344U priority patent/CN202535316U/en
Priority to US13/416,612 priority patent/US9030078B2/en
Publication of JP2012191300A publication Critical patent/JP2012191300A/en
Publication of JP2012191300A5 publication Critical patent/JP2012191300A5/ja
Priority to US14/682,466 priority patent/US9837982B2/en
Publication of JP5772082B2 publication Critical patent/JP5772082B2/en
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Claims (14)

励振部を有した圧電基板と、前記励振部の対向する両主面に夫々対向配置された各励振電極と、を備えた圧電振動素子であって、
前記圧電基板は、前記励振部より薄い前記励振部の周縁に設けられた周辺部と、を有し、
前記励振部の全ての側面は夫々厚み方向に段差部を有し、
厚さ方向に沿って、前記周辺部から突出している突起部を少なくとも一つ備えていることを特徴とする圧電振動素子。 A piezoelectric vibration element comprising: a piezoelectric substrate having an excitation part; and excitation electrodes respectively disposed opposite to both opposing main surfaces of the excitation part,
The piezoelectric substrate has a peripheral section provided in front Symbol periphery of the thin front Symbol excitation portion from the excitation portion,
All the side surfaces of the excitation unit have stepped portions in the thickness direction,
A piezoelectric vibration element comprising at least one protrusion protruding from the peripheral portion along the thickness direction . 前記圧電基板は、水晶の結晶軸である、電気軸としてのＸ軸と、機械軸としてのＹ軸と、光学軸としてのＺ軸と、からなる直交座標系の前記Ｘ軸を中心として、前記Ｚ軸を前記Ｙ軸の−Ｙ方向へ傾けた軸をＺ’軸とし、前記Ｙ軸を前記Ｚ軸の＋Ｚ方向へ傾けた軸をＹ’軸とし、前記Ｘ軸と前記Ｚ’軸に平行な面で構成され、前記Ｙ’軸に平行な方向を厚みとする水晶基板であり、
前記側面は、前記Ｘ軸と平行な２つの側面、及び前記Ｚ’軸と平行な２つの側面を有していることを特徴とする請求項１に記載の圧電振動素子。 The piezoelectric substrate is centered on the X axis of an orthogonal coordinate system consisting of an X axis as an electric axis, a Y axis as a mechanical axis, and a Z axis as an optical axis, which are crystal axes of quartz. The axis tilted in the -Y direction of the Y axis is the Z 'axis, the axis tilted in the + Z direction of the Z axis is the Y' axis, and is parallel to the X axis and the Z 'axis. A quartz substrate having a thickness in a direction parallel to the Y ′ axis,
The side, front Symbol X-axis parallel to the two sides, and the piezoelectric vibrating element according to claim 1, characterized in that it has the Z 'axis parallel to two aspects. 前記圧電基板は、複数の角隅部を有し、
前記複数の角隅部のうち一部の角隅部には、パッドを有し、
前記突起部は、前記パッドを有する前記角隅部以外の角隅部に設けられていること特徴とする請求項１、又は２に記載の圧電振動素子。 The piezoelectric substrate has a plurality of corners,
In some corners of the plurality of corners, a pad is provided,
The protrusions, the piezoelectric vibrating element according to claim 1 or 2, characterized that provided in the corner portions other than the angle corner portion having a pre-Symbol pad. 前記圧電基板は、複数の角隅部を有し、
前記複数の角隅部のうち一部の角隅部には、パッドを有し、
前記突起部は、前記パッドを有する前記角隅部以外の角隅部にあって、前記Ｚ’軸に沿った端縁に沿って設けられていることを特徴とする請求項２に記載の圧電振動素子。 The piezoelectric substrate has a plurality of corners,
In some corners of the plurality of corners, a pad is provided,
The projections, in the corners other than the angle corner portion having a pre-Symbol pad, to claim 2, characterized in that provided along the edge along the leading Symbol Z 'axis The piezoelectric vibration element as described. 前記圧電基板は、複数の角隅部を有し、
前記複数の角隅部のうち一部の角隅部には、パッドを有し、
前記突起部は、前記パッドを有する前記角隅部以外の角隅部にあって、前記Ｚ’軸に沿った端縁に沿って設けられた第１の突起部分と、該第１の突起部分と連設しており、前記Ｘ軸に沿って設けられている第２の突起部分と、を備えていることを特徴とする請求項２に記載の圧電振動素子。 The piezoelectric substrate has a plurality of corners,
In some corners of the plurality of corners, a pad is provided,
The projections, in the corners other than the angle corner portion having a pre-Symbol pad, a first protruding portion provided along the edge along the leading Symbol Z 'axis, said first of the protruding portion and has continuously provided, the piezoelectric vibrating element according to claim 2, characterized in that it comprises a and a second protruding portion provided along the X axis. 前記突起部は、前記周辺部の表裏主面に夫々備えており、前記表主面側の前記突起部の頂点から前記裏面側の前記突起部の頂点までの厚さに沿った長さは、前記第１部分の厚さと等しいことを特徴とする請求項１乃至５何れかの１項に記載の圧電振動素子。 The protrusions are respectively provided on the front and back main surfaces of the peripheral part, and the length along the thickness from the top of the protrusion on the front main surface side to the top of the protrusion on the back side is: The piezoelectric vibration element according to claim 1, wherein the piezoelectric vibration element has a thickness equal to that of the first portion . 前記圧電基板の前記Ｚ´軸に平行な方向の寸法をＺとし、前記励振部の短辺の寸法をＭｚとし、前記励振部の厚さをｔとするとき、
８≦Ｚ／ｔ≦１１、かつ、０．６≦Ｍｚ／Ｚ≦０．８の関係を満たすことを特徴とする請求項２乃至５の何れか一項に記載の圧電振動素子。 When the dimension in the direction parallel to the Z ′ axis of the piezoelectric substrate is Z, the dimension of the short side of the excitation part is Mz, and the thickness of the excitation part is t,
6. The piezoelectric vibration element according to claim 2, wherein the relationship of 8 ≦ Z / t ≦ 11 and 0.6 ≦ Mz / Z ≦ 0.8 is satisfied. 前記圧電基板の前記Ｘ軸に平行な方向の寸法をＸとするとき、
Ｘ／ｔ≦１７の関係を満たすことを特徴とする請求項２乃至７の何れか一項に記載の圧電振動素子。 When the dimension of the piezoelectric substrate in the direction parallel to the X axis is X,
The piezoelectric vibration element according to claim 2, wherein a relationship of X / t ≦ 17 is satisfied. 請求項１乃至８のうち何れか一項に記載の圧電振動素子と、前記圧電振動素子を収容するパッケージと、を備えたことを特徴とする圧電振動子。   A piezoelectric vibrator comprising: the piezoelectric vibration element according to claim 1; and a package that accommodates the piezoelectric vibration element. 請求項１乃至８のうち何れか一項に記載の圧電振動素子と、該圧電振動素子を駆動する発振回路と、パッケージと、を備えたことを特徴とする圧電発振器。   A piezoelectric oscillator comprising: the piezoelectric vibration element according to claim 1; an oscillation circuit that drives the piezoelectric vibration element; and a package. 請求項９に記載の圧電振動子と、該圧電振動子を駆動する発振回路と、を備えたことを特徴とする圧電発振器。   A piezoelectric oscillator comprising the piezoelectric vibrator according to claim 9 and an oscillation circuit that drives the piezoelectric vibrator. 前記発振回路はＩＣに搭載されていることを特徴とする請求項１０又は１１に記載の圧電発振器。   The piezoelectric oscillator according to claim 10 or 11, wherein the oscillation circuit is mounted on an IC. 請求項１乃至８のうち何れか一項に記載の圧電振動素子と、少なくとも一つ以上の電子部品と、をパッケージに備えたことを特徴とする電子デバイス。   An electronic device comprising: a package comprising the piezoelectric vibration element according to claim 1 and at least one or more electronic components. 請求項１３に記載の電子デバイスにおいて、前記電子部品が、サーミスタ、コンデンサ、リアクタンス素子、及び半導体素子のうちのいずれかであることを特徴とする電子デバイス。 An electronic device according to claim 13, an electronic device to the electronic component, a thermistor, a capacitor, wherein a is any one of reactance elements, and semi-conductor elements.
JP2011051312A 2011-03-09 2011-03-09 Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device Active JP5772082B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011051312A JP5772082B2 (en) 2011-03-09 2011-03-09 Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
CN201210058926.7A CN102684636B (en) 2011-03-09 2012-03-07 Vibrating elements, oscillator, oscillator and electronic equipment
CN2012200836344U CN202535316U (en) 2011-03-09 2012-03-07 Vibrating element, vibrator, oscillator and electronic equipment
US13/416,612 US9030078B2 (en) 2011-03-09 2012-03-09 Vibrating element, vibrator, oscillator, and electronic device
US14/682,466 US9837982B2 (en) 2011-03-09 2015-04-09 Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section

Applications Claiming Priority (1)

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JP2011051312A JP5772082B2 (en) 2011-03-09 2011-03-09 Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device

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JP2012191300A JP2012191300A (en) 2012-10-04
JP2012191300A5 true JP2012191300A5 (en) 2014-04-10
JP5772082B2 JP5772082B2 (en) 2015-09-02

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JP5943186B2 (en) 2012-03-19 2016-06-29 セイコーエプソン株式会社 Vibrating piece, vibrator, electronic device, and electronic equipment
JP5943187B2 (en) 2012-03-21 2016-06-29 セイコーエプソン株式会社 Vibration element, vibrator, electronic device, and electronic apparatus
JP6592906B2 (en) 2015-01-29 2019-10-23 セイコーエプソン株式会社 Vibrating piece, vibrator, vibrating device, oscillator, electronic device, and moving object
JP2017079388A (en) 2015-10-20 2017-04-27 セイコーエプソン株式会社 Piezoelectric vibrator, electronic device and moving body
JP6820690B2 (en) * 2016-08-26 2021-01-27 京セラ株式会社 Manufacturing method of crystal vibrating element
JP6923059B2 (en) * 2018-10-18 2021-08-18 セイコーエプソン株式会社 Vibration devices, electronic devices and mobiles
CN113302838B (en) * 2019-03-27 2024-03-26 株式会社村田制作所 Vibration element, vibrator, and method for manufacturing vibration element

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JP2004200777A (en) * 2002-12-16 2004-07-15 Toyo Commun Equip Co Ltd Piezoelectric substrate of mesa structure, piezoelectric vibration element, piezoelectric vibrator, and piezoelectric oscillator
JP4396336B2 (en) * 2004-03-16 2010-01-13 エプソントヨコム株式会社 Piezoelectric vibration element and piezoelectric vibrator using the same
JP4075893B2 (en) * 2004-05-21 2008-04-16 セイコーエプソン株式会社 Quartz crystal manufacturing method, apparatus and crystal resonator
JP4938366B2 (en) * 2006-06-30 2012-05-23 京セラキンセキ株式会社 Piezoelectric vibrator
JP2008218951A (en) * 2007-03-08 2008-09-18 Epson Toyocom Corp Piezoelectric device with convex vibration piece
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