JP2012114496A5 - - Google Patents
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- JP2012114496A5 JP2012114496A5 JP2010259178A JP2010259178A JP2012114496A5 JP 2012114496 A5 JP2012114496 A5 JP 2012114496A5 JP 2010259178 A JP2010259178 A JP 2010259178A JP 2010259178 A JP2010259178 A JP 2010259178A JP 2012114496 A5 JP2012114496 A5 JP 2012114496A5
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- JP
- Japan
- Prior art keywords
- axis
- piezoelectric
- excitation
- direction parallel
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (4)
前記圧電基板の両主面の振動領域に表裏で重なるように配置された励振電極と、
を含み、
前記圧電基板は、
前記Ｘ軸に平行な方向を長辺とし、前記Ｚ´軸に平行な方向を短辺とする矩形の励振部と、
前記励振部より小さい厚さを有し、前記励振部の周辺に形成された周辺部と、
を有し、
前記励振部は、
第１部分と、
前記第１部分より小さい厚さを有し、前記第１部分の周辺に形成された第２部分と、
を有し、
前記圧電基板の前記Ｚ´軸に平行な方向の寸法をＺとし、前記励振部の短辺の寸法をＭｚとし、前記第１部分の厚さをｔとすると、
８≦Ｚ／ｔ≦１１、かつ、０．６≦Ｍｚ／Ｚ≦０．８の関係を満たす、圧電振動片。 Centering on the X axis of an orthogonal coordinate system consisting of an X axis as an electric axis, a Y axis as a mechanical axis, and a Z axis as an optical axis, which are crystal axes of quartz, the Z axis is the Y axis. The axis tilted in the −Y direction is the Z ′ axis, the Y axis is tilted in the + Z direction of the Z axis as the Y ′ axis, and is configured by planes parallel to the X axis and the Z ′ axis. consists AT-cut quartz substrate having a thickness direction parallel to the Y'-axis, and the piezoelectric substrate to the thickness direction to a direction parallel to the Y'-axis,
Excitation electrodes arranged so as to overlap on both sides of the vibration region of both main surfaces of the piezoelectric substrate;
Including
The piezoelectric substrate is
A rectangular excitation section having a long side in the direction parallel to the X axis and a short side in the direction parallel to the Z ′ axis;
A peripheral portion having a thickness smaller than that of the excitation portion and formed around the excitation portion;
Have
The excitation unit is
A first part;
A second portion having a smaller thickness than the first portion and formed around the first portion;
Have
When the dimension of the piezoelectric substrate in the direction parallel to the Z ′ axis is Z, the dimension of the short side of the excitation part is Mz, and the thickness of the first part is t,
A piezoelectric vibrating piece satisfying a relationship of 8 ≦ Z / t ≦ 11 and 0.6 ≦ Mz / Z ≦ 0.8.
前記圧電基板の前記Ｘ軸に平行な方向の寸法をＸとすると、
Ｘ／ｔ≦１７の関係を満たす、圧電振動片。 In claim 1,
If the dimension of the piezoelectric substrate in the direction parallel to the X axis is X,
A piezoelectric vibrating piece that satisfies a relationship of X / t ≦ 17.
前記励振部は、前記第２部分より小さい厚さを有し、前記第２部分の周辺に形成された第３部分を、さらに有する、圧電振動片。 In claim 1 or 2,
The piezoelectric vibration piece, wherein the excitation unit has a thickness smaller than that of the second part, and further includes a third part formed around the second part.
前記圧電振動片が収容されたパッケージと、
を含む、圧電振動子。 The piezoelectric vibrating piece according to any one of claims 1 to 3,
A package containing the piezoelectric vibrating piece;
Including a piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010259178A JP5505647B2 (en) | 2010-11-19 | 2010-11-19 | Piezoelectric vibrating piece and piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010259178A JP5505647B2 (en) | 2010-11-19 | 2010-11-19 | Piezoelectric vibrating piece and piezoelectric vibrator |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014056354A Division JP5871144B2 (en) | 2014-03-19 | 2014-03-19 | Piezoelectric vibrator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012114496A JP2012114496A (en) | 2012-06-14 |
| JP2012114496A5 true JP2012114496A5 (en) | 2013-09-19 |
| JP5505647B2 JP5505647B2 (en) | 2014-05-28 |
Family
ID=46498281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010259178A Active JP5505647B2 (en) | 2010-11-19 | 2010-11-19 | Piezoelectric vibrating piece and piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5505647B2 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102684636B (en) | 2011-03-09 | 2015-12-16 | 精工爱普生株式会社 | Vibrating elements, oscillator, oscillator and electronic equipment |
| JP5708089B2 (en) | 2011-03-18 | 2015-04-30 | セイコーエプソン株式会社 | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device |
| JP5943186B2 (en) | 2012-03-19 | 2016-06-29 | セイコーエプソン株式会社 | Vibrating piece, vibrator, electronic device, and electronic equipment |
| JP5943187B2 (en) | 2012-03-21 | 2016-06-29 | セイコーエプソン株式会社 | Vibration element, vibrator, electronic device, and electronic apparatus |
| JP6083144B2 (en) * | 2012-07-27 | 2017-02-22 | セイコーエプソン株式会社 | Vibrating piece, vibrating element, vibrator, electronic device, electronic apparatus, moving body, and method of manufacturing vibrating piece |
| JP6119138B2 (en) * | 2012-07-27 | 2017-04-26 | セイコーエプソン株式会社 | Vibrating piece, vibrating element, vibrator, electronic device, electronic apparatus, moving body, and method of manufacturing vibrating piece |
| JP6390836B2 (en) | 2014-07-31 | 2018-09-19 | セイコーエプソン株式会社 | Vibrating piece, vibrator, vibrating device, oscillator, electronic device, and moving object |
| US9503045B2 (en) | 2015-01-19 | 2016-11-22 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, and moving object |
| WO2016121466A1 (en) * | 2015-01-28 | 2016-08-04 | 株式会社村田製作所 | Quartz resonator, method for manufacturing same, and quartz resonator device |
| JP6592906B2 (en) | 2015-01-29 | 2019-10-23 | セイコーエプソン株式会社 | Vibrating piece, vibrator, vibrating device, oscillator, electronic device, and moving object |
| JP2016140024A (en) | 2015-01-29 | 2016-08-04 | セイコーエプソン株式会社 | Vibrating piece, vibrator, oscillation device, oscillator and mobile object |
| JP2017079388A (en) | 2015-10-20 | 2017-04-27 | セイコーエプソン株式会社 | Piezoelectric vibrator, electronic device and moving body |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4506135B2 (en) * | 2003-09-18 | 2010-07-21 | エプソントヨコム株式会社 | Piezoelectric vibrator |
| JP4075893B2 (en) * | 2004-05-21 | 2008-04-16 | セイコーエプソン株式会社 | Quartz crystal manufacturing method, apparatus and crystal resonator |
| JP4558433B2 (en) * | 2004-10-01 | 2010-10-06 | 日本電波工業株式会社 | Crystal oscillator |
| JP4572807B2 (en) * | 2005-10-31 | 2010-11-04 | エプソントヨコム株式会社 | Mesa-type piezoelectric vibrating piece |
| JP4936221B2 (en) * | 2007-06-08 | 2012-05-23 | セイコーエプソン株式会社 | Mesa-type piezoelectric vibrating piece, mesa-type piezoelectric vibrating device, oscillator, and electronic device |
-
2010
- 2010-11-19 JP JP2010259178A patent/JP5505647B2/en active Active
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