JP2012175017A - Piezoelectric actuator - Google Patents

Piezoelectric actuator Download PDF

Info

Publication number
JP2012175017A
JP2012175017A JP2011037892A JP2011037892A JP2012175017A JP 2012175017 A JP2012175017 A JP 2012175017A JP 2011037892 A JP2011037892 A JP 2011037892A JP 2011037892 A JP2011037892 A JP 2011037892A JP 2012175017 A JP2012175017 A JP 2012175017A
Authority
JP
Japan
Prior art keywords
bellows
piezoelectric element
piezoelectric actuator
piezoelectric
piston rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011037892A
Other languages
Japanese (ja)
Other versions
JP5687922B2 (en
Inventor
Takahiro Kondo
卓宏 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYB Corp
Original Assignee
Kayaba Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kayaba Industry Co Ltd filed Critical Kayaba Industry Co Ltd
Priority to JP2011037892A priority Critical patent/JP5687922B2/en
Publication of JP2012175017A publication Critical patent/JP2012175017A/en
Application granted granted Critical
Publication of JP5687922B2 publication Critical patent/JP5687922B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Sealing Devices (AREA)
  • Diaphragms And Bellows (AREA)
  • Fluid-Damping Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can enhance mass productivity while reducing the manufacturing cost.SOLUTION: A piezoelectric actuator equipped with piezoelectric elements 4, which deform upon application of voltage, comprises a tubular bellows 1 having multiple bends 2, 3 and telescoping in the axial direction, and the piezoelectric elements 4 provided at the bends 2, 3 of the bellows 1. The piezoelectric elements 4 are provided, respectively, on one and the other end faces thereof with electrodes 4a, 4b which are pasted to the convex side surface 2a of the bend 2 and the concave side surface 3b of the bend 3.

Description

本発明は、圧電アクチュエータの改良に関する。   The present invention relates to an improvement of a piezoelectric actuator.

電圧の印加により変位する圧電素子を備えた圧電アクチュエータとしては、たとえば、中空のコイルばねと、コイルばねの表面を圧電素子で巻回したものがある(たとえば、特許文献1参照)。   As a piezoelectric actuator provided with a piezoelectric element that is displaced by application of a voltage, for example, there are a hollow coil spring and a coil spring whose surface is wound with a piezoelectric element (see, for example, Patent Document 1).

この圧電アクチュエータによれば、特に、特開平05−75173号公報に開示されているような変位拡大機構を用いずに、大きな変位を得られる。   According to this piezoelectric actuator, in particular, a large displacement can be obtained without using a displacement enlarging mechanism as disclosed in Japanese Patent Laid-Open No. 05-75173.

特開06−216424号公報(実施例欄)JP 06-216424 A (Example column)

しかしながら、上記した圧電アクチュエータは、上述したように、コイルばねの表面全部に圧電素子を巻き付ける必要があるので、量産性に乏しく、製造コストも高いという問題がある。   However, as described above, the above-described piezoelectric actuator needs to wrap the piezoelectric element around the entire surface of the coil spring, so that there is a problem that the mass productivity is poor and the manufacturing cost is high.

そこで、上記不具合を改善するために創案されたものであって、その目的とするところは、量産性を向上でき、製造コストを低減することが可能な圧電アクチュエータを提供することである。   In view of the above, the present invention has been made to improve the above-described problems, and an object thereof is to provide a piezoelectric actuator that can improve mass productivity and reduce manufacturing costs.

上記した目的を達成するため、本発明の課題解決手段は、電圧印加により変形する圧電素子を備えた圧電アクチュエータにおいて、筒状であって複数の湾曲部を有して軸方向に伸縮可能なベローと、当該ベローの湾曲部に設けた圧電素子とを備えたことを特徴とする。   In order to achieve the above-described object, the problem-solving means of the present invention is a piezoelectric actuator including a piezoelectric element that is deformed by applying a voltage, and is a cylindrical bellows having a plurality of curved portions and capable of expanding and contracting in the axial direction. And a piezoelectric element provided at the curved portion of the bellows.

本発明の圧電アクチュエータは、ベローの湾曲部に圧電素子を設けただけの簡単な構成であるから、量産性が向上し、製造コストも安価となる。   Since the piezoelectric actuator of the present invention has a simple configuration in which a piezoelectric element is simply provided on the curved portion of the bellows, mass productivity is improved and manufacturing cost is reduced.

一実施の形態における圧電アクチュエータの横断面である。It is a cross section of the piezoelectric actuator in one embodiment. 一実施の形態における圧電アクチュエータの一部切欠斜視図である。It is a partially cutaway perspective view of the piezoelectric actuator in one embodiment. ダンパDに適用した一実施の形態のおける圧電アクチュエータの横断面図ある。2 is a cross-sectional view of a piezoelectric actuator in one embodiment applied to a damper D. FIG.

以下、図に示した実施の形態に基づき、本発明を説明する。図1に示すように、一実施の形態における圧電アクチュエータは、筒状であって複数の湾曲部2,3を有して軸方向に伸縮可能なベロー1と、当該ベロー1の湾曲部2,3に設けた圧電素子4とを備えて構成されている。   The present invention will be described below based on the embodiments shown in the drawings. As shown in FIG. 1, a piezoelectric actuator according to an embodiment is a cylindrical bellows 1 having a plurality of curved portions 2 and 3 and capable of expanding and contracting in the axial direction, and the curved portions 2 and 2 of the bellows 1. 3 and the piezoelectric element 4 provided in the structure 3.

以下、各部について詳細に説明する。まず、ベロー1は、図1および図2に示すように、弾性を備えるとともに筒状であって、外部へ向けて凸となる湾曲部2と内部へ向けて凸となる湾曲部3とが交互に現れるように形成されており、湾曲部2,3が撓むことで、軸方向に伸縮することができるようになっている。   Hereinafter, each part will be described in detail. First, as shown in FIGS. 1 and 2, the bellows 1 has elasticity and a cylindrical shape, and a curved portion 2 that is convex toward the outside and a curved portion 3 that is convex toward the inside are alternately arranged. It can be expanded and contracted in the axial direction by bending the bending portions 2 and 3.

上記湾曲部2の凸側面2a、つまり湾曲部2の外方側面と、湾曲部3の凹側面3b、つまり湾曲部3の外方側面には、それぞれ圧電素子4が設けられている。圧電素子4は、図外の電源からの電圧の印加によって伸縮する逆圧電効果を呈する圧電体であり、一端面と他端面にそれぞれ電極4a,4bを備えており、湾曲部2の凸側面2aと湾曲部3の凹側面3bに貼付されている。より詳細には、この圧電素子4は、上記図外の電源から電極4a,4bを介して電圧を印加すると、ベロー1の湾曲部2,3の軸方向に沿って伸縮するようにベロー1に貼付してある。なお、圧電素子4は、この場合、接着によってベロー1に貼付されているが、その他の方法によって圧電素子4をベロー1に一体化してもよい。また、ベロー1が同電体の場合には、当該ベロー1を圧電素子4の電極として用いることもできる。   Piezoelectric elements 4 are provided on the convex side surface 2 a of the bending portion 2, that is, the outer side surface of the bending portion 2, and the concave side surface 3 b of the bending portion 3, that is, the outer side surface of the bending portion 3. The piezoelectric element 4 is a piezoelectric body that exhibits an inverse piezoelectric effect that expands and contracts when a voltage from a power source (not shown) is applied. The piezoelectric element 4 includes electrodes 4 a and 4 b on one end surface and the other end surface, respectively. And affixed to the concave side surface 3b of the bending portion 3. More specifically, the piezoelectric element 4 is applied to the bellows 1 so as to expand and contract along the axial direction of the curved portions 2 and 3 of the bellows 1 when a voltage is applied via the electrodes 4a and 4b from a power source (not shown). Affixed. In this case, the piezoelectric element 4 is attached to the bellows 1 by adhesion, but the piezoelectric element 4 may be integrated with the bellows 1 by other methods. Further, when the bellows 1 is the same electric body, the bellows 1 can also be used as an electrode of the piezoelectric element 4.

たとえば、湾曲部2の凸側面2aに設けた圧電素子4を収縮させるとともに、湾曲部3の凹側面3bに設けた圧電素子4を伸長させると、湾曲部2,3は、平坦となるように撓むので、圧電素子4へ電圧を全く印加していない状態のベロー1に対してベロー1の図1中上下方向長さとなる軸方向長さを長くすることができる。反対に、湾曲部2の凸側面2aに設けた圧電素子4を伸長させるとともに、湾曲部3の凹側面3bに設けた圧電素子4を収縮させると、湾曲部2,3は、より湾曲を深めるように撓むので、圧電素子4へ電圧を全く印加していない状態のベロー1に対してベロー1の図1中上下方向長さとなる軸方向長さを短くすることができる。   For example, when the piezoelectric element 4 provided on the convex side surface 2a of the bending portion 2 is contracted and the piezoelectric element 4 provided on the concave side surface 3b of the bending portion 3 is extended, the bending portions 2 and 3 become flat. Since it bends, the axial length of the bellows 1 in the vertical direction in FIG. 1 can be increased with respect to the bellows 1 in a state where no voltage is applied to the piezoelectric element 4. On the contrary, when the piezoelectric element 4 provided on the convex side surface 2a of the bending portion 2 is expanded and the piezoelectric element 4 provided on the concave side surface 3b of the bending portion 3 is contracted, the bending portions 2 and 3 deepen the bending. Therefore, the axial length of the bellows 1 in the vertical direction in FIG. 1 can be shortened with respect to the bellows 1 in a state where no voltage is applied to the piezoelectric element 4.

つまり、このベロー1と圧電素子4とでなる圧電アクチュエータの推力の出力方向は、ベロー1の軸方向である図1中上下方向となっている。なお、この実施の形態の場合、湾曲部2の凹側面2bと湾曲部3の凸側面3aに圧電素子4を設けてもよいが、ベロー1の外側となる湾曲部2の凸側面2aと湾曲部3の凹側面3bに圧電素子4を設ける方が、外部から圧電素子4へ電圧を印加するに際して便利となる。また、この実施の形態では、湾曲部2,3の凸側面或いは凹側面にのみ圧電素子4を設けるユニモルフ型とされているが、湾曲部2,3の凸側面2a,3aと凹側面2b,3bのそれぞれに圧電素子4を設けてバイモルフ型に設定してもよい。   That is, the output direction of the thrust of the piezoelectric actuator composed of the bellows 1 and the piezoelectric element 4 is the vertical direction in FIG. In the case of this embodiment, the piezoelectric element 4 may be provided on the concave side surface 2b of the curved portion 2 and the convex side surface 3a of the curved portion 3, but the convex side surface 2a of the curved portion 2 that is outside the bellows 1 and the curved surface. It is convenient to provide the piezoelectric element 4 on the concave side surface 3 b of the portion 3 when applying a voltage to the piezoelectric element 4 from the outside. In this embodiment, the piezoelectric element 4 is provided only on the convex or concave side surfaces of the curved portions 2 and 3, but the convex side surfaces 2a and 3a and the concave side surfaces 2b and 2b of the curved portions 2 and 3 are provided. The piezoelectric element 4 may be provided in each of the 3b to set the bimorph type.

また、この圧電アクチュエータは、ベロー1が外力によって、軸方向へ変位させられると、湾曲部2,3の撓み量が変化して圧電素子4も伸縮して発電するので、この電力を回収することも可能である。さらに、圧電素子4を図外の外部回路へ接続したり、圧電素子4に上記電源によって電圧を印加するようにしたりして、ベロー1が外力によって軸方向変形する際に圧電素子4に当該変形を抑制する減衰力を発揮させることも可能である。   In addition, when the bellows 1 is displaced in the axial direction by an external force, this piezoelectric actuator changes the amount of bending of the bending portions 2 and 3 and the piezoelectric element 4 expands and contracts to generate power. Is also possible. Further, when the bellows 1 is deformed in the axial direction by an external force by connecting the piezoelectric element 4 to an external circuit outside the figure or applying a voltage to the piezoelectric element 4 by the power source, the piezoelectric element 4 is deformed. It is also possible to exert a damping force that suppresses the above.

以上のように、この圧電アクチュエータは、ベロー1の湾曲部2,3に圧電素子4を設けただけの簡単な構成であるから、量産性が向上し、製造コストも安価となる。   As described above, since this piezoelectric actuator has a simple configuration in which the piezoelectric elements 4 are simply provided on the curved portions 2 and 3 of the bellows 1, mass productivity is improved and manufacturing costs are reduced.

そして、このように構成された圧電アクチュエータは、アクチュエータとして機能するだけでなく、弾性を備えているのでばね要素としても機能できる。また、たとえば、図3に示すように、シリンダCとシリンダC内に出入りするピストンロッドRとを備えて伸縮時に減衰力を発生するダンパDのロッドカバーとして用いることができる。この場合、圧電アクチュエータは、ベロー1の一端となる図3中上端をピストンロッドRの先端へ、ベロー1の他端となる図3中下端をシリンダCの端部へそれぞれ連結して、上記ピストンロッドRとシリンダCとの間に介装されてピストンロッドRの外周に配置され、ピストンロッドRを保護している。この場合の圧電アクチュエータは、ダンパDの伸縮時に際して、ダンパDとともに伸縮するが、圧電素子4への印加電圧を制御してやることで圧電アクチュエータに積極的に推力を発揮させて、ダンパDの減衰力に推力を重畳させることもできる。したがって、圧電アクチュエータは、ダンパDと協働して減衰力を可変にでき、図示しない車両の車体と車軸との間に介装される場合、ダンパDととともにアクティブサスペンションとして機能することもでき、外力で伸縮する場合には発電するから、当該発電した電力で車両のバッテリを充電することもできる。   And the piezoelectric actuator comprised in this way not only functions as an actuator, but since it is provided with elasticity, it can also function as a spring element. For example, as shown in FIG. 3, it can be used as a rod cover of a damper D that includes a cylinder C and a piston rod R that goes in and out of the cylinder C and generates a damping force during expansion and contraction. In this case, the piezoelectric actuator connects the upper end in FIG. 3 as one end of the bellows 1 to the tip of the piston rod R and the lower end in FIG. 3 as the other end of the bellows 1 to the end of the cylinder C, respectively. It is interposed between the rod R and the cylinder C and is disposed on the outer periphery of the piston rod R to protect the piston rod R. The piezoelectric actuator in this case expands and contracts together with the damper D when the damper D expands and contracts. However, by controlling the voltage applied to the piezoelectric element 4, the piezoelectric actuator positively exerts a thrust, and the damping force of the damper D It is also possible to superimpose thrust on the. Therefore, the piezoelectric actuator can change the damping force in cooperation with the damper D, and when interposed between the vehicle body and the axle of the vehicle (not shown), can also function as an active suspension together with the damper D. Since electric power is generated when it expands and contracts by external force, the vehicle battery can be charged with the generated electric power.

以上で、本発明の実施の形態についての説明を終えるが、本発明の範囲は図示されまたは説明された詳細そのものには限定されないことは勿論である。   This is the end of the description of the embodiment of the present invention, but the scope of the present invention is of course not limited to the details shown or described.

本発明は、圧電アクチュエータに利用することができる。   The present invention can be used for a piezoelectric actuator.

1 ウェーブリング
2,3 湾曲部
2a,3a 湾曲部の凸側面
2b,3b 湾曲部の凹側面
4 圧電素子
C シリンダ
D ダンパ
R ピストンロッド
DESCRIPTION OF SYMBOLS 1 Wave ring 2, 3 Curved part 2a, 3a Convex side surface 2b of curved part, 3b Concave side surface of curved part 4 Piezoelectric element C Cylinder D Damper R Piston rod

Claims (2)

電圧印加により変形する圧電素子を備えた圧電アクチュエータにおいて、筒状であって複数の湾曲部を有して軸方向に伸縮可能なベローと、当該ベローの湾曲部に設けた圧電素子とを備えたことを特徴とする圧電アクチュエータ。 A piezoelectric actuator including a piezoelectric element that is deformed by application of a voltage includes a cylindrical bellows that has a plurality of curved portions and can be expanded and contracted in the axial direction, and a piezoelectric element provided on the curved portion of the bellows. A piezoelectric actuator characterized by that. シリンダと、シリンダ内に出入りするピストンロッドとを備えて伸縮時に減衰力を発生するダンパを備え、上記ベローの一端をピストンロッドに連結するとともにベローの他端をシリンダに連結してピストンロッドを保護することを特徴とする請求項1に記載の圧電アクチュエータ。 A cylinder and a piston rod that goes in and out of the cylinder are equipped with a damper that generates a damping force during expansion and contraction. One end of the bellows is connected to the piston rod and the other end of the bellows is connected to the cylinder to protect the piston rod. The piezoelectric actuator according to claim 1, wherein:
JP2011037892A 2011-02-24 2011-02-24 Piezoelectric actuator Active JP5687922B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011037892A JP5687922B2 (en) 2011-02-24 2011-02-24 Piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011037892A JP5687922B2 (en) 2011-02-24 2011-02-24 Piezoelectric actuator

Publications (2)

Publication Number Publication Date
JP2012175017A true JP2012175017A (en) 2012-09-10
JP5687922B2 JP5687922B2 (en) 2015-03-25

Family

ID=46977596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011037892A Active JP5687922B2 (en) 2011-02-24 2011-02-24 Piezoelectric actuator

Country Status (1)

Country Link
JP (1) JP5687922B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014162923A1 (en) * 2013-04-01 2014-10-09 株式会社Lixil Electric power generator and method for manufacturing same
KR101488311B1 (en) * 2013-06-12 2015-01-30 현대자동차주식회사 Assembly type spring using fiber reinforced composite materials
WO2020241901A1 (en) * 2019-05-31 2020-12-03 株式会社昭和螺旋管製作所 Conduit line information collection apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249146U (en) * 1988-09-29 1990-04-05
JP2004297042A (en) * 2003-03-13 2004-10-21 Denso Corp Piezoelectric actuator, its manufacturing method, and injector
JP2010276113A (en) * 2009-05-28 2010-12-09 Kayaba Ind Co Ltd Suspension device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249146U (en) * 1988-09-29 1990-04-05
JP2004297042A (en) * 2003-03-13 2004-10-21 Denso Corp Piezoelectric actuator, its manufacturing method, and injector
JP2010276113A (en) * 2009-05-28 2010-12-09 Kayaba Ind Co Ltd Suspension device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014162923A1 (en) * 2013-04-01 2014-10-09 株式会社Lixil Electric power generator and method for manufacturing same
KR101488311B1 (en) * 2013-06-12 2015-01-30 현대자동차주식회사 Assembly type spring using fiber reinforced composite materials
WO2020241901A1 (en) * 2019-05-31 2020-12-03 株式会社昭和螺旋管製作所 Conduit line information collection apparatus
JPWO2020241901A1 (en) * 2019-05-31 2021-09-13 株式会社昭和螺旋管製作所 Pipeline information collection device

Also Published As

Publication number Publication date
JP5687922B2 (en) 2015-03-25

Similar Documents

Publication Publication Date Title
US10770991B2 (en) Vibrator manufacturing method
US8604648B2 (en) Flat spring and voice coil motor using the same
JP5687922B2 (en) Piezoelectric actuator
CN102966691B (en) Cylindrical vibration-isolation device
JP2006336865A (en) Bellows for joint
JP2013055877A (en) Actuator
JP5687921B2 (en) Piezoelectric actuator
JP5661593B2 (en) Vehicle suspension system
JP2024063037A (en) Multi-layer PZT electrode configuration for increased suspension stroke
JP2012154355A (en) Dust cover structure of hydraulic shock absorber
JP6438258B2 (en) Reaction force adjusting member and suspension
US10190686B2 (en) Cover member
JP6650637B2 (en) Actuator and stage device
JP2001012525A (en) Diaphragm for air spring
JP6563290B2 (en) Spring assembly
JPH06216424A (en) Deformation actuator
JP2016134955A (en) Wire harness arrangement structure
JP4661110B2 (en) Polymer actuator
JP2007016900A (en) Shock absorber
JP2005081487A (en) High polymer actuator
JP6253965B2 (en) Stirling cycle engine
WO2020158462A1 (en) Vehicular suspension device, and suspension device spring
JP7394721B2 (en) stopper
JP2018119601A (en) Air spring
JP2011027004A (en) Shape memory alloy actuator device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130826

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140902

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141029

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150123

R151 Written notification of patent or utility model registration

Ref document number: 5687922

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350