JP6650637B2 - Actuator and stage device - Google Patents

Description

The present invention relates to an actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, a mounting jig to which the telescopic part is mounted and to which the telescopic displacement of the telescopic element is transmitted, and a stage device using the same .

  Actuators, which are mechanisms for "moving" something, are used in everything from industrial machinery, automobiles, aircraft, medical equipment, to the electrical appliances around us. The actuator is, for example, a solenoid or an air valve in an industrial mechanism, a moving mechanism for moving a magnetic chip for reading and writing to a hard disk drive in a personal computer, and a vibration motor generating vibration in a mobile phone. It is used as such.

  An expansion element that expands and contracts in a predetermined direction is used as a driving element of the actuator, and examples of such expansion elements include a piezoelectric element and a magnetostrictive element.

  Among these, a piezoelectric element has attracted particular attention. In a piezoelectric actuator using a piezoelectric element, (1) mechanical energy is actually converted to 60% or more of the input electric energy, for example, the force generated by a 10 mm × 10 mm element reaches 300 kgf, and the energy efficiency is extremely high. High (2) High-speed response of several kHz or more is possible. (3) When an object is held at a fixed position, it is necessary to apply a voltage. (4) Suitable for miniaturization and thinning.

  On the other hand, when the telescopic element is used for the actuator, the element is rarely used alone, and is usually used while being mounted on various mounting members. For example, the displacement of a piezoelectric element is very small, from several μm to several tens of μm. An actuator has been developed (for example, Patent Document 1). Further, since the piezoelectric element is made of a ceramic which is a brittle material and is weak against a tensile force, a pressurizing mechanism for applying a pressure to the piezoelectric element for the purpose of preventing breakage of the piezoelectric element may be used as a mounting member. Further, when the expansion / contraction element is attached to the interface of another device, it may be attached to a member for attachment.

  Since it is necessary for these mounting members to take out the displacement of the expansion and contraction element with high precision, conventionally, both ends of the expansion and contraction element are bonded to the mounting portion of the mounting member with an adhesive.

JP 2004-48955 A

  However, if the elastic element is adhered to the mounting member, the elastic element cannot be detached when an unexpected force is applied, or even if the elastic element or the mounting member is damaged, only one of them cannot be replaced. There is.

  On the other hand, it is also considered to attach the expansion element by applying pressure in the expansion and contraction direction without bonding, but since the expansion and contraction element is fast expanding and contracting, the expansion and contraction element repeatedly expands and contracts even when pressure is applied. As a result, displacement of the element occurs, and it is difficult to effectively prevent damage to the expansion and contraction element.

Therefore, the present invention provides an actuator that can avoid the disadvantage of bonding the extensible element to the mounting member and does not cause damage to the extensible element during operation, and a stage device using the same. With the goal.

  That is, according to the present invention, the following (1) to (20) are provided.

(1) An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and an attachment member to which the telescopic part is mounted and to which the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
An actuator which is fixed so that the elastic portion does not move in a direction other than the elastic direction in a state where the elastic portion and the mounting member are fitted by the fitting portion.

  (2) The actuator according to (1), wherein the fitting portion fits the end of the elastic portion and the mounting member so that the elastic portion does not move in a direction other than the elastic direction. .

  (3) A cross section of the mounting portion of the elastic portion and the mounting member has a rectangular shape, and a fitting portion between the end portion of the elastic portion and the mounting portion projects from two opposite sides of the mounting portion. It has a first portion having a pair of first protrusions provided, and a pair of second protrusions provided at two ends of the end portion of the expansion / contraction portion that do not correspond to the first protrusion. The actuator according to (2), wherein the actuator is configured by fitting the second portion.

  (4) The actuator according to (3), wherein the first projecting portion is provided to face the width direction of the mounting member, and the mounting member is entirely formed with the same thickness.

  (5) The mounting member has a cylindrical portion or a columnar portion, and the expandable portion has a columnar portion or a cylindrical portion corresponding to the cylindrical portion or the columnar portion of the mounting member. The actuator according to (2), wherein the mounting member is fitted by inserting the columnar portion into the cylindrical portion.

  (6) The actuator according to any one of (1) to (5), wherein the fitting portions are provided on both ends of the expansion and contraction portion.

  (7) The actuator according to (6), wherein at least one side is screwed when the elastic portions are fitted at both ends.

  (8) The fitting portion is provided at one end of the expandable portion, and the other end of the expandable portion and the mounting member are screwed from (1) to ( The actuator according to any one of 5).

  (9) A pair of projecting portions projecting from opposite sides of the end surface are formed on both end surfaces of the expandable portion, and the mounting portion of the mounting member is mounted so as to be sandwiched between the pair of projecting portions. The actuator according to (1), wherein the fitting portion is configured, and when the expandable portion is mounted, at least one end of the expandable portion is screwed to a mounting portion of the mounting member.

  (10) A pair of protrusions protruding from opposite sides of the end surface is formed on one end surface of the expandable portion, and a first mounting portion of the mounting member corresponding to one end surface of the expandable portion is The fitting portion mounted so as to be sandwiched between the pair of protrusions is configured, and the other end face of the elastic portion is a corresponding second mounting portion of the mounting member when the elastic portion is mounted. When the elastic part is mounted, at least the end part including the other end surface of the elastic part and the second mounting part are screwed (1). 2. The actuator according to claim 1.

  (11) The mounting portion of the mounting member to which both ends of the elastic portion are mounted is formed with a pair of projecting portions projecting from opposing sides of the end surface, and both end portions of the elastic portion are respectively the pair of protrusions. The fitting portion is configured to be mounted so as to be sandwiched by the protruding portion, and when the elastic portion is mounted, at least one end of the elastic portion is screwed to a mounting portion of the mounting member ( The actuator according to 1).

  (12) The first mounting portion of the mounting member to which one end of the elastic portion is mounted has a pair of projecting portions projecting from opposing sides of the end surface, and the first mounting portion has one end of the elastic portion. The end portion is configured as the fitting portion sandwiched between the pair of projecting portions, and the second mounting portion on the other end side of the expansion and contraction portion of the mounting member, when the expansion and contraction portion is mounted, The end face is configured to be fitted to the end face of the other end of the elastic part, and when the elastic part is attached, at least the other end of the elastic part and the second mounting part The actuator according to (1), wherein and are screwed.

  (13) The expansion / contraction part is configured by attaching a metal fitting jig to an end of the expansion / contraction element in a state where the expansion / contraction element does not move in a direction other than the expansion / contraction direction. The actuator according to any one of (1) to (12), in which the mounting member is fitted.

  (14) The actuator according to (13), wherein the expansion element and the fitting jig are bonded to each other.

  (15) The actuator according to (13), wherein a concave portion is formed at an end of the fitting jig, and the elastic element is inserted and fitted into the concave portion.

  (16) The actuator according to any one of (1) to (15), wherein the mounting member is a displacement magnifying mechanism that magnifies a displacement of the telescopic element.

  (17) The actuator according to (2), wherein the actuator is used as a stage driving mechanism, and the mounting member transmits a displacement of the expansion / contraction element to the stage.

(18) The stage has a base member and a stage member that moves on the base member, and the mounting member is attached to the base member and a first end of the expandable portion is mounted. A member, and a second member attached to the stage member and to which the other end of the elastic portion is attached;
The actuator according to (17), wherein the expandable portion and the second member are fitted together to form a fitted portion.

  (19) The second member includes a fixing jig attached to the stage member, and a moving unit that performs rough position adjustment by rotating a spindle to move the stage member in the direction of displacement of the expansion and contraction unit. , A cylindrical portion provided at the tip of the spindle, the expandable portion has a cylindrical portion corresponding to the cylindrical portion, the expandable portion and the second member, the cylindrical portion is the cylindrical portion The actuator according to (18), wherein the actuator is rotatably fitted by being inserted into the actuator.

  (20) The actuator according to any one of (1) to (19), wherein the expansion element is any one of a piezoelectric element, a magnetostrictive element, and a shape memory alloy element.

  According to the present invention, a fitting portion for detachably fitting the end of the elastic portion and the mounting member is provided, and the elastic portion and the mounting member are fitted in the fitting portion, and the elastic portion is stretched in the stretching direction. Since it is fixed so as not to move in other directions, it is possible to avoid inconvenience of bonding the extendable element to the mounting member, and to prevent the elastic element from being damaged during operation.

FIG. 2 is a schematic front view showing a first example of the actuator according to the first embodiment of the present invention. It is the schematic which shows the expansion-contraction part which bonded the fitting jig made of metal to the edge part of an expansion-contraction element. FIG. 3 is a schematic front view showing a second example of the actuator according to the first embodiment of the present invention. It is a schematic front view showing a modification of the 2nd example of the actuator concerning a 1st embodiment of the present invention. FIG. 9 is a schematic front view showing another modification of the second example of the actuator according to the first embodiment of the present invention. FIG. 11 is a perspective view showing still another modified example of the second example of the actuator according to the first embodiment of the present invention. It is a perspective view for explaining the 1st example of a fitting part. FIG. 6 is a schematic front view showing a state where one side of the fitting portion is screwed in the first example of the fitting portion. FIG. 6 is a schematic front view showing a state where both sides of the fitting portion are screwed in the first example of the fitting portion. It is a perspective view for explaining the 2nd example of a fitting part. It is a perspective view for explaining the 2nd example of a fitting part. It is a perspective view for explaining the 2nd example of a fitting part. FIG. 13 is a schematic front view showing a state in which fitting portions are provided on both sides of a telescopic portion and one side of the fitting portion is screwed in a third example of the fitting portion. FIG. 13 is a schematic front view showing a state in which fitting portions are provided on both sides of a telescopic portion and both sides of the fitting portions are screwed in a third example of the fitting portion. FIG. 13 is a schematic front view showing a state in which a fitting portion is provided on one side of a telescopic portion and a side where no fitting portion is provided is screwed in a third example of the fitting portion. It is a schematic front view showing the state where one side of a fitting part was screwed in the 4th example of a fitting part. It is a schematic front view showing the state where both sides of a fitting section were screwed in the 4th example of a fitting section. FIG. 14 is a schematic front view showing a state in which a fitting portion is provided on one side of the expansion and contraction portion and a side where the fitting portion is not provided is screwed in a fourth example of the fitting portion. It is a top view of the stage device to which the actuator concerning a 2nd embodiment of the present invention was applied. FIG. 9 is a side view of a stage device to which an actuator according to a second embodiment of the present invention is applied.

  Hereinafter, embodiments of the present invention will be described in detail.

<First embodiment>
In the first embodiment of the present invention, an actuator will be described in which a telescopic unit having a telescopic element is mounted on a displacement magnifying mechanism as a mounting member, and the displacement of the telescopic unit is magnified by the displacement magnifying mechanism.

(First example of actuator)
FIG. 1 is a schematic front view showing a first example of the actuator according to the first embodiment of the present invention. In the description of the first example, for convenience, the description will be made with reference to the top and bottom of FIG. 1, but the arrangement of the actuator is not limited to this.

  The actuator 100 functions as a telescopic part 1 having a telescopic element that expands and contracts in a predetermined direction by applying a trigger such as a voltage, and functions as a mounting member to which the telescopic part 1 is attached, and expands the telescopic displacement of the telescopic element. And a displacement magnifying mechanism 2 for transmitting to the object.

  The expansion element of the expansion section 1 may be any element that expands and contracts in a predetermined direction, such as a piezoelectric element that changes according to a voltage, a magnetostrictive element that changes according to a magnetic field, and a shape memory alloy element that changes according to temperature. Can be mentioned. In any case, the displacement according to the voltage can be realized by directly applying a voltage from a power supply or converting the voltage into a magnetic field or a temperature using an appropriate means. In FIG. 1, electric terminals and the like are omitted.

When the expansion and contraction element is a piezoelectric element, the expansion and contraction element is configured as, for example, a rectangular parallelepiped having a length of, for example, 40 mm, in which a plurality of 10 mm × 10 mm plate-like piezoelectric bodies are stacked with electrodes interposed therebetween. As a piezoelectric material constituting the piezoelectric body, a ceramic material having a piezoelectric effect is used. As such a material, typically, lead zirconate titanate (Pb (Zr, Ti) O ₃ ; PZT) is given. Can be. The shape of the expansion element 1 is not limited to a rectangular parallelepiped, and may be, for example, a polygonal column such as a triangular column or a hexagonal column, or a column.

  The displacement magnifying mechanism 2, which is a mounting member, includes a displacement transmitting unit 20 to which the expandable unit 1 is mounted and to which the displacement of the expandable unit 1 is transmitted, and a displacement magnifying unit 30 that performs an operation of expanding the displacement of the expandable unit 1. . The displacement of the expansion and contraction unit 1 is transmitted to the displacement transmission unit 20 and further transmitted to the displacement enlargement operation unit 30 and enlarged.

  The displacement transmitting section 20 has a first member 3 to which the lower end of the expandable section 1 is connected, and a second member 4 to which the upper end of the expandable section 1 is connected. The first member 3 is formed in a U-shape having a notch 5 into which the elastic part 1 is inserted, and the elastic part 1 is inserted into the notch 5 so that its longitudinal direction coincides with the vertical direction. . The elastic element of the elastic part 1 expands and contracts in the longitudinal direction. Then, the bottom of the notch 5 in the first member 3 and the lower end of the elastic part 1 are connected. The second member 4 is provided so as to enter the upper part of the notch 5, and the lower end of the second member 4 is connected to the upper end of the expandable portion 1. The first member 3 has a plurality of mounting holes 9 that penetrate in the thickness direction for mounting to the base material with bolts or the like.

  The lower end of the second member 4 and the upper end of the expansion and contraction unit 1 are detachably fitted by a fitting unit 7. In addition, the bottom of the notch 5 of the first member 3 and the lower end of the expansion and contraction section 1 are detachably fitted by a fitting section 8 in the same manner.

  The elastic part 1 may have a configuration in which the end of the elastic element is directly fitted to the second member 4. However, when a piezoelectric element is used as the elastic element, the piezoelectric element is made of a ceramic which is a brittle material. Therefore, the strength may be insufficient. In such a case, as shown in FIG. 2, a metal fitting jig 18 such as stainless steel is attached to the end of the elastic element 17 as the elastic part 1, and this fitting jig 18 is It is preferable to use it for fitting with the two members 4.

At this time, it is necessary that the fitting jig 18 and the expansion / contraction element 17 do not move with respect to the XY plane which is the mounting surface, that is, do not move in a direction other than the expansion / contraction direction of the expansion / contraction element 17 . As a technique for this, bonding the fitting jig 18 and the expansion / contraction element 17 can be cited. Alternatively, a recess may be formed by leaving the four sides of the end of the fitting jig 18 on the stretchable element side in a frame shape, and the stretchable element 17 may be inserted and fitted therein. This method has an advantage that it is not necessary to adhere. Alternatively, the end of the second member 4 in the displacement magnifying mechanism 2 may be processed into a state in which a concave portion is formed by leaving a frame shape, and the telescopic element may be directly inserted into the concave portion. However, in this case, since the thickness of the second member 4 cannot be made the same as the thickness of the other parts of the displacement enlarging mechanism 2, the wire cutting which is a simple method cannot be used, and the structure is complicated. Requires processing.

  The expansion / contraction part 1 including the expansion / contraction element is applied with a compression force in advance by an appropriate method in a state where the expansion / contraction part 1 is attached to the displacement transmitting part 20. In particular, when a piezoelectric element is used as the expansion / contraction element, it is important to apply a compressive force in advance because the piezoelectric element is made of a brittle ceramic material and is weak against a tensile force. Examples of a method of applying a compressive force to the expansion element in advance include the methods described in JP-A-2008-99399 and JP-A-2012-139028.

  The displacement enlarging section 30 has one end hingedly connected to the first member 3 and the second member 4, respectively, and the other end has a pair of arms 12 for displacing the object to be displaced. That is, the base end of each arm 12 is formed by the hinge 10 extending from the upper end on one side of the U-shaped first member 3 and the hinge 11 extending from the upper end of the second member 4 to form the first member 3 and the third member 3. It is connected to two members 4. The arms 12 are curved and extend along one peripheral edge and the other peripheral edge of the second member 4. One end of a leaf spring 14 is joined to the tip of the arm 12, and the other end of each leaf spring 14 is connected via a center piece 15 having a mounting hole 16 for mounting an object. . The object to be displaced is attached to the center piece 15.

  The hinges 10 and 11 are formed of a flexible material. The hinge 10 is provided integrally with the arm 12 and the first member 3, and the hinge 11 is provided integrally with the arm 12 and the second member 4. The hinges 10 and 11 bend or bend by the expansion and contraction of the expansion and contraction element, so that the movement of the second member 4 and the rotation of the arm 12 are allowed.

  As a result, the arm 12 pivots via the hinges 10 and 11 due to the movement of the second member 4 in accordance with the expansion and contraction of the expansion element in the expansion and contraction section 1. Acted upon.

  Specifically, the lower end of the telescopic part 1 is restrained by the first member 3, and the upper end of the telescopic part 1 is restrained by the second member 4. Since the height position of the upper end of the second member 4 coincides with the height position of the second member 4, the second member 4 rises with respect to the first member 3 when the telescopic element is displaced in the direction in which it extends. The arm 12 is transmitted to the arm 12 of the displacement enlarging operation section 30 via 10 and 11, and the arm 12 rotates so as to approach the first member 3, and is attached to the center piece 15 and the center piece 15 via the leaf spring 14. An enlarged displacement of the target object occurs downward. Conversely, when the telescopic element is displaced in the contracting direction, the second member 4 descends with respect to the first member, and the displacement is transmitted to the arm 12 of the displacement enlarging section 30 via the hinges 10 and 11. The arm 12 rotates so as to be separated from the first member 3, and the center piece 15 undergoes an enlarged upward displacement via the leaf spring 14.

  Each leaf spring 14 has thin portions 14a, 14c at one end and the other end, and a thick portion 14b thicker than the thin portions 14a, 14c at an intermediate portion. 14b prevents buckling when bending or bending deformation occurs.

  In the actuator 100 configured as described above, when the expansion / contraction unit 1 having the expansion / contraction element is mounted on the displacement transmission unit 20 of the displacement enlarging mechanism 2 and a voltage is applied to the expansion / contraction element, the expansion / contraction element expands. As a result, the second member 4 is raised with respect to the first member 3 and the hinge 11 is also displaced with respect to the hinge 10 by this displacement, so that the pair of arms 12 connected to the hinges 10 and 11 approach each other by the principle of leverage. To rotate. Following this, each leaf spring 14 also bends or bends so as to approach each other, and the center piece 15 and the displacement object attached to the center piece 15 are displaced downward. At this time, the displacement of the expansion / contraction element is enlarged by several times to several tens times by the arm 12, and the enlarged displacement can be applied to the object to be displaced. When a voltage of the opposite polarity is applied to the expansion and contraction element and the expansion and contraction element is degenerated, the pair of arms 12 similarly rotate to move away from the center piece 15 and the center piece 15 according to this principle. The displacement expanded upward acts on the attached displacement object.

(Second example of actuator)
FIG. 3 is a schematic front view showing a second example of the actuator according to the first embodiment of the present invention.

  The actuator 100 'functions as a telescopic part 1 having a telescopic element that expands and contracts in a predetermined direction by applying a trigger such as a voltage, and as a mounting member to which the telescopic part 1 is mounted, and expands the telescopic displacement of the telescopic element. And a displacement magnifying mechanism 2 ′ for transmitting to a target object.

  As in the first example, the expansion and contraction element of the expansion and contraction section 1 may be any element that expands and contracts in a predetermined direction, such as a piezoelectric element that displaces according to voltage, a magnetostrictive element that displaces according to a magnetic field, and a displacement that varies according to temperature. And the like. In any case, the displacement according to the voltage can be realized by directly applying a voltage from a power supply or converting the voltage into a magnetic field or a temperature using an appropriate means. In FIG. 3, the electric terminals and the like are omitted.

  The expansion / contraction element is configured as a rectangular parallelepiped piezoelectric element having a length of, for example, 40 mm, in which a plurality of 10 mm × 10 mm plate-shaped piezoelectric bodies are laminated with electrodes interposed therebetween.

The expandable element is configured to expand and contract in a length direction (Y direction in FIG. 1) indicated by an arrow C in FIG. 3 when a voltage is applied. As the piezoelectric material constituting the piezoelectric body, a ceramic material having a piezoelectric effect is used. As such a material, typically, lead zirconate titanate (Pb (Zr, Ti) O ₃ ; PZT) is given. Can be. The shape of the expansion element 1 is not limited to a rectangular parallelepiped, and may be, for example, a polygonal column such as a triangular column or a hexagonal column, or a column.

  The expansion / contraction part 1 including the expansion / contraction element is applied with a compressive force in advance by an appropriate method in a state of being mounted on the displacement enlarging mechanism 2 '. In particular, when a piezoelectric element is used as the expansion / contraction element, it is important to apply a compressive force in advance because the piezoelectric element is made of a brittle ceramic material and is weak against a tensile force. As a method of applying a compressive force to the expansion element in advance, as described above, the methods described in JP-A-2008-99399 and JP-A-2012-139028 can be exemplified.

  The displacement magnifying mechanism 2 ′ is configured as a hinge mechanism having a flexible hinge. The displacement in the Y direction of the expansion and contraction unit 1 is transmitted, and the displacement is output as an enlarged displacement in the X direction. Is transmitted to a movement target member (not shown), and is provided so as to cover the outside of the expandable portion 1. The displacement enlarging mechanism 2 ′ has a first headpiece 41 and a second headpiece 42 attached to one end and the other end in the length direction (Y direction) of the extendable portion 1, respectively. A first displacement transmitting section 40a and a second displacement transmitting section 40b connecting the first head piece 41 and the second head piece 42 are provided on one side and the other side of the telescopic section 1 between the second head piece 42 and the second head piece 42, respectively. are doing.

  The inner part of the first headpiece 41 and one end of the telescopic part 1 are detachably fitted by the fitting part 7. Further, the inside portion of the second head piece 42 and the other end of the elastic portion 1 are detachably fitted by the fitting portion 8.

  The first displacement transmitting section 40a includes a first hinge 43a, a first intermediate member 44a, a second hinge 45a, a first output member 46a, a third hinge 47a, a second intermediate member 48a, and a fourth hinge. 49a, the first intermediate member 44a is connected to the first headpiece 41 via the first hinge 43a, and the second intermediate member 48a is connected to the second headpiece 12 via the fourth hinge 49a. The first output member 46a is connected to the first intermediate member 44a and the second intermediate member 48a via the second hinge 45a and the third hinge 47a, respectively.

  On the other hand, the second displacement transmitting unit 40b includes a fifth hinge 43b, a third intermediate member 44b, a sixth hinge 45b, a second output member 46b, a seventh hinge 47b, a fourth intermediate member 48b, 8th hinge 49b, the third intermediate member 44b is connected to the first headpiece 41 via the fifth hinge 43b, and the fourth intermediate member 48b is connected to the second headpiece 42 via the eighth hinge 19b. The second output member 46b is connected to the third intermediate member 44b and the fourth intermediate member 48b via the sixth hinge 45b and the seventh hinge 47b, respectively.

  The first output member 46a and the second output member 46b are provided so as to oppose the center of the elastic portion 1 in the length direction (Y direction) with the elastic portion 1 interposed therebetween. A movement target member (not shown) is attached to the first output member 46a. On the other hand, the second output member 46b is fixed to the fixing jig 31.

  The first intermediate member 44a and the second intermediate member 48a are arranged symmetrically with the first output member 46a interposed therebetween, and the first intermediate member 44a and the second intermediate member 48a, and the third intermediate member 44b and the fourth intermediate member 48b Is symmetrically arranged with the elastic portion 1 interposed therebetween. Further, the first to eighth hinges 43a, 45a, 47a, 49a, 43b, 45b, 47b, 49b have flexibility, and are bent by the expansion and contraction of the expansion and contraction element 1 to displace the displacement of the expansion and contraction element 1 to the first output member 46a. And the second output member 46b, and the expanded displacement in the X direction is output from the first output member 46a and the second output member 46b by the expansion and contraction displacement of the expandable portion 1 in the Y direction. It has become.

  The first hinge 43a, the fourth hinge 49a, the fifth hinge 43b, and the eighth hinge 49b are provided outside the second hinge 45a, the third hinge 47a, the sixth hinge 45b, and the seventh hinge 47b. Therefore, the first output member 46a and the second output member 46b are displaced outward relative to the expandable element 1 when the expandable element of the expandable section 1 is expanded. At this time, since the second output member 46b is fixed by the fixing jig 31, the second output member 46b is actually a stationary part. For this reason, when the telescopic element 1 extends in the direction of arrow A, portions other than the second output member 46b are displaced in the direction of arrow B in FIG. 1 together with the telescopic element, and the displacement is transmitted to the movement target member. .

  Instead of attaching the movement target member to the first output member 46a and fixing the second output member 46b, the movement target member may be attached to the second output member 46b to fix the first output member 46a. Then, the movement target member may be attached to both the first output member 46a and the second output member 46b, and both may be operated.

  In the actuator 100 'configured as described above, when a predetermined voltage is applied to the expansion / contraction element, the expansion / contraction section 1 is extended and displaced in the Y direction (the direction of the arrow A), and accordingly, the displacement enlarging mechanism which is a mounting member. The displacement is transmitted to 2 '. In the displacement magnifying mechanism 2 ', the extension displacement of the telescopic part 1 is transmitted to the first headpiece 41 and the second headpiece 42, and the first to fourth hinges 43a, 45a, 47a, 49a of the first displacement transmission part 40a. The first output member 46a and the second output member 46b move outward along the X direction as shown by the arrow B via the fifth to eighth hinges 43b, 45b, 47b, 49b of the second displacement transmitting portion 40b. It is displaced and output as a displacement in the X direction that is magnified about 10 to 30 times. Then, the enlarged displacement is transmitted to a movement target member (not shown). When the elastic element 1 is retracted from the expanded state, the first output member 46a and the second output member 46b are displaced inward by the reverse operation.

In the second example, some modifications are possible.
For example, as shown in FIG. 4, the first to eighth hinges 43a, 45a, 47a, 49a, 43b, 45b, 47b, 49b are changed so that the first output member 46a is drawn when the telescopic unit 1 is extended and displaced. 3 can be displaced in the direction of arrow C opposite to the direction of arrow B. Further, as shown in FIG. 5, only the first output member 46a may be displaced without providing a hinge at the intermediate portion on one side. Further, as shown in FIG. 6, the first displacement transmitting section 40a and the second displacement transmitting section 40a are provided between the two expandable sections 1 so that the displacement of the first output section 46a and the second output section 46b is not hindered by the expandable section 1. The displacement transmitting section 40b may be provided.

(First example of fitting portion)
Next, a first example of the fitting portion will be described.
Here, the fitting portion applied to the first example of the actuator shown in FIG. 1 is shown, but the fitting portion can be similarly applied to the second example of the actuator shown in FIG.

  FIG. 7 is a perspective view for explaining a first example of the fitting portion. As shown in FIG. 7, the second member 4 and the extendable portion 1 of the displacement enlarging mechanism 2 are each formed in a rectangular column shape having a rectangular cross section, and the lower end of the second member 4 and the upper end of the extendable portion 1 are provided. A first portion 7a having a pair of first protrusions 21 provided to protrude from two sides of the lower end of the second member 4 in the width direction (the direction of arrow E), and a telescopic portion. The upper end of the first portion 7b is fitted with the second portion 7b having a pair of second projecting portions 22 provided so as to project from two sides facing the thickness direction (F direction) not corresponding to the first projecting portion 21. It consists of. In a state where the first portion 7a and the second portion 7b are fitted, the protrusion 21 of the first portion 7a and the second protrusion 22 of the second portion 7b are orthogonal to each other, and the protrusion 21 of the first portion 7a is orthogonal. Is configured so as to sandwich, without a gap, a surface corresponding to two sides of the upper end portion of the elastic portion 1 where the second protrusion 22 is not formed, and the second protrusion 22 of the second portion 7 b Are configured so as to sandwich, without gaps, surfaces corresponding to two sides on which the first protruding portions are not formed. The second portion 7b has a step 23 into which the first protrusion 21 is fitted. Accordingly, the first member 21 and the second member 22 prevent the relative movement of the second member 4 and the elastic member 1 in the X direction and the Y direction, and the elastic member 1 and the second member 4 A state in which movement within the connection surface does not occur can be achieved. The fitting portion 8 of the bottom of the notch 5 and the lower end of the expansion and contraction portion 1 is configured similarly to the fitting portion 7.

  In this manner, the upper end of the expandable portion 1 and the second member 4 are fitted by the fitting portion 7, and the lower end of the expandable portion 1 and the first member 3 are fitted by the fitting portion 8, thereby expanding and contracting. The part 1 can be prevented from moving in a direction other than the displacement direction. When the displacement enlarging mechanism 2 has the same thickness as a whole, a simple method such as wire cutting can be adopted, which is advantageous in manufacturing. However, the fitting portion 7 having the above structure is adopted. By doing so, the displacement transmitting section 20 of the displacement enlarging mechanism 2 can be formed with the same thickness, and the manufacturability is not reduced. The second portion 7b of the expansion and contraction portion 1 projects in the thickness direction by the amount of the second protrusion 22.

  In addition, since the pressurization is applied in the expansion and contraction direction of the expansion and contraction portion 1, only one of the fitting portions 7 and 8 is provided, and the end surface of the expansion and contraction portion 1 on the side where the fitting portion does not exist is the first member 3 or Only the corresponding end face of the second member 4 may be contacted.

  Conventionally, the expansion / contraction element was used by bonding it to a displacement enlarging mechanism, which is a mounting member.However, if the expansion / contraction element is bonded, the expansion / contraction element cannot be removed when an unexpected force is applied. Even if the mounting member is damaged, only one of them cannot be replaced. On the other hand, in order to solve such inconvenience, it has been considered to attach the expandable element by applying pressure in the expansion and contraction direction without attaching the expandable element. In addition, since the expansion and contraction of the expansion and contraction element repeats, the element is displaced, and it is difficult to effectively prevent the expansion and contraction element from being damaged.

  Therefore, in this example, the upper end and lower end of the expansion / contraction unit 1 having the expansion / contraction element and the second member 4 and the first member 3 of the displacement enlarging mechanism 2 as the mounting member are fitted to the fitting units 7 and 8, respectively. Thereby, it is detachably fitted so as not to move in these joining surfaces. As described above, since the extensible element is detachable without adhering to the displacement enlarging mechanism 2 which is a mounting member, when the extensible element is adhered, inconvenience that the extensible element cannot be removed when unexpected force is applied or the like. In addition, it is possible to avoid the disadvantage that only one of them can be replaced even if the expansion element or the mounting member is damaged. In addition, the telescopic part 1 having the telescopic element can be prevented from moving in a direction other than the telescopic direction. Even if the telescopic element repeatedly expands and contracts, the telescopic element is not displaced, thereby preventing damage to the telescopic element. Can be. In particular, when a piezoelectric element using a ceramic material, which is a brittle material, is used as the expansion / contraction element, this damage prevention effect is effective.

  In this case, as described above, since a compressive force is applied in advance in the expansion and contraction direction of the expansion and contraction portion 1, only one of the fitting portions 7 and 8 is provided, and the expansion and contraction portion 1 on the side where the fitting portion does not exist is provided. The above effect can be obtained even if only the end face of the first member 3 contacts the corresponding end face of the first member 3 or the second member 4. However, from the viewpoint of reliably obtaining the above effects, it is preferable to provide both the fitting portions 7 and 8.

  In addition, as shown in FIGS. 8A and 8B, by attaching at least one side of such a fitting portion with a screw, the expansion and contraction portion 1 can be mounted more reliably. 8A and 8B illustrate the second example of the actuator as an example. FIG. 8A illustrates a case where the first head piece 41 on the fitting portion 7 side and the telescopic portion 1 are screwed with the screw 32. FIG. 8B shows an example in which both the first head piece 41 on the fitting portion 7 side and the second head piece 42 on the fitting portion 8 side are screwed to the telescopic portion 1 with screws 32 and 33. It is an example.

  Alternatively, only one of the fitting portions 7 and 8 may be provided, and the end of the telescopic portion 1 where the fitting portion is not provided may be screwed to the mounting member. Alternatively, only one of the fitting portions 7 and 8 may be provided, and both ends of the elastic portion 1 may be screwed to the mounting member.

(Second example of fitting portion)
Next, a second example of the fitting portion will be described.
Here, another example of the fitting method that does not cause the in-plane movement of the connection surface between the elastic portion and the mounting member will be described based on the first example of the actuator shown in FIG. Of course, the same can be applied to the second example of the actuator shown in FIG.

  FIG. 9A shows that the end of the second member 4 is a square tube 4a, one end of the expandable unit 1 is a square column 1a corresponding to the square tube 4a, and the square column 1a is inserted into the square tube 4a. This shows an example in which the fitting portion 7 is configured. FIG. 9B shows that the end of the second member 4 is a cylindrical portion 4b, one end of the elastic portion 1 is a cylindrical portion 1b corresponding to the cylindrical portion 4b, and the cylindrical portion 1b is inserted into the cylindrical portion. 3 shows an example in which the fitting portion 7 is configured. Further, the present invention is not limited to the rectangular tube portion and the cylindrical portion, and the prism portion and the column portion, but may be another polygonal tube or a polygonal column, as long as the cylindrical portion and the column portion are compatible with each other. Further, in the case of a combination of the cylindrical portion 4b and the columnar portion 1b as shown in FIG. 9B, the cylindrical portion 4b and the columnar portion 1b rotate relatively while preventing the expansion and contraction portion 1 from moving in a direction other than the displacement direction. It is acceptable. Similarly, when the end of the second member 4 is a polygonal cylinder and the corresponding end of the expandable unit 1 is a cylinder inscribed therein, relative rotation is also permitted.

  Further, as shown in FIG. 9C, the end of the second member 4 may be configured such that a cylindrical portion 4d is provided at the tip of a prism 4c.

  In this example, contrary to FIGS. 9A to 9C, a columnar portion may be provided on the mounting member side, and a tubular portion may be provided on the expansion / contraction portion side, thereby forming a fitting portion. Further, the overall cross-sectional shape of the elastic portion 1 is not particularly limited. Also, in this example, the extendable portion 1 may be composed of only the extendable element, or may be composed of the extendable element 17 and the fitting member 18 as shown in FIG.

(Third example of fitting portion)
Next, a third example of the fitting portion will be described.
Here, an example will be described based on a second example of the actuator shown in FIG. 3 in which positioning is performed by a fitting portion between the elastic portion and the mounting member, and the elastic portion is restrained by screwing. Of course, the same can be applied to the first example of the actuator shown in FIG.

  In the example of FIG. 10A, the expandable portion 1 has a rectangular cross section, and a pair of projecting portions 51 protruding from two opposing sides is formed on both end surfaces of the expandable portion 1. The fitting portion 7 and the fitting portion 8 are configured so as to sandwich the mounting portion 52 at the end of the piece 41 and the second head piece 42. Thereby, the positioning of the telescopic part 1 is performed. Then, the first head piece 41 on the fitting portion 7 side and the expansion / contraction portion 1 are screwed with the screw 32. Thereby, the expansion and contraction unit 1 and the displacement enlarging mechanism 2 ′ are detachable, and when fixed by screws, are prevented from moving in a direction other than the expansion and contraction direction of the expansion and contraction unit 1. It is possible to avoid the inconvenience of adhering to the device, and to prevent the expansion element from being damaged during operation.

  In the example of FIG. 10B, both the first head piece 41 on the fitting portion 7 side and the second head piece 42 on the fitting portion 8 side are screwed to the telescopic portion 1 with screws 32 and 33. Although the above effect can be obtained by screwing only one side, the above effect can be obtained more reliably by screwing both sides of the expansion and contraction section 1 in this way.

  In the example of FIG. 10C, the fitting portion 8 is configured similarly to the example of FIGS. 10A and 10B, but the end face of the expandable portion 1 on the first headpiece 41 side is formed by the mounting portion 52 of the first headpiece. It is configured to be brought into contact with the end face. This makes it possible to more easily position the telescopic unit 1. Then, when the elastic part is attached, the end of the elastic part 1 on the first headpiece 41 side is screwed with the first headpiece 41 and the screw 32. Thereby, the expansion and contraction unit 1 and the displacement enlarging mechanism 2 ′ are detachable, and when fixed by screws, are prevented from moving in a direction other than the expansion and contraction direction of the expansion and contraction unit 1. It is possible to avoid the inconvenience of adhering to the device, and to prevent the expansion element from being damaged during operation. In the example of FIG. 10C, the fitting portion 7 is provided, and the end face of the extendable portion 1 on the second head piece 42 side is configured to be brought into contact with the end face of the mounting portion 52 of the second head piece. The end of the first second headpiece 42 may be screwed to the second headpiece 42. Further, both sides of the elastic portion 1 may be screwed.

  In addition, although the cross-sectional shape of the expansion-contraction part 1 and the cross-sectional shape of the mounting part of the displacement enlarging mechanism 2 'are rectangular, it is not limited to this. Also, in this example, the extendable portion 1 may be composed of only the extendable element, or may be composed of the extendable element 17 and the fitting member 18 as shown in FIG.

(Fourth example of fitting portion)
Next, a fourth example of the fitting portion will be described.
Here, similarly to the third example, an example in which positioning is performed by a fitting portion between the expansion and contraction portion and the mounting member and the expansion and contraction portion is restrained by screwing will be described based on the second example of the actuator illustrated in FIG. I do. Of course, the same can be applied to the first example of the actuator shown in FIG.

  In the example of FIG. 11A, the mounting portion at the end of the first headpiece 41 and the second headpiece 42 on the telescopic portion 1 side has a rectangular cross section, and a pair of protrusions protruding from two opposite sides of the end surface. The fitting portion 7 and the fitting portion 8 are configured so that the projection 53 has both ends 54 of the elastic portion 1. As a result, the positioning of the telescopic part 1 is performed. Then, the first head piece 41 on the fitting portion 7 side and the expansion / contraction portion 1 are screwed with the screw 32. Thereby, the expansion and contraction unit 1 and the displacement enlarging mechanism 2 ′ are detachable, and when fixed by screws, are prevented from moving in a direction other than the expansion and contraction direction of the expansion and contraction unit 1. It is possible to avoid the inconvenience of adhering to the device, and to prevent the expansion element from being damaged during operation.

  In the example of FIG. 11B, both the first head piece 41 on the fitting portion 7 side and the second head piece 42 on the fitting portion 8 side are screwed to the telescopic portion 1 with screws 32 and 33. Although the above effect can be obtained by screwing only one side, the above effect can be obtained more reliably by screwing both sides of the expansion and contraction section 1 in this way.

  In the example of FIG. 11C, the fitting portion 8 is configured similarly to the examples of FIGS. 11A and 11B, but the end face of the expandable portion 1 on the first headpiece 41 side is the same as the mounting portion 52 of the first headpiece. The end faces are configured to be brought into contact with each other. This makes it possible to more easily position the telescopic unit 1. Then, when the elastic part is attached, the end of the elastic part 1 on the first headpiece 41 side is screwed with the first headpiece 41 and the screw 32. Thereby, the expansion and contraction unit 1 and the displacement enlarging mechanism 2 ′ are detachable, and when fixed by screws, are prevented from moving in a direction other than the expansion and contraction direction of the expansion and contraction unit 1. It is possible to avoid the inconvenience of adhering to the device, and to prevent the expansion element from being damaged during operation. In the example of FIG. 11C, the fitting portion 7 is provided, and the end face of the extendable portion 1 on the second head piece 42 side is configured to be brought into contact with the end face of the mounting portion 52 of the second head piece. The end of the first second headpiece 42 may be screwed to the second headpiece 42. Further, both sides of the elastic portion 1 may be screwed.

  In addition, although the cross-sectional shape of the expansion-contraction part 1 and the cross-sectional shape of the mounting part of the displacement enlarging mechanism 2 'are rectangular, it is not limited to this. Also, in this example, the extendable portion 1 may be composed of only the extendable element, or may be composed of the extendable element 17 and the fitting member 18 as shown in FIG.

<Second embodiment>
Next, a second embodiment of the present invention will be described.
FIG. 12A is a plan view showing a stage device using an actuator according to a second embodiment of the present invention, and FIG. 12B is a side view thereof.

  The stage device 400 has a stage 200 and an actuator 300 as a driving mechanism for driving the stage 200.

  The stage 200 has a base member 61 and a stage member 62 that moves on a rail 63 provided on the base member 61. The stage member 62 is urged in the direction of arrow A by a spring member (not shown).

  The actuator 300 is used as a drive mechanism of the stage 200, and has an expansion / contraction unit 71 having an expansion / contraction element that expands / contracts in a predetermined direction by applying a trigger such as a voltage, and a mounting member 72 to which the expansion / contraction unit 71 is attached. The extendable portion 71 is configured similarly to the extendable portion 1 of the first embodiment, and is displaced in the X direction in the figure.

  The mounting member 72 is attached to the base member 61 of the stage 200 and has a first member 73 to which one end of the elastic portion 71 is attached, and a second member to be attached to the stage member 62 and to which the other end of the elastic portion is attached. And a member 74.

  The first member 73 has a vertical portion 81 extending upward from the base member 61, and a mounting portion 82 fixed to one end of the expandable portion 71 and fitted into the vertical portion 81.

  The second member 74 is attached to the fixing jig 91 attached to the stage member 62 and the stage member 62 is moved in the X direction in the drawing via the fixing jig 91 to roughly adjust the position. It has a moving unit 92 for performing. The moving section 92 has the same principle as the micrometer, and includes a rotating section 93 that is manually rotated, a sleeve 94 provided inside the rotating section 93 and attached to a fixing jig 91, and a rotating section 93. A spindle 95 which rotates in the X direction relative to the sleeve while rotating, and a cylindrical portion 96 provided at the tip of the spindle 95.

  On the other hand, the expansion and contraction portion 71 has a columnar shape, and the other end is a columnar portion 71a corresponding to the cylindrical portion 96. However, the expansion and contraction portion 71 does not move in a direction other than the displacement direction. The columnar portion 71a may be a part of the telescopic element, or may be a fitting jig mounted on the telescopic element. When the moving member 92 moves the stage member 62, the rotating part 93 is rotated to rotate the spindle 95 and the cylindrical part 96 accordingly, but the fitting part 90 is formed of a cylinder and a cylinder. Since the fitting is performed, the rotation is allowed while maintaining the state in which the elastic portion 71 does not move in a direction other than the displacement direction.

  In the stage device 400 configured as described above, the actuator 300 used as a drive mechanism of the stage 200 has one end of the expansion and contraction portion 71 mounted on the first member 73 of the mounting member 72 and the other end mounted on the mounting member 72. It is in a state of being mounted on the second member 74. Specifically, the attachment part 82 fixed to one end of the elastic part 71 is fitted into the vertical part 81, and the cylindrical part 71 a constituting the other end of the elastic part 71 is attached to the cylindrical part 96 of the second member 74. It is fitted.

  When the position of the stage member 62 of the stage 200 is roughly adjusted, the rotating unit 93 of the moving unit 92 is rotated, and the spindle 95 is linearly moved while rotating. Thus, the sleeve 94 attached to the fixing jig 91 relatively moves in the X direction, and accordingly, the stage member 62 moves in the X direction. When finely adjusting the position of the stage member 61, the position of the stage member 62 is adjusted by the moving section 92, and then the expandable element is expanded and contracted by applying a voltage to the expandable element of the expandable section 71.

  As described above, the actuator 300 is configured such that the cylindrical portion 71a of the expandable portion 71 and the cylindrical portion 96 of the second member 74 forming the mounting portion 72 are removably fitted to form the fitting portion 90, and the expandable portion 71 Since it is configured not to move in a direction other than the displacement direction, it is possible to eliminate the inconvenience of bonding the expandable element to the mounting member.

  Further, when the moving part 92 is moved, the cylindrical part 96 is rotated with the rotation of the spindle 95. However, since the fitting part 90 is a fitting of the cylinder and the column, the elastic part 71 is moved in a direction other than the displacement direction. Rotation is allowed while keeping the state of not moving. Such a use was difficult in the case where the conventional elastic element and the mounting member were bonded to each other, but can be easily performed in the present embodiment.

  In the above example, the stage device that moves only in the X direction is shown. However, an XY stage device provided with stage members that move in the X direction and the Y direction may be used. In this case, two actuators in the X direction and two actuators in the Y direction may be provided. Further, in the above example, an example in which the rotating unit is manually rotated is shown, but the rotating unit may be automatically rotated. Furthermore, in the above-described example, the actuator is provided with a moving part other than the telescopic part so that the position of the stage member can be roughly adjusted. You may. When the moving portion is not provided, the fitting portion does not need to allow rotation, and therefore, a fitting portion other than the combination of the cylindrical portion and the column portion can be used.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above two embodiments, and various modifications can be made. For example, in the above embodiment, the example of the actuator using the displacement enlarging mechanism as the mounting member for mounting the expansion / contraction unit and the example of the actuator applied to the stage device have been described. The present invention is not limited to this as long as the displacement is transmitted. For example, a pressurizing mechanism that applies a compressive force to the expandable element or a member for attaching the expandable element to an interface of another device is used as a mounting member. be able to. Further, the displacement magnifying mechanism as the mounting member is not limited to the above example, and can be applied to any type of displacement magnifying mechanism.

  In addition, the mounting mode of the end portion of the expansion and contraction section and the mounting member is not limited to the above embodiment, and may be any mode as long as the expansion and contraction section can be detachably mounted and securely fixed to the mounting section.

  1, 41; telescopic part, 2, 2 '; displacement enlarging mechanism (mounting member), 3; first member, 4; second member, 5; notch, 7, 8, 90; fitting part, 7a; 1 part, 7b; second part, 10, 11, 43a, 43b, 45a, 45b, 47a, 47b, 49a, 49b; hinge, 12; arm, 14; leaf spring, 15; centerpiece, 17; 18; fitting jig, 20; displacement transmitting portion, 21; first projecting portion, 22; second projecting portion, 23; step portion, 32, 33; screw, 41, 42; head piece, 44a, 44b, 44b. 48b, intermediate member, 46a, 46b; output member, 51, 53; projecting portion, 52, 54; end portion, 61; base member, 62; stage member, 63; rail, 71a; 73, a first member, 74; a second member, 81 Vertical part, 82; Mounting part, 91; Fixing jig, 92; Moving part, 93; Rotating part, 94; Sleeve, 95; Spindle, 96; Cylindrical part, 100, 100 ', 300; Actuator, 200; 400; Stage device

Claims (19)

An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
The end of the elastic portion and the mounting member are fixed so that the elastic portion does not move in a direction other than the elastic direction in a state where the elastic member is fitted by the fitting portion,
The cross section of the elastic portion and the mounting portion of the mounting member has a rectangular shape,
A fitting portion between the end portion of the elastic portion and the mounting portion has a first portion having a pair of first projecting portions provided to project from two opposite sides of the mounting portion, and an end portion of the elastic portion. An actuator configured by fitting a second portion having a pair of second projecting portions provided so as to project from two opposing sides not corresponding to the first projecting portion . Said first protrusion, said provided to face in the width direction of the mounting member, the actuator according to claim 1, overall the mounting member is formed with the same thickness. An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
The end of the elastic portion and the mounting member are fixed so that the elastic portion does not move in a direction other than the elastic direction in a state where the elastic member is fitted by the fitting portion,
The mounting member has a cylindrical portion or a columnar portion, and the expansion and contraction portion has a columnar portion or a cylindrical portion corresponding to the cylindrical portion or the columnar portion of the mounting member. Is an actuator fitted by inserting the columnar portion into the cylindrical portion. The actuator according to any one of claims 1 to 3 , wherein the fitting portion is provided on both ends of the expansion and contraction portion. 5. The actuator according to claim 4 , wherein at least one side is screwed when the expansion and contraction section is fitted by the fitting section at both end sides. The said fitting part is provided in the one end side of the said expansion-contraction part, At least the other end side is screwed with the said mounting member in any one of Claims 1-3. An actuator as described. An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
A pair of protrusions are formed on both end surfaces of the expansion and contraction, respectively, protruding from opposing sides of the end surface, and the mounting portion of the mounting member is mounted so as to be sandwiched between the pair of protrusions. An actuator, wherein at least one end of the telescopic part is screwed to a mounting part of the mounting member when the telescopic part is mounted. An actuator having a telescopic part having a telescopic element that is telescopically displaced in a predetermined direction, and a mounting member to which the telescopic part is mounted and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
One end surface of the expandable portion is formed with a pair of projecting portions projecting from opposing sides of the end surface, and a first mounting portion corresponding to one end surface of the expandable portion in the mounting member includes the pair of protrusions. The fitting portion mounted so as to be sandwiched by the protruding portion is configured, and the other end surface of the expandable portion is connected to an end surface of a corresponding second mounting portion of the mounting member when the expandable portion is mounted. The actuator according to claim 1, wherein at least an end including the other end surface of the elastic portion and the second mounting portion are screwed when the elastic portion is attached. An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
The mounting portion on which both ends of the elastic portion of the mounting member are mounted is formed with a pair of protruding portions protruding from opposing sides of the end surface, and both ends of the elastic portion are respectively formed on the pair of protruding portions. An actuator, wherein the fitting portion mounted so as to be sandwiched is configured, and at least one end of the elastic portion is screwed to a mounting portion of the mounting member when the elastic portion is mounted. An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
The first mounting portion of the mounting member, to which one end of the elastic portion is mounted, is formed with a pair of protrusions projecting from opposing sides of the end surface, and the one end of the elastic portion is The fitting portion sandwiched between the pair of protrusions is configured, and a second mounting portion of the mounting member on the other end side of the expandable portion has an end surface when the expandable portion is mounted. An end face of the other end of the elastic portion is configured to be fitted, and when the elastic portion is mounted, at least the other end of the elastic portion and the second mounting portion are screwed. Actuator stopped. The expansion / contraction part is configured such that a metal fitting jig is attached to an end of the expansion / contraction element in a state where the expansion / contraction element does not move in a direction other than the expansion / contraction direction, and the fitting jig and the mounting member The actuator according to any one of claims 1 to 10 , wherein the actuator is fitted.   An actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and a mounting member to which the telescopic part is attached and the telescopic displacement of the telescopic element is transmitted,
  Further comprising a fitting portion for detachably fitting the end portion of the elastic portion and the mounting member,
  The telescopic portion and the mounting member are fixed so that the telescopic portion does not move in a direction other than the telescopic direction in a state where the telescopic portion is fitted by the fitting portion,
  The expansion / contraction part is configured such that a metal fitting jig is attached to an end of the expansion / contraction element in a state where the expansion / contraction element does not move in a direction other than the expansion / contraction direction, and the fitting jig and the mounting member The actuator with which is fitted. 13. The actuator according to claim 11, wherein the expansion element and the fitting jig are adhered to each other. 13. The actuator according to claim 11 , wherein a concave portion is formed at an end of the fitting jig, and the elastic element is inserted and fitted into the concave portion. The actuator according to any one of claims 1 to 14 , wherein the mounting member is a displacement magnifying mechanism that magnifies a displacement of the telescopic element. The actuator according to any one of claims 1 to 15 , wherein the expansion element is one of a piezoelectric element, a magnetostrictive element, and a shape memory alloy element. A stage device having a stage and a stage driving mechanism for driving the stage,
The stage driving mechanism is configured by an actuator having a telescopic part having a telescopic element that expands and contracts in a predetermined direction, and an attachment member to which the telescopic part is mounted and the telescopic displacement of the telescopic element is transmitted.
The actuator further includes a fitting portion that removably fits the end of the expandable portion and the mounting member,
The end of the elastic portion and the mounting member are fixed so that the elastic portion does not move in a direction other than the elastic direction in a state where the elastic member is fitted by the fitting portion,
The stage has a base member and a stage member that moves on the base member,
The mounting member includes a first member attached to the base member and one end of the elastic portion attached thereto, and a second member attached to the stage member and attached to the other end of the elastic portion. Have
A stage device in which the telescopic portion and the second member are fitted to each other to form a fitting portion . The second member includes a fixing jig attached to the stage member, a moving unit that moves the stage member in a direction of displacement of the expansion and contraction unit by rotating a spindle, and roughly adjusts a position, and the spindle A cylindrical portion provided at a tip of the elastic member, the expandable portion has a cylindrical portion corresponding to the cylindrical portion, and the expandable portion and the second member are such that the cylindrical portion is inserted into the cylindrical portion. 18. The stage device according to claim 17, wherein the stage device is rotatably fitted .   19. The stage device according to claim 17, wherein the expansion element is one of a piezoelectric element, a magnetostrictive element, and a shape memory alloy element.

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