JP2012178567A - 光反射用熱硬化性樹脂組成物、これを用いた光半導体素子搭載用基板とその製造方法および光半導体装置 - Google Patents
光反射用熱硬化性樹脂組成物、これを用いた光半導体素子搭載用基板とその製造方法および光半導体装置 Download PDFInfo
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- JP2012178567A JP2012178567A JP2012062306A JP2012062306A JP2012178567A JP 2012178567 A JP2012178567 A JP 2012178567A JP 2012062306 A JP2012062306 A JP 2012062306A JP 2012062306 A JP2012062306 A JP 2012062306A JP 2012178567 A JP2012178567 A JP 2012178567A
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
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- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical group [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
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- 150000002513 isocyanates Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
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- 125000002524 organometallic group Chemical group 0.000 description 1
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- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
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- 239000002530 phenolic antioxidant Substances 0.000 description 1
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- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 1
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- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- RQAGEUFKLGHJPA-UHFFFAOYSA-N prop-2-enoylsilicon Chemical compound [Si]C(=O)C=C RQAGEUFKLGHJPA-UHFFFAOYSA-N 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Led Device Packages (AREA)
Abstract
【解決手段】光半導体素子搭載領域となる凹部が1つ以上形成されている光半導体素子搭載用基板の製造方法であって、凹部を光反射用熱硬化性樹脂組成物を用いたトランスファー成型により形成し、光反射用熱硬化性樹脂組成物は(A)エポキシ樹脂、(B)硬化剤、(C)硬化促進剤、(D)無機充填剤、(F)カップリング剤、(G)酸化防止剤を含み、熱硬化後の、波長350nm〜800nmにおける光反射率が80%以上である。
【選択図】図1
Description
(実施例1)
下記組成の材料を混練温度20〜30℃、混練時間10分の条件でロール混練し、光反射用熱硬化性樹脂組成物を作製した。
(B)硬化剤:グルタル酸無水物(GA):114重量部
(C)硬化促進剤:テトラ−n−ブチルホスホニウム−o,o−ジエチルホスホロジチオエート:2.1重量部
(D)無機充填剤:酸化マグネシウム:155重量部
(F)カップリング剤:3−グリシドキシプロピルトリメトキシシラン(A−187):1.7重量部
(G)酸化防止剤:9,10―ジヒドロ―9−オキサ−10―ホスファフェナントレン―10−オキシド(HCA):2.5重量部
(G)酸化防止剤を、リン系酸化防止剤(4,4’−ブチリデンビス(3−メチル−6−tert−ブチルフェニル−ジ−トリデシルホスファイト)、旭電化製、品番260):2.5重量部、とした以外は、実施例1と同様にして光反射用熱硬化性樹脂組成物を作製した。
(B)硬化剤を、メチルヘキサヒドロ無水フタル酸(MeHHPA):168重量部、(D)無機充填剤を、酸化マグネシウム:193重量部、(G)酸化防止剤を、9,10―ジヒドロ―9−オキサ−10―ホスファフェナントレン―10−オキシド:3.3重量部、とした以外は、実施例1と同様にして光反射用熱硬化性樹脂組成物を作製した。
(B)硬化剤を、メチルヘキサヒドロ無水フタル酸:168重量部、(D)無機充填剤を、酸化マグネシウム:193重量部、(G)酸化防止剤を、リン系酸化防止剤(ジフェニルイソデシルホスファイト、旭電化製、品番135A):3.3重量部、とした以外は、実施例1と同様にして光反射用樹脂組成物を作製した。
(B)硬化剤を、ヘキサヒドロ無水フタル酸(HHPA):154重量部、(D)無機充填剤を、酸化マグネシウム:183重量部、とした以外は、実施例1と同様にして光反射用樹脂組成物を作製した。
(G)酸化防止剤を添加しなかった以外は、実施例1と同様にして光反射用樹脂組成物を作製した。
(B)硬化剤を、メチルヘキサヒドロ無水フタル酸:168重量部、(D)無機充填剤を、酸化マグネシウム:193重量部、とした以外は、比較例1と同様にして光反射用熱硬化性樹脂組成物を作製した。
(B)硬化剤を、ヘキサヒドロ無水フタル酸:154重量部、(D)無機充填剤を、酸化マグネシウム:181重量部、とした以外は、比較例1と同様にして光反射用熱硬化性樹脂組成物を作製した。
各実施例及び各比較例の光反射用樹脂組成物を、金型温度180℃、成形圧力6.9MPa、キュア時間90秒の条件でトランスファー成形を行った後、150℃の温度で2時間ポストキュアを行うことによって厚み1.0mmのテストピースを作製した。ついで、各テストピースの、波長350〜800nmにおける光反射率を積分球型分光光度計V−570型(日本分光株式会社製)を用いて測定した。また、150℃、72時間熱処理後の各テストピースの光反射率も測定した。さらに、初期光反射率に対する熱処理後の光反射率の減少率を算出し、それぞれの耐熱劣化性を下記基準により評価した。結果をまとめて表1に示す。
○:光反射減少率が2%以上、5%未満
△:光反射減少率が5%以上、10%未満
×:光反射減少率が10%以上
101・・・・・透明封止樹脂
102・・・・・ボンディングワイヤ
103・・・・・リフレクター
104・・・・・Ni/Agめっき
105・・・・・金属配線
106・・・・・蛍光体
107・・・・・はんだバンプ
110・・・・・光半導体素子搭載用基板
200・・・・・光半導体素子搭載領域(凹部)
300・・・・・樹脂注入口
301・・・・・金型
400・・・・・LED素子
401・・・・・ボンディングワイヤ
402・・・・・透明封止樹脂
403・・・・・リフレクター
404・・・・・リード
405・・・・・蛍光体
406・・・・・ダイボンド材
Claims (4)
- 光半導体素子搭載領域となる凹部が1つ以上形成されている光半導体素子搭載用基板の製造方法であって、少なくとも前記凹部を、光反射用熱硬化性樹脂組成物を用いたトランスファー成型により形成し、
前記光反射用熱硬化性樹脂組成物は、(A)エポキシ樹脂、(B)硬化剤、(C)硬化促進剤、(D)無機充填剤、(F)カップリング剤、(G)酸化防止剤を成分として含む光反射用熱硬化性樹脂組成物であって、熱硬化後の、波長350nm〜800nmにおける光反射率が80%以上であることを特徴とする光半導体搭載用基板の製造方法。 - 前記(D)無機充填剤が、シリカ、アルミナ、酸化マグネシウム、酸化アンチモン、水酸化アルミニウム、硫酸バリウム、炭酸マグネシウム、炭酸バリウムからなる群の中から選ばれる少なくとも1種以上であることを特徴とする請求項1に記載の光半導体搭載用基板の製造方法。
- 前記(D)無機充填剤の含有率が、樹脂組成物全体に対して10体積%〜85体積%の範囲であることを特徴とする請求項1または2に記載の光半導体搭載用基板の製造方法。
- 前記(G)酸化防止剤が、リン系酸化防止剤であることを特徴とする請求項1〜3のいずれかに記載の光半導体搭載用基板の製造方法。
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